Static seal magnetic coupling rotating device

Abstract

The utility model belongs to the technical field of vacuum coating, and relates to a static seal magnetic coupling rotating device which comprises a sample frame, a rotation driving component for driving the sample frame to rotate and a transmission component for transmitting rotation power, the transmission assembly comprises a magnetic-permeable sleeve, a rotating shaft axially penetrating through the magnetic-permeable sleeve, a driven gear located outside the magnetic-permeable sleeve and a magnetic coupling transmitting torque of the driven gear to the rotating shaft, the sample holder is fixed to the lower end of the rotating shaft, the upper end and the lower end of the magnetic-permeable sleeve are sealed, and the rotation driving assembly drives the driven gear to rotate. According to the device, the rotation driving assembly drives the rotating shaft to rotate through the magnetic coupling, the magnetic permeable sleeve does not block magnetic force permeation, and therefore the magnetic coupling can complete torque transmission under the condition that the inside and the outside do not make direct contact. The magnetic permeable sleeve can separate the interior of the vacuum chamber from the atmosphere and is in a fixed state, so that a static sealing mode is adopted, and compared with a magnetic fluid bearing, the cost is lower, and the vacuum stability is higher.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a static sealing magnetic coupling rotating device. Background Art

[0002] In the production process of perovskite solar cells, vacuum evaporation is required for coating. Different evaporation materials need to be deposited on the substrate during evaporation, and the evaporation has different ranges and thicknesses, so different masks need to be used in different evaporation steps to cover the evaporation surface of the substrate, so that the range that needs evaporation is selectively exposed. The uniformity of the film layer and the convenience of taking and placing the substrate will affect its commercial value.

[0003] Chinese patent CN109837509A discloses a substrate sample holder and coating equipment, the coating principle of which is to carry the substrate and mask plate through the sample holder unit, and drive the sample holder unit to rotate around its own inner axis through the rotating unit, so that the evaporated material below is evenly coated on the lower surface of the substrate not blocked by the mask plate. Because impurities cannot enter during evaporation, the sample holder unit is located inside the vacuum chamber during the coating process, and the rotating unit is located outside the vacuum chamber. The connection position between the rotating unit and the vacuum chamber needs to be sealed. The patent uses a magnetic fluid bearing for dynamic sealing, which is costly and the stability of the vacuum seal is not high enough.

[0004] Therefore, it is necessary to improve the rotation driving method to solve the above problems. Summary of the invention

[0005] The main purpose of the utility model is to provide a static sealing magnetic coupling rotating device, which can use a magnetic coupling to transmit the torque inside and outside the magnetic permeable sleeve, adopt a more reliable static sealing method, and have low cost.

[0006] The utility model achieves the above-mentioned purpose through the following technical scheme: a static sealed magnetic coupling rotation device, comprising a sample holder, a rotation drive assembly driving the sample holder to rotate, and a transmission assembly transmitting rotational power, the transmission assembly comprising a magnetically permeable sleeve, a rotating shaft axially passing through the inside of the magnetically permeable sleeve, a driven gear located outside the magnetically permeable sleeve, and a magnetic coupling transmitting the torque of the driven gear to the rotating shaft, the sample holder is fixed to the lower end of the rotating shaft, the upper and lower ends of the magnetically permeable sleeve are sealed, and the rotation drive assembly drives the driven gear to rotate.

[0007] Specifically, the rotary drive assembly includes a motor, a driving gear connected to the main shaft of the motor, and a transmission belt wound around the driving gear and the driven gear.

[0008] Furthermore, the magnetic coupling includes an outer magnetic rotor located outside the magnetically permeable sleeve and an inner magnetic rotor located inside the magnetically permeable sleeve, the outer magnetic rotor is connected to the driven gear, the inner magnetic rotor is connected to the rotating shaft, and the magnetic poles of the outer magnetic rotor and the inner magnetic rotor are distributed at intervals.

[0009] Furthermore, the magnetically permeable sleeve and the motor are both connected to a fixed bracket, the sample holder is located in a vacuum chamber, the rotating shaft passes through a bellows, and both ends of the bellows are respectively sealed and connected to the lower wall of the fixed bracket and the outer wall of the vacuum chamber.

[0010] Furthermore, a rotating joint is provided on the fixed bracket, and two cooling water channels are provided in the rotating shaft, and the cooling water channels are connected to the rotating joint and the interior of the sample rack.

[0011] The beneficial effects of the technical solution of the utility model are:

[0012] The rotating drive assembly of this device drives the shaft to rotate through the magnetic coupling. The magnetic sleeve will not block the magnetic force from penetrating, so the magnetic coupling can complete the torque transmission without direct contact between the inside and the outside. The magnetic sleeve can separate the inside of the vacuum chamber from the atmosphere and is in a stationary state, so it is a static sealing method. Compared with the application of magnetic fluid bearings, the cost is lower and the vacuum stability is higher. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 A three-dimensional diagram of a static seal magnetic coupling rotating device according to an embodiment;

[0014] Figure 2 It is a partial schematic diagram of the upper part of the static seal magnetic coupling rotating device;

[0015] Figure 3 A cross-sectional view of the transmission assembly.

[0016] The numbers in the figure represent:

[0017] 1-rotation drive assembly, 11-motor, 12-driving gear, 13-transmission belt;

[0018] 2-transmission assembly, 21-magnetic sleeve, 22-rotating shaft, 221-cooling water channel, 23-magnetic coupling, 231-external magnetic rotor, 232-internal magnetic rotor, 24-driven gear,

[0019] 3- Sample rack;

[0020] 4-Fix the bracket;

[0021] 5- bellows;

[0022] 6-Swivel joint. DETAILED DESCRIPTION

[0023] The utility model is further described in detail below in conjunction with specific embodiments.

[0024] Example:

[0025] like Figure 1 As shown, a static sealed magnetic coupling rotation device of the utility model comprises a sample holder 3, a rotation drive assembly 1 for driving the sample holder 3 to rotate, and a transmission assembly 2 for transmitting rotational power, wherein the transmission assembly 2 comprises a magnetically permeable sleeve 21, a rotating shaft 22 axially passing through the inside of the magnetically permeable sleeve 21, a driven gear 24 located outside the magnetically permeable sleeve 21, and a magnetic coupling 23 for transmitting the torque of the driven gear 24 to the rotating shaft 22, the sample holder 3 is fixed to the lower end of the rotating shaft 22, the upper and lower ends of the magnetically permeable sleeve 21 are sealed, and the rotation drive assembly 1 drives the driven gear 24 to rotate.

[0026] The rotary drive assembly 1 drives the rotating shaft 22 to rotate through the magnetic coupling 23. The magnetically permeable sleeve 21 does not block the magnetic force from penetrating, so the magnetic coupling 23 can complete the torque transmission without direct contact between the inside and the outside. The magnetically permeable sleeve 21 can separate the interior of the vacuum chamber from the atmosphere and is in a stationary state, so it belongs to a static sealing method. Compared with the application of magnetic fluid bearings, the cost is lower and the vacuum stability is higher.

[0027] like Figure 2 As shown, the rotary drive assembly 1 includes a motor 11 , a driving gear 12 connected to the main shaft of the motor 11 , and a transmission belt 13 wound around the driving gear 12 and the driven gear 24 .

[0028] The driven gear 24 is driven to rotate by the transmission belt 13. This method can, on the one hand, allow the motor 11 to be positioned to the side of the transmission assembly 2, which not only reduces the height of the device but also avoids the space of the rotary joint 6. On the other hand, it can also avoid the impact on the main shaft caused by poor coaxiality between the motor 11 and the driven gear 24, thereby extending the service life of the parts.

[0029] like Figure 3 As shown, the magnetic coupling 23 includes an outer magnetic rotor 231 located outside the magnetic sleeve 21 and an inner magnetic rotor 232 located inside the magnetic sleeve 21. The outer magnetic rotor 231 is connected to the driven gear 24, and the inner magnetic rotor 232 is connected to the rotating shaft 22. The magnetic poles of the outer magnetic rotor 231 and the inner magnetic rotor 232 are distributed at intervals.

[0030] When the outer magnetic rotor 231 and the inner magnetic rotor 232 are opposite to each other, they attract each other. If the angular velocities of the two are inconsistent, the distance between the same poles will be shortened, and the repulsive force will increase. Then, the increased repulsive force will control the angular velocity of the inner magnetic rotor 232 to be consistent with that of the outer magnetic rotor 231. For example, when the outer magnetic rotor 231 accelerates clockwise, the magnetic pole behind the outer magnetic rotor 231 in the rotation direction will approach the magnetic pole in the front of the inner magnetic rotor 232 in the rotation direction, so that the torque along the rotation direction of the outer magnetic rotor 231 will increase, so that the inner magnetic rotor 232 will also be accelerated; when the outer magnetic rotor 231 decelerates, the magnetic pole in the front of the outer magnetic rotor 231 in the rotation direction will approach the magnetic pole behind the inner magnetic rotor 232 in the rotation direction, so that the torque against the rotation direction of the outer magnetic rotor 231 will increase, so that the inner magnetic rotor 232 will also be decelerated. When the outer magnetic rotor 231 and the inner magnetic rotor 232 are opposite to each other with the same poles, the repulsive force between the two is the largest, and there is a maximum torque in the process of increasing repulsive force. If the inner magnetic rotor 232 brakes suddenly or stops unexpectedly, the magnetic coupling 23 may overcome the maximum torque and continue to rotate under the action of inertia, but this will not cause the motor 11 to stop suddenly, so damage to the motor 11 is avoided.

[0031] like Figure 2 As shown, the magnetically permeable sleeve 21 and the motor 11 are both connected to the fixed bracket 4, the sample holder 3 is located in the vacuum chamber (not shown), the rotating shaft 22 passes through the bellows 5, and the two ends of the bellows 5 are respectively sealed and connected to the lower wall of the fixed bracket 4 and the outer wall of the vacuum chamber.

[0032] The fixed bracket 4 is the installation base for the rotary drive assembly 1 and the transmission assembly 2, and the fixed bracket 4 is connected to the outside of the vacuum chamber through the bellows 5. The bellows 5 can not only perform static sealing between the rotary drive assembly 1 and the vacuum chamber, but also buffer vibration and extend the service life of the parts.

[0033] like Figures 1 to 3 As shown, a rotating joint 6 is also provided on the fixed bracket 4 , and two cooling water channels 221 are provided in the rotating shaft 22 . The cooling water channels 221 communicate with the rotating joint 6 and the interior of the sample rack 3 .

[0034] There are some heat release positions in the sample rack 3. In order to prevent the sample rack 3 from being damaged by overheating or even affecting the evaporation product, cooling water is required to assist cooling. Because the sample rack 3 is always rotating during operation, only the shaft 22 will remain connected, so the cooling water channel 221 should be set inside the shaft 22, and one of the cooling water channels is allowed to flow water through the rotating joint 6, and the other cooling water channel is allowed to flow water out, so that the cooling water can be kept flowing all the time to take away the heat.

[0035] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A static sealed magnetic coupling rotating device, comprising a sample holder, a rotating drive assembly for driving the sample holder to rotate, and a transmission assembly for transmitting the rotating power, characterized in that: The transmission assembly includes a magnetically permeable sleeve, a rotating shaft axially passing through the inside of the magnetically permeable sleeve, a driven gear located outside the magnetically permeable sleeve, and a magnetic coupling that transmits the torque of the driven gear to the rotating shaft. The sample holder is fixed to the lower end of the rotating shaft. The upper and lower ends of the magnetically permeable sleeve are sealed, and the rotary drive assembly drives the driven gear to rotate.

2. The static seal magnetic coupling rotating device according to claim 1, characterized in that: The rotary drive assembly includes a motor, a driving gear connected to the motor main shaft, and a transmission belt wound around the driving gear and the driven gear.

3. The static seal magnetic coupling rotating device according to claim 1 or 2, characterized in that: The magnetic coupling includes an outer magnetic rotor located outside the magnetically permeable sleeve and an inner magnetic rotor located inside the magnetically permeable sleeve, the outer magnetic rotor is connected to the driven gear, the inner magnetic rotor is connected to the rotating shaft, and the magnetic poles of the outer magnetic rotor and the inner magnetic rotor are distributed at intervals.

4. The static seal magnetic coupling rotating device according to claim 2, characterized in that: The magnetically permeable sleeve and the motor are both connected to a fixed bracket, the sample holder is located in a vacuum chamber, the rotating shaft passes through a bellows, and two ends of the bellows are respectively sealed and connected to a lower wall of the fixed bracket and an outer wall of the vacuum chamber.

5. The static seal magnetic coupling rotating device according to claim 4, characterized in that: The fixed bracket is also provided with a rotating joint, and the rotating shaft is provided with two cooling water channels, and the cooling water channels are connected with the rotating joint and the interior of the sample rack.

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