Intelligent automatic semiconductor cleaning device

Abstract

The utility model discloses an intelligent automatic semiconductor cleaning device which comprises a square frame body and a cleaning pool fixedly embedded in the inner bottom of the frame body, a storage basket is arranged above the cleaning pool, and a lifting plate is arranged above the storage basket. Four fixing rods distributed in a rectangular shape are fixedly connected between the lower end of the lifting plate and the storage basket, a vibration motor is fixedly connected to the upper end of the lifting plate, two symmetrically-formed openings are formed in the upper end of the lifting plate, connecting rods are slidably inserted into the openings, the two ends of the connecting rods penetrate through the openings correspondingly, and the two ends of the connecting rods penetrate through the storage basket. The lower end of the connecting rod is fixedly connected with an anti-falling block, the upper end and the lower end of the connecting rod are both sleeved with springs, and the inner top of the frame body is fixedly connected with an electric push rod corresponding to the connecting rod. Through the arrangement of the timing module, the vibration motor and other mechanisms, a semiconductor is automatically cleaned, meanwhile, a user can conveniently and rapidly separate cleaning liquid or water, and efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning, in particular to an intelligent automatic semiconductor cleaning device. Background Art

[0002] Semiconductor cleaning is a key process link in the semiconductor industry chain. Its main purpose is to remove impurities such as particles, natural oxide layers, metal pollution, organic matter, sacrificial layers, polishing residues, etc. generated in the semiconductor manufacturing process to prevent these impurities from affecting the yield and performance of the chip. When cleaning semiconductor crystals, a variety of chemical reagents and water are used for cleaning.

[0003] Currently, after a semiconductor is placed in a cleaning tank for cleaning, it is not convenient to quickly separate the cleaning liquid or water therein, resulting in reduced efficiency of subsequent drying and baking. Improvements are provided in this regard. Utility Model Content

[0004] The utility model aims to solve the problem that after the semiconductor is placed in a cleaning tank for cleaning, it is inconvenient to quickly separate the cleaning liquid or water therein, resulting in reduced efficiency of subsequent drying and baking, and proposes an intelligent automatic semiconductor cleaning device.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] An intelligent automatic semiconductor cleaning device comprises a square frame and a cleaning pool fixedly embedded in the inner bottom thereof, a storage basket is provided above the cleaning pool, a lifting plate is provided above the storage basket, four rectangularly distributed fixing rods are fixedly connected between the lower end of the lifting plate and the storage basket, a vibration motor is fixedly connected to the upper end of the lifting plate, two symmetrically arranged openings are provided at the upper end of the lifting plate, a connecting rod is slidably inserted in the interior of the opening, two ends of the connecting rod respectively pass through the opening, an anti-slip block is fixedly connected to the lower end of the connecting rod, springs are sleeved on the upper and lower ends of the connecting rod, an electric push rod corresponding to the connecting rod is fixedly connected to the inner top of the frame, the lower end of the electric push rod is fixedly connected to the upper end of the connecting rod, and the upper end of the electric push rod passes through the frame.

[0007] Preferably, the electric push rod is provided with two connecting rings on the fixed sleeve, and the two connecting rings are respectively fixed on two sides of the frame, and the outer side walls of the frame are respectively fixedly connected with a controller and a timing module.

[0008] Preferably, a rubber block is fixedly connected to the inner side wall of the opening.

[0009] Preferably, a drain pipe communicating with the cleaning pool is fixedly inserted on the outer side wall of the frame, and a valve is installed on the drain pipe.

[0010] Preferably, a rubber pad is fixedly connected to the lower end of the frame.

[0011] Preferably, the model of the controller is 80S51.

[0012] Beneficial effects:

[0013] 1. Through the setting of electric push rod, lifting plate, fixed rod and storage basket, the semiconductor can be automatically placed in the cleaning tank for cleaning. Through the setting of vibration motor, the storage basket can be shaken and drained after it rises, thereby improving the separation speed and efficiency of water;

[0014] 2. Through the setting of the timing module and the controller, the user can conveniently set the start and stop time of the vibration motor, thereby improving the intelligence of the cleaning operation; the utility model realizes automatic cleaning of semiconductors through the setting of mechanisms such as the timing module and the vibration motor, and facilitates the user to quickly separate the cleaning liquid or water, thereby improving efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a structural schematic diagram of an intelligent automatic semiconductor cleaning device proposed by the utility model;

[0016] Figure 2 This is a schematic diagram of the structure of the intelligent automatic semiconductor cleaning device proposed by the utility model;

[0017] Figure 3 This is a schematic diagram of the control system structure of an intelligent automatic semiconductor cleaning device proposed by the utility model.

[0018] In the figure: 1-frame, 2-drain pipe, 3-cleaning tank, 4-timing module, 5-storage basket, 6-controller, 7-electric push rod, 8-vibration motor, 9-lifting plate, 10-fixing rod, 11-anti-slip block, 12-connecting rod, 13-spring, 14-rubber block. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] Reference Figure 1-3, an intelligent automatic semiconductor cleaning device, comprising a square frame 1 and a cleaning pool 3 fixedly embedded in the bottom thereof, the cleaning pool 3 is used to store cleaning liquid for soaking and cleaning semiconductors, a drain pipe 2 connected to the cleaning pool 3 is fixedly inserted on the outer wall of the frame 1, and is used to cooperate with a valve to facilitate users to discharge waste water, and a valve is installed on the drain pipe 2, and a rubber pad is fixedly connected to the lower end of the frame 1 to prevent the lower end of the frame 1 from being worn;

[0021] In this embodiment, a storage basket 5 is provided above the cleaning pool 3 to prevent semiconductors, a lifting plate 9 is provided above the storage basket 5 to drive the fixing rod 10 to rise and fall, four rectangularly distributed fixing rods 10 are fixedly connected between the lower end of the lifting plate 9 and the storage basket 5 to drive the storage basket 5 to rise and fall, a vibration motor 8 is fixedly connected to the upper end of the lifting plate 9 to drive the lifting plate 9 and the storage basket 5 to shake, and two symmetrically arranged openings are provided at the upper end of the lifting plate 9, and a rubber block 14 is fixedly connected to the inner side wall of the opening to prevent a rigid collision between the connecting rod 12 and the inner side wall of the opening;

[0022] In this embodiment, a connecting rod 12 is slidably inserted inside the opening, and cooperates with the anti-slip block 11 to support the lifting plate 9. The two ends of the connecting rod 12 pass through the opening respectively, and the lower end of the connecting rod 12 is fixedly connected with the anti-slip block 11, which is used to support the spring 13 and the lifting plate 9. The upper and lower ends of the connecting rod 12 are sleeved with springs 13, which are used to elastically support the lifting plate 9. The inner top of the frame 1 is fixedly connected with an electric push rod 7 corresponding to the connecting rod 12, which is used to drive the lifting plate 9 to rise and fall. The lower end of the electric push rod 7 is fixedly connected to the upper end of the connecting rod 12, and the upper end of the electric push rod 7 passes through the frame 1. Two connecting rings are fixedly sleeved on the electric push rod 7 to improve the firmness between the electric push rod 7 and the frame 1. The two connecting rings are respectively fixed on both sides of the frame 1;

[0023] In this embodiment, the outer side walls of the frame 1 are respectively fixedly connected with a controller 6 and a timing module 4, the output end of the timing module 4 is electrically connected to the input end of the controller 6, and the output end of the controller 6 is electrically connected to the input end of the electric push rod 7 and the vibration motor 8, respectively. The model of the controller 6 is 80S51, and the model of the timing module 4 is DS12C887;

[0024] In this embodiment, the semiconductor is first placed in the storage basket 5, and then the electric push rod 7 is started to drive the lifting plate 9 to descend. The lifting plate 9 drives the storage basket 5 to descend into the cleaning tank 3 through the fixing rod 10 for cleaning. After cleaning, the storage basket 5 is lifted up. At this time, the vibration motor 8 is started to drive the lifting plate 9, the fixing rod 10 and the storage basket 5 to shake, so that the internal moisture is quickly separated. Since the connecting rod 12 is elastically slidable and movably connected to the lifting plate 9 through the spring 13, it will not affect the normal shaking operation of the lifting plate 9. Through the setting of the timing module 6 and the controller 4, the user can conveniently set the working time of the vibration motor 8. When the start time reaches the preset value, the vibration motor 8 is turned off by the controller 4, thereby improving the intelligence of the cleaning work.

[0025] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An intelligent automatic semiconductor cleaning device, comprising a square frame (1) and a cleaning pool (3) fixedly embedded in the bottom thereof, characterized in that: A storage basket (5) is provided above the cleaning pool (3), and a lifting plate (9) is provided above the storage basket (5). Four rectangularly distributed fixing rods (10) are fixedly connected between the lower end of the lifting plate (9) and the storage basket (5). A vibration motor (8) is fixedly connected to the upper end of the lifting plate (9). Two symmetrically arranged openings are provided at the upper end of the lifting plate (9). A connecting rod (12) is slidably inserted inside the opening. Both ends of the connecting rod (12) pass through the openings respectively. An anti-slip block (11) is fixedly connected to the lower end of the connecting rod (12). Springs (13) are sleeved on both upper and lower ends of the connecting rod (12). An electric push rod (7) corresponding to the connecting rod (12) is fixedly connected to the inner top of the frame (1). The lower end of the electric push rod (7) is fixedly connected to the upper end of the connecting rod (12), and the upper end of the electric push rod (7) passes through the frame (1).

2. The intelligent automatic semiconductor cleaning device according to claim 1, characterized in that: The electric push rod (7) is fixedly sleeved with two connecting rings, which are respectively fixed on two sides of the frame (1), and the outer side walls of the frame (1) are respectively fixedly connected with a controller (6) and a timing module (4).

3. The intelligent automatic semiconductor cleaning device according to claim 1, characterized in that: A rubber block (14) is fixedly connected to the inner side wall of the opening.

4. The intelligent automatic semiconductor cleaning device according to claim 1, characterized in that: A drainage pipe (2) communicating with the cleaning pool (3) is fixedly inserted on the outer wall of the frame (1), and a valve is installed on the drainage pipe (2).

5. The intelligent automatic semiconductor cleaning device according to claim 1, characterized in that: A rubber pad is fixedly connected to the lower end of the frame (1).

6. The intelligent automatic semiconductor cleaning device according to claim 2, characterized in that: The model of the controller (6) is 80S51.

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