Hydrogen furnace for welding semiconductors

Abstract

The utility model provides a hydrogen furnace for welding a semiconductor. The hydrogen furnace comprises a rack, an upper cavity and a lower cavity, wherein the upper cavity and the lower cavity are connected to the rack; the welding platform and the cooling platform are symmetrically arranged in the working cavity side by side in the horizontal direction and are horizontally connected to the lower cavity; the carrying mechanism is connected to the lower cavity and comprises a transferring frame, a jacking assembly and a transferring assembly; the transferring assembly comprises a gear, a rack, a transmission shaft and a transferring driving piece. The transferring frame is driven by the jacking assembly to move up and down, the rack and the transferring frame connected with the rack are made to move horizontally by rotating the gear, materials are transferred to the cooling platform from the welding platform, the transferring driving piece is located outside the working cavity, the service life of the transferring driving piece and the service life of the hydrogen furnace are guaranteed, and the working efficiency is improved. And the working cavity is not influenced during overhauling, so that resources are saved, and the maintenance difficulty and cost are reduced.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor hydrogen welding, and more specifically refers to a hydrogen furnace used for welding semiconductors. Background Art

[0002] Semiconductor welding is a common electronic device manufacturing process used to connect semiconductor chips with other electronic components or circuit boards. Semiconductor welding requires heating the solder to its melting point, making it contact with the welding surface and cooling it to solidify. This process can easily cause oxidation of the welding surface, thereby affecting the welding quality. It needs to be processed in a hydrogen protection environment to achieve the ideal welding requirements. Therefore, hydrogen furnaces are the most in-demand equipment in the semiconductor welding industry.

[0003] Existing hydrogen furnaces usually place the drive components for horizontally moving materials in the working chamber. Heat accumulates in the sealed working chamber, which can easily damage the drive components and cause hydrogen furnace failure. As a result, the materials do not leave the welding platform in time, causing the materials to be overheated and damaged. In addition, the working chamber is in a vacuum state. When the hydrogen furnace is working, hydrogen exists in the working chamber. The drive components need to be emptied of hydrogen before maintenance, which makes maintenance difficult, wastes resources and increases maintenance costs. Utility Model Content

[0004] The utility model aims to overcome the defects of the prior art and provide a hydrogen furnace for welding semiconductors to solve the technical problems of the prior art hydrogen furnace being prone to failure, difficult to maintain and having high maintenance costs.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A hydrogen furnace for welding semiconductors, comprising:

[0007] A frame, and an upper cavity and a lower cavity connected to the frame, wherein the upper cavity is located above the lower cavity and is sealed to the lower cavity; a working cavity is formed between the upper cavity and the lower cavity;

[0008] The welding platform and the cooling platform are symmetrically and side by side arranged in the working chamber along the horizontal direction, and are horizontally connected to the lower chamber;

[0009] The transport mechanism is connected to the lower cavity, and includes: a transfer frame, a lifting assembly and a transfer assembly; the transfer frame is horizontally arranged above the welding platform and the cooling platform, the lifting assembly is arranged corresponding to the transfer frame, and is located on the side of the lower cavity away from the upper cavity; the lifting assembly and the transfer assembly vertically penetrate the lower cavity, and are both connected to the transfer frame; the lifting assembly is used to drive the transfer frame to perform lifting and lowering actions, and the transfer assembly is used to drive the transfer frame to move back and forth between the welding platform and the cooling platform;

[0010] The transfer assembly includes: a gear, a rack, a transmission shaft and a transfer drive member; the rack is arranged in the working chamber, along the direction from the welding platform to the cooling platform, and is fixedly connected to one end of the transfer frame away from the center of the transfer frame; the gear is horizontally arranged in the working chamber, and the rack and the gear are meshed with each other; the transmission shaft is vertically arranged through the lower chamber, one end of the transmission shaft is fixedly connected to the center of the gear, and the other end is connected to the transfer drive member; the transfer drive member is used to drive the gear to rotate.

[0011] Among them, the conveying mechanism also includes: two sliding rods; the two sliding rods are symmetrically arranged in the working cavity; the sliding rod is movably connected to the lower cavity, and the sliding rod and the rack are arranged parallel to each other; the transfer frame is slidably connected to the sliding rod, and the lifting assembly is connected to the sliding rod.

[0012] Among them, the gear and the rack are located on the side of the sliding rod away from the welding platform and the cooling platform, the gear is arranged between the welding platform and the cooling platform, and the rack extends from the gear to the end of the welding platform or the cooling platform away from the gear.

[0013] Among them, the jacking assembly includes: four lifting rods, a connecting plate and a lifting drive component; the connecting plate is arranged on the side of the lower cavity away from the upper cavity, and there is a distance between the connecting plate and the lower cavity; the lifting rod is arranged to pass through the lower cavity, and the four lifting rods are arranged corresponding to the two ends of the two sliding rods, one end of the lifting rod is connected to the sliding rod, and the other end is fixedly connected to the connecting plate; the lifting drive component is used to drive the connecting plate to perform lifting and lowering actions.

[0014] Wherein, the transfer frame includes: two sleeves, a plurality of connecting rods and a connecting block; the two sleeves are respectively sleeved on the two sliding rods, the two ends of the connecting rods are respectively connected to the two sleeves, one end of the connecting block is connected to the sleeve, and the other end is connected to the rack.

[0015] There are two transfer assemblies, which are symmetrically arranged on both sides of the transfer frame, and two ends of the transfer frame are respectively connected to the two transfer assemblies.

[0016] Among them, the transfer assembly also includes: a mounting seat, a synchronization rod, two first bevel gears and two second bevel gears; the mounting seat is fixedly connected to the side of the lower cavity away from the upper cavity, and is located below the connecting plate; the transmission shaft passes through the mounting seat; the synchronization rod is horizontally arranged and rotatably connected to the side of the mounting seat away from the lower cavity; the first bevel gear is fixedly connected to one end of the transmission shaft away from the gear, and the second bevel gear is fixedly connected to the synchronization rod and meshes with the first bevel gear; the transfer drive is used to drive the synchronization rod to rotate.

[0017] Among them, a side of the lower cavity away from the upper cavity is provided with a plurality of through holes and a plurality of seals, the plurality of through holes are arranged corresponding to the transmission shaft and the lifting rod, the seals are arranged in the through holes, and the transmission shaft and the lifting rod are passed through the seals.

[0018] Among them, the upper cavity is provided with a lifting mechanism and a locking mechanism; the lifting mechanism is arranged on the side of the upper cavity away from the lower cavity, and is used to drive the upper cavity away from or close to the lower cavity; the locking mechanism is used to lock or release the upper cavity and the lower cavity.

[0019] Wherein, the lower cavity is also provided with a hydrogen pipe, a nitrogen pipe and a vacuum pipe; the hydrogen pipe and the nitrogen pipe are used to fill the working cavity with hydrogen and nitrogen respectively; the vacuum pipe is used to evacuate the working cavity.

[0020] Compared with the prior art, the utility model has the following beneficial effects: the utility model drives the transfer frame to move up and down through the jacking assembly, and horizontally moves the rack and the transfer frame connected to the rack by rotating the gear, thereby realizing the transfer of materials from the welding platform to the cooling platform, and the transfer drive component is located outside the working chamber, thereby ensuring the service life of the transfer drive component and the hydrogen furnace, and having no impact on the working chamber during maintenance, thereby saving resources and reducing the difficulty and cost of maintenance.

[0021] The above description is only an overview of the technical solution of the utility model. In order to more clearly understand the technical means of the utility model, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are specifically cited and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the overall structure of a hydrogen furnace for welding semiconductors provided by the utility model;

[0023] Figure 2 A schematic diagram of the internal structure of a lower cavity of a hydrogen furnace for welding semiconductors provided by the utility model;

[0024] Figure 3 A schematic diagram of the top view of the lower cavity of a hydrogen furnace for welding semiconductors provided by the utility model;

[0025] Figure 4 A schematic diagram of the side structure of a lower cavity of a hydrogen furnace for welding semiconductors provided by the utility model;

[0026] Figure 5 A schematic diagram of the structure of a transport mechanism of a hydrogen furnace for welding semiconductors provided by the utility model;

[0027] Figure 6 A schematic diagram of the side view of a transport mechanism of a hydrogen furnace for welding semiconductors provided by the utility model;

[0028] Figure 7 This is a schematic diagram of the main structure of a transport mechanism of a hydrogen furnace for welding semiconductors provided by the utility model;

[0029] Figure 8 The utility model provides a schematic diagram of the positional relationship between an upper cavity and a lower cavity of a hydrogen furnace for welding semiconductors.

[0030] Reference numerals:

[0031] 1. Frame; 2. Upper cavity; 21. Locking mechanism; 22. Cooling water pipe; 3. Lower cavity; 31. Seal; 32. Hydrogen pipe; 33. Nitrogen pipe; 34. Vacuum tube; 35. Sealing ring; 4. Working chamber; 5. Welding platform; 51. Rod groove; 6. Cooling platform; 7. Transport mechanism; 71. Transfer frame; 711. Sleeve; 712. Connecting rod; 713. Connecting block; 72. Lifting assembly; 721. Lifting rod; 722. Connecting plate ; 723, lifting drive member; 73, transfer assembly; 731, gear; 732, rack; 733, transmission shaft; 734, transfer drive member; 74, slide rod; 75, mounting seat; 751, mounting column; 752, fixing plate; 753, mounting plate; 76, synchronization rod; 77, first bevel gear; 78, second bevel gear; 8, lifting mechanism; 81, support plate; 82, moving block; 83, guide rod; 84, lifting drive member; 9, vacuum pump. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below with reference to the accompanying drawings and specific implementation methods.

[0033] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0034] It should be understood that when used in this specification and the appended claims, the terms "include" and "comprises" indicate the presence of described features, integers, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or combinations thereof.

[0035] It should also be understood that the terms used in this utility model / invention specification are only for the purpose of describing specific embodiments and are not intended to limit the utility model / invention. As used in the utility model / invention specification and the appended claims, the singular forms "a", "an" and "the" are intended to include plural forms unless the context clearly indicates otherwise.

[0036] It should be further understood that the term “and / or” used in the present utility model / invention specification and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0037] See also Figures 1 to 8 As shown, this embodiment discloses a hydrogen furnace for welding semiconductors, comprising:

[0038] A frame 1, and an upper cavity 2 and a lower cavity 3 connected to the frame 1, wherein the upper cavity 2 is located above the lower cavity 3 and is sealed and connected to the lower cavity 3; a working cavity 4 is formed between the upper cavity 2 and the lower cavity 3;

[0039] The welding platform 5 and the cooling platform 6 are symmetrically and side by side arranged in the working chamber 4 along the horizontal direction, and are horizontally connected to the lower chamber 3;

[0040] The transport mechanism 7 is connected to the lower cavity 3, and includes: a transfer frame 71, a lifting assembly 72 and a transfer assembly 73; the transfer frame 71 is horizontally arranged above the welding platform 5 and the cooling platform 6, and the lifting assembly 72 is arranged corresponding to the transfer frame 71, and is located on the side of the lower cavity 3 away from the upper cavity 2; the lifting assembly 72 and the transfer assembly 73 vertically penetrate the lower cavity 3, and are both connected to the transfer frame 71; the lifting assembly 72 is used to drive the transfer frame to perform lifting actions, and the transfer assembly 73 is used to drive the transfer frame 71 to move back and forth between the welding platform 5 and the cooling platform 6;

[0041] The transfer assembly 73 includes: a gear 731, a rack 732, a transmission shaft 733 and a transfer driving member 734; the rack 732 is arranged in the working chamber 4, along the direction from the welding platform 5 to the cooling platform 6, and is fixedly connected to the end of the transfer frame 71 away from the center of the transfer frame 71; the gear 731 is horizontally arranged in the working chamber 4, and the rack 732 and the gear 731 are meshed with each other; the transmission shaft 733 is vertically arranged through the lower chamber 3, one end of the transmission shaft 733 is fixedly connected to the center of the gear 731, and the other end is connected to the transfer driving member 734; the transfer driving member 734 is used to drive the gear 731 to rotate.

[0042] In this embodiment, the materials include: a weldment, a workpiece to be welded, and solder, the solder is placed between the weldment and the workpiece to be welded, the weldment is a semiconductor or other electronic device, and the workpiece to be welded is an electronic component such as a circuit board. In other embodiments, the types of weldments and workpieces to be welded can be adjusted according to actual needs.

[0043] The transfer frame 71 is connected to the rack 732. When the lifting assembly 72 drives the transfer frame 71 to move up and down, the rack 732 also moves up and down with the transfer frame 71. When the gear 731 rotates to drive the rack 732 to move horizontally, the transfer frame 71 also moves horizontally with the rack 732. In the initial state, the transfer frame 71 is set in contact with the welding platform 5, and the welding platform 5 is heated to melt the solder so that the weldment is welded to the welded part; the lifting assembly 72 drives the transfer frame 71 to move up, so that the transfer frame 71 leaves the welding platform 5; the transfer drive 734 drives the gear 731 to rotate, so that the rack 732 and the transfer frame 71 connected to the rack 732 move horizontally until the transfer frame 71 is located above the cooling platform 6; the lifting assembly 72 drives the transfer frame 71 to move down until the transfer frame 71 is in contact with the cooling platform 6, so that the material is cooled and solidified; after the welding process of the material is completed, the transfer frame returns to the initial state. The transfer drive component 734 of this embodiment is located outside the working chamber 4, which ensures the service life of the transfer drive component 734 and the hydrogen furnace, does not affect the working chamber 4 during maintenance, saves resources, and reduces maintenance difficulty and cost.

[0044] Specifically, a concave cavity is provided on one side of the upper cavity 2 and the lower cavity 3 close to each other, the concave cavity of the upper cavity 2 opens downward, and the concave cavity of the lower cavity 3 opens upward, and when the upper cavity 2 and the lower cavity 3 are sealed and connected, the two concave cavities form a working cavity 4. The working cavity 4 provides a working space for welding, handling and cooling of materials.

[0045] Specifically, the transport mechanism 7 further includes: two slide bars 74; the two slide bars 74 are symmetrically arranged in the working chamber 4; the slide bars 74 are movably connected to the lower chamber 3, and the slide bars 74 and the rack 732 are arranged parallel to each other; the transfer frame 71 is slidably connected to the slide bars 74, and the lifting assembly 72 is connected to the slide bars 74. The slide bars 74 facilitate the horizontal movement of the transfer frame 71, and the two slide bars 74 balance the two ends of the transfer frame 71, so that the material can be stably placed on the transfer frame 71 to prevent the material from sliding off the transfer frame 71.

[0046] Specifically, the gear 731 and the rack 732 are located on the side of the slide bar 74 away from the welding platform 5 and the cooling platform 6, the gear 731 is arranged between the welding platform 5 and the cooling platform 6, and the rack 732 extends from the gear 731 to the end of the welding platform 5 or the cooling platform 6 away from the gear 731. When the transfer frame 71 is located above the welding platform 5, one end of the rack 732 is meshed with the gear 731, and the other end is located at the end of the welding platform 5 away from the cooling platform 6. The gear 731 rotates, and the rack 732 gradually approaches the cooling platform 6 until the end of the rack 732 away from the gear 731 moves to the gear 731, and the transfer frame 71 is located above the cooling platform 6; the gear 731 is reversed, and the transfer frame can be moved from the cooling platform 6 to the welding platform 5. The rack 732 can be lifted and then meshed with the gear 731, and the height of the gear 731 can also be set to be greater than the range of the up and down movement of the rack 732, so that the rack 732 is meshed with the gear 731 when it moves up and down.

[0047] Specifically, the lifting assembly 72 includes: four lifting rods 721, a connecting plate 722 and a lifting drive 723; the connecting plate 722 is arranged on the side of the lower cavity 3 away from the upper cavity 2, and there is a gap between the lower cavity 3; the lifting rod 721 is arranged to penetrate the lower cavity 3, and the four lifting rods 721 are arranged corresponding to the two ends of the two slide bars 74, one end of the lifting rod 721 is connected to the slide bar 74, and the other end is fixedly connected to the connecting plate 722; the lifting drive 723 is used to drive the connecting plate 722 to perform lifting and lowering actions. The lifting drive 723 drives the connecting plate 722 to move up and down, the connecting plate 722 drives the lifting rod 721 to move up and down, the lifting rod 721 drives the slide bar 74 to move up and down, the slide bar 74 drives the transfer frame 71 to move up and down, and the transfer frame 71 drives the material and the rack 732 to move up and down.

[0048] In this embodiment, the lifting drive member 723 is a cylinder, which is fixedly connected to the side of the connecting plate 722 close to the lower cavity 3, and the output rod of the cylinder is connected to the side of the lower cavity 3 away from the upper cavity 2, and the distance between the cylinder and each lifting rod 721 is equal. When the output rod of the cylinder is extended, the cylinder is away from the lower cavity 3, driving the connecting plate 722 to move downward, and then the transfer frame 71 is moved downward; when the output rod of the cylinder is retracted, the cylinder is close to the lower cavity 3, driving the connecting plate 722 to move upward, and then the transfer frame 71 is moved upward. In other embodiments, an electric cylinder or other driving member can be used instead of the cylinder, and the position of the lifting drive member 723 can also be adjusted according to actual needs.

[0049] Specifically, the transfer frame 71 includes: two sleeves 711, a plurality of connecting rods 712 and a connecting block 713; the two sleeves 711 are respectively sleeved on the two slide bars 74, the two ends of the connecting rod 712 are respectively connected to the two sleeves 711, one end of the connecting block 713 is connected to the sleeve 711, and the other end is connected to the rack 732. The material is placed on the connecting rod 712, and there is a gap between the connecting rods 712 to facilitate heating and cooling of the material. The sleeve 711 is hollow to prevent the transfer frame 71 from detaching from the slide bar 74 when moving up and down.

[0050] Specifically, the welding platform 5 and the cooling platform 6 are both recessed with a rod groove 51 corresponding to the connecting rod 712. When the transfer frame 71 is attached to the welding platform 5 or the cooling platform 6, the connecting rod 712 is attached to the rod groove 51, so that the material on the connecting rod 712 is closer to the welding platform 5 or the cooling platform 6, making it easier to heat and cool the material to a preset effect, thereby improving the welding quality.

[0051] Specifically, there are two transfer assemblies 73, which are symmetrically arranged on both sides of the transfer frame 71, and both ends of the transfer frame 71 are respectively connected to the two transfer assemblies 73. The two transfer assemblies 73 facilitate smoother and more stable movement of the transfer frame 71 in the horizontal direction.

[0052] Specifically, the transfer assembly 73 also includes: a mounting seat 75, a synchronization rod 76, two first bevel gears 77 and two second bevel gears 78; the mounting seat 75 is fixedly connected to the side of the lower cavity 3 away from the upper cavity 2 and is located below the connecting plate 722; the transmission shaft 733 is set through the mounting seat 75; the synchronization rod 76 is horizontally set and rotatably connected to the side of the mounting seat 75 away from the lower cavity 3; the first bevel gear 77 is fixedly connected to one end of the transmission shaft 733 away from the gear 731, and the second bevel gear 78 is fixedly connected to the synchronization rod 76 and meshes with the first bevel gear 77; the transfer driving member 734 is used to drive the synchronization rod 76 to rotate. The synchronization rod 76, the first bevel gear 77 and the second bevel gear 78 realize the same speed rotation of the gears 731 of the two transfer assemblies 73. The transfer driving member 734 drives the synchronization rod 76 to rotate, the synchronization rod 76 drives the second bevel gear 78 to rotate, the second bevel gear 78 drives the first bevel gear 77 to rotate, the first bevel gear 77 drives the transmission shaft 733 to rotate, and the transmission shaft 733 drives the gear 731 to rotate.

[0053] In this embodiment, the two gears 731 are respectively installed on the side of the two racks 732 close to the transfer frame 71, the meshing surfaces of the two racks 732 are both arranged on the side close to the transfer frame 71, and the two second bevel gears 78 are arranged in opposite directions. The two gears 731 rotate in opposite directions, and the two racks 732 move in the same direction, so that the racks 732 move synchronously.

[0054] In this embodiment, the transfer driving member 734 is a motor, which is horizontally arranged at one end of the synchronization rod 76 and fixedly connected to one side of the mounting seat 75, and the output shaft of the motor is fixedly connected to the synchronization rod 76. In other embodiments, a rotary cylinder or other driving member can be used to replace the motor, and the position of the transfer driving member 734 can also be adjusted according to actual needs.

[0055] In this embodiment, the mounting seat 75 includes: four mounting columns 751, two fixing plates 752 and a mounting plate 753; the mounting plate 753 is arranged corresponding to the symmetry axis of the welding platform 5 and the cooling platform 6, and is arranged below the connecting plate 722, and the fixing plate 752 and the mounting plate 753 are arranged perpendicular to each other; the two fixing plates 752 are parallel to each other and symmetrically arranged, and the two ends of the mounting plate 753 are respectively fixedly connected to the center of the two fixing plates 752, forming an "I" shape; one end of the four mounting columns 751 is respectively connected to the two ends of the two fixing plates 752, and the other end is fixedly connected to the lower cavity 3.

[0056] Specifically, a plurality of through holes (not marked in the figure) and a plurality of seals 31 are provided on the side of the lower cavity 3 away from the upper cavity 2. The plurality of through holes are provided corresponding to the transmission shaft 733 and the lifting rod 721. The seals 31 are provided in the through holes, and the transmission shaft 733 and the lifting rod 721 are passed through the seals 31. The transfer drive 734 and the lifting drive 723 are both provided below the lower cavity 3, which are not easily damaged and are convenient for the maintenance of the hydrogen furnace; at the same time, it is beneficial to seal the working cavity 4, and the transmission shaft 733 and the lifting rod 721 do not need to move horizontally, so the lower cavity 3 does not need to be provided with corresponding grooves to enable the transmission shaft 733 and the lifting rod 721 to move horizontally, and there is no need to provide complex seals 31 to seal the grooves. The seals 31 used to seal the through holes are easier to provide and have lower costs.

[0057] Specifically, the upper cavity 2 is provided with a lifting mechanism 8 and a locking mechanism 21; the lifting mechanism 8 is arranged on the side of the upper cavity 2 away from the lower cavity 3, and is used to drive the upper cavity 2 away from or close to the lower cavity 3; the locking mechanism 21 is used to lock or loosen the upper cavity 2 and the lower cavity 3. In practical applications, the upper cavity 2 needs to be opened frequently to put materials, take materials, clean the working cavity 4 or perform maintenance and overhaul work, and the upper cavity 2 and the lower cavity 3 conduct the heat in the working cavity 4, and the lifting mechanism 8 avoids manually opening the upper cavity 2 and scalding the workers; the locking mechanism 21 makes the upper cavity 2 and the lower cavity 3 fit tightly and stably, ensuring the sealing of the working cavity 4 and the safety of welding.

[0058] Specifically, the lifting mechanism 8 includes: a support plate 81, a moving block 82, a guide rod 83 and a lifting drive 84; the support plate 81 is fixedly connected to the frame 1, the moving block 82 is fixedly connected to the side of the upper cavity 2 away from the lower cavity 3, the lifting drive 84 is connected to the support plate 81, and the output end of the lifting drive 84 is connected to the moving block 82; the guide rod 83 is arranged through the support plate 81, and the end close to the upper cavity 2 is connected to the upper cavity 2; the lifting drive 84 is a cylinder, connected to the side of the support plate 81 away from the upper cavity 2, and the output end is arranged through the support plate 81. The guide rod 83 facilitates the upper cavity 2 to slide up and down under the drive of the lifting drive 84, and the lifting drive 84 is used to drive the moving block 82 to perform an up and down movement, so that the moving block 82 drives the upper cavity 2 to move up and down.

[0059] Specifically, the upper chamber 2 is also provided with an exhaust pipe (not marked in the figure), which is used to extract a mixture of hydrogen and nitrogen from the working chamber 4. Nitrogen enters the working chamber 4 and can discharge hydrogen outside the working chamber 4, which is used to dilute the hydrogen concentration in the working chamber 4.

[0060] Specifically, the lower cavity 3 is also provided with a hydrogen pipe 32, a nitrogen pipe 33 and a vacuum pipe 34; the hydrogen pipe 32 and the nitrogen pipe 33 are used to charge the working cavity 4 with hydrogen and nitrogen respectively; the vacuum pipe 34 is used to evacuate the working cavity 4. Hydrogen has a reducing effect and can prevent oxidation of the welding surface; when hydrogen is used, the working cavity 4 needs to be in an oxygen-free environment, so before charging hydrogen, the working cavity 4 needs to be evacuated; nitrogen is used to dilute and discharge the hydrogen in the working cavity 4 after the welding process is completed. One end of the hydrogen pipe 32, the nitrogen pipe 33 and the vacuum pipe 34 are all connected to the lower cavity 3, and the other end extends to the outside of the lower cavity 3.

[0061] Specifically, the hydrogen furnace for semiconductor welding of this embodiment further includes a vacuum pump 9 , one end of the vacuum tube 34 is connected to the vacuum pump 9 , and the other end is connected to the lower cavity 3 . The vacuum pump 9 evacuates the working cavity 4 through the vacuum tube 34 .

[0062] Specifically, the lower cavity 3 is further provided with a sealing ring 35 . The sealing ring 35 enhances the sealing performance of the working cavity 4 .

[0063] Specifically, the upper cavity 2 and the lower cavity 3 are both provided with cooling water pipes 22. The cooling water pipes 22 are wound around the upper cavity 2 and the lower cavity 3, and are used to pass cooling water to cool the upper cavity 2 and the lower cavity 3.

[0064] The welding process of a hydrogen furnace for welding semiconductors in this embodiment is as follows:

[0065] Step 1: Make sure the material is placed on the transfer frame and close the upper and lower cavities;

[0066] Step 2: extract the air in the working chamber until the working chamber is in a vacuum state;

[0067] Step 3: Fill the working chamber with hydrogen until the hydrogen concentration in the working chamber reaches a preset value;

[0068] Step 4: Move the transfer frame until it fits the welding platform;

[0069] Step 5: Start the welding platform to heat the material;

[0070] Step 6: Move the transfer frame until the transfer frame fits the cooling platform;

[0071] Step 7: Start the cooling platform to cool and solidify the material;

[0072] Step 8: Fill the working chamber with nitrogen and open the exhaust pipe to discharge the hydrogen;

[0073] Step 9. Move the upper cavity away from the lower cavity and the welding is completed.

[0074] A hydrogen furnace for welding semiconductors in this embodiment drives the transfer frame to move up and down through a lifting assembly, and horizontally moves the rack and the transfer frame connected to the rack by rotating the gear, thereby realizing the transfer of materials from the welding platform to the cooling platform, and the transfer drive component is located outside the working chamber, thereby ensuring the service life of the transfer drive component and the hydrogen furnace, and having no impact on the working chamber during maintenance, thereby saving resources and reducing the difficulty and cost of maintenance.

[0075] The above examples are only used to further illustrate the technical content of the utility model, so that readers can understand it more easily, but it does not mean that the implementation methods of the utility model are limited to this. Any technical extension or re-creation made based on the utility model is protected by the utility model. The protection scope of the utility model shall be based on the claims.

Claims

1. A hydrogen furnace for welding semiconductors, characterized in that: include: A frame, and an upper cavity and a lower cavity connected to the frame, wherein the upper cavity is located above the lower cavity and is sealed to the lower cavity; A working chamber is formed between the upper chamber and the lower chamber; The welding platform and the cooling platform are symmetrically and side by side arranged in the working chamber along the horizontal direction, and are horizontally connected to the lower chamber; The transport mechanism is connected to the lower cavity, and includes: a transfer frame, a lifting assembly and a transfer assembly; the transfer frame is horizontally arranged above the welding platform and the cooling platform, the lifting assembly is arranged corresponding to the transfer frame, and is located on the side of the lower cavity away from the upper cavity; the lifting assembly and the transfer assembly vertically penetrate the lower cavity, and are both connected to the transfer frame; the lifting assembly is used to drive the transfer frame to perform lifting and lowering actions, and the transfer assembly is used to drive the transfer frame to move back and forth between the welding platform and the cooling platform; The transfer assembly includes: a gear, a rack, a transmission shaft and a transfer drive member; the rack is arranged in the working chamber, along the direction from the welding platform to the cooling platform, and is fixedly connected to one end of the transfer frame away from the center of the transfer frame; the gear is horizontally arranged in the working chamber, and the rack and the gear are meshed with each other; the transmission shaft is vertically arranged through the lower chamber, one end of the transmission shaft is fixedly connected to the center of the gear, and the other end is connected to the transfer drive member; the transfer drive member is used to drive the gear to rotate.

2. The hydrogen furnace for semiconductor welding according to claim 1, characterized in that: The transport mechanism also includes: two slide bars; the two slide bars are symmetrically arranged in the working cavity; the slide bars are movably connected to the lower cavity, and the slide bars and the rack are arranged parallel to each other; the transfer frame is slidably connected to the slide bars, and the lifting assembly is connected to the slide bars.

3. The hydrogen furnace for semiconductor welding according to claim 2, characterized in that: The gear and the rack are located on a side of the slide bar away from the welding platform and the cooling platform, the gear is arranged between the welding platform and the cooling platform, and the rack extends from the gear to an end of the welding platform or the cooling platform away from the gear.

4. The hydrogen furnace for semiconductor welding according to claim 3, characterized in that: The lifting assembly includes: four lifting rods, a connecting plate and a lifting drive component; the connecting plate is arranged on a side of the lower cavity away from the upper cavity, and there is a distance between the connecting plate and the lower cavity; the lifting rod is arranged to pass through the lower cavity, and the four lifting rods are arranged corresponding to the two ends of the two sliding rods, one end of the lifting rod is connected to the sliding rod, and the other end is fixedly connected to the connecting plate; the lifting drive component is used to drive the connecting plate to perform a lifting action.

5. The hydrogen furnace for semiconductor welding according to claim 4, characterized in that: The transfer frame includes: two sleeves, a plurality of connecting rods and a connecting block; the two sleeves are respectively sleeved on the two sliding rods, the two ends of the connecting rod are respectively connected to the two sleeves, one end of the connecting block is connected to the sleeve, and the other end is connected to the rack.

6. The hydrogen furnace for semiconductor welding according to claim 5, characterized in that: The number of the transfer assemblies is two, and the two transfer assemblies are symmetrically arranged on both sides of the transfer frame, and the two ends of the transfer frame are respectively connected to the two transfer assemblies.

7. The hydrogen furnace for semiconductor welding according to claim 6, characterized in that: The transfer assembly also includes: a mounting seat, a synchronization rod, two first bevel gears and two second bevel gears; the mounting seat is fixedly connected to the side of the lower cavity away from the upper cavity, and is located below the connecting plate; the transmission shaft passes through the mounting seat; the synchronization rod is horizontally arranged and rotatably connected to the side of the mounting seat away from the lower cavity; the first bevel gear is fixedly connected to one end of the transmission shaft away from the gear, and the second bevel gear is fixedly connected to the synchronization rod and meshes with the first bevel gear; the transfer drive is used to drive the synchronization rod to rotate.

8. The hydrogen furnace for semiconductor welding according to claim 7, characterized in that: A plurality of through holes and a plurality of sealing members are provided on a side of the lower cavity away from the upper cavity. The plurality of through holes are provided corresponding to the transmission shaft and the lifting rod. The sealing members are provided in the through holes. The transmission shaft and the lifting rod are passed through the sealing members.

9. The hydrogen furnace for semiconductor welding according to claim 8, characterized in that: The upper cavity is provided with a lifting mechanism and a locking mechanism; the lifting mechanism is arranged on the side of the upper cavity away from the lower cavity, and is used to drive the upper cavity away from or close to the lower cavity; the locking mechanism is used to lock or release the upper cavity and the lower cavity.

10. The hydrogen furnace for semiconductor welding according to claim 9, characterized in that: The lower cavity is also provided with a hydrogen pipe, a nitrogen pipe and a vacuum pipe; the hydrogen pipe and the nitrogen pipe are used to fill the working cavity with hydrogen and nitrogen respectively; the vacuum pipe is used to evacuate the working cavity.

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