Winding type magnetic control coating machine
By introducing infrared transmitters and receivers into the winding magnetron coating machine, the substrate offset is detected and alarmed in real time, which solves the problem that traditional coating machines cannot detect substrate offsets, and improves the coating quality and process stability.
Patent Information
- Application Number
- CN202420512767.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-15
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-03-15
AI Technical Summary
Traditional winding magnetron coating machines cannot detect whether the substrate is offset, resulting in the substrate being offset or folded during the coating process, affecting the coating quality.
A winding magnetron coating machine is designed with a built-in infrared transmitter and receiver. By detecting the deviation of the substrate during the conveying process, real-time monitoring and alarming are ensured to ensure the stability of the substrate during the coating process.
Real-time detection and alarm of substrate offset is realized, the coating quality problems caused by substrate offset are reduced, and the stability and efficiency of the coating process are improved.
Smart Images
Figure CN222476731U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of coating equipment, in particular to a winding type magnetron coating machine. Background Art
[0002] Magnetron sputtering vacuum coating is a method of applying a DC voltage under vacuum conditions to generate electrons through the discharge phenomenon between the two electrodes (called DC glow discharge). The electrons are accelerated to migrate under the action of the electric field and collide with neutral atoms to generate positive ions. Under the action of the electric field, the positive ions are accelerated to collide with the target material set at the cathode to form sputtering. The sputtered target atoms condense on the surface of the plated piece (continuously windable strip) to form a thin film.
[0003] During the use of traditional winding-type magnetron coating machines, the unwinding roller and the winding roller usually rotate at the same speed and in the same direction. The unwinding roller and the winding roller cooperate to drive the substrate (film) to move, and the substrate is coated with a magnetron sputtering target in the magnetron coating machine. Due to non-standard installation of the substrate or reasons for use, the substrate is prone to deviation during movement. In severe cases, part of the substrate may be folded, making it impossible to coat the substrate in the folded area. Therefore, the current winding-type magnetron coating cannot detect whether the substrate is offset.
[0004] Therefore, we proposed a winding type magnetron coating machine to solve the above problems. Utility Model Content
[0005] The utility model aims to solve the problem that it is impossible to detect whether a substrate is deflected.
[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a winding type magnetron coating machine, comprising a coating box, a film supply box and a film collection box are respectively installed on both sides of the coating box, a unwinding roller is installed inside the film supply box, a winding roller is installed inside the film collection box, a coating roller is rotatably installed inside the coating box, the substrate on the unwinding roller bypasses the coating roller and is wound around the winding roller, extension rods are installed at both ends of the coating box, a mounting plate is fixed to the bottom end of the extension rod, and an infrared transmitter and an infrared receiver for detecting the substrate are installed at the end of the mounting plate.
[0007] Furthermore: the ends of the film supply box and the film collection box are respectively equipped with a first motor and a second motor, the output shaft of the first motor extends into the film supply box and is connected to the end of the unwinding roller, and the output shaft of the second motor extends into the film collection box and is connected to the end of the winding roller.
[0008] Further: one end of the coating roller passes through the coating box and is equipped with a third motor, and the third motor is installed at the end of the coating box.
[0009] Furthermore: a plurality of partitions are arranged inside the coating box along the length direction, a plurality of magnetron sputtering targets are installed equidistantly between adjacent partitions, and the output ends of the plurality of magnetron sputtering targets are arranged toward the coating roller.
[0010] Furthermore: an adjustment seat is installed on the inner top wall of the coating box, bearing supports are fixed at the bottom of both ends of the adjustment seat, the same bidirectional screw is rotatably installed between the two bearing supports, a threaded sliding seat is symmetrically installed on the bidirectional screw, and the top end of each extension rod is fixedly connected to the threaded sliding seat.
[0011] Furthermore: a slider is fixed on the top of the threaded sliding seat, a sliding groove is opened at the bottom of the adjustment seat along the length direction, and the slider is slidably installed inside the sliding groove.
[0012] Furthermore: one end of the bidirectional screw rod passes through the coating box and is fixed with a fourth motor, and the fourth motor is also installed at the end of the coating box.
[0013] Furthermore: winding rollers are symmetrically installed inside the coating box for rotation, and the substrate between the unwinding roller and the coating roller, and the substrate between the coating roller and the winding roller respectively pass around the winding rollers.
[0014] Furthermore: the output end of the infrared receiver is electrically connected to a controller outside the coating box through a wire, and the controller is electrically connected to an alarm through a wire.
[0015] Furthermore: the top of the film coating box, the top of the film supply box and the top of the film collection box are all provided with openings, and a sealing plate is installed in each opening.
[0016] Beneficial effects of the utility model
[0017] The utility model has an infrared transmitter and an infrared receiver inside the coating box. If the substrate in the coating box deviates from the infrared transmitter and the infrared receiver during transportation, the infrared rays emitted by the infrared transmitter will irradiate the infrared transmitter, thereby transmitting the detected information to the controller. The controller will sound an alarm, so that the staff can be reminded in time and take corresponding measures, thereby reducing the phenomenon of folding areas caused by excessive deviation of the substrate, thereby improving the quality of substrate coating.
[0018] The coating box of the utility model is provided with a bidirectional screw rod inside. The bidirectional screw rod can drive the two threaded sliding seats to move in relative or opposite directions during rotation, so that the threaded sliding seat can drive the mounting plate to move through the extension rod, so that the distance between the two mounting plates can be adjusted, which can be suitable for substrates of different widths, thereby improving the use effect of the device. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;
[0020] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;
[0021] Figure 3 It is a schematic diagram of the partial explosion structure of the utility model;
[0022] Figure 4 It is a schematic diagram of the structure of the connection between the adjusting seat and the threaded sliding seat in the utility model;
[0023] Figure 5 It is a schematic diagram of the internal structure of the middle protection box of the utility model.
[0024] The names corresponding to the marks in the figure are:
[0025] 1. Coating box; 2. Film supply box; 3. Film collection box; 4. Unwinding roller; 5. Rewinding roller; 6. Coating roller; 7. Substrate; 8. Extension rod; 9. Mounting plate; 10. Infrared transmitter; 11. Infrared receiver; 12. First motor; 13. Second motor; 14. Third motor; 15. Partition; 16. Magnetron sputtering target; 17. Adjustment seat; 18. Bearing support; 19. Bidirectional screw; 20. Threaded sliding seat; 21. Sliding block; 22. Slide; 23. Fourth motor; 24. Winding roller; 25. Sealing plate. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.
[0027] Embodiments of the present utility model:
[0028] A winding magnetron coating machine comprises a coating box 1, on both sides of which a film supply box 2 and a film receiving box 3 are respectively fixed, and openings are provided at the top of the coating box 1, the top of the film supply box 2 and the top of the film receiving box 3, and a sealing plate 25 is detachably installed in each opening. Since the sealing plate 25 is provided on the upper part of the film supply box 2 and the film receiving box 3, the unwinding roller 4 in the film supply box 2 and the winding roller 5 in the film receiving box 3 can be replaced or adjusted. Since the sealing plate 25 is provided on the upper part of the coating box 1, the substrate 7 (the substrate 7 is an unprocessed film) in the coating box 1 can be adjusted. Passages are provided between the coating box 1 and the film supply box 2 and between the film supply box 2 and the film receiving box 3, so that the substrate 7 in the film supply box 2 can pass through the coating box 1 and extend to the interior of the film receiving box 3.
[0029] A first motor 12 is installed at one end of the film supply box 2, and the output end of the first motor 12 extends to the interior of the film supply box 2 where a first mounting assembly is installed. A first bearing is fixed to the inner end wall of the film supply box 2 away from the first motor 12, and a first rotating shaft is installed in the first bearing, and a second mounting assembly is installed at one end of the first rotating shaft. Both ends of the unwinding roller 4 are respectively installed on the first mounting assembly and the second mounting assembly. The arrangement of the first mounting assembly and the second mounting assembly facilitates the replacement of the unwinding roller 4.
[0030] A second motor 13 is installed at one end of the film collection box 3, and the output shaft of the second motor 13 extends to the interior of the film collection box 3 where a third mounting assembly is installed. A second bearing is fixed to the inner end wall of the film collection box 3 away from the second motor 13, and a second rotating shaft is installed in the second bearing, and a fourth mounting assembly is installed at one end of the second rotating shaft. Both ends of the winding roller 5 are respectively installed on the third mounting assembly and the fourth mounting assembly. The arrangement of the third mounting assembly and the fourth mounting assembly facilitates the replacement of the winding roller 5.
[0031] It should be noted that the first mounting assembly, the second mounting assembly, the third mounting assembly and the fourth mounting assembly are all of exactly the same size. For the convenience of description, only one set of mounting assemblies is described. The mounting assembly includes two flanges, which are connected by a number of bolts.
[0032] A third motor 14 is installed at one end of the coating box 1, and the output shaft of the third motor 14 extends to the coating box 1 where a coating roller 6 is installed. A winding roller 24 is also symmetrically installed inside the coating box 1, so that the substrate on the unwinding roller 4 sequentially passes around one of the winding rollers 24, the coating roller 6 and the other winding roller 24 and is wound around the winding roller 5.
[0033] A plurality of partitions 15 are fixed at equal intervals along the length direction at the lower part of the coating box 1 , a plurality of magnetron sputtering targets 16 are fixed between adjacent partitions 15 , and the output ends of the plurality of magnetron sputtering targets 16 are all arranged toward the coating roller 6 , so that the substrate 7 can be coated.
[0034] An adjustment seat 17 is fixed inside the coating box 1 along the length direction, and bearing supports 18 are fixed at both ends of the adjustment seat 17, and a bidirectional lead screw 19 is rotatably installed between the two bearing supports 18, one end of the bidirectional lead screw 19 passes through the bearing support 18 and a fourth motor 23 is fixed to the coating box 1 in sequence, and the fourth motor 23 is also installed at the end of the coating box 1, and the fourth motor 23 is arranged to drive the coating box 1, and the two ends of the bidirectional lead screw 19 are threadedly installed with a threaded sliding seat 20, a slider 21 is fixed to the top of the threaded sliding seat 20, and a slide groove 22 is provided at the bottom of the adjustment seat 17 along the length direction, so that the slider 21 is slidably installed in the slide groove 22, and the cooperation of the slider 21 and the slide groove 22 plays a role in limiting the threaded sliding seat 20, preventing the threaded sliding seat 20 from rotating along with the bidirectional lead screw 19 during the rotation process. An extension rod 8 is fixed to the bottom of the threaded sliding seat 20, and two protection boxes 26 are fixed to the bottom end of the extension rod 8 and the mounting plate 9. The two ends of the mounting plate 9 are fixed, and the openings of each two protection boxes 26 are arranged opposite to each other. Through the arrangement of the protection box 26, the infrared transmitter 10 and the infrared receiver 11 are protected. The distance between the opening of the protection box 26 and the substrate 7 is 1cm-3cm, which can prevent impurities from entering the interior of the protection box 26. The infrared transmitter 10 and the infrared receiver 11 are respectively installed in the two protection boxes 26, and the output end of the infrared receiver 11 is electrically connected to the controller (not shown in the figure) outside the coating box 1 through a wire, and the controller is electrically connected to the alarm through a wire. The alarm can be an alarm light or a buzzer, and the type of alarm can be selected according to the needs of use.
[0035] When processing the substrate 7, the first motor 12, the second motor 13 and the multiple magnetron sputtering targets 16 are turned on at the same time. The rotation speeds of the first motor 12 and the second motor 13 are exactly the same, so that the first motor 12 drives the unwinding roller 4 to rotate, thereby releasing the substrate 7 on the unwinding roller 4, and the second motor 13 drives the winding roller 5 to rotate, so that the substrate 7 can be wound up, so that the substrate 7 can be coated by the multiple magnetron sputtering targets 16.
[0036] If the substrate 7 is offset and deviates from between the infrared transmitter 10 and the infrared receiver 11, the infrared rays emitted by the infrared receiver 11 will shine on the infrared transmitter 10. The infrared transmitter 10 receives the information and transmits it to the controller outside the coating box 1. The controller controls the alarm and sends out an alarm signal, which can promptly notify the staff and take corresponding measures.
Claims
1. A winding type magnetron coating machine, comprising a coating box (1), wherein a film supply box (2) and a film collection box (3) are respectively installed on both sides of the coating box (1), a film supply box (2) is installed with a reeling roller (4), a film collection box (3) is installed with a reeling roller (5), and a coating roller (6) is rotatably installed inside the coating box (1), characterized in that: The substrate (7) on the unwinding roller (4) first passes around the coating roller (6) and then is wound around the winding roller (5). Extension rods (8) are installed at both ends of the coating box (1). A mounting plate (9) is fixed to the bottom end of the extension rod (8). An infrared transmitter (10) and an infrared receiver (11) for detecting the substrate (7) are installed at the end of the mounting plate (9).
2. A roll-to-roll magnetron coating machine according to claim 1, characterized in that: A first motor (12) and a second motor (13) are respectively installed at the end of the film supply box (2) and the end of the film collection box (3); the output shaft of the first motor (12) extends into the film supply box (2) and is connected to the end of the unwinding roller (4); the output shaft of the second motor (13) extends into the film collection box (3) and is connected to the end of the winding roller (5).
3. The roll-to-roll magnetron coating machine according to claim 1, characterized in that: One end of the coating roller (6) passes through the coating box (1) and is equipped with a third motor (14), and the third motor (14) is installed at the end of the coating box (1).
4. The roll-to-roll magnetron coating machine according to claim 1, characterized in that: The coating box (1) is further provided with a plurality of partitions (15) along the length direction, and a plurality of magnetron sputtering targets (16) are installed equidistantly between adjacent partitions (15), and the output ends of the plurality of magnetron sputtering targets (16) are all arranged toward the coating roller (6).
5. A roll-to-roll magnetron coating machine according to claim 1, characterized in that; An adjustment seat (17) is installed on the inner top wall of the coating box (1), and bearing supports (18) are fixed at the bottom of both ends of the adjustment seat (17). The same bidirectional screw rod (19) is rotatably installed between the two bearing supports (18), and a threaded sliding seat (20) is symmetrically installed on the bidirectional screw rod (19), and the top end of each extension rod (8) is fixedly connected to the threaded sliding seat (20).
6. A roll-to-roll magnetron coating machine according to claim 5, characterized in that: A slider (21) is fixed on the top of the threaded sliding seat (20), a sliding groove (22) is provided on the bottom of the adjustment seat (17) along the length direction, and the slider (21) is slidably installed inside the sliding groove (22).
7. A winding type magnetron coating machine according to claim 5 or 6, characterized in that: One end of the bidirectional screw rod (19) passes through the coating box (1) and is fixed with a fourth motor (23), and the fourth motor (23) is also installed at the end of the coating box (1).
8. The roll-to-roll magnetron coating machine according to claim 1, characterized in that: A winding roller (24) is also symmetrically mounted inside the coating box (1) so as to rotate. The substrate (7) between the unwinding roller (4) and the coating roller (6), and the substrate (7) between the coating roller (6) and the winding roller (5) respectively pass around the winding roller (24).
9. The roll-to-roll magnetron coating machine according to claim 1, characterized in that: The output end of the infrared receiver (11) is electrically connected to a controller outside the coating box (1) via a wire, and the controller is electrically connected to an alarm via a wire.
10. The roll-to-roll magnetron coating machine according to claim 1, characterized in that: The top of the film coating box (1), the top of the film supply box (2) and the top of the film collection box (3) are all provided with openings, and a sealing plate (25) is installed in each opening.