Reaction chamber and metal organic chemical vapor deposition equipment

Abstract

The utility model discloses a reaction chamber and metal organic chemical vapor deposition equipment, and relates to the technical field of deposition equipment. The reaction chamber comprises a cavity assembly and an elastic pressing assembly, a containing cavity is formed in the cavity assembly, a heat insulation barrel is arranged in the containing cavity, and the two ends of the heat insulation barrel are connected with the two ends of the containing cavity in a one-to-one correspondence mode. The elastic pressing assembly is arranged at one end of the containing cavity, one end of the heat insulation barrel is connected with the elastic pressing assembly, and the other end of the heat insulation barrel and the other end of the containing cavity can be pressed through the elastic force of the elastic pressing assembly. In the installation and debugging process of the reaction chamber, the pressure acting on the heat insulation cylinder is buffered through the elastic pressing assembly, the heat insulation cylinder can be prevented from being crushed, the reaction chamber can be installed by inexperienced installation personnel, and the installation difficulty and the installation cost are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of deposition equipment, in particular to a reaction chamber and metal organic chemical vapor deposition equipment. Background Art

[0002] Metal organic chemical vapor deposition is a technology that introduces metal organic compounds and other reaction gases into a reaction chamber, undergoes thermal decomposition reaction under high temperature and ultimately forms a semiconductor thin film on a substrate. The thin film formed in this way is generally called an epitaxial layer.

[0003] In metal organic chemical vapor deposition equipment, the reaction chamber is the main place for the process, providing the necessary gas environment for the formation of the epitaxial layer, and using the internal structure to improve the process effect or the growth rate of the epitaxial layer. The insulation cylinder used in the reaction chamber is made of quartz. In the prior art, the bottom of the insulation cylinder is directly in contact with the flange, which is easy to cause the insulation cylinder to break during the installation and debugging process. Experienced installers are required to perform installation and debugging, which increases the difficulty and cost of installation. Utility Model Content

[0004] The utility model aims to provide a reaction chamber and metal organic chemical vapor deposition equipment, wherein the heat insulation tube of the reaction chamber is not easy to break during the installation and commissioning process, thereby reducing the installation difficulty and installation cost of the metal organic chemical vapor deposition equipment.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A reaction chamber comprising:

[0007] A cavity assembly, wherein a receiving cavity is provided in the cavity assembly, a heat insulating tube is provided in the receiving cavity, and two ends of the heat insulating tube are connected to two ends of the receiving cavity in a one-to-one correspondence;

[0008] An elastic clamping assembly is arranged at one end of the accommodating cavity, one end of the thermal insulation tube is connected to the elastic clamping assembly, and the elastic force of the elastic clamping assembly can compress the other end of the thermal insulation tube against the other end of the accommodating cavity.

[0009] As an optional scheme for the reaction chamber, the elastic clamping assembly includes a clamping seat, an elastic member and a support column. The clamping seat is arranged at one end of the cavity assembly. An installation cavity is arranged in the clamping seat. The elastic member is arranged in the installation cavity. One end of the elastic member is connected to the bottom of the installation cavity, and the other end is connected to the support column. The end of the support column away from the elastic member is used to support the insulation cylinder.

[0010] As an optional solution for the reaction chamber, the support column includes a limit head and a support column body, the limit head is arranged at one end of the support column body, the limit head is arranged in the installation cavity and is connected to the elastic member, and the support column body extends out of the installation cavity to support the insulation cylinder.

[0011] As an optional solution for the reaction chamber, a plurality of the elastic clamping assemblies are arranged at intervals along the circumference of the accommodating cavity, and the plurality of the elastic clamping assemblies support the thermal insulation cylinder via a supporting member.

[0012] As an optional scheme for the reaction chamber, the cavity assembly includes a cavity, a first flange and a second flange, the first flange and the second flange are respectively arranged at two ends of the cavity, the first flange is connected to the air intake end cover, and the elastic clamping assembly is arranged on the second flange, which can make the other end of the insulation tube abut and press against the air intake end cover.

[0013] As an optional solution for the reaction chamber, the reaction chamber also includes a blowing assembly, a blowing hole is provided on the cavity, the blowing hole is communicated with the accommodating cavity, and the blowing assembly is connected to the blowing hole to blow and clean the cavity formed between the cavity and the insulation cylinder.

[0014] As an optional solution for the reaction chamber, a partition extending toward the insulation cylinder is provided on the second flange, an exhaust cavity is formed between the partition and the support, and the cavity is communicated with the exhaust cavity.

[0015] As an optional scheme for the reaction chamber, the insulating cylinder includes an outer cylinder and an inner cylinder, a first connecting ring is arranged inside the end of the outer cylinder close to the second flange, the inner cylinder is connected to the end of the first connecting ring away from the outer cylinder, the inner cylinder is arranged lower than the outer cylinder, the inner diameter of the inner cylinder is the same as the inner diameter of the partition, the inner cavity of the partition and the inner cavity of the inner cylinder are arranged as heating chambers; the first connecting ring is provided with a first exhaust hole connected to the exhaust chamber.

[0016] As an optional solution of the reaction chamber, a first cooling cavity is arranged in the side wall of the cavity, and a water-isolating ring is arranged in the first cooling cavity;

[0017] A second cooling cavity is provided in the second flange.

[0018] A metal organic chemical vapor deposition device comprises a reaction chamber as described in any of the above schemes.

[0019] Beneficial effects of the utility model:

[0020] The reaction chamber provided by the utility model includes a cavity assembly and an elastic pressing assembly. A heat-insulating cylinder is arranged in the cavity assembly. The elastic pressing assembly is arranged at one end of the cavity assembly. The heat-insulating cylinder is pressed against the other end of the cavity assembly by the elastic force of the elastic pressing assembly. During the installation and debugging process, one end of the heat-insulating cylinder is arranged on the elastic pressing assembly. The elastic force of the elastic pressing assembly is utilized to press the other end of the heat-insulating cylinder against the other end of the cavity. The elastic pressing assembly itself can buffer the pressure acting on the heat-insulating cylinder to prevent the heat-insulating cylinder from being crushed. During the installation and debugging process of the reaction chamber, the elastic pressing assembly buffers the pressure acting on the heat-insulating cylinder, which can prevent the heat-insulating cylinder from being crushed. Inexperienced installers can also perform the installation, which reduces the difficulty and cost of installation.

[0021] The metal organic chemical vapor deposition equipment provided by the utility model uses the above-mentioned reaction chamber, which can ensure the safe and smooth installation of the reaction chamber and reduce the installation difficulty and installation cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a cross-sectional view of the reaction chamber provided in the specific embodiment of the utility model. Figure 1 ;

[0023] Figure 2 It is a partial cross-sectional view of the connection between the elastic pressing component and the cavity component provided by the specific embodiment of the utility model;

[0024] Figure 3 It is a partial structural schematic diagram of the connection between the elastic pressing component and the cavity component provided by the specific embodiment of the utility model;

[0025] Figure 4 A schematic diagram of the structure of a reaction chamber provided by a specific embodiment of the utility model;

[0026] Figure 5 It is a cross-sectional view of a reaction chamber hidden elastic clamping assembly provided by a specific embodiment of the utility model.

[0027] In the figure:

[0028] 1. Cavity assembly; 11. Cavity; 111. Blowing hole; 112. First cooling cavity; 1121. Water-isolating ring; 113. Reaction cavity; 114. First water inlet; 115. First water outlet; 12. First flange; 13. Second flange; 131. Connecting flange; 132. Fixing flange; 1321. Third exhaust hole; 1322. Second cooling cavity; 1323. Second water inlet; 1324. Second water outlet; 14. Separator; 141. Separating cylinder; 142. Second connecting ring; 1421. Second exhaust hole; 15. Exhaust cavity; 16. Heating cavity; 17. Cavity;

[0029] 2. Insulation tube; 21. Outer tube; 22. Inner tube; 23. First connecting ring; 231. First exhaust hole;

[0030] 3. Elastic clamping assembly; 31. Clamping seat; 32. Elastic member; 33. Support column; 331. Support column body; 332. Limiting head;

[0031] 4. Support member; 41. Support ring; 42. Connecting tube;

[0032] 5. Air blowing pipeline. DETAILED DESCRIPTION

[0033] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.

[0034] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0035] This embodiment provides a metal organic chemical vapor deposition device, including a reaction chamber, an air intake device, an exhaust gas collection device and a heater. The air intake device and the exhaust gas collection device are respectively arranged at the two ends of the reaction chamber, and the reaction gas enters the reaction chamber from one end to undergo a chemical reaction. After the reaction is completed, the exhaust gas is discharged from the other end of the reaction chamber and enters the exhaust gas collection device. The heater is arranged in the reaction chamber to heat the temperature in the reaction chamber to the temperature required for the chemical reaction to occur.

[0036] like Figure 1 and Figure 2As shown, this embodiment provides a reaction chamber, which is applied to the above-mentioned metal organic chemical vapor deposition equipment. The reaction chamber includes a cavity assembly 1 and an elastic clamping assembly 3. The cavity assembly 1 is provided with a receiving cavity, and the receiving cavity is provided with an insulating tube 2. The two ends of the insulating tube 2 are connected to the two ends of the receiving cavity in a one-to-one correspondence. The elastic clamping assembly 3 is arranged at one end of the receiving cavity, and one end of the insulating tube 2 is connected to the elastic clamping assembly 3. The elastic force of the elastic clamping assembly 3 can make the other end of the insulating tube 2 and the other end of the receiving cavity pressed tightly. During the installation and debugging process, one end of the insulating tube 2 is arranged on the elastic clamping assembly 3, and the elastic force of the elastic clamping assembly 3 is used to make the other end of the insulating tube 2 and the other end of the cavity 11 pressed tightly. The elastic clamping assembly 3 itself can buffer the pressure acting on the insulating tube 2 to prevent the insulating tube 2 from being crushed. During the installation and debugging process of the reaction chamber, the elastic clamping assembly 3 buffers the pressure acting on the insulating tube 2, which can prevent the insulating tube 2 from being crushed. Inexperienced installers can also perform installation, which reduces the difficulty and cost of installation.

[0037] Specifically, the cavity assembly 1 includes a cavity 11, a first flange 12 and a second flange 13. The first flange 12 and the second flange 13 are respectively arranged at the two ends of the cavity 11. The inner cavity of the cavity 11 forms a receiving cavity. The first flange 12 is connected to the air inlet end cover, and the air inlet end cover is provided with an air inlet. The elastic pressing assembly 3 is arranged on the second flange 13, which can make the other end of the insulation tube 2 abut against the air inlet end cover and press. The second flange 13 is provided with a partition 14 extending in the direction close to the insulation tube 2. The insulation tube 2 includes an outer tube 21 and an inner tube 22. The inner end of the outer tube 21 close to the second flange 13 is provided with a first connecting ring 23. The inner tube 22 is connected to the end of the first connecting ring 23 away from the outer tube 21. The inner tube 22 is arranged lower than the outer tube 21. The inner diameter of the inner tube 22 is the same as the inner diameter of the partition 14. The inner cavity of the partition 14 and the inner cavity of the inner tube 22 are set as a heating cavity 16. The heater is arranged in the heating cavity 16. A carrier plate for carrying the substrate is arranged at one end of the inner cylinder 22 away from the first connecting ring 23 , and the air inlet end cover, the inner wall of the outer cylinder 21 , the first connecting ring 23 , the outer wall of the inner cylinder 22 and the carrier plate together form a reaction chamber 113 .

[0038] like Figure 2 and Figure 3 As shown, the elastic clamping assembly 3 is arranged on the second flange 13, and the second flange 13 includes a connecting flange 131 and a fixing flange 132. The connecting flange 131 is connected to the cavity 11, and an annular mounting groove connected to the inner hole of the connecting flange 131 is arranged at one end of the connecting flange 131 close to the cavity 11, and the elastic clamping assembly 3 is arranged in the annular mounting groove. The fixing flange 132 is arranged at one end of the connecting flange 131 away from the cavity 11, and the inner hole of the fixing flange 132 is connected to the driving mechanism, and the driving mechanism is used to drive the carrier plate. The partition 14 is arranged above the fixing flange 132 and is matched and connected with the inner hole of the connecting flange 131.

[0039] Specifically, the elastic clamping assembly 3 includes a clamping seat 31, an elastic member 32 and a support column 33. The clamping seat 31 is arranged at one end of the cavity assembly 1. The clamping seat 31 is provided with a mounting cavity. The elastic member 32 is arranged in the mounting cavity. One end of the elastic member 32 is connected to the bottom of the mounting cavity, and the other end is connected to the support column 33. The end of the support column 33 away from the elastic member 32 is used to support the heat insulation cylinder 2. The clamping seat 31 is fixed in the annular mounting groove. One end of the mounting cavity passes through the bottom of the clamping seat 31, and the other end is provided with a connecting port. The elastic member 32 is a spring. One end of the spring is connected to the bottom of the annular mounting groove, and the other end is connected to the support column 33. The spring can make the support column 33 elastically extend out of the connecting port to support the heat insulation cylinder 2.

[0040] In this embodiment, the support column 33 includes a stopper 332 and a support column body 331. The stopper 332 is disposed at one end of the support column body 331. The stopper 332 is disposed in the mounting cavity and connected to the elastic member 32. The support column body 331 extends out of the mounting cavity to support the heat insulating cylinder 2. The inner diameter of the communication port is smaller than the inner diameter of the mounting cavity, the outer diameter of the support column body 331 is smaller than or equal to the inner diameter of the communication port, and the outer diameter of the stopper 332 is larger than the inner diameter of the communication port, so that in the normal state of the spring, the stopper 332 abuts against one end of the mounting cavity and the communication port, and stably supports the heat insulating cylinder 2.

[0041] Furthermore, in order to ensure the stability of the support of the thermal insulation tube 2, multiple elastic clamping assemblies 3 are arranged at intervals along the circumference of the accommodating cavity, and multiple elastic clamping assemblies 3 support the thermal insulation tube 2 through the support member 4. The support member 4 includes a support ring 41 and a connecting tube 42. The support ring 41 is fixed to the support column 33 by screws. The connecting tube 42 is arranged on the inner side of the support ring 41 and extends away from the thermal insulation tube 2. The outer wall of the connecting tube 42 is fitted with the inner hole of the connecting flange 131. In this embodiment, six elastic clamping assemblies 3 are arranged evenly along the circumference of the annular mounting groove.

[0042] Specifically, continue to refer to Figure 1 The partition 14 and the support 4 are spaced apart to form an exhaust chamber 15 between the partition 14 and the support 4. The first connecting ring 23 is provided with a first exhaust hole 231 connected to the exhaust chamber 15. After the reaction gas enters the reaction chamber 113 from the air inlet and undergoes a chemical reaction, it enters the exhaust chamber 15 from the first exhaust hole 231. There are a plurality of first exhaust holes 231, and the plurality of first exhaust holes 231 are evenly arranged along the circumference of the first connecting ring 23 to ensure that the gas after the reaction is completed can be evenly discharged to the exhaust chamber 15, and to ensure that the gas flow in the reaction chamber 113 is stable.

[0043] Furthermore, the partition 14 includes a partition tube 141 and a second connecting ring 142, one end of the second connecting ring 142 is connected to the inner hole of the connecting flange 131, the partition tube 141 is arranged on the inner side of the second connecting ring 142, and extends toward the direction close to the insulation tube 2, the inner diameter of the partition tube 141 is equal to the inner diameter of the inner tube 22, and the heater is arranged in the heating chamber 16 formed by the partition tube 141 and the inner tube 22.

[0044] In this embodiment, an exhaust chamber 15 is formed between the connecting tube 42 and the separating tube 141, a second exhaust hole 1421 is provided on the second connecting ring 142 corresponding to the exhaust chamber 15, and a third exhaust hole 1321 is provided on the fixing flange 132 corresponding to the second exhaust hole 1421, so that the gas after the reaction in the reaction chamber 113 is discharged to the exhaust gas collection device in sequence through the first exhaust hole 231, the exhaust chamber 15, the second exhaust hole 1421 and the third exhaust hole 1321. In order to prevent the exhaust gas from interfering with the heater, high-purity nitrogen is filled in the heating chamber 16 to maintain a positive pressure to prevent the exhaust gas from entering.

[0045] Since there is a cavity 17 between the outer wall of the outer cylinder 21 and the inner wall of the chamber 11, the product of the chemical reaction in the reaction chamber 113 is likely to remain in the cavity 17. In order to prevent the reaction product from remaining in the cavity 17, Figure 4 and Figure 5 As shown, the reaction chamber further includes a blowing assembly, a blowing hole 111 is provided on the cavity 11, the blowing hole 111 is communicated with the accommodating cavity, and the blowing assembly is connected to the blowing hole 111, so as to blow and purge the cavity 17 formed between the cavity 11 and the heat insulation cylinder 2, so as to prevent the reaction product from remaining in the cavity 17. In this embodiment, four blowing holes 111 are arranged at intervals along the circumferential direction of the cavity 11, and the blowing assembly includes four blowing pipelines 5, each blowing hole 111 is connected to a blowing pipeline 5, and the purge gas is blown into the cavity 17 through the blowing pipeline 5 and the blowing hole 111, so as to prevent the reaction product from remaining in the cavity 17.

[0046] Furthermore, the cavity 17 is connected to the exhaust cavity 15. The cavity 17 is connected to the exhaust cavity 15 through the gap between the support member 4 and the cavity 11. After the purge gas enters the exhaust cavity 15 through the gap between the support member 4 and the cavity 11, it enters the exhaust gas collection device through the second exhaust hole 1421 and the third exhaust hole 1321. It should be noted that the gap between the support member 4 and the cavity 11 includes a first gap between the outer side of the support ring 41 and the inner wall of the cavity 11, a second gap between the outer wall of the connecting tube 42 and the inner hole of the connecting flange 131, and a third gap between the connecting tube 42 and the second connecting ring 142. After the purge gas purges the cavity 17, it enters the exhaust cavity 15 through the first gap, the second gap and the third gap.

[0047] In order to prevent the structure of the chamber assembly 1 from being affected by the high temperature in the reaction chamber 113, a first cooling chamber 112 is provided in the side wall of the chamber 11, and water-blocking rings 1121 are arranged at intervals in the first cooling chamber 112. A plurality of water holes are arranged at intervals on the water-blocking rings 1121, so that the cooling water in the first cooling chamber 112 can flow through the water holes. The plurality of water-blocking rings 1121 are evenly spaced along the height direction of the chamber 11 to ensure uniform heat dissipation of the side wall of the chamber 11. A first water inlet 114 and a first water outlet 115 communicating with the first cooling chamber 112 are also provided on the chamber 11. The first water inlet 114 is provided at one end of the chamber 11 close to the second flange 13, and the first water outlet 115 is provided at one end of the chamber 11 close to the first flange 12. The cooling water enters the first cooling chamber 112 through the first water inlet 114, and flows out through the first water outlet 115 after circulating and exchanging heat in the first cooling chamber 112, so as to dissipate heat from the chamber 11.

[0048] Further, continue to refer to Figure 1 , Figure 4 and Figure 5 Since the heater is arranged close to the second flange 13, in order to ensure the structural strength of the second flange 13, a second cooling chamber 1322 is arranged in the second flange 13, and the second cooling chamber 1322 is arranged on the fixed flange 132, and the second cooling chamber 1322 is arranged on the side of the third exhaust hole 1321 away from the inner hole of the fixed flange 132. The fixed flange 132 is also provided with a second water inlet 1323 and a second water outlet 1324 which are in communication with the second cooling chamber 1322. The cooling water enters the second cooling chamber 1322 through the second water inlet 1323, circulates in the second cooling chamber 1322 to realize heat exchange, so as to realize the heat dissipation of the fixed flange 132, and finally is discharged through the second water outlet 1324.

[0049] The metal organic chemical vapor deposition equipment provided by the utility model uses the above-mentioned reaction chamber, which can not only ensure the safe and smooth installation of the reaction chamber and reduce the installation difficulty and cost; but also can use the purge component to blow and clean the cavity 17 formed between the cavity 11 and the insulation tube 2 to prevent the reaction products from remaining in the cavity 17 and affecting the cleanliness of the reaction chamber.

[0050] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A reaction chamber, characterized in that include: A cavity assembly (1), wherein a receiving cavity is provided in the cavity assembly (1), a heat insulating tube (2) is provided in the receiving cavity, and two ends of the heat insulating tube (2) are connected to two ends of the receiving cavity in a one-to-one correspondence; An elastic clamping assembly (3) is arranged at one end of the accommodating cavity, one end of the thermal insulation tube (2) is connected to the elastic clamping assembly (3), and the elastic force of the elastic clamping assembly (3) can cause the other end of the thermal insulation tube (2) to be compressed with the other end of the accommodating cavity.

2. The reaction chamber according to claim 1, characterized in that The elastic clamping assembly (3) comprises a clamping seat (31), an elastic member (32) and a support column (33); the clamping seat (31) is arranged at one end of the cavity assembly (1); an installation cavity is arranged in the clamping seat (31); the elastic member (32) is arranged in the installation cavity; one end of the elastic member (32) is connected to the bottom of the installation cavity, and the other end is connected to the support column (33); the end of the support column (33) away from the elastic member (32) is used to support the insulation tube (2).

3. The reaction chamber according to claim 2, characterized in that The support column (33) comprises a limit head (332) and a support column body (331); the limit head (332) is arranged at one end of the support column body (331); the limit head (332) is arranged in the installation cavity and is connected to the elastic member (32); the support column body (331) extends out of the installation cavity to support the thermal insulation tube (2).

4. The reaction chamber according to claim 2, characterized in that A plurality of the elastic clamping assemblies (3) are arranged at intervals along the circumference of the accommodating cavity, and the plurality of the elastic clamping assemblies (3) support the heat insulating cylinder (2) via a support member (4).

5. The reaction chamber according to claim 4, characterized in that The cavity assembly (1) comprises a cavity (11), a first flange (12) and a second flange (13); the first flange (12) and the second flange (13) are respectively arranged at two ends of the cavity (11); the first flange (12) is connected to an air intake end cover; the elastic clamping assembly (3) is arranged on the second flange (13) and can make the other end of the insulation tube (2) abut against and be clamped against the air intake end cover.

6. The reaction chamber according to claim 5, characterized in that The reaction chamber further comprises an air blowing assembly, the cavity (11) is provided with an air blowing hole (111), the air blowing hole (111) is communicated with the accommodating cavity, and the air blowing assembly is connected to the air blowing hole (111) so as to blow and clean the cavity (17) formed between the cavity (11) and the insulation cylinder (2).

7. The reaction chamber according to claim 6, characterized in that The second flange (13) is provided with a partition (14) extending in a direction close to the heat insulation cylinder (2), an exhaust cavity (15) is formed between the partition (14) and the support member (4), and the cavity (17) is connected to the exhaust cavity (15).

8. The reaction chamber according to claim 7, characterized in that The heat-insulating cylinder (2) comprises an outer cylinder (21) and an inner cylinder (22); a first connecting ring (23) is arranged inside one end of the outer cylinder (21) close to the second flange (13); the inner cylinder (22) is connected to one end of the first connecting ring (23) away from the outer cylinder (21); the inner cylinder (22) is arranged lower than the outer cylinder (21); the inner diameter of the inner cylinder (22) is the same as the inner diameter of the partition (14); the inner cavity of the partition (14) and the inner cavity of the inner cylinder (22) are arranged as a heating cavity (16); and the first connecting ring (23) is provided with a first exhaust hole (231) connected to the exhaust cavity (15).

9. The reaction chamber according to claim 8, characterized in that A first cooling cavity (112) is arranged in the side wall of the cavity (11), and a water-isolating ring (1121) is arranged in the first cooling cavity (112); A second cooling cavity (1322) is provided in the second flange (13).

10. Metal organic chemical vapor deposition equipment, characterized in that Comprising a reaction chamber as described in any one of claims 1-9.

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