Turnover type welding positioning device for precise metal plate assembly of semiconductor equipment

Abstract

The utility model discloses a semiconductor equipment precision sheet metal assembly turnover type welding positioning device which comprises a rack and two turnover clamping arms which are oppositely arranged and rotationally connected to the rack, and a welding frame is arranged between the two turnover clamping arms. The welding frame is of a latticed structure, and a plurality of horizontal base plates located on the same plane are arranged on the welding frame. A positioning assembly used for positioning a metal plate structure is arranged on the horizontal base plate. And the rack is provided with a positioning pin shaft which can be connected with the overturning clamping arm in an inserting manner. The utility model aims to provide the turnover type welding positioning device for the precise sheet metal component of the semiconductor equipment, which can turn over the whole sheet metal structure on the premise of ensuring positioning, is convenient for multi-aspect welding operation, and improves the working efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of welding positioning, in particular to a flip-type welding positioning device for a precision sheet metal component of a semiconductor device. Background Art

[0002] When processing conventional sheet metal parts, it is necessary to control the dimensional tolerance of the product at every stage of processing, especially in the welding stage. It is easy to cause dimensional deviation due to thermal deformation, which will lead to unqualified products and affect customer use. The traditional welding positioning tooling is set on a fixed working platform as a whole, and welding operations can only be performed on one working surface. After single-sided welding operations, the entire workpiece needs to be turned over to the other side and repositioned, resulting in low welding efficiency. Utility Model Content

[0003] The utility model aims to provide a flip welding positioning device for precision sheet metal components of semiconductor equipment, which can flip the entire sheet metal structure under the premise of ensuring positioning, facilitate various welding operations, and increase work efficiency.

[0004] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a flip welding positioning device for precision sheet metal components of semiconductor equipment, comprising a frame and two flip clamp arms arranged oppositely and rotatably connected to the frame, a welding frame is arranged between the two flip clamp arms;

[0005] The welding frame is in a grid-like structure, on which a plurality of horizontal substrates located in the same plane are arranged;

[0006] The horizontal substrate is provided with a positioning component for positioning the sheet metal structure;

[0007] The frame is provided with a positioning pin shaft which can be plugged into the flip clamp arm.

[0008] In a preferred embodiment of the utility model, the positioning assembly includes a quick clamp, a supporting positioning clamp, and a positioning seat arranged on the welding frame and / or the horizontal base plate;

[0009] The quick clamp and the positioning seat are arranged opposite to each other, and a gap is reserved between them for placing the sheet metal structure. The quick clamp and the positioning seat can be clamped on both sides of the sheet metal structure in the horizontal direction;

[0010] The support and positioning clamp comprises a support seat, a positioning clamp, and a fixing screw rod which is passed through the positioning clamp and can be threadedly connected with the support seat. The support seat and the positioning clamp can be clamped on both sides of the sheet metal structure along the vertical direction.

[0011] In a preferred embodiment of the utility model, a plurality of equal-height cushion blocks are arranged on the welding frame and / or the horizontal base plate, and at least one positioning screw is threadedly connected to each of the equal-height cushion blocks.

[0012] In a preferred embodiment of the present invention, a through hole is provided on the horizontal substrate.

[0013] In a preferred embodiment of the utility model, a plurality of concave blocks are arranged on the welding frame, and an L-shaped block capable of being clamped on the concave block is arranged on the flip clamp arm, and the concave block and the L-shaped block can be fixedly connected by bolts.

[0014] In a preferred embodiment of the utility model, a plurality of level adjustment feet are arranged at the bottom of the frame.

[0015] The beneficial effects of the utility model are:

[0016] (1) The various parts of the sheet metal structure are positioned and assembled on the positioning assembly. The sheet metal structure fixed on the welding frame by the positioning assembly can be turned over as a whole following the flip clamp arm, and the position of the welding frame is limited and fixed by the plug-in cooperation between the positioning pin shaft and the flip clamp arm. There is no need to reposition the other side of the sheet metal structure, which is convenient for the staff to perform welding operations on different sides of the sheet metal structure and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0018] Figure 1 It is a structural schematic diagram of a flip welding positioning device for precision sheet metal components of semiconductor equipment in a preferred embodiment of the utility model;

[0019] Figure 2 In the preferred embodiment of the utility model Figure 1 A schematic diagram of the local enlarged structure at B;

[0020] Figure 3 In the preferred embodiment of the utility model Figure 1 A schematic diagram of the local enlarged structure at C;

[0021] Figure 4 In the preferred embodiment of the utility model Figure 1 Schematic diagram of the structure viewed from above;

[0022] Among them, 1. frame; 2. flip clamp arm; 3. welding frame; 4. horizontal base plate; 401. through hole; 5. positioning pin; 6. quick clamp; 7. support positioning clamp; 701. support seat; 702. positioning clamp; 703. fixing screw; 8. positioning seat; 9. equal height pad; 10. positioning screw; 11. concave block; 12. L-shaped block; 13. horizontal adjustment foot. DETAILED DESCRIPTION

[0023] The present invention will now be further described in detail in conjunction with the accompanying drawings and embodiments. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0024] It should be noted that if there are directional indications (such as up, down, bottom, top, etc.) involved in this embodiment, the directional indication is only used to explain the relative position relationship, movement, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly. The terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. Unless otherwise clearly specified and defined, the terms "set", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0025] like Figure 1-Figure 4 As shown, a semiconductor device precision sheet metal assembly flip welding positioning device comprises a frame 1 and two flip clamp arms 2 which are arranged opposite to each other and rotatably connected to the frame 1, and a welding frame 3 is arranged between the two flip clamp arms 2;

[0026] The welding frame 3 is a grid-like structure, on which a plurality of horizontal substrates 4 located in the same plane are arranged;

[0027] A positioning component for positioning the sheet metal structure is provided on the horizontal base plate 4;

[0028] The frame 1 is provided with a positioning pin shaft 5 which can be plugged into the flip clamp arm 2 .

[0029] In the above solution, the sheet metal structure is a combination of multiple sheet metal parts and must be welded to form a complete whole. Each part of the sheet metal structure is positioned and assembled on the positioning component. The horizontal base plate 4 can be used as a reference platform to install the positioning component, improving the position accuracy of the installed positioning component. The grid-shaped welding frame 3 facilitates the rapid heat dissipation of the sheet metal structure during the welding process. The two coaxially arranged flipping clamping arms 2 can perform flipping actions relative to the machine frame 1, that is, the sheet metal structure fixed on the welding frame 3 through the positioning component can follow the flipping clamping arms 2 to perform overall flipping, and the position of the welding frame 3 is restricted and fixed through the insertion and cooperation of the positioning pin shaft 5 and the flipping clamping arms 2. The position of the positioning pin shaft 5 can be reinforced with bolts to facilitate the welding operation of the different surfaces of the sheet metal structure by the staff. By using the positioning tooling in this technical solution, there is no need to repeatedly position the sheet metal structure, which can increase the welding efficiency and also ensure the dimensional accuracy of the sheet metal structure.

[0030] Further, as Figure 1 , Figure 2 shown, the positioning component includes a quick clamp 6, a support positioning clamp 7, and a positioning seat 8 provided on the welding frame 3 and / or the horizontal base plate 4;

[0031] The quick clamp 6 and the positioning seat 8 are arranged opposite to each other, and there is a gap for placing the sheet metal structure between them. The quick clamp 6 and the positioning seat 8 can be clamped on both sides of the sheet metal structure along the horizontal direction;

[0032] The support positioning clamp 7 includes a support seat 701, a positioning clamp 702, and a fixing screw 703 passing through the positioning clamp 702 and capable of being threadedly connected to the support seat 701. The support seat 701 and the positioning clamp 702 can be clamped on both sides of the sheet metal structure along the vertical direction.

[0033] Further, the shape of the positioning clamp 702 can be U-shaped, giant-shaped, L-shaped, and can be selected according to the shape of the sheet metal structure. When there is a hem on the side of the sheet metal structure. As Figure 2 shown, it can be clamped and fixed by the U-shaped positioning clamp 702. The U-shaped positioning clamp 702 can directly cross over the hem of the sheet metal structure and directly act on the inside of the sheet metal structure. Additionally, as Figure 2 shown, when the cross-section of the sheet metal structure is U-shaped, the giant-shaped positioning clamp 702 can be used, and the effect of positioning and pressing the sheet metal structure is better.

[0034] Specifically, the quick clamp 6 in the positioning assembly adopts the manual quick clamp 6 commonly used in the prior art. After the sheet metal structure placed between the quick clamp 6 and the positioning seat 8 is manually operated, one side of the sheet metal structure will be tightly abutted by the quick clamp 6, and the other side of the sheet metal structure will be abutted against the positioning seat 8, so as to correct and position the horizontal position of the sheet metal structure. At the same time, the sheet metal structure can also be clamped between the support seat 701 and the positioning clamp 702, and the sheet metal structure can be positioned and fixed by tightening the fixing bolts. Through the mutual cooperation between the quick clamp 6, the positioning seat 8 and the supporting positioning clamp 7, the horizontal position of the sheet metal structure can be corrected respectively, and the sheet metal structure after the correction position can also be fixed, so as to ensure the welding accuracy of the sheet metal structure.

[0035] Furthermore, in order to increase the overall stability of the sheet metal structure during welding. Figure 1 As shown, a plurality of equal-height pads 9 are arranged on the welding frame 3 and / or the horizontal base plate 4, and at least one positioning screw 10 is threadedly connected to each equal-height pad 9. The equal-height pads 9 are supported on the bottom side of the middle part of the sheet metal parts constituting the sheet metal structure, and are used to support the sheet metal structure. The positioning screws 10 threadedly connected to the equal-height pads 9 can be used as another positioning point for placing the sheet metal parts, reducing the process of placing and assembling the sheet metal parts.

[0036] In this embodiment, in order to facilitate the staff to observe the welding situation and also to provide the staff with an operating space for welding, a through hole 401 is provided on the horizontal substrate 4 .

[0037] Furthermore, in order to meet the welding requirements of sheet metal structures of different specifications and models. Figure 3 As shown, the welding frame 3 is provided with a plurality of concave blocks 11, and the flip clamp arm 2 is provided with an L-shaped block 12 that can be clamped on the concave block 11, and the concave block 11 and the L-shaped block 12 can be fixedly connected by bolts. The welding frame 3 can be quickly removed from the flip clamp arm 2 to facilitate replacement of welding frames 3 of different specifications and types, and to facilitate rapid replacement of positioning tooling according to work requirements.

[0038] Furthermore, in order to increase the stability of the entire positioning tool, a plurality of level adjustment legs 13 are provided at the bottom of the frame 1, so that the positioning tool can adapt to more working environments.

[0039] Working principle: Through the mutual cooperation between the quick clamp 6, the positioning seat 8 and the supporting positioning clamp 7, the horizontal position of the sheet metal structure can be corrected respectively, and the sheet metal structure after the correction position can also be fixed to ensure the accuracy of the sheet metal structure welding. At the same time, the sheet metal structure fixed on the welding frame 3 by the positioning assembly can be turned over as a whole following the flip clamp arm 2, and the position of the welding frame 3 can be limited and fixed by the plug-in cooperation between the positioning pin shaft 5 and the flip clamp arm 2, so as to facilitate the staff to perform welding operations on different surfaces of the sheet metal structure. The positioning tooling in this technical solution does not need to repeatedly position the sheet metal structure, which can increase the efficiency of welding, and at the same time can ensure the dimensional accuracy of the sheet metal structure and greatly increase the welding efficiency.

[0040] The above is based on the ideal embodiment of the utility model. Through the above description, relevant personnel can make various changes and modifications without deviating from the technical concept of the utility model. The technical scope of this utility model is not limited to the content in the specification, and the technical scope must be determined according to the scope of the claims.

Claims

1. A flip welding positioning device for precision sheet metal components of semiconductor equipment, characterized in that: It comprises a frame (1) and two flip clamp arms (2) arranged opposite to each other and rotatably connected to the frame (1), and a welding frame (3) is arranged between the two flip clamp arms (2); The welding frame (3) is in a grid-like structure, on which a plurality of horizontal base plates (4) located in the same plane are arranged; A positioning component for positioning the sheet metal structure is arranged on the horizontal base plate (4); The frame (1) is provided with a positioning pin shaft (5) which can be plugged into the flip clamp arm (2).

2. The semiconductor equipment precision sheet metal component flip welding positioning device according to claim 1, characterized in that: The positioning assembly comprises a quick clamp (6), a supporting positioning clamp (7), and a positioning seat (8) which are arranged on the welding frame (3) and / or the horizontal base plate (4); The quick clamp (6) and the positioning seat (8) are arranged opposite to each other, and a gap is reserved between them for placing the sheet metal structure. The quick clamp (6) and the positioning seat (8) can be clamped on both sides of the sheet metal structure in a horizontal direction; The support positioning clamp (7) comprises a support seat (701), a positioning clamp (702), and a fixing screw (703) which is passed through the positioning clamp (702) and can be threadedly connected to the support seat (701); the support seat (701) and the positioning clamp (702) can be clamped on both sides of the sheet metal structure along the vertical direction.

3. The semiconductor equipment precision sheet metal component flip welding positioning device according to claim 2, characterized in that: A plurality of equal-height cushion blocks (9) are arranged on the welding frame (3) and / or the horizontal base plate (4), and each of the equal-height cushion blocks (9) is threadedly connected with at least one positioning screw (10).

4. The semiconductor equipment precision sheet metal component flip welding positioning device according to claim 3, characterized in that: The horizontal substrate (4) is provided with a through hole (401).

5. The semiconductor equipment precision sheet metal component flip welding positioning device according to claim 4, characterized in that: The welding frame (3) is provided with a plurality of concave blocks (11), and the flip clamp arm (2) is provided with an L-shaped block (12) capable of being clamped on the concave block (11), and the concave block (11) and the L-shaped block (12) can be fixedly connected by bolts.

6. The semiconductor equipment precision sheet metal component flip welding positioning device according to claim 5, characterized in that: A plurality of horizontal adjustment feet (13) are provided at the bottom of the frame (1).

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