Auxiliary tool for operation on inner wall of polycrystalline silicon reduction furnace and polycrystalline silicon reduction furnace

Abstract

The utility model discloses an auxiliary tool for operation on the inner wall of a polycrystalline silicon reduction furnace, which comprises a plate sheet and a tensioning mechanism, the section structure of the plate sheet is consistent with that of a sight glass hole of the polycrystalline silicon reduction furnace, and the plate sheet is used as a sample sheet for operation on the inner wall of the polycrystalline silicon reduction furnace. The sheet bar is detachably plugged at an opening, facing the inner wall, in a sight glass hole of the polycrystalline silicon reduction furnace, the surface, facing the interior of the polycrystalline silicon reduction furnace, of the sheet bar is flush with the inner wall face of the polycrystalline silicon reduction furnace, the end of the tensioning mechanism is connected with the sheet bar, and the tensioning mechanism is arranged in the sight glass hole so that the sheet bar can be fixed by being connected with the inner wall of the sight glass hole in a tensioning mode. The auxiliary tool for the inner wall operation of the polycrystalline silicon reduction furnace can provide a real representation sample wafer for the inner wall operation, ensure that the operation effect can be effectively detected, effectively protect a sight glass hole, ensure the operation continuity, reduce the operation difficulty and prevent equipment from being damaged. The utility model further provides a polycrystalline silicon reduction furnace.

Description

Technical Field

[0001] The utility model specifically relates to an auxiliary tooling for inner wall operation of a polysilicon reduction furnace and a polysilicon reduction furnace. Background Art

[0002] At present, the production of high-purity polysilicon is basically carried out by the modified Siemens method. The reduction furnace barrel is the key polysilicon production equipment, which completes the electrochemical reaction of silicon element reduction deposition at high temperature. The reduction link is the part with the highest power consumption cost of the Siemens method. Since the temperature inside the reduction furnace is high during production (about 1100 degrees Celsius), the internal silicon material production situation cannot be directly observed. Therefore, about 5 observation holes will be set on the reduction furnace barrel, such as Figure 1 As shown, it is isolated from the inside by high temperature resistant quartz glass. During the use of the reduction furnace, silicon scale will quickly deposit on the inner wall at high temperature, and the internal reaction substances will also corrode the inner wall. Rod tipping during production will also damage the inner wall of the furnace barrel. The scale, corrosion and damage on the inner surface of the furnace barrel will seriously affect the thermal radiation rate and thermal reflectivity of the inner wall of the reduction furnace. The furnace barrel will absorb more heat energy (compared to a new furnace barrel with intact inner wall), which will greatly increase the power consumption in the reduction production link.

[0003] Therefore, the reduction furnace barrel used for polysilicon production needs to repair the inner wall in time, such as grinding the inner wall, preparing a new coating on the inner wall, etc., to improve the heat reflectivity of the furnace barrel, reduce the absorption of thermal radiation, and thus reduce the electric heat energy consumption of the reduction process. During the grinding or coating preparation process of the inner wall, due to the presence of the sight glass, the inner wall has a porous structure and a non-continuous plane structure. Therefore, during the grinding and spraying process, the grinding tools and coating preparation tools cannot work continuously and need to avoid the sight glass hole. If the avoidance is not timely, it will cause a series of problems such as tool damage, sight glass hole damage, and sight glass cannot be used, which seriously affects the repair work of the inner wall of the reduction furnace.

[0004] At present, when performing operations on the inner wall of a reduction furnace, a plugging device (metal plate, metal sheet, etc.) that is approximately circular (the inner side of the sight glass hole is circular) is usually used, which is simply placed (usually forcefully inserted) into the sight glass hole to protect the sight glass hole to a certain extent. However, due to the large number of reduction furnace models and inconsistent sight glass hole specifications and sizes (different furnaces designed by different merchants have different sight glass hole structures), it is difficult for the plugging device to completely match the sight glass hole size, so the sight glass hole position is still uneven, so the problems of discontinuous operation and difficulty in operation caused by the sight glass hole remain unsolved. At the same time, since it is only simply placed, the probability of the plugging device falling off or entering the inside of the sight glass during the inner wall operation is very high, and it cannot truly achieve the purpose of protecting the sight glass.

[0005] In addition, polysilicon reduction furnaces are generally large in size and heavy in weight, with a diameter and height of more than 3 meters and a weight of about 20 tons. Therefore, after the inner wall operation is completed, the interior of the reduction furnace is a restricted space, and detection and measurement are restricted. The environment inside the reduction furnace is harsh (there are dust, flammable gases, toxic and harmful gases in the environment after the operation is completed), which makes it difficult to detect the results of the operation. The reduction furnace is an oversized workpiece, the detection position is high, and detection is difficult. At the same time, the lack of internal light affects the accuracy of observation and detection. Some key indicator parameters of the inner wall operation (such as spraying thickness, grinding thickness, coating material property analysis and detection, etc.) cannot be detected (the reduction furnace is made of stainless steel, the workpiece size is large, the thickness change cannot be detected, and electron microscopy analysis, coating property detection and analysis, etc. cannot be performed), making it difficult to conduct a true detection and evaluation of the inner wall operation effect, and also making it difficult to optimize and improve the inner wall operation process. Utility Model Content

[0006] The technical problem to be solved by the present invention is to provide a polysilicon reduction furnace inner wall operation auxiliary tooling for the above-mentioned deficiencies in the prior art, that is, to effectively protect the sight glass holes of different structural sizes during the operation of the inner wall of the polysilicon reduction furnace barrel, and solve the problems of discontinuous operation, high difficulty of operation, easy damage to equipment, and the problem that the operation effect is difficult or impossible to conduct real and effective evaluation and detection. The tooling can provide a real characterization sample for the inner wall operation, ensure that the operation effect can be effectively detected, and can effectively protect the sight glass holes, ensure continuous operation, reduce the difficulty of operation, and prevent damage to equipment. The present invention also provides a polysilicon reduction furnace.

[0007] The utility model provides an auxiliary tooling for working on the inner wall of a polysilicon reduction furnace, comprising a plate and a tensioning mechanism. The cross-sectional structure of the plate is consistent with the cross-sectional structure of a sight glass hole of the polysilicon reduction furnace. The plate is used as a sample for working on the inner wall of the polysilicon reduction furnace, and can be detachably sealed at the opening of the sight glass hole of the polysilicon reduction furnace facing the inner wall, and the surface of the plate facing the inside of the polysilicon reduction furnace is flush with the inner wall surface of the polysilicon reduction furnace, the end of the tensioning mechanism is connected to the plate, and the tensioning mechanism is arranged inside the sight glass hole to fix the plate by tensioning and connecting the inner wall of the sight glass hole.

[0008] Furthermore, the tensioning mechanism includes a pull cone, a sliding flap and a connecting rod, the sliding flap includes a plurality of petals, each petal is arranged around the connecting rod, and is spaced apart from each other in the same circle with the connecting rod as the axis, the plate is connected to the end of the sliding flap, the pull cone is movably connected to the connecting rod along the axial direction of the connecting rod, and the outer surface is a curved surface that gradually expands from one side close to the plate to the other side, so that the petals are spread open along the connecting rod close to the plate and tightly connected to the inner wall of the sight glass hole, and the petals are contracted along the connecting rod away from the plate and detached from the sight glass hole.

[0009] Furthermore, the sliding flap also includes multiple support rods, each support rod is parallel to the connecting rod, and the end of each petal is connected to the plate through an independent support rod. One end of the support rod is rotatably connected to the plate, and the other end is connected to the petal through a threaded adapter.

[0010] Furthermore, each of the support rods is made of elastic material, so that when the taper moves away from the plate along the connecting rod, each petal is closed by virtue of the elasticity of the support rod.

[0011] Furthermore, the pulling cone has a truncated cone structure, and the outer side surface is a cone surface that gradually expands outward from one side close to the plate to the other side, and the inner side surface of each petal is a curved surface, so that the inner side surface of the sliding petal formed by each petal is a cone surface consistent with the outer side surface of the pulling cone.

[0012] Furthermore, the tensioning mechanism also includes an anti-skid pad, which is adhered to the outer side of each petal.

[0013] Furthermore, a protruding stopper is provided on the inner surface of at least one of the petals, and a strip groove adapted to the stopper is axially opened on the outer surface of the taper, and the stopper is embedded in the strip groove. The connecting rod is a screw rod, and the nut at the end of the connecting rod can be rotatably connected to the countersunk hole opened in the middle of the plate. The rod section of the connecting rod is adapted to the taper through a threaded connection, thereby driving the taper to move axially along the rod section during rotation.

[0014] Furthermore, the plate is in a flat truncated cone-shaped structure as a whole, and its diameter gradually decreases from one side away from the taper to the other side along the thickness direction.

[0015] The utility model also provides a polysilicon reduction furnace, comprising a reduction furnace barrel and the above-mentioned auxiliary tooling for working the inner wall of the polysilicon reduction furnace, wherein the reduction furnace barrel is provided with a sight glass hole, and the auxiliary tooling for working the inner wall of the polysilicon reduction furnace can be detachably sealed in the sight glass hole.

[0016] The utility model provides an auxiliary tooling for inner wall operation of a polysilicon reduction furnace, which sets a plate serving as an inner wall operation sample piece to be a component whose cross-sectional structure is consistent with that of the sight glass hole, thereby blocking the sight glass hole opening through the sample piece.

[0017] This setting structure first fills the holes on the inner wall of the reduction furnace, which not only protects the safety of the sight glass itself during the operation, but also makes the inner wall of the reduction furnace appear as a continuous surface, eliminating singularities in the operation process (discontinuous or local positions that need to be skipped), and solving the problems of difficult and discontinuous operations on the inner wall of the reduction furnace; further, it enables the plate itself to undergo operation repair together with the inner wall of the reduction furnace, thereby serving as a carrier of the actual results of the inner wall operation and providing samples for the detection and evaluation of the actual results of the inner wall operation; further, the plate itself is located in the sight glass hole, and its outer surface is flush with the inner wall of the reduction furnace. Therefore, the inner wall surface that should be repaired will not be blocked due to the setting of the sample, and because the wall surfaces are flush, the degree of repair received by the sample and the inner wall is ensured to be consistent as much as possible, so that the sample is closer to the actual situation of the operation.

[0018] In addition, the tensioning mechanism is located inside the sight glass hole, and the plate is fixed by tensioning. Compared with fixing at the gap or other external mechanical connection fixing methods, firstly, this fixing method will not affect the inner wall operation, thereby ensuring the continuity of the operation. Secondly, since this fixing method is not set in the working space, it will not be affected by the inner wall operation, thus avoiding problems such as the plate detaching. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the position of the upper mirror hole of the polysilicon reduction furnace;

[0020] Figure 2 It is a structural schematic diagram of the auxiliary tooling for inner wall operation of the polysilicon reduction furnace in Example 1 of the utility model;

[0021] Figure 3 It is a three-dimensional structural schematic diagram of the auxiliary tooling for inner wall operation of the polysilicon reduction furnace in Example 1 of the utility model;

[0022] Figure 4 It is a side view structural schematic diagram of the auxiliary tooling for inner wall operation of the polysilicon reduction furnace in Example 1 of the utility model;

[0023] Figure 5 yes Figure 4 Schematic diagram of the AA section.

[0024] In the figure: 1, plate; 11, countersunk hole; 2, tensioning mechanism; 21, taper; 211, stopper; 22, sliding petal; 221, petal; 222, support rod; 23, connecting rod; 24, anti-slip pad. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the utility model to clearly and completely describe the technical solution in the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, but not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of the utility model.

[0026] In the description of the present invention, it should be noted that the terms "upper", "lower" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience and simplification of the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0027] In the description of the present invention, the terms "first", "second" and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0028] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connection", "setting", "installation", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0029] Example 1

[0030] like Figures 2 to 5 As shown, the auxiliary tooling for working on the inner wall of a polysilicon reduction furnace of this embodiment includes a plate 1 and a tensioning mechanism 2. The cross-sectional structure of the plate 1 is consistent with the cross-sectional structure of the sight glass hole of the polysilicon reduction furnace. The plate 1 is used as a sample for working on the inner wall of the polysilicon reduction furnace. It can be removably sealed in the opening of the sight glass hole of the polysilicon reduction furnace facing the inner wall, and the surface of the plate 1 facing the inside of the polysilicon reduction furnace is flush with the inner wall surface of the polysilicon reduction furnace. The end of the tensioning mechanism 2 is connected to the plate 1, and the tensioning mechanism 2 is arranged inside the sight glass hole to fix the plate 1 by tensioning and connecting the inner wall of the sight glass hole.

[0031] The auxiliary tooling for the inner wall operation of the polysilicon reduction furnace of this embodiment sets the plate 1 serving as the inner wall operation sample to a component with a cross-sectional structure consistent with the cross-sectional structure of the sight glass hole, thereby blocking the opening of the sight glass hole through the plate 1.

[0032] This setting structure first fills the holes on the inner wall of the reduction furnace, which not only protects the safety of the sight glass itself during the operation, but also makes the inner wall of the reduction furnace appear as a continuous surface, eliminating singularities in the operation process (discontinuous or local positions that need to be skipped), and solving the problems of difficult and discontinuous operations on the inner wall of the reduction furnace; further, it enables the plate 1 itself to undergo operation repair together with the inner wall of the reduction furnace, thereby serving as a carrier of the actual results of the inner wall operation and providing a sample for the detection and evaluation of the actual results of the inner wall operation; further, the plate 1 is located in the sight glass hole, and its outer surface is flush with the inner wall of the reduction furnace. Therefore, the inner wall surface that should be repaired will not be blocked due to the setting of the sample, and because the wall surfaces are flush, the degree of repair received by the sample and the inner wall is ensured to be consistent as much as possible, so that the sample is closer to the actual situation of the operation.

[0033] In addition, the tensioning mechanism 2 is located inside the sight glass hole, and the plate 1 is fixed by tensioning. Compared with fixing at the gap or other external mechanical connection fixing methods, firstly, this fixing method will not affect the inner wall operation, thereby ensuring the continuity of the operation. Secondly, since this fixing method is not set in the working space, it will not be affected by the inner wall operation, thus avoiding the problem of the plate 1 being detached.

[0034] Compared with the current simple structure of directly inserting a disc into the sight glass hole (which not only has a weak protective effect, but also cannot provide samples for detecting and evaluating the actual results of inner wall operations), the auxiliary tooling of this embodiment can essentially be used as a sight glass protection and sample carrier device for the inner wall operations of a polysilicon reduction furnace. It is suitable for scenarios in which the inner wall operations of reduction furnaces are performed in the Siemens method for producing polysilicon in the industry. It specifically involves a sight glass hole protection device for operations on the inner wall of a reduction furnace, and provides a solution for obtaining samples that characterize the actual results of inner wall operations.

[0035] In this embodiment, Figure 3 As shown, the tensioning mechanism 2 includes a pull cone 21, a sliding flap 22 and a connecting rod 23. The sliding flap 22 includes a plurality of petals 221. Each petal 221 is arranged around the connecting rod 23 and is spaced apart from each other in the same circumference with the connecting rod 23 as the axis. The plate 1 is connected to the end of the sliding flap 22. The pull cone 21 is movably connected to the connecting rod 23 along the axial direction of the connecting rod 23, and the outer surface is a curved surface that gradually expands from one side close to the plate 1 to the other side, so that the petals 221 are stretched open along the connecting rod 23 to be tightly connected to the inner wall of the sight glass hole, and the petals 221 are closed along the connecting rod 23 away from the plate 1 to be separated from the sight glass hole.

[0036] Since the outer surface of the taper 21 is a gradually expanding curved surface, the outer diameters at different positions are different. Therefore, during the axial movement along the connecting rod 23, the contact surface between the taper 21 and the inner surface of the sliding flap 22 will change. This change in the contact surface causes the taper 21 to open the sliding flap 22 at different positions, thereby adjusting the opening degree of the sliding flap 22 by the difference in the outer diameters at the opening. This setting method allows the tooling to be applicable to sight glass holes of different apertures, and is easy to adjust, and is suitable for installation and fixation in limited spaces such as sight glass holes.

[0037] Specifically, in this embodiment, each petal 221 is arranged to form a roughly cylindrical structure (in this embodiment, the inner wall of the cylindrical structure is a conical surface), the connecting rod 23 is located on the axis of the cylindrical structure, and the pull cone 21 realizes the opening and closing of the sliding petal 22 by gradually penetrating into or exiting the cylindrical structure.

[0038] In this embodiment, the sliding flap 22 also includes a plurality of support rods 222, each support rod 222 is parallel to the connecting rod 23, and the ends of each petal 221 are connected to the plate 1 through an independent support rod 222, one end of the support rod 222 is rotatably connected to the plate 1, and the other end is connected to the petal 221 through a threaded adapter. In this embodiment, the rotatable connection between the support rod 222 and the plate 1 can be achieved by adopting an embedded connection method (nut and countersunk hole, etc.), a slewing bearing connection method, etc., which are all common slewing connection structures and are not described in detail here. The petal 221 is provided with a threaded hole, and the support rod 222 rod section is provided with an external thread. The axial position of the sliding flap 22 can be adjusted by adjusting the screwing length of the thread. When in use, the petal 221 is first moved forward and backward (along the depth direction of the mirror hole) by adjusting the thread pair (tightening or loosening), and after determining the position of the petal 221, the device is placed in the mirror hole. When the depth of the mirror hole is deep, the bolts are loosened, the support rod 222 becomes longer, and the sliding flap 22 is driven to penetrate into the mirror and fixed; when the depth of the mirror is shallow, the bolts are tightened, the support rod 222 becomes shorter, and the sliding flap 22 is fixed at a shallower position. Since the axial position of the sliding flap 22 can be adjusted, the position of the sliding flap 22 in contact with the inner wall of the mirror hole after the sliding flap 22 is opened will also change accordingly, so that the tooling can be applied to mirror holes of different depths.

[0039] In this embodiment, each support rod 222 is made of elastic material, so that when the taper 21 moves away from the plate 1 along the connecting rod 23 , each petal 221 is closed by virtue of the elasticity of the support rod 222 .

[0040] In this embodiment, Figure 5As shown, the pull cone 21 is a truncated cone structure (or a conical structure), and the outer side surface is a conical surface that gradually expands from one side close to the plate 1 to the other side, and the inner side surface of each petal 221 is a curved surface, so that the inner side surface of the sliding petal 22 surrounded by each petal 221 is a conical surface consistent with the outer side surface of the pull cone 21. The sliding petal 22 and the pull cone 21 use a conical surface with matching structure as the contact surface, and the contact area is larger than that of other types of contact surfaces, so that more stable and reliable adjustment can be achieved.

[0041] In this embodiment, the tensioning mechanism 2 also includes an anti-skid pad 24, which is adhered to the outer surface of each petal 221. The anti-skid pad 24 can increase the friction between the sliding petal 22 and the inner wall of the mirror hole, and improve the stability of installation and fixation. In this embodiment, the end (external top) of the adjustable support (i.e., the support rod 222) is fixed with a split structure of the sliding petal 22, and the inner surface of the sliding petal 22 and the outer surface of the taper 21 can fit together. The forward and backward movement of the taper 21 can push the sliding petal 22 to open or retract, and realize the change of the outer diameter of the sliding petal 22, so that the anti-skid pad 24 can achieve close contact with the inner wall of the mirror hole and firmly fix it to the inner wall of the mirror hole. Since the outer diameter of the sliding petal 22 is variable, it can adapt to mirrors with different apertures.

[0042] In this embodiment, a protruding stopper 211 is provided on the inner surface of at least one petal 221, and a strip groove adapted to the stopper 211 is provided on the outer surface of the taper 21 in the axial direction, and the stopper 211 is embedded in the strip groove, thereby limiting the taper 21 so that it can only move axially but cannot rotate. The connecting rod 23 is a screw rod, and the nut at the end of the connecting rod 23 can be rotatably connected to the countersunk hole 11 opened in the middle of the plate 1. The rod section of the connecting rod 23 is connected to the taper 21 through threaded adaptation, thereby driving the taper 21 to move axially along the rod section during rotation. Among them, the nut at the end of the connecting rod 23 can be rotatably connected to the countersunk hole 11 opened in the middle of the plate 1. The rotation connection can be directly realized by directly limiting the countersunk hole 11, or further rotation connection can be realized by a slewing bearing, etc., which will not be described in detail here.

[0043] In this embodiment, the plate 1 is a flat truncated cone structure, and its diameter gradually decreases from the side away from the taper 21 to the other side along the thickness direction. This arrangement not only facilitates the plate 1 to be smoothly inserted into the opening of the sight glass hole, but also enables the axis position to be adjusted through the tapered surface, that is, during the process of inserting into the sight glass hole, the center is automatically aligned along the tapered surface direction.

[0044] Plate 1 is a customized sample (the outer dimensions can be determined according to the actual sight glass hole size, and the metal material can be determined according to the process and testing requirements), which can be fitted with the innermost hole of the sight glass hole to ensure the integrity of the working surface of the inner wall of the reduction furnace. The customized sample is a detachable structure. After being installed according to the required size and process requirements, when various process operations (inner wall grinding, spray repair, etc.) are carried out, the customized sample directly participates in the entire actual operation process as a part of the inner wall (blocked on the sight glass hole). After the operation is completed, the actual results of the process can be directly detected by testing the customized sample. At the same time, the reduction furnace barrel generally has more than one (usually five) sight glass holes. By installing different customized samples in different sight glass holes, more types of process verification results can be obtained at the same time, which can greatly improve the efficiency of process research.

[0045] Generally speaking, the tooling mainly includes a taper 21, a sliding flap 22, a support rod 222 (also called an adjustable support), an anti-skid pad 24 (i.e., an anti-skid compensation pad), a connecting rod 23 (also called a centering rod with a countersunk bolt on the top), a plate 1 (also called a customized template), and other parts. The above-mentioned partial structures cooperate with each other in a certain order to realize the filling of various sight glass holes inside the polysilicon reduction furnace barrel (to ensure the continuous progress of processes such as grinding, spraying and repair of the polysilicon reduction furnace barrel), and at the same time provide measurement and monitoring samples (customized templates) under real operating processes, so as to provide real and reliable experimental data for process effect detection, evaluation, optimization and improvement.

[0046] Specifically, the taper 21 is a metal with a conical shape (including but not limited to 304 stainless steel, determined according to actual installation and process requirements, the shape can also be spherical, elliptical, etc., including but not limited to conical, but the outer surface must be able to fit with the inner surface of the sliding flap 22 so as to push the sliding flap 22 to open or retract); the taper 21 is located on the inner side of the sliding flap 22, and the outer surface of the taper 21 and the inner surface of the sliding flap 22 can fit tightly, which can push the sliding flap 22 to open or retract; the taper 21 and the connecting rod 23 are threadedly connected, and the taper 21 is driven to move forward and backward by adjusting (tightening or loosening) the countersunk screw on the connecting rod 23.

[0047] The sliding petal 22 is a metal structure in a split petal shape (the number of split petals 221 is greater than 2, but not limited to 2), and the petals 221 are distributed in intervals within the circumference (or arranged, the layout intervals are usually set at equal intervals, and can also be unequal intervals, but they need to be on the same circumference). The inner surface of each petal 221 structure and the outer surface of the taper 21 can fit tightly (for example, the outer surface of the taper 21 is a conical surface, and the inner surface of the petal 221 is a part of the conical surface. When the two surfaces fit together, the curves of the fitting parts are consistent), so as to achieve the change of the outer diameter of the sliding petal 22 structure by moving the taper 21 structure.

[0048] The adjustable support (i.e., support rod 222) is composed of a plurality of independent elastic connecting rods (metal or non-metal elastic materials), the outermost side of each independent connecting rod is mechanically connected to each independent petal of the sliding flap, and each independent petal is connected to an independent adjustable support connecting rod. The innermost side of each independent connecting rod is uniformly connected to the customized template (plate 1) by bolts, that is, all adjustable supports are connected to the customized template by respective adjustable bolts (which can be tightened or loosened), and the adjusting bolts of each connecting rod of the adjustable support can be set as countersunk bolts to ensure that the outer surface is always flush with the outer surface of the customized template, and to ensure the flatness and continuity of the outer surface of the customized template. By adjusting the adjustable bolts of each connecting rod of the adjustable support (the top end is located on the outer surface of the customized template), the petal structure connected at the end can be driven to move forward and backward (in the depth direction of the sight glass hole), thereby adjusting the position of the sliding flap inside the sight glass hole to adapt to the installation requirements of sight glass holes of different depths.

[0049] The anti-skid compensation pad (anti-skid pad 24) is installed and fixed on the outermost side of each petal 221 of the sliding flap, and is usually not limited to rubber and other materials with certain plasticity and elasticity. Its structure is a petal design, and its external dimensions are consistent with the petal structures of the corresponding fixed sliding flaps. When the pull cone 21 pushes the sliding flap 22 and drives the anti-skid compensation pad to open and contact the inner wall of the sight glass hole (when the inner wall of the sight glass hole is fixed), the plasticity and elasticity of the anti-skid compensation pad can adapt to different shapes of the inner wall of the sight glass hole (different reduction furnace models and different design and production manufacturers, the internal structure of each sight glass hole will be different in size, surface curvature, etc.), and increase the contact friction, and complete the fixation of the tooling structure faster and more firmly.

[0050] The centering connecting rod (connecting rod 23) is a mechanical structure that can adjust the telescopic degree. The centering connecting rod is threadedly connected to the pull taper 21. The innermost end of the centering connecting rod is mechanically connected to the customized template through a countersunk bolt (fixed on the customized template). By loosening or tightening the countersunk bolt, the pull taper 21 connected to the outermost end can be driven to move forward and backward. The outer surface of the countersunk bolt at the innermost end of the centering connecting rod is flush with the customized template, thereby ensuring the flatness and continuity of the outer surface of the customized template.

[0051] The customized sample (plate 1) is an independent, detachable sample (or sample, including but not limited to metal, polymer material, special ceramics, etc.) with customizable size and material. There are fixing holes (countersunk holes 11 to ensure the flatness of the customized sample surface) on the sample. The fixing holes cooperate with the centering connecting rod and the fixing mechanism of the adjustable support, and can be installed and fixed to the innermost side of the tooling structure. The customized sample has a transitional chamfer structure (its structure is determined according to the inner structure (radian) of the installation mirror hole). After installation, the customized sample is flush with the inner wall of the reduction furnace (to ensure the continuity of the inner wall surface of the furnace). The sample determines its external dimensions, material, thickness, number of samples (including but not limited to the above parameters), etc. according to the actual process operation requirements and process verification test requirements.

[0052] During the test, plate 1 is used as a sample and the following tests can be performed:

[0053] 1. The coating thickness and porosity test was conducted using a tungsten filament scanning electron microscope. The qualified standard was that the thickness was distributed between 156 μm and 243 μm, the porosity range was distributed between 0.820% and 3.937%, and the main structure was FCC solid solution phase.

[0054] 2. Vickers microhardness test, using Vickers microhardness tester, the qualified standard is that the Vickers hardness range is between 363.5HV0.3 and 487.6HV0.3.

[0055] 3. Infrared reflectivity test, using a spectrophotometer, the qualified standard is that the infrared reflectivity range is between 57.1% and 84.3%.

[0056] 4. Electrochemical corrosion performance test, using an electrochemical workstation, the qualified standard is that in -3.5% NaCl solution, the corrosion current density range is 4.049E-7 ~ 2.679E-6.

[0057] After the installation of this tooling device is completed, the customized sample is located at the innermost side of the sight glass hole of the reduction furnace (i.e., the opening facing the reduction furnace), and is flush with the surface of the inner wall of the reduction furnace, which solves the problem of discontinuous curved surface of the inner wall of the reduction furnace, so that each process operation can be carried out uninterruptedly (no need to avoid multiple sight glass holes during operation) and greatly reduces the difficulty of process control (process control is implemented according to a unified and complete curved surface operation, and there is no singularity avoidance problem caused by the sight glass hole). At the same time, the customized sample can be customized according to the process operation requirements and process optimization and improvement requirements. The customized sample will participate in the entire process. After the process is completed, it can be easily disassembled to provide a real process operation result sample, solving the problem that the process results of the inner wall repair operation of the reduction furnace (super-large workpiece) are difficult to verify and measure. The reduction furnace has multiple sight glass holes. Different customized samples are installed in different sight glass holes, and multiple process results can be verified and tested at the same time. Installing the same customized sample can provide multiple test samples and provide more real monitoring data.

[0058] The detachable and customizable customized template in the utility model device not only solves the pain points and difficulties in process control implementation and operation, but also provides samples for detection and verification of real process operation results, solving the problems of difficult detection and inability to truly detect process experimental results. It has high innovation value and significance for promotion and application.

[0059] The present embodiment can adapt to different sight glass hole depths by adjusting the fixed support, relies on a special sliding flap structure and the coordinated adjustment of the pull cone, utilizes the plastic anti-skid pad 24 to adapt to different inner surfaces of the sight glass hole, and realizes firm fixation in sight glass holes of different structures. The original detachable and customizable sample carrier design installed on the innermost side forms a continuous working plane on the inner wall of the reduction furnace barrel, thereby ensuring the continuity of the repair work of the inner wall of the reduction furnace, improving the efficiency of the repair work, avoiding damage to the repair tools and the sight glass structure, and providing real samples of the inner wall operation, solving the problems of difficult and discontinuous operation of the inner wall of the reduction furnace, avoiding singularities (discontinuous or local positions that need to be skipped) in the operation process, and utilizing the customized samples in the device to characterize the real results of the inner wall operation, providing a reliable basis for operation process verification and optimization.

[0060] This tooling device combines the structural characteristics of the sight glass hole in the structure of the polysilicon reduction furnace, and designs and implements a split-flap sliding structure and a matching taper structure for different furnace types and different sight glass structures. It can adaptively adjust the positioning and centering, and can be quickly adjusted and installed to achieve safety protection for sight glasses of various specifications. It is supplemented by unique structures such as centering tapers and fixed supports that can be flexibly adjusted. In addition, a customized sample that is easy to install and disassemble is innovatively designed on the innermost side of the device to avoid singularities (discontinuous or local positions that need to be skipped) during the operation process. While solving the problems of difficulty in inner wall operation, damage to equipment, and discontinuous operation caused by the sight glass hole, it also provides a real inner wall operation result verification test sample, characterizing the real result of the inner wall operation, solving the problem that the process cannot be detected and verified, and providing a reliable basis for operation process verification and optimization. The original design of this tooling device that fits the structure and needs of the reduction furnace itself perfectly solves many problems in the inner wall operation of the polysilicon reduction furnace, and has high innovation and great promotion and application value.

[0061] Example 2

[0062] The polysilicon reduction furnace of this embodiment includes a reduction furnace barrel and the auxiliary tooling for working the inner wall of the polysilicon reduction furnace in Example 1. A sight glass hole is provided on the reduction furnace barrel, and the auxiliary tooling for working the inner wall of the polysilicon reduction furnace can be detachably sealed in the sight glass hole.

[0063] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A polysilicon reduction furnace inner wall operation auxiliary tooling, characterized in that: It comprises a plate (1) and a tensioning mechanism (2), wherein the cross-sectional structure of the plate (1) is consistent with the cross-sectional structure of the sight glass hole of the polycrystalline silicon reduction furnace. The plate (1) is used as a sample for the inner wall of the polysilicon reduction furnace, and can be detachably sealed at the opening of the sight glass hole of the polysilicon reduction furnace facing the inner wall, and the surface of the plate (1) facing the inside of the polysilicon reduction furnace is flush with the inner wall surface of the polysilicon reduction furnace. The end of the tensioning mechanism (2) is connected to the plate (1), and the tensioning mechanism (2) is arranged inside the sight glass hole so as to fix the plate (1) by tensioning and connecting the inner wall of the sight glass hole.

2. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 1, characterized in that: The tensioning mechanism (2) comprises a pull cone (21), a sliding flap (22) and a connecting rod (23). The sliding flap (22) includes a plurality of petals (221), each petal (221) is arranged around the connecting rod (23), and is spaced apart from each other and distributed within the same circumference with the connecting rod (23) as the axis. The plate (1) is connected to the end of the sliding flap (22). The taper (21) is movably connected to the connecting rod (23) along the axial direction of the connecting rod (23), and the outer surface is a curved surface that gradually expands outward from one side close to the plate (1) to the other side, so that when the connecting rod (23) approaches the plate (1), the petals (221) are spread open and closely connected to the inner wall of the sight glass hole, and when the connecting rod (23) moves away from the plate (1), the petals (221) are closed and separated from the sight glass hole.

3. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 2, characterized in that: The sliding flap (22) further comprises a plurality of support rods (222), each support rod (222) being parallel to the connecting rod (23). The ends of each petal (221) are connected to the plate (1) via independent support rods (222). One end of the support rod (222) is rotatably connected to the plate (1), and the other end is connected to the petal (221) through a threaded adapter.

4. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 3, characterized in that: Each of the support rods (222) is made of elastic material, so that when the taper (21) moves away from the plate (1) along the connecting rod (23), each of the petals (221) can be closed by virtue of the elasticity of the support rods (222).

5. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 2, characterized in that: The pull cone (21) is in a truncated cone structure, and the outer side surface is a conical surface that gradually expands outward from one side close to the plate (1) to the other side. The inner side surface of each of the petals (221) is a curved surface, so that the inner side surface of the sliding petal (22) formed by each of the petals (221) is a conical surface consistent with the outer side surface of the pull cone (21).

6. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 2, characterized in that: The tensioning mechanism (2) further comprises an anti-skid pad (24), wherein the anti-skid pad (24) is adhered to the outer side surface of each petal (221).

7. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 2, characterized in that: A protruding stopper (211) is provided on the inner surface of at least one of the petals (221), and a strip groove matching the stopper (211) is axially provided on the outer surface of the taper (21), and the stopper (211) is embedded in the strip groove. The connecting rod (23) is a screw rod, and the nut at the end of the connecting rod (23) can be rotatably connected to the countersunk hole (11) opened in the middle of the plate (1). The rod section of the connecting rod (23) is connected to the taper (21) through threaded adaption, so that the taper (21) is driven to move axially along the rod section during rotation.

8. The auxiliary tooling for inner wall operation of polysilicon reduction furnace according to claim 1, characterized in that: The plate (1) is in the form of a flat truncated cone as a whole, and its diameter gradually decreases from one side away from the taper (21) to the other side along the thickness direction.

9. A polysilicon reduction furnace, characterized in that: It comprises a reduction furnace barrel and an auxiliary tooling for inner wall operation of a polysilicon reduction furnace according to any one of claims 1 to 8, The reduction furnace barrel is provided with a sight glass hole. The auxiliary tooling for working on the inner wall of the polysilicon reduction furnace can be detachably sealed in the sight glass hole.

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