Boat pushing paddle adjusting mechanism and diffusion furnace equipment

Abstract

The utility model discloses a boat-pushing paddle adjusting mechanism and diffusion furnace equipment adopting the boat-pushing paddle adjusting mechanism, and the boat-pushing paddle adjusting mechanism comprises a base, a horizontal movable seat movably arranged on the base, a horizontal driving mechanism for driving the horizontal movable seat to do horizontal reciprocating motion, and a lifting driving mechanism for driving the base to lift, the horizontal movable seat is rotatably provided with a swing seat through a first horizontal rotating shaft, the swing seat is movably provided with boat pushing paddles, an adjusting device is arranged between each boat pushing paddle and the swing seat, and the adjusting devices can drive the boat pushing paddles to rotate around the length directions of the boat pushing paddles; and / or the adjusting device can drive the boat pushing paddle to lift up and down relative to the swinging seat. By adopting the structure, a user can keep the upper surface of the boat pushing paddle horizontal and support the quartz boat through the adjusting device.

Description

Technical Field

[0001] The utility model relates to the field of silicon wafer production, in particular to a boat-paddle adjusting mechanism and diffusion furnace equipment using the boat-paddle adjusting mechanism. Background Art

[0002] With the continuous development of the photovoltaic industry, the battery cells are also moving towards larger sizes and thinner sheets. At the same time, with the continuous increase in labor costs, reducing costs and increasing efficiency is also an urgent problem to be solved in the industry. Therefore, under the premise of ensuring efficiency, increasing the loading capacity of the equipment as much as possible and reducing the labor debugging and maintenance costs are also problems faced by the industry now.

[0003] As the size of silicon wafers continues to increase, the overall weight of the carriers that carry silicon wafers is also increasing. Especially in the diffusion process, the industry currently uses push boats as carriers to transport the carrier quartz boats filled with silicon wafers to be processed into the diffusion furnace for processing. After the process is completed, the silicon wafer carrier quartz boat is sent out.

[0004] The weight and size of the existing carriers for carrying silicon wafers are increasing. When the carrier is placed on the push boat paddle, the front end of the push boat paddle sags and deforms accordingly. However, since the push boat paddle needs to transport the carrier carrying silicon wafers into the furnace tube of the diffusion furnace for processing, it is necessary to ensure that the center line of the push boat paddle is parallel to the center of the furnace tube of the diffusion furnace during the transportation process.

[0005] At present, the main practice of enterprises is to first adjust the front end of the boat pusher to a fixed angle, and then place the carrier quartz boat filled with silicon wafers to be processed on the boat pusher. At this time, the front end of the boat pusher droops and is parallel to the center of the furnace tube of the diffusion furnace. Then, the boat pusher can smoothly transport the carrier quartz boat filled with silicon wafers to be processed into the furnace tube of the diffusion furnace. After the boat pusher unloads the carrier quartz boat, the front end of the boat pusher recovers its deformation and tilts up. However, in the process of repeatedly carrying and transporting the quartz boat, the quartz boat repeatedly squeezes the boat pusher and may cause the front end of the boat pusher to deflect and droop downward. Therefore, after the enterprise uses the boat pusher to push the quartz boat for a period of time, the workers need to adjust the front end of the boat pusher to a fixed angle again, which is time-consuming and labor-intensive.

[0006] In addition, when workers adjust the boat pusher paddle, they can only adjust the front end of the boat pusher paddle to tilt upward or drop downward to a horizontal state, but cannot adjust the boat pusher paddle to rotate around the length direction. If the boat pusher paddle is deflected during the installation process, the upper surface of the boat pusher paddle is in an inclined state and cannot be close to the lower surface of the vehicle. Only a portion of the upper surface of the boat pusher paddle is in contact with the vehicle, which greatly increases the pressure at the position where the boat pusher paddle supports the vehicle. The boat pusher paddle is easily damaged, and the vehicle is also easy to slide from one side due to uneven placement, posing a complete hidden danger. Utility Model Content

[0007] The utility model aims to solve one of the problems of the prior art to at least a certain extent. To this end, the utility model proposes a boat pushing paddle adjustment mechanism, which can drive the boat pushing paddle to rotate around the length direction of the boat pushing paddle and keep the upper end surface of the boat pushing paddle horizontal.

[0008] According to some embodiments of the utility model, a boat pusher paddle adjustment mechanism comprises: a base, the base having a horizontal guide rail arranged in a horizontal direction, the horizontal guide rail being movably mounted with a horizontal movable seat, the base being provided with a horizontal driving mechanism transmission-connected with the horizontal movable seat, the horizontal driving mechanism being capable of driving the horizontal movable seat to reciprocate along the horizontal guide rail; a swing seat, the swing seat being movably mounted with the horizontal movable seat via a first horizontal rotation axis; at least one boat pusher paddle movably mounted on the swing seat; a swing driving mechanism being arranged on the horizontal movable seat, the swing driving mechanism being located on one side of the first horizontal rotation axis, the swing driving mechanism being arranged on the horizontal movable seat, the swing driving mechanism being located on one side of the first horizontal rotation axis, the swing driving mechanism being arranged on the horizontal movable seat, the swing driving mechanism being arranged on the The swing drive mechanism can drive the swing seat to drive all the boat pushing paddles to swing upward around the first horizontal rotation axis to rise or swing downward to fall; the lifting drive mechanism, the lifting drive mechanism is connected to the base in a transmission manner, the lifting drive mechanism can drive the base to drive the swing seat and all the boat pushing paddles to move upward to rise or move downward to fall; wherein, an adjustment device is arranged between each of the boat pushing paddles and the swing seat, the adjustment device can drive the boat pushing paddle to rotate forward or reversely around the length direction of the boat pushing paddle, and / or the adjustment device can drive the boat pushing paddle to rise and fall in the up and down directions relative to the swing seat.

[0009] A push boat paddle adjustment mechanism according to some embodiments of the utility model has the following beneficial effects:

[0010] In the present embodiment, an adjustment device is provided between each boat pushing paddle and the swing seat. When the upper surface of the boat pushing paddle tilts to the left or right, the worker can drive the boat pushing paddle to rotate forward or reversely around the length direction of the boat pushing paddle through the adjustment device, so that the upper surface of the boat pushing paddle remains horizontal without tilting to the left or right. Therefore, when the boat pushing paddle supports the quartz boat, the upper surface of the boat pushing paddle can better fit and support the bottom of the quartz boat, avoiding the situation where only part of the upper surface of the boat pushing paddle supports the quartz boat, resulting in excessive force and damage to a local position of the boat pushing paddle, which helps to protect the boat pushing paddle and allows the quartz boat to be placed on the boat pushing paddle more stably without tilting to the left or right. The left or right side of the boat paddle is tilted to facilitate the boat pusher to support and transport the quartz boat into the diffusion furnace; in addition, by arranging all the boat pusher paddles on a swing seat, the swing seat is rotatably installed on the base, and the base is provided with a swing drive mechanism that is transmission-connected to the swing seat. The swing drive mechanism can drive the swing seat to drive all the boat pusher paddles to swing upward or downward around the first horizontal rotation axis, thereby adjusting the horizontal height of the front end of the boat pusher paddle, so that the boat pusher paddle can maintain a horizontal state to smoothly transport the quartz boat filled with silicon wafers to be processed into the diffusion furnace, and the boat pusher can maintain a horizontal state to exit the diffusion furnace after unloading the quartz boat, thereby meeting the production needs of the enterprise.

[0011] In some embodiments, it also includes a fixed mounting plate, which is fixedly mounted on the horizontal movable seat, the first horizontal rotation axis is fixedly connected to a side of the fixed mounting plate away from the horizontal movable seat, and the swing seat is movably sleeved on the outer periphery of the first horizontal rotation axis.

[0012] In some embodiments, the swing drive mechanism is disposed on the fixed mounting plate, and the swing drive mechanism includes a first motor, a first drive shaft and an eccentric structure. The first motor is fixedly mounted on the fixed mounting plate, and the first motor is located on the side of the first horizontal rotation axis away from the front end of the boat pusher paddle. The first drive shaft is transmission-connected to the output shaft of the first motor. The eccentric structure is disposed on the first drive shaft, and the eccentric structure abuts against the rear end of the swing seat, wherein the first motor can drive the first drive shaft to drive the eccentric structure to rotate forward or reverse, so that the eccentric structure drives the swing seat to drive all the boat pusher paddles to swing upward and lift or swing downward and land around the first horizontal rotation axis.

[0013] In some embodiments, the eccentric structure includes an eccentric bearing or an eccentric cam, which is sleeved on the outer circumference of the first drive shaft, and the eccentric bearing or the eccentric cam is abutted against the rear end of the swing seat. When the first motor drives the first drive shaft to rotate forward or reverse, the first drive shaft can drive the eccentric bearing or the eccentric cam to rotate forward or reverse relative to the swing seat.

[0014] In some embodiments, a driven wheel is movably mounted on the rear end of the swing seat, and the driven wheel abuts against the eccentric bearing, or the driven wheel abuts against the eccentric cam.

[0015] In some embodiments, the adjustment device includes at least one group of adjustment components, each group of adjustment components includes a support bracket, and a left adjustment bolt and a right adjustment bolt are correspondingly provided on both sides of the support bracket. The rear end of the boat pusher is fixedly mounted on the support bracket, and the boat pusher is located between the left adjustment bolt and the right adjustment bolt, the left adjustment bolt is threadedly connected or abutted with the swing seat, and the right adjustment bolt is threadedly connected or abutted with the swing seat.

[0016] In some embodiments, the number of the adjustment components is two groups, and along the length direction of the push boat paddle, the two groups of the adjustment components are arranged at intervals at the rear end of the push boat paddle.

[0017] In some embodiments, the lifting drive mechanism includes a first base, on which a first screw rod arranged in the up-down direction is rotatably installed, a first nut member is threadedly connected to the outer periphery of the first screw rod, the first nut member is fixedly connected to the base, and the first base is provided with a second motor, which is transmission-connected to the first screw rod; wherein, the second motor can drive the first screw rod to rotate forward or reversely, the first screw rod cooperates with the first nut member and drives the base to drive the swing seat and all the boat push paddles to move upward for lifting or downward for landing.

[0018] In some embodiments, the horizontal driving mechanism includes a third motor fixedly mounted on the base, an output end of the third motor is connected to a synchronous belt mechanism, and a synchronous belt of the synchronous belt mechanism is drivingly connected to the horizontal movable seat.

[0019] The diffusion furnace equipment according to some embodiments of the present invention includes a diffusion furnace body, and the diffusion furnace body is provided with the above-mentioned push boat paddle adjustment mechanism.

[0020] The diffusion furnace equipment according to some embodiments of the utility model has the following beneficial effects:

[0021] The diffusion furnace equipment of this embodiment adopts the above-mentioned push boat paddle adjustment mechanism, so that the push boat paddle can maintain a horizontal state to smoothly transport the quartz boat filled with silicon wafers to be processed into the diffusion furnace, and the push boat paddle can also maintain a horizontal state when withdrawing from the diffusion furnace after unloading the quartz boat, effectively preventing the front end of the push boat paddle from contacting and scratching the inner wall of the diffusion furnace or the quartz boat, thereby protecting the diffusion furnace and the quartz boat. In addition, the diffusion furnace equipment can adjust and keep the left and right sides of the upper surface of the push boat paddle horizontal through the adjustment device, so that the push boat paddle can better support the quartz boat to meet the needs of the enterprise. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a structural schematic diagram of a push boat paddle adjustment mechanism of some embodiments of the utility model;

[0023] Figure 2 yes Figure 1 A schematic structural diagram of a push boat paddle adjustment mechanism from another angle is shown;

[0024] Figure 3 yes Figure 1 A schematic diagram of the structure of a boat pusher paddle adjustment mechanism after removing the base, the horizontal drive mechanism and the lifting drive mechanism;

[0025] Figure 4 yes Figure 1 A schematic structural diagram of a boat pusher paddle adjustment mechanism from another angle after removing the base, the horizontal drive mechanism and the lifting drive mechanism;

[0026] Figure 5 yes Figure 1 A schematic diagram of the assembly structure of a swing seat and a boat pushing paddle in a boat pushing paddle adjustment mechanism is shown;

[0027] Figure 6 yes Figure 1 A schematic diagram of the assembly structure of a swing seat and a boat pushing paddle at another angle in a boat pushing paddle adjustment mechanism is shown. DETAILED DESCRIPTION

[0028] Embodiments of the present embodiment are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present embodiment, and should not be construed as limiting the present embodiment.

[0029] The drawings used in this embodiment are schematic and principle and are only used to facilitate the description of this embodiment and simplify the description. Therefore, they should not be understood as limiting this embodiment.

[0030] In the description of this embodiment, "several" means one or more, "more" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In the description of this embodiment, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this embodiment based on the specific content of the technical solution.

[0032] Figures 1 to 6 It is a schematic diagram of some implementation modes of a push boat paddle adjustment mechanism of the utility model.

[0033] Reference Figures 1 to 6 ( Figure 5 The direction of the arc arrow in the middle indicates the direction of the propeller's rotation) and is mainly referred to Figures 3 to 6According to some embodiments of the present invention, a boat pusher paddle adjustment mechanism is sometimes referred to as a "boat pusher paddle adjustment mechanism" for ease of description. The boat pusher paddle adjustment mechanism includes a base 100, a swing seat 200, at least one boat pusher paddle 300, a swing drive mechanism and a lifting drive mechanism. In this embodiment, the base 100 is roughly in the shape of a long strip. The base 100 has a horizontal guide rail 110 arranged in the horizontal direction. The horizontal guide rail 110 is movably mounted with a horizontal movable seat 120. The horizontal movable seat 120 can move back and forth along the horizontal guide rail 110. The base 100 is also equipped with a horizontal movable seat 120. The movable seat 120 is connected to a horizontal driving mechanism, which can drive the horizontal movable seat 120 to reciprocate along the horizontal guide rail 110. The swing seat 200 is rotatably mounted on the horizontal movable seat 120. Specifically, a first horizontal rotation axis 210 arranged in the horizontal direction is provided on one side of the horizontal movable seat 120. A rotation hole matching the first horizontal rotation axis 210 is provided in the middle of the swing seat 200. The first horizontal rotation axis 210 is rotatably mounted in the rotation hole. The swing seat 200 can rotate forward or reversely around the first horizontal rotation axis 210 relative to the horizontal movable seat 120. In this embodiment, there are two boat pushing paddles 300. The two boat pushing paddles 300 are movably mounted on the swing seat 200 in parallel with each other. The end of the boat pushing paddle 300 close to the swing seat 200 is the rear end of the boat pushing paddle 300, and the end of the boat pushing paddle 300 away from the swing seat 200 is the front end of the boat pushing paddle 300. The swing drive mechanism is arranged on the horizontal movable seat 120, and the swing drive mechanism is located on one side of the first horizontal rotation axis 210. The swing drive mechanism can drive the swing seat 200 to drive all the boat pushing paddles 300 to swing upward or swing downward around the first horizontal rotation axis 210, and then adjust the front end of the boat pushing paddle 300 to tilt upward or adjust the front end of the boat pushing paddle 300 to rotate to a horizontal state. The lifting drive mechanism is connected to the base 100 by transmission, and the lifting drive mechanism can be installed on the ground or a diffusion furnace or other support seat. The lifting drive mechanism can drive the base 100 to drive the swing seat 200 and all the boat pushing paddles 300 to move upward to rise or move downward to fall. In this embodiment, an adjustment device is arranged between each boat pushing paddle 300 and the swing seat 200. The adjustment device can drive the boat pushing paddle 300 to rotate forward or reversely around the length direction of the boat pushing paddle 300, and / or the adjustment device can drive the boat pushing paddle 300 to rise and fall relative to the swing seat 200 along the up and down direction.

[0034] The push boat paddle adjustment mechanism of the present embodiment is achieved by movably mounting all the push boat paddles 300 on the swing seat 200, and the swing seat 200 is rotatably mounted on the base 100. The base 100 is provided with a swing driving mechanism that is transmission-connected with the swing seat 200. When the push boat paddle 300 needs to load the quartz boat full of silicon wafers to be processed and transport it into the diffusion furnace, the swing driving mechanism can drive the swing seat 200 to drive the front ends of all the push boat paddles 300 to tilt upward at a certain angle. When the quartz boat full of silicon wafers to be processed is placed on the push boat paddle 300, the push boat paddle 300 is forced to droop downward to a horizontal state. The horizontal driving mechanism drives the horizontal movable seat 120 to drive the swing seat 200, all the push boat paddles 300 and the quartz boat full of silicon wafers to be processed to move horizontally into the diffusion furnace. When the quartz boat full of silicon wafers to be processed is placed on the push boat paddle 300, the push boat paddle 300 is forced to droop downward to a horizontal state. The horizontal driving mechanism drives the horizontal movable seat 120 to drive the swing seat 200, all the push boat paddles 300 and the quartz boat full of silicon wafers to be processed to move horizontally into the diffusion furnace. After the boat reaches the set position, the lifting drive mechanism drives the base 100 to drive the horizontal movable seat 120, the swing seat 200, all the boat pushing paddles 300 and the quartz boat full of silicon wafers to be processed to move downward and land synchronously, so that the quartz boat full of silicon wafers to be processed is placed at the set position of the diffusion furnace, and the swing drive mechanism drives the swing seat 200 again to drive the front ends of all the boat pushing paddles 300 to swing downward and make the boat pushing paddles 300 in a horizontal state. At this time, the horizontal drive mechanism drives the horizontal movable seat 120 to drive the swing seat 200 and all the boat pushing paddles 300 to move out from the inside of the diffusion furnace in a horizontal direction, effectively preventing the front ends of the boat pushing paddles 300 from contacting and scratching the inner wall of the diffusion furnace or the quartz boat, thereby protecting the diffusion furnace and the quartz boat; at the same time, an adjustment device is provided between each boat pushing paddle 300 and the swing seat 200, such as Figure 5 and Figure 6As shown, when the upper surface of the boat pushing paddle 300 tilts to the left or right, the worker can drive the boat pushing paddle 300 to rotate forward or reversely around the length direction of the boat pushing paddle 300 through the adjustment device, so that the upper surface of the boat pushing paddle 300 remains horizontal and does not tilt to the left or right. Therefore, when the boat pushing paddle 300 supports the quartz boat, the upper surface of the boat pushing paddle 300 can better fit and support the bottom of the quartz boat, avoiding the situation where only one side of the upper surface of the boat pushing paddle 300 supports the quartz boat, causing excessive force and damage to a local position of the boat pushing paddle 300, which helps to protect the boat pushing paddle 300 and allows the quartz boat to be placed on the boat pushing paddle 300 more stably without tilting towards the boat pushing paddle 300. When the upper surfaces of the two boat pushing paddles 300 are tilted to the left or right side, and the upper surfaces of the two boat pushing paddles 300 are not parallel, the corresponding boat pushing paddles 300 can be driven by the adjusting device to rotate around the length direction of the boat pushing paddles 300, so that the upper surfaces of the two boat pushing paddles 300 are parallel to each other; or when the upper surfaces of the two boat pushing paddles 300 are inconsistent in height, the corresponding boat pushing paddles 300 can be driven by the adjusting device to rise and fall relative to the swing seat 200 along the up and down direction, so that the upper surfaces of the two boat pushing paddles 300 maintain the same horizontal height. At this time, the upper surfaces of the two boat pushing paddles 300 can constitute a supporting plane that jointly supports the quartz boat, so that the boat pushing paddle adjusting mechanism can better load the quartz boat.

[0035] In the above embodiment, the number of the boat pushing paddles 300 is two, while in certain embodiments of the present invention, the number of the boat pushing paddles 300 may be one, three or more, depending on actual needs, and is not limited to two.

[0036] Reference Figures 1 to 4 In order to facilitate the production and assembly of the boat pushing paddle adjustment mechanism, in some embodiments of the utility model, the boat pushing paddle adjustment mechanism also includes a fixed mounting plate 201, a first horizontal rotation axis 210 is fixedly connected to a side of the fixed mounting plate 201 away from the horizontal movable seat 120, and the swing seat 200 is movably sleeved on the outer periphery of the first horizontal rotation axis 210. At this time, the fixed mounting plate 201, the first horizontal rotation axis 210 and the swing seat 200 constitute a parts module. During installation, it is only necessary to fix the fixed mounting plate 201 on the horizontal movable seat 120, thereby facilitating the production and assembly of the boat pushing paddle adjustment mechanism.

[0037] It should be noted that in the above embodiments, the fixed mounting plate 201 and the horizontal movable seat 120 are two independent parts. In certain embodiments of the present invention, the fixed mounting plate 201 and the horizontal movable seat 120 can be an integrated structure, or the fixed mounting plate 201 is a side wall of the horizontal movable seat 120, which can be determined according to actual needs.

[0038] Reference Figure 3 and Figure 4In order to simplify the structure of the swing drive mechanism, in some embodiments of the utility model, the swing drive mechanism is arranged on the fixed mounting plate 201, and the swing drive mechanism includes a first motor 310, a first drive shaft 320 and an eccentric structure. The first motor 310 is fixedly installed on the fixed mounting plate 201, and the first motor 310 is located on the side of the first horizontal rotation axis 210 away from the front end of the boat pusher 300, the first drive shaft 320 is transmission-connected with the output shaft of the first motor 310, the eccentric structure is arranged on the first drive shaft 320, and the eccentric structure abuts against the rear end of the swing seat 200, wherein the first motor 310 can drive the first drive shaft 320 to drive the eccentric structure to rotate forward or reverse, so that the eccentric structure drives the swing seat 200 to drive all the boat pushers 300 to swing upward or swing downward around the first horizontal rotation axis 210 to fall. Specifically, the eccentric structure includes an eccentric bearing 330 or an eccentric cam, which is sleeved on the outer periphery of the first drive shaft 320, and the eccentric bearing 330 or the eccentric cam is in contact with the rear end of the swing seat 200. When the first motor 310 drives the first drive shaft 320 to rotate forward or reversely, the first drive shaft 320 can drive the eccentric bearing 330 or the eccentric cam to rotate forward or reversely relative to the swing seat 200. At this time, the eccentric bearing 330 or the eccentric cam can apply force and drive the swing seat 200 to drive the boat pusher 300 to swing upward around the first horizontal rotation axis 210, or the eccentric bearing 330 or the eccentric cam can remove the pressure applied to the driving swing seat 200, and at this time the swing seat 200 and the boat pusher 300 rotate downward around the first horizontal rotation axis 210 and make the front end of the boat pusher 300 in a horizontal position.

[0039] In certain embodiments of the present invention, the first motor 310 is a servo motor. Therefore, the control circuit can control the rotation of the first motor 310 and accurately drive the swing seat 200 to drive all the boat paddles 300 to swing upward or downward around the first horizontal rotation axis 210 to land.

[0040] In certain embodiments of the utility model, the swing drive mechanism includes a first drive shaft 320 and an eccentric structure, wherein the first drive shaft 320 is rotatably mounted on the fixed mounting plate 201, and the first drive shaft 320 is located on a side of the first horizontal rotation axis 210 away from the front end of the boat pusher 300, and the eccentric structure is arranged on the first drive shaft 320, and the eccentric structure is in contact with the rear end of the swing seat 200, wherein the first drive shaft 320 can drive the first drive shaft 320 to drive the eccentric structure to rotate forward or reversely, so that the eccentric structure drives the swing seat 200 to drive all the boat pushers 300 to swing upward and tilt or swing downward and fall around the first horizontal rotation axis 210. At this time, the first drive shaft 320 can be manually driven by a worker to rotate forward or reversely, and then the eccentric structure drives the swing seat 200 to drive all the boat pushers 300 to swing upward and tilt or swing downward and fall around the first horizontal rotation axis 210, which can be determined according to actual needs.

[0041] Furthermore, in order to protect the swing drive mechanism and the swing seat 200, in some embodiments of the present invention, a driven wheel 202 is movably installed at the rear end of the swing seat 200, and the driven wheel 202 abuts against the eccentric bearing 330, or the driven wheel 202 abuts against the eccentric cam. By adopting the above structure, when the first motor 310 drives the first drive shaft 320 to rotate forward or reverse, the first drive shaft 320 can drive the eccentric bearing 330 or the eccentric cam to rotate relative to the swing seat 200, and the eccentric bearing 330 or the eccentric cam can cooperate with the driven wheel 202 and drive the swing seat 200 to drive the boat pusher 300 to swing upward around the first horizontal rotation axis 210 or make the swing seat 200 drive the boat pusher 300 to swing downward around the first horizontal rotation axis 210, and at the same time, it can prevent the eccentric bearing 330 or the eccentric cam from being damaged or wearing the swing seat 200 during repeated rotation.

[0042] Reference Figure 5 and Figure 6In order to simplify the structure of the adjustment device, in some embodiments of the present invention, the adjustment device includes at least one group of adjustment components, each group of adjustment components includes a support frame 400, and the left adjustment bolt 410 and the right adjustment bolt 420 are respectively arranged on both sides of the support frame 400. The rear end of the boat pushing paddle 300 is fixedly installed on the support frame 400, and the boat pushing paddle 300 is located between the left adjustment bolt 410 and the right adjustment bolt 420. The left adjustment bolt 410 is threadedly connected or abutted with the swing seat 200, and the right adjustment bolt 420 is threadedly connected or abutted with the swing seat 200. When the upper surface of the boat pushing paddle 300 tilts to the left or right, the left adjustment bolt 410 and / or the right adjustment bolt 420 can be screwed, so that the support frame 400 drives the boat pushing paddle 300 to rotate forward or reversely around the length direction of the boat pushing paddle 300, so that the left and right sides of the upper surface of the boat pushing paddle 300 remain horizontal. If the left adjusting bolt 410 and the right adjusting bolt 420 are turned at the same time, the left adjusting bolt 410 and the right adjusting bolt 420 can drive the supporting frame 400 to drive the boat pushing paddle 300 to move and rise and fall as a whole relative to the swing seat 200, thereby achieving the goal of moving and rising the boat pushing paddle 300 relative to the swing seat 200 in the up and down directions, and can fine-tune the horizontal height of the boat pushing paddle 300.

[0043] Furthermore, in order to better install the boat-pushing paddle 300 on the swing seat 200, in some embodiments of the present invention, the number of the adjustment components is two groups, and along the length direction of the boat-pushing paddle 300, the two groups of adjustment components are arranged at intervals at the rear end of the boat-pushing paddle 300. Specifically, the two support brackets 400 of the two groups of adjustment components are fixedly installed at intervals at the rear end of the boat-pushing paddle 300, and the left adjustment bolt 410 and the right adjustment bolt 420 of each support bracket 400 are correspondingly threadedly connected or abutted with the swing seat 200, thereby making the boat-pushing paddle 300 more firmly installed on the swing seat 200 and not easy to fall off, thereby ensuring safety.

[0044] Reference Figure 1 and Figure 2 In order to simplify the structure of the lifting drive mechanism, in some embodiments of the utility model, the lifting drive mechanism includes a first base 500, and the first base 500 is rotatably installed with a first screw rod 510 arranged in the up and down directions. The outer periphery of the first screw rod 510 is threadedly connected with a first nut member 520, and the first nut member 520 is fixedly connected to the base 100. The first base 500 is provided with a second motor 530, and the second motor 530 is transmission-connected to the first screw rod 510; wherein the second motor 530 can drive the first screw rod 510 to rotate forward or reversely, and the first screw rod 510 cooperates with the first nut member 520 and drives the base 100 to drive the swing seat 200 and all the boat push paddles 300 to move upward to rise or move downward to land.

[0045] In this embodiment, the lifting drive mechanism further includes a second base 540, a second screw rod 541 and a second nut member 542. The second base 540 and the first base 500 are arranged parallel to each other and at intervals. The second screw rod 541 is movably installed on the second base 540 along the up and down direction. The second nut member 542 is threadedly connected to the outer periphery of the second screw rod 541. The second nut member 542 is fixedly connected to the base 100, and the second screw rod 541 is transmission-connected to the first screw rod 510 through a coupling. Therefore, when the second motor 530 is working, it can synchronously drive the first screw rod 510 and the second screw rod 541 to rotate, and then the first nut member 520 and the second nut member 542 can jointly drive the base 100 to drive the swing seat 200 and all the boat push paddles 300 to move upward to rise or move downward to land.

[0046] In order to simplify the structure of the horizontal driving mechanism, in some embodiments of the present utility model, the horizontal driving mechanism includes a third motor 600 fixedly mounted on the base 100, the output end of the third motor 600 is connected to a synchronous belt mechanism, and the synchronous belt of the synchronous belt mechanism is in transmission connection with the horizontal movable seat 120. When the third motor 600 drives the synchronous belt mechanism to rotate, the synchronous belt mechanism can drive the horizontal movable seat 120 to drive the swing seat 200 and all the boat pushing paddles 300 to reciprocate along the horizontal guide rail 110.

[0047] It is understandable that the horizontal driving mechanism may adopt other structures besides the above structure, such as the horizontal driving mechanism is an electric push rod fixedly mounted on the base 100, and the push rod of the electric push rod is in transmission connection with the horizontal movable seat 120. Therefore, when the electric push rod is working, it can drive the horizontal movable seat 120 to drive the swing seat 200 and all the boat pushing paddles 300 to move back and forth along the horizontal guide rail 110.

[0048] Reference Figures 1 to 6 The diffusion furnace equipment of certain embodiments of the utility model includes a diffusion furnace body, and the diffusion furnace body is equipped with the above-mentioned push boat paddle adjustment mechanism.

[0049] Since the diffusion furnace equipment of this embodiment adopts the above-mentioned push boat paddle adjustment mechanism, it has the advantages of the above-mentioned push boat paddle adjustment mechanism, which will not be repeated here.

[0050] Although examples of the present embodiment have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present embodiment, and the scope of the present embodiment is defined by the claims and their equivalents.

Claims

1. A push boat paddle adjustment mechanism, characterized in that: include: A base, wherein the base has a horizontal guide rail arranged in a horizontal direction, a horizontal movable seat is movably mounted on the horizontal guide rail, and the base is provided with a horizontal driving mechanism transmission-connected with the horizontal movable seat, and the horizontal driving mechanism can drive the horizontal movable seat to reciprocate along the horizontal guide rail; A swing seat, wherein the swing seat is movably mounted on the horizontal movable seat via a first horizontal rotation axis; At least one boat-pushing paddle, movably mounted on the swing seat; A swing drive mechanism is provided on the horizontal movable seat, the swing drive mechanism is located on one side of the first horizontal rotation axis, and the swing drive mechanism can drive the swing seat to drive all the boat pushers to swing upward around the first horizontal rotation axis to tilt up or swing downward to land; A lifting drive mechanism, the lifting drive mechanism is in driving connection with the base, the lifting drive mechanism can drive the base to drive the swing seat and all the boat pushers to move upwards to rise or downwards to land; Among them, an adjustment device is arranged between each of the boat pushing paddles and the swing seat, and the adjustment device can drive the boat pushing paddle to rotate forward or reversely around the length direction of the boat pushing paddle, and / or the adjustment device can drive the boat pushing paddle to rise and fall relative to the swing seat in the up and down direction.

2. A push boat paddle adjustment mechanism according to claim 1, characterized in that: It also includes a fixed mounting plate, which is fixedly mounted on the horizontal movable seat. The first horizontal rotation axis is fixedly connected to a side of the fixed mounting plate away from the horizontal movable seat. The swing seat is movably sleeved on the outer periphery of the first horizontal rotation axis.

3. A push boat paddle adjustment mechanism according to claim 2, characterized in that: The swing drive mechanism is arranged on the fixed mounting plate, and the swing drive mechanism includes a first motor, a first drive shaft and an eccentric structure. The first motor is fixedly mounted on the fixed mounting plate, and the first motor is located on a side of the first horizontal rotation axis away from the front end of the boat pusher paddle. The first drive shaft is transmission-connected with the output shaft of the first motor. The eccentric structure is arranged on the first drive shaft, and the eccentric structure abuts against the rear end of the swing seat, wherein the first motor can drive the first drive shaft to drive the eccentric structure to rotate forward or reverse, so that the eccentric structure drives the swing seat to drive all the boat pusher paddles to swing upward and tilt up or swing downward and land around the first horizontal rotation axis.

4. A push boat paddle adjustment mechanism according to claim 3, characterized in that: The eccentric structure includes an eccentric bearing or an eccentric cam, which is sleeved on the outer periphery of the first drive shaft, and the eccentric bearing or the eccentric cam is abutted against the rear end of the swing seat. When the first motor drives the first drive shaft to rotate forward or reverse, the first drive shaft can drive the eccentric bearing or the eccentric cam to rotate forward or reverse relative to the swing seat.

5. A push boat paddle adjustment mechanism according to claim 4, characterized in that: A driven wheel is movably mounted on the rear end of the swing seat, and the driven wheel abuts against the eccentric bearing, or the driven wheel abuts against the eccentric cam.

6. A push boat paddle adjustment mechanism according to claim 1, characterized in that: The adjusting device comprises at least one set of adjusting components, Each group of adjustment components includes a supporting bracket, and a left adjusting bolt and a right adjusting bolt are correspondingly arranged on both sides of the supporting bracket. The rear end of the boat pushing paddle is fixedly mounted on the supporting bracket, and the boat pushing paddle is located between the left adjusting bolt and the right adjusting bolt. The left adjusting bolt is threadedly connected or abutted with the swing seat, and the right adjusting bolt is threadedly connected or abutted with the swing seat.

7. A push boat paddle adjustment mechanism according to claim 6, characterized in that: The number of the adjustment components is two groups, Along the length direction of the boat pushing paddle, two groups of the adjustment components are arranged at intervals at the rear end of the boat pushing paddle.

8. The push boat paddle adjustment mechanism according to claim 1, characterized in that: The lifting drive mechanism comprises a first base, a first screw arranged in the up-down direction is rotatably mounted on the first base, a first nut is threadedly connected to the outer circumference of the first screw, the first nut is fixedly connected to the base, and the first base is provided with a second motor, which is drivingly connected to the first screw; Among them, the second motor can drive the first screw to rotate forward or reversely, and the first screw cooperates with the first nut and drives the base to drive the swing seat and all the boat pushers to move upward and rise or move downward and fall.

9. The push boat paddle adjustment mechanism according to claim 1, characterized in that: The horizontal driving mechanism comprises a third motor fixedly mounted on the base, an output end of the third motor is connected to a synchronous belt mechanism, and a synchronous belt of the synchronous belt mechanism is drivingly connected to the horizontal movable seat.

10. Diffusion furnace equipment, characterized in that, It comprises a diffusion furnace body, and the diffusion furnace body is provided with a push boat paddle adjustment mechanism as claimed in any one of claims 1 to 9.

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