Semiconductor detection tray transferring device

Abstract

The utility model discloses a Tray disc transferring device for semiconductor detection, which belongs to the technical field of semiconductors and comprises a bottom plate. The moving mechanism is arranged on the bottom plate so as to move the tray; the servo rotating platform is arranged on the moving mechanism; the bearing plate is fixedly connected to the top end of the servo rotating platform; the positioning mechanism is arranged on the bearing plate so as to position the tray; the feeding mechanism is arranged on the bearing plate so as to push the tray; according to the utility model, through cooperation of the moving mechanism, the servo rotating platform and the bearing plate, the Tray disc is moved to the detection equipment for detection of a semiconductor device, and the positioning mechanism fixes the Tray disc in multiple directions in the moving process, so that the stability of the semiconductor device is maintained when the Tray disc moves, and meanwhile, the stability of the semiconductor during detection can be maintained; and the problem that the detection result is influenced by deviation of the semiconductor device is effectively avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and more specifically to a semiconductor detection Tray transfer device. Background Art

[0002] In the production of semiconductor devices, from semiconductor single wafers to the final product, dozens or even hundreds of processes must be carried out. In order to ensure that the product performance is qualified, stable and reliable, and has a high yield rate, all process steps must have strict and specific requirements based on the production conditions of various products. Therefore, corresponding systems and precise monitoring measures must be established in the production process, starting with semiconductor process detection.

[0003] At present, semiconductor devices require the use of trays and transfer devices in the detection process. Trays are a kind of tooling, also called material trays, which are used in conjunction with transfer devices to carry and transport semiconductor devices so that the semiconductor devices are moved to the corresponding detection equipment. The detection equipment detects the semiconductor devices on the trays. However, most of the existing transfer devices cannot guarantee the stability of the semiconductor devices on the trays during the process of moving the trays. The semiconductor devices carried by the trays are prone to displacement, which affects the detection effect. Utility Model Content

[0004] 1. Technical issues to be solved

[0005] In view of the problems existing in the prior art, the purpose of the utility model is to provide a semiconductor inspection tray transfer device, aiming to solve the problem that the transfer device in the prior art cannot ensure the stability of the semiconductor devices on the tray during the process of moving the tray, and the semiconductor devices carried by the tray are prone to displacement, affecting the detection effect.

[0006] 2. Technical solution

[0007] In order to solve the above problems, the utility model adopts the following technical solutions:

[0008] A semiconductor inspection tray transfer device, comprising:

[0009] Base plate;

[0010] A moving mechanism is arranged on the bottom plate to realize the movement of the Tray;

[0011] A servo rotating platform is arranged on the moving mechanism;

[0012] A bearing plate, fixedly connected to the top of the servo rotating platform;

[0013] A positioning mechanism is arranged on the carrying plate to realize positioning of the Tray;

[0014] The feeding mechanism is arranged on the carrying plate to push the Tray.

[0015] As a preferred solution of the utility model, the moving mechanism includes a translation motor, a ball screw, a nut and a sliding seat. The translation motor is fixedly connected to the base plate, the ball screw is fixedly connected to the output end of the translation motor, the nut is threadedly connected to the circumferential surface of the ball screw, the sliding seat is fixedly connected to the nut, and the servo rotating platform is fixedly connected to the sliding seat.

[0016] As a preferred solution of the utility model, the positioning mechanism includes multiple positioning cylinders, multiple positioning blocks, limit blocks and fixed components, the multiple positioning cylinders and limit blocks are fixedly connected to the supporting plate, the multiple positioning blocks are respectively fixedly connected to the output ends of the multiple positioning cylinders, and the fixed components are arranged on the supporting plate corresponding to the limit blocks.

[0017] As a preferred solution of the utility model, the fixed component includes a push-pull cylinder, a limit bar, a fixed plate, an arc groove and a rotating wheel. The push-pull cylinder and the fixed plate are fixedly connected to the bottom end of the supporting plate. The limit bar is movably hinged to the output end of the push-pull cylinder through a hinge shaft. The arc groove is excavated on the fixed plate. The rotating wheel is rotatably connected to the limit bar, and the rotating wheel is slidably connected in the arc groove.

[0018] As a preferred solution of the utility model, the feeding mechanism includes multiple transmission wheels, transmission motors, transmission belts, moving blocks and pushing blocks. The multiple transmission wheels are rotatably connected to one side end of the supporting plate, the transmission motor is fixedly connected to the bottom end of the supporting plate, the transmission belt is transmission-connected between the multiple transmission wheels and the output end of the transmission motor, the moving block is fixedly connected to the transmission belt, and the pushing block is fixedly connected to the moving block.

[0019] As a preferred solution of the utility model, a slide rail module is fixedly connected to the bottom plate, and the slide seat is slidably connected to the slide rail module.

[0020] As a preferred solution of the utility model, one side end of the carrying plate is fixedly connected to a side slide rail, and the moving block is slidably connected to the side slide rail.

[0021] As a preferred solution of the utility model, a fixing frame is fixedly connected to the bottom plate, a sensor is fixedly connected to the fixing frame, and the sensor corresponds to the carrying plate.

[0022] 3. Beneficial effects

[0023] Compared with the prior art, the advantages of the present invention are:

[0024] 1) In this solution, the moving mechanism and the servo rotating platform cooperate to drive the carrier plate to move and rotate the carrier plate 90°, so that the carrier plate and the Tray are accurately moved to correspond to the detection equipment. During the movement, the positioning mechanism positions the Tray to keep the Tray stable during movement, prevent the semiconductor device from shifting, and facilitate the detection equipment to detect the semiconductor devices on the Tray to complete the entire detection process. After the detection is completed, the feeding mechanism automatically pushes the Tray to the next process; In the utility model, the device moves the Tray to the detection equipment for semiconductor device detection through the cooperation of the moving mechanism, the servo rotating platform and the carrier plate. During the movement, the positioning mechanism fixes the Tray in multiple directions, which not only keeps the semiconductor device stable when the Tray moves, but also keeps the semiconductor stable during detection, effectively avoiding the problem of semiconductor device deviation affecting the detection result, and after the detection is completed, the feeding mechanism controls the Tray to automatically move to the next process, making the transportation of the Tray more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is the front view of the utility model;

[0026] Figure 2 It is a three-dimensional diagram of the utility model;

[0027] Figure 3 For the utility model Figure 2 A magnified image of point A;

[0028] Figure 4 It is a three-dimensional diagram of part of the structure of the utility model.

[0029] Description of the numbers in the figure:

[0030] 1. Base plate; 2. Moving mechanism; 21. Translation motor; 22. Ball screw; 23. Nut; 24. Sliding seat; 3. Servo rotating platform; 4. Load plate; 5. Positioning mechanism; 51. Positioning cylinder; 52. Positioning block; 53. Limit block; 54. Fixed component; 541. Push-pull cylinder; 542. Limit bar; 543. Fixed plate; 544. Arc groove; 545. Rotating wheel; 6. Feeding mechanism; 61. Transmission wheel; 62. Transmission motor; 63. Transmission belt; 64. Moving block; 65. Pushing block; 7. Slide rail module; 8. Side slide rail; 9. Fixed frame; 10. Sensor. DETAILED DESCRIPTION

[0031] The following will clearly and completely describe the technical solutions in the embodiments of the utility model in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0032] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "top / bottom" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0033] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "set / connected", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0034] Example:

[0035] See also Figure 1-4 , a semiconductor detection tray transfer device, comprising:

[0036] Bottom plate 1;

[0037] The moving mechanism 2 is arranged on the bottom plate 1 to realize the movement of the Tray;

[0038] A servo rotating platform 3 is arranged on the moving mechanism 2;

[0039] The carrying plate 4 is fixedly connected to the top of the servo rotating platform 3;

[0040] A positioning mechanism 5 is disposed on the carrier plate 4 to achieve positioning of the Tray;

[0041] The feeding mechanism 6 is disposed on the carrying plate 4 to push the Tray.

[0042] In this embodiment, when the semiconductor device moves toward the detection equipment, the robot arm of the previous process first places the Tray carrying the semiconductor device on the carrier plate 4, and the positioning mechanism 5 positions the Tray in multiple directions so that the Tray is fixed on the carrier plate 4. The moving mechanism 2 drives the servo rotating platform 3 to move toward the detection equipment, and the servo rotating platform 3 drives the carrier plate 4 to move and controls it to rotate 90°, so that the carrier plate 4 moves to correspond to the detection equipment, which is convenient for the detection equipment to detect the semiconductor device. After the detection is completed, the positioning mechanism 5 is opened, and the feeding mechanism 6 pushes the Tray from the carrier plate 4 to the next process.

[0043] Specifically, the moving mechanism 2 includes a translation motor 21, a ball screw 22, a nut 23 and a sliding seat 24. The translation motor 21 is fixedly connected to the base plate 1, the ball screw 22 is fixedly connected to the output end of the translation motor 21, the nut 23 is threadedly connected to the circumferential surface of the ball screw 22, the sliding seat 24 is fixedly connected to the nut 23, and the servo rotating platform 3 is fixedly connected to the sliding seat 24.

[0044] In this embodiment, the translation motor 21 is started by an external power supply to control the rotation of the ball screw 22. The ball screw 22 can drive the nut 23 to move. During the movement of the nut 23, the sliding seat 24 is pushed to slide on the base plate 1, thereby moving the servo rotating platform 3 and the supporting plate 4, thereby realizing the movement of the Tray toward the detection device.

[0045] Specifically, the positioning mechanism 5 includes multiple positioning cylinders 51, multiple positioning blocks 52, limit blocks 53 and a fixing assembly 54. The multiple positioning cylinders 51 and the limit blocks 53 are all fixedly connected to the supporting plate 4. The multiple positioning blocks 52 are respectively fixedly connected to the output ends of the multiple positioning cylinders 51. The fixing assembly 54 is arranged on the supporting plate 4 corresponding to the limit blocks 53.

[0046] In this embodiment, multiple positioning cylinders 51 are symmetrically arranged on the supporting plate 4. After the Tray is placed on the supporting plate 4, it corresponds to the multiple positioning blocks 52. The multiple positioning cylinders 51 are started by an external power supply to control the movement of the multiple positioning blocks 52. The multiple positioning blocks 52 stabilize the Tray on the supporting plate 4. At the same time, the fixing assembly 54 cooperates with the limit block 53 to fix the Tray on the supporting plate 4, so that the Tray remains stable during movement.

[0047] Specifically, the fixing assembly 54 includes a push-pull cylinder 541, a limit bar 542, a fixing plate 543, an arc groove 544 and a rotating wheel 545. The push-pull cylinder 541 and the fixing plate 543 are both fixedly connected to the bottom end of the supporting plate 4. The limit bar 542 is movably hinged to the output end of the push-pull cylinder 541 through a hinge shaft. The arc groove 544 is excavated on the fixing plate 543. The rotating wheel 545 is rotatably connected to the limit bar 542, and the rotating wheel 545 is slidably connected in the arc groove 544.

[0048] In this embodiment, when the Tray is placed on the supporting plate 4, it corresponds to the limit block 53. The push-pull cylinder 541 is started by an external power supply to pull the limit bar 542. During the pulling process of the limit bar 542, the rotating wheel 545 slides in the arc groove 544, thereby causing the limit bar 542 to rotate. After rotation, the limit bar 542 blocks one side of the Tray and cooperates with the limit block 53 to fix the Tray, thereby further ensuring the stability of the Tray.

[0049] Specifically, the feeding mechanism 6 includes multiple transmission wheels 61, a transmission motor 62, a transmission belt 63, a moving block 64 and a pushing block 65. The multiple transmission wheels 61 are rotatably connected to one side end of the supporting plate 4, the transmission motor 62 is fixedly connected to the bottom end of the supporting plate 4, the transmission belt 63 is transmission-connected between the output ends of the multiple transmission wheels 61 and the transmission motor 62, the moving block 64 is fixedly connected to the transmission belt 63, and the pushing block 65 is fixedly connected to the moving block 64.

[0050] In this embodiment, after the inspection of the semiconductor devices on the Tray is completed, the fixing component 54 is opened, and the transmission motor 62 is started by an external power supply, so that the transmission belt 63 is transmitted between multiple transmission wheels 61, and the transmission belt 63 drives the moving block 64 and the pushing block 65 to move, and the pushing block 65 pushes the Tray to move the Tray to the next process.

[0051] Specifically, the bottom plate 1 is fixedly connected with a slide rail module 7 , and the slide seat 24 is slidably connected to the slide rail module 7 .

[0052] In this embodiment, the slide rail module 7 is used to ensure the stability of the slide seat 24 when sliding, so that the slide seat 24 can stably drive the servo rotating platform 3 and the carrying plate 4 to move.

[0053] Specifically, one side end of the carrying plate 4 is fixedly connected to a side slide rail 8 , and the moving block 64 is slidably connected to the side slide rail 8 .

[0054] In this embodiment, the side slide rail 8 is used to ensure the stability of the moving block 64 during movement, so as to facilitate the moving block 64 and the pushing block 65 to push the tray to the next process.

[0055] Specifically, a fixing frame 9 is fixedly connected to the bottom plate 1 , a sensor 10 is fixedly connected to the fixing frame 9 , and the sensor 10 corresponds to the carrying plate 4 .

[0056] In this embodiment, the fixing frame 9 is used to support some parts in the transfer device to facilitate the operation of the parts. The sensor 10 on the fixing frame 9 confirms whether a tray is placed on the carrier plate 4.

[0057] Working principle: When the semiconductor device is moved to the testing equipment for testing, the robot arm of the previous process first places the Tray carrying the semiconductor device on the carrier plate 4. The Tray corresponds to the limit block 53 and multiple positioning blocks 52. Multiple positioning cylinders 51 are started by an external power supply to control the movement of multiple positioning blocks 52. Multiple positioning blocks 52 clamp the Tray. The push-pull cylinder 541 is started by an external power supply to pull the limit bar 542. During the pulling process of the limit bar 542, the rotating wheel 545 slides in the arc groove 544, so that the limit bar 542 rotates. The rotated limit bar 542 blocks one side of the Tray and cooperates with the limit block 53 to fix the Tray. The Tray is positioned in multiple directions and is firmly fixed on the carrier plate 4. The translation motor 21 is started by an external power supply to control The ball screw 22 is controlled to rotate, and the ball screw 22 drives the nut 23 to move. During the movement of the nut 23, the sliding seat 24 is pushed to slide on the base plate 1, so that the servo rotating platform 3 drives the carrier plate 4 to move toward the detection equipment and controls it to rotate 90°. The carrier plate 4 moves the Tray to correspond to the detection equipment, which is convenient for the detection equipment to detect semiconductor devices. After the detection is completed, the push-pull cylinder 541 pushes the limit bar 542, and the limit bar 542 rotates downward through the sliding connection of the rotating wheel 545 and the arc groove 544, so that one side of the carrier plate 4 is opened, and the transmission motor 62 is started by an external power supply to transmit the transmission belt 63 between multiple transmission wheels 61, and the transmission belt 63 drives the moving block 64 and the pushing block 65 to move, and the pushing block 65 pushes the Tray, so that the Tray moves to the next process.

[0058] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent substitutions or changes within the technical scope disclosed by the present invention according to the technical solution and improved concept of the present invention, which should be included in the protection scope of the present invention.

Claims

1. A semiconductor inspection tray transfer device, It is characterized by; including: Bottom plate (1); A moving mechanism (2) is arranged on the bottom plate (1) to realize the movement of the tray; A servo rotating platform (3) is arranged on the moving mechanism (2); A bearing plate (4) fixedly connected to the top of the servo rotating platform (3); A positioning mechanism (5) is arranged on the carrying plate (4) to achieve positioning of the tray; The feeding mechanism (6) is arranged on the carrying plate (4) to push the tray.

2. A semiconductor inspection tray transfer device according to claim 1, characterized in that: The moving mechanism (2) comprises a translation motor (21), a ball screw (22), a nut (23) and a sliding seat (24); the translation motor (21) is fixedly connected to the base plate (1); the ball screw (22) is fixedly connected to the output end of the translation motor (21); the nut (23) is threadedly connected to the circumferential surface of the ball screw (22); the sliding seat (24) is fixedly connected to the nut (23); and the servo rotating platform (3) is fixedly connected to the sliding seat (24).

3. A semiconductor inspection tray transfer device according to claim 2, characterized in that: The positioning mechanism (5) comprises a plurality of positioning cylinders (51), a plurality of positioning blocks (52), a limiting block (53) and a fixing assembly (54); the plurality of positioning cylinders (51) and the limiting blocks (53) are all fixedly connected to the supporting plate (4); the plurality of positioning blocks (52) are respectively fixedly connected to the output ends of the plurality of positioning cylinders (51); and the fixing assembly (54) is arranged on the supporting plate (4) and corresponds to the limiting blocks (53).

4. A semiconductor inspection tray transfer device according to claim 3, characterized in that: The fixing assembly (54) comprises a push-pull cylinder (541), a limit bar (542), a fixing plate (543), an arc-shaped groove (544) and a rotating wheel (545); the push-pull cylinder (541) and the fixing plate (543) are both fixedly connected to the bottom end of the bearing plate (4); the limit bar (542) is movably hinged to the output end of the push-pull cylinder (541) via a hinge shaft; the arc-shaped groove (544) is excavated on the fixing plate (543); the rotating wheel (545) is rotatably connected to the limit bar (542), and the rotating wheel (545) is slidably connected in the arc-shaped groove (544).

5. A semiconductor inspection tray transfer device according to claim 4, characterized in that: The feeding mechanism (6) comprises a plurality of transmission wheels (61), a transmission motor (62), a transmission belt (63), a moving block (64) and a pushing block (65); the plurality of transmission wheels (61) are rotatably connected to one side end of the carrier plate (4); the transmission motor (62) is fixedly connected to the bottom end of the carrier plate (4); the transmission belt (63) is transmission-connected between the plurality of transmission wheels (61) and the output end of the transmission motor (62); the moving block (64) is fixedly connected to the transmission belt (63); and the pushing block (65) is fixedly connected to the moving block (64).

6. A semiconductor inspection tray transfer device according to claim 5, characterized in that: The bottom plate (1) is fixedly connected to a slide rail module (7), and the slide seat (24) is slidably connected to the slide rail module (7).

7. A semiconductor inspection tray transfer device according to claim 6, characterized in that: One side end of the bearing plate (4) is fixedly connected to a side slide rail (8), and the moving block (64) is slidably connected to the side slide rail (8).

8. The semiconductor inspection tray transfer device according to claim 7, characterized in that: A fixing frame (9) is fixedly connected to the bottom plate (1), a sensor (10) is fixedly connected to the fixing frame (9), and the sensor (10) corresponds to the supporting plate (4).

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