Waist-shaped quartz tuning fork, vibration device and electronic equipment

Abstract

The utility model relates to a girdling type quartz tuning fork and a vibration device. The girdling type quartz tuning fork comprises a pair of vibration arms. The base body is integrally formed at the base ends of the pair of vibrating arms, the two sides, in the width direction, of the base body are concaved inwards to form a pair of first notches, and the base body is sequentially divided into a connecting part, a rib part and a mounting part by the pair of first notches in the direction away from the pair of vibrating arms, the width direction is perpendicular to the length direction of the pair of vibrating arms, the width of the rib part is not smaller than 30% of the width of the mounting part, and the width of the rib part is not larger than the distance between the center lines of the pair of vibrating arms in the width direction. The quartz tuning fork has the effects of improving the falling impact resistance and the glue point stability of the quartz tuning fork and improving the poor temperature reliability.

Description

Technical Field

[0001] The present application relates to a waisted quartz tuning fork, a vibration device and an electronic device. Background Art

[0002] Electronic devices have built-in vibration devices that function as filters, resonators, reference clock sources, etc. Vibration devices are important unit modules of electronic devices. Vibration devices play functions such as timing, timing, event recording, and low-power interruption in electronic devices.

[0003] At present, this type of vibration device usually adopts a quartz tuning fork sealed in a package with a cavity. The quartz tuning fork is made by semiconductor photolithography etching process, and has a pair of vibration arms arranged in parallel and a substrate that fixes the base end sides of the two vibration arms as a whole in the length direction, wherein a groove is provided on the vibration arm, and an excitation electrode is provided on the vibration arm in accordance with the groove. In addition, an assembly electrode connected to the excitation electrode is formed on the outer surface of the substrate. When a predetermined voltage is applied to these electrodes, the excitation electrodes of the pair of vibration arms interact with each other, and the pair of vibration arms vibrate at a predetermined resonant frequency in the direction of approaching or moving away from each other (Y direction).

[0004] When operating a quartz tuning fork, due to the anisotropy of the quartz crystal, after the groove of the vibration arm is wet-etched, its cross-sectional shape is not ideally symmetrical. Therefore, during the vibration process, the electric field forces on the left and right are not equal, and the vibration arm does not vibrate horizontally on the X axis but on the XZ plane. Because the two vibration arms vibrate in opposite directions in the X-axis direction, the energy in the X-axis direction is offset, but in the Z direction, they are in the same direction and are in an enhanced state.

[0005] The relevant document discloses a piezoelectric vibrating plate, in which a cutout is provided on a base. According to this structure, the vibration excited by the vibrating arm is limited to the vibrating arm side, and the vibration arm is prevented from leaking to the base side. The setting of the cutout reduces the rigidity of the base, resulting in poor drop impact resistance of the piezoelectric vibrating plate.

[0006] With respect to the above-mentioned related technologies, there is a problem that the requirements for substrate rigidity cannot be met while improving energy suppression. Utility Model Content

[0007] In order to balance the requirements of substrate rigidity and the improvement of energy suppression effect, the purpose of the present application is to provide a waisted quartz tuning fork, a vibration device and an electronic device.

[0008] In the first aspect, the waisted quartz tuning fork provided in the present application adopts the following technical solution:

[0009] A waisted quartz tuning fork, comprising:

[0010] a pair of vibrating arms;

[0011] A base body, which is integrally formed at the base end of a pair of vibration arms, and the base body is recessed inwardly on both sides along the width direction to have a pair of first notches, and the pair of first notches separate the base body into a connecting portion, a rib portion, and a mounting portion in sequence along a direction away from the pair of vibration arms, wherein the width direction is perpendicular to the length direction of the pair of vibration arms, the rib portion width is not less than 30% of the mounting portion width, and the rib portion width is not greater than the center line spacing of the pair of vibration arms along the width direction.

[0012] By adopting the above technical solution, a pair of first notches are used to derive ribs, and the ribs are provided to reduce the Z-direction energy transmitted to the base during the vibration of the vibration arm and the Z-direction energy transmitted from the base to the vibration arm during the drop impact, that is, to reduce the conduction efficiency of the Z-direction energy between the vibration arm and the base. Further, the rib width is limited to not less than 30% of the width of the mounting portion, and the rib width is not greater than the center line spacing of a pair of vibration arms along the width direction, so as to meet the rigidity requirements of the base, reduce the probability of fracture during the drop impact, and cause product failure, while improving the energy suppression effect.

[0013] Optionally, the cross-section of the first notch is any one of rectangular, triangular, and arc-shaped.

[0014] By adopting the above technical solution and multiple structural settings, the cross-section of the first notch can be any one of a rectangular, triangular, and arc shape. In the actual production process, the appropriate structure is determined according to the actual situation to ensure that after corrosion in actual production, the residual crystal does not cause the x-axis center of gravity line of the tuning fork to shift.

[0015] Optionally, the connecting portion is inwardly recessed on both sides along the width direction to have at least one pair of second notches, and the pair of second notches sequentially separate the connecting portion into alternately arranged protrusions and notch pieces along a direction away from the pair of vibration arms.

[0016] By adopting the above technical solution and setting the second notch, the energy suppression effect is further improved while meeting the rigidity requirement of the base.

[0017] Optionally, the at least one pair of second notches is 1-2 pairs.

[0018] By adopting the above technical solution, the energy suppression effect is further improved while meeting the rigidity requirements of the substrate.

[0019] Optionally, the width of the mounting portion is greater than the width of the connecting portion, and the width of the connecting portion is not less than the width of a pair of the vibration arms.

[0020] By adopting the above technical solution, on the basis that the width of the connecting part is not less than the width of a pair of vibration arms, the width of the mounting part is limited to be not less than the width of the connecting part, that is, the width of the mounting part is increased to ensure that the base and the glue point have a larger contact area. The increase in contact area, firstly, increases the amount of glue consumed during the installation process of the base, weakens the problem of the tuning fork collapsing due to insufficient glue consumption of the base, and the left and right sides are not mounted on the same level; secondly, reduces the risk of fracture of the contact surface between the adhesive material and the mounting part.

[0021] Optionally, along the length direction of the vibration arm, the height of the connecting portion is smaller than the height of the mounting portion.

[0022] By adopting the above technical solution, the height of the mounting portion is limited to be higher than the height of the connecting portion, the height of the mounting portion is increased, and a larger contact area between the substrate and the glue point is further ensured.

[0023] Optionally, the height of the connecting portion is less than 90% of the height of the mounting portion and greater than 65% of the height of the mounting portion.

[0024] By adopting the above technical solution, the height ratio of the connecting portion and the mounting portion is further limited, ensuring that the substrate and the glue point have a larger contact area, while improving the effect of reducing the conduction efficiency of Z-direction energy between the vibration arm and the substrate.

[0025] Optionally, along the length direction of the vibration arm, the height of the rib is not less than 50 um and not greater than 45% of the height of the base.

[0026] By adopting the above technical solution, the rib height is limited, taking into account both the rigidity requirements of the substrate and the improvement of the energy suppression effect.

[0027] In the second aspect, the vibration device provided by the present application adopts the following technical solution:

[0028] Vibration devices, including:

[0029] The waisted quartz tuning fork;

[0030] A support seat, which is glued to the mounting portion to support the waisted quartz tuning fork;

[0031] The packaging component has the support seat disposed therein and accommodates the waisted quartz tuning fork.

[0032] By adopting the above technical solution, a vibration device is provided which can satisfy the rigidity requirements of the base body and improve the energy suppression effect.

[0033] In a third aspect, the electronic device provided by the present application adopts the following technical solution:

[0034] An electronic device includes a vibration device.

[0035] By adopting the above technical solution, an electronic device with a vibration device that can meet the requirements of substrate rigidity and improve the energy suppression effect is provided.

[0036] In summary, the present application includes at least one of the following beneficial technical effects:

[0037] 1. The setting of the ribs reduces the conduction efficiency of Z-direction energy between the vibration arm and the substrate, meets the rigidity requirements of the substrate, reduces the probability of breakage during the drop impact process, and causes product failure, while improving the energy suppression effect.

[0038] 2. Increase the width of the mounting part to ensure a larger contact area between the base and the glue point. The increase in contact area, first, increases the amount of glue consumed during the base installation process, weakening the problem of the tuning fork collapsing due to insufficient glue consumption and the left and right sides not being on the same level; second, it reduces the risk of fracture of the contact surface between the adhesive material and the mounting part. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a schematic structural diagram of a waisted quartz tuning fork according to one embodiment of the present application;

[0040] Figure 2 It is a schematic structural diagram of a waisted quartz tuning fork according to one embodiment of the present application;

[0041] Figure 3 It is a schematic structural diagram of a waisted quartz tuning fork according to one embodiment of the present application;

[0042] Figure 4 It is a schematic structural diagram of a waisted quartz tuning fork according to one embodiment of the present application;

[0043] Figure 5 It is a schematic structural diagram of a waisted quartz tuning fork according to one embodiment of the present application;

[0044] Figure 6 It is a cross-sectional schematic diagram of a vibration device according to one embodiment of the present application.

[0045] The figures are marked as follows: 100, waisted quartz tuning fork; 200, vibration device; 1, vibration arm; 10, groove; 2, base; 3, connection part; 4, rib; 5, mounting part; 6, glue point; 7, first notch; 8, second notch; 80, protrusion; 81, notch part; 9, packaging part; 90, support seat. DETAILED DESCRIPTION

[0046] The following is combined with Figure 1 -Attached Figure 6 , further details of this application are given.

[0047] (Waisted Quartz Tuning Fork)

[0048] The present application discloses a waisted quartz tuning fork, referring to Figure 1 The waisted quartz tuning fork includes a pair of vibration arms 1 and a base 2 integrally formed at the base ends of the pair of vibration arms 1 .

[0049] Reference Figure 1 In the following description, the length direction of a pair of vibration arms 1 is set as the Y direction, the direction parallel to the paper surface and perpendicular to the Y direction is set as the X direction, the X direction is the width direction of the pair of vibration arms 1, and the direction perpendicular to the paper surface and perpendicular to the Y direction is set as the Z direction.

[0050] The pair of vibration arms 1 are configured to extend parallel to each other, and the extension direction is the Y direction. In this embodiment, a groove 10 is provided on the pair of vibration arms 1, and the groove 10 penetrates the pair of vibration arms 1 along the Z direction. The pair of vibration arms 1 are formed with an excitation electrode (not shown) for vibrating the pair of vibration arms 1 in conjunction with the groove 10.

[0051] Due to the anisotropy of the quartz crystal, after the groove 10 of the vibration arm 1 is formed by wet etching, its cross-sectional shape is not ideally symmetrical on the left and right. Therefore, during the vibration process, the electric field forces on the left and right are not equal, and the vibration arm 1 does not vibrate horizontally on the X-axis but vibrates in the XZ plane. Because the two vibration arms 1 vibrate in opposite directions in the X-axis direction, the energy in the X-axis direction cancels out, but they are in the same direction in the Z direction and are in a strengthened state. In order to filter, i.e., reduce the Z-direction energy generated during the vibration of the vibration arm 1 and the Z-direction energy transmitted from the substrate 2 to the vibration arm 1 during the drop impact, in this embodiment, the substrate 2 is recessed inwardly on both sides along the width direction (X direction) to have a pair of first notches 7, wherein the width direction is perpendicular to the length direction of the pair of vibration arms 1, i.e., the X direction. In this embodiment, an assembly electrode (not shown) is formed on the outer surface of the substrate 2, and the assembly electrode and the excitation electrode are electrically connected.

[0052] A pair of first notches 7 are symmetrically arranged about the center line of the substrate 2 along the width direction, and the pair of first notches 7 sequentially separate the substrate 2 into a connecting portion 3, a rib 4, and a mounting portion 5 in a direction away from the pair of vibration arms 1. In this embodiment, the connecting portion 3 is connected to the pair of vibration arms 1, and the rib 4 constitutes a connection between the connecting portion 3 and the mounting portion 5, and the rib 4 is retracted inward relative to the connecting portion 3 and the mounting portion 5 along the X direction. The mounting portion 5 is used to assemble the quartz tuning fork in the package 9 described later, that is, to be glued to the subsequent support seat 90, and the assembly electrode forms two conductive connection points on the mounting portion 5, which constitute the subsequent glue point 6; a predetermined voltage is applied to the excitation electrode through the glue point 6, and the interaction between the excitation electrodes of the pair of vibration arms 1 causes the pair of vibration arms 1 to vibrate at a predetermined resonant frequency in the direction of approaching or moving away from each other (Y direction).

[0053] Effect of rib 4 settings:

[0054] Firstly, by setting the rib 4 to reduce the Z-direction energy, it can be ensured that the Z-direction force does not exceed the elastic modulus of the adhesive material, thereby improving the deformation of the adhesive material at the adhesive joint, thereby causing changes in the interface between the adhesive material and the mounting portion 5 and the subsequent support seat 90.

[0055] Secondly, since it is impossible for the vibration device to touch the ground as a whole in the XY plane or other planes during the actual falling process, the impact energy is transmitted from the subsequent packaging component 9 through the support seat 90 and the adhesive material to the quartz tuning fork. The waist structure can also reduce the Z-direction energy transmitted from the mounting portion 5 to the vibration arm 1, thereby reducing product failure caused by the breakage of the vibration arm 1.

[0056] Furthermore, by reducing the Z-direction energy, the interface changes between the glue point and the tuning fork caused by the drop impact can be suppressed, the influence of vibration leakage and external changes can be reduced, and the frequency and resistance changes can be suppressed, thereby improving the reliability against temperature.

[0057] Reference Figure 1 The width W3 of the rib 4 is not less than 30% of the width W1 of the mounting portion 5, that is, W3 / W1≧30%; in this embodiment, the minimum width of the rib 4 is limited to prevent W3 from being too small, the base from being insufficiently rigid, and breaking during a drop impact, causing product failure.

[0058] Furthermore, the width W3 of the rib 4 is not greater than the centerline spacing W4 of a pair of the vibration arms 1 along the width direction, that is, W3≦W4; it can be seen that 30%*W1≦W3≦W4 (30%*W1 satisfies≦W4). In this embodiment, the maximum width of the rib 4 is limited to improve the energy suppression effect.

[0059] When manufacturing a waisted quartz tuning fork, first, a protective film having an outer pattern of a pair of vibration arms 1 and a base 2 (with first notches 7) is formed on both surfaces of a wafer (not shown) by photolithography, and then wet etching is performed.

[0060] In one possible embodiment, referring to Figure 1 , the cross section of the first notch 7 is rectangular, that is, each first notch 7 includes a pair of first side walls oppositely arranged and extending along the X direction, and a first bottom wall connecting the pair of first side walls, and the first bottom wall extends along the Y direction;

[0061] In one possible embodiment, referring to Figure 2 , the cross section of the first notch 7 is triangular, that is, each first notch 7 includes a pair of second side walls arranged at a certain angle; in one embodiment, the certain angle is 40-60°;

[0062] In a possible implementation manner, the cross section of the first notch 7 is arc-shaped; in one embodiment, referring to Figure 3 The first notch 7 includes a pair of arcuate side walls and a second bottom wall connecting the pair of arcuate side walls, wherein the pair of arcuate side walls are convex; in another embodiment, referring to Figure 4 , the first notch 7 is in the shape of a full arc that is concave inwards;

[0063] Regarding the shape setting of the first notch 7, in the actual production process, a suitable structure is determined according to the actual situation to ensure resistance to drop impact and to ensure that after actual production corrosion, the residual crystal does not cause the x-axis center of gravity line of the tuning fork to shift.

[0064] Reference Figure 5 In order to further improve the energy suppression effect while meeting the rigidity requirement of the substrate 2, in another embodiment, the waisted quartz tuning fork disclosed in the present application further includes at least one pair of second notches 8. Specifically, the connecting portion 3 is recessed inwardly on both sides along the width direction and has at least one pair of second notches 8. The pair of second notches 8 separates the connecting portion 3 into alternately arranged protrusions 80 and notch members 81 in sequence along the direction away from the pair of vibration arms 1; the number of the second notches 8 can be 1 pair, 2 pairs, or 3 pairs, as long as the number set can achieve the effect of meeting the rigidity requirement of the substrate 2 while improving the energy suppression effect; in this embodiment, the number of the second notches 8 is 1 pair.

[0065] In order to increase the width of the mounting portion 5 and ensure a larger contact area between the substrate 2 and the glue point, in a possible implementation scheme, the width W1 of the mounting portion 5 is greater than the width W2 of the connecting portion 3, that is, W1>W2. In this embodiment, W2 is determined by the outermost dimension W5 of the roots of the two vibration arms 1, and the width W2 of the connecting portion 3 is not less than the width W5 of a pair of the vibration arms 1, that is, W2≧W5; and W5 is composed of the width dimension of the two vibration arms 1 and the spacing dimension of the two vibration arms 1, and the spacing dimension must ensure that the vibration arms 1 do not collide with each other when vibrating. In this embodiment, the contact area is increased, so that the probability of the quartz tuning fork collapsing due to insufficient glue consumption by the base 2 and the left and right sides not being on the same horizontal plane is reduced; specifically: first, during the falling process, under the same impact force, the contact surface between the quartz tuning fork and the glue is increased, thereby reducing the pressure on the glue surface, increasing the difficulty of exceeding the tolerance range of the elastic modulus of the glue, and thereby reducing the probability of deformation or fracture of the contact surface between the glue and the quartz tuning fork; second, during the temperature change process, objects will expand and contract, and the linear expansion coefficients of the tuning fork and the glue are different, so the contact area is increased and the risk of fracture of the contact area between the glue and the tuning fork is reduced; in short, it can suppress the falling impact and reduce the interface changes between the glue point and the tuning fork caused by temperature changes, reduce the influence of vibration leakage and external changes, and can suppress frequency and resistance changes, thereby improving the reliability of temperature.

[0066] In order to further increase the contact area, in another embodiment, along the length direction (Y direction) of the vibration arm 1, the height H2 of the connecting portion 3 is less than the height H1 of the mounting portion 5; further, the height H2 of the connecting portion 3 is less than 90% of the height H1 of the mounting portion 5 and greater than 65% of the height H1 of the mounting portion 5, that is, 65%*H1 <H2<90%*H1。

[0067] In order to take into account both meeting the rigidity requirements of the substrate 2 and improving the energy suppression effect, in another embodiment, along the length direction of the vibration arm 1, the height H3 of the rib 4 is not less than 50um and not greater than 45% of the height of the substrate 2 (H1+H2+H3), that is, 50um≦H3≦45%*(H1+H2+H3).

[0068] (Vibration device)

[0069] This embodiment discloses a vibration device. Figure 6 , the vibration device includes a waisted quartz tuning fork 100, a support seat 90 and a packaging member 9;

[0070] The support seat 90 is glued to the mounting portion 5 to support the waisted quartz tuning fork 100, that is, the waisted quartz tuning fork 100 is glued to the support seat 90 through its mounting portion 5. Specifically, the waisted quartz tuning fork 100 is glued to the support seat 90 through its mounting portion 5;

[0071] The package 9 includes a container and a cover for packaging the container. The support seat 90 is arranged in the container, and the waisted quartz tuning fork 100 is accommodated, and then packaged by the cover, so that the waisted quartz tuning fork 100 can be hermetically sealed in a reduced pressure atmosphere or an inert gas atmosphere such as nitrogen.

[0072] In one embodiment, the support base 90 and the mounting portion 5 are bonded together through a pair of bonding points stacked along the center line of a pair of vibration arms 1 in the width direction, and the bonding material is conductive to electrically connect a pair of excitation electrodes to lead out of the package 9 respectively.

[0073] In one embodiment, the vibration device may specifically be a filter, a resonator, a reference clock source, etc.

[0074] (Electronic equipment)

[0075] This embodiment discloses an electronic device including a vibration device 200 , that is, the vibration device 200 that functions as a filter, a resonator, a reference clock source, etc. is built into the electronic device.

[0076] In one embodiment, the electronic device may be a computer, a telephone, a camera, a tablet terminal, a clock, an inkjet ejection device (such as an inkjet printer), a wearable terminal, a television, a video recorder, a car navigation device, or a pager;

[0077] In another embodiment, the electronic device may also be an electronic notepad with communication function, an electronic dictionary, a calculator, an electronic game device, a word processor, a monitor, an electronic telescope, a POS terminal, etc.

[0078] In another embodiment, the electronic device may also be a medical device such as an electronic thermometer, a blood pressure meter, a blood glucose meter, an electrocardiogram measuring device, an ultrasonic diagnostic device, or an electronic endoscope;

[0079] In another embodiment, the electronic device may also be a fish finder, various measuring equipment, measuring instruments for vehicles, aircraft, and ships, a base station for portable terminals, a flight simulator, and the like.

[0080] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. Waisted quartz tuning fork, characterized in that: include: a pair of vibrating arms (1); A base (2) is integrally formed at the base end of a pair of vibration arms (1), and the base (2) is recessed inwardly on both sides along the width direction to have a pair of first notches (7), and the pair of first notches (7) sequentially separate the base (2) into a connecting portion (3), a rib portion (4), and a mounting portion (5) along a direction away from the pair of vibration arms (1), wherein the width direction is perpendicular to the length direction of the pair of vibration arms (1), the width of the rib portion (4) is not less than 30% of the width of the mounting portion (5), and the width of the rib portion (4) is not greater than the center line spacing of the pair of vibration arms (1) along the width direction.

2. The waisted quartz tuning fork according to claim 1, characterized in that: The cross section of the first notch (7) is any one of rectangular, triangular and arc-shaped.

3. The waisted quartz tuning fork according to claim 1, characterized in that: The connecting portion (3) is inwardly recessed on both sides along the width direction and has at least one pair of second notches (8), and the pair of second notches (8) sequentially separates the connecting portion (3) into alternately arranged protrusions (80) and notch pieces (81) in a direction away from the pair of vibration arms (1).

4. The waisted quartz tuning fork according to claim 3, characterized in that: The at least one pair of second notches (8) is 1-2 pairs.

5. The waisted quartz tuning fork according to claim 1, characterized in that: The width of the mounting portion (5) is greater than the width of the connecting portion (3), and the width of the connecting portion (3) is not less than the width of the pair of vibration arms (1).

6. The waisted quartz tuning fork according to claim 1, characterized in that: Along the length direction of the vibration arm (1), the height of the connection portion (3) is smaller than the height of the mounting portion (5).

7. The waisted quartz tuning fork according to claim 6, characterized in that: The height of the connecting portion (3) is less than 90% of the height of the mounting portion (5) and greater than 65% of the height of the mounting portion (5).

8. The waisted quartz tuning fork according to claim 1, characterized in that: Along the length direction of the vibration arm (1), the height of the rib (4) is not less than 50 um and not greater than 45% of the height of the base (2).

9. A vibration device, characterized in that include: The waisted quartz tuning fork (100) according to any one of claims 1 to 8; A support seat (90) which is glued to the mounting portion (5) to support the waisted quartz tuning fork (100); A packaging component (9) is provided inside which the support seat (90) is arranged and which accommodates the waisted quartz tuning fork (100).

10. An electronic device, characterized in that Comprising the vibration device (200) as claimed in claim 9.

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