Four-arm miniature quartz tuning fork wafer, vibration device and electronic equipment

Abstract

The utility model relates to a four-arm miniature quartz tuning fork wafer, a vibrating device and electronic equipment, the four-arm miniature quartz tuning fork wafer comprises a pair of vibrating arms, a base part and a pair of supporting arms which are connected in sequence, the pair of supporting arms are arranged on the two sides of the vibrating part respectively, each vibrating arm extends in the first direction, and each supporting arm extends in the second direction. Wherein the supporting arm comprises a first straight arm, a bent arm and a second straight arm in the direction far away from the base part, the length ratio of the supporting arm to the bent arm to the first straight arm in the first direction is 8: 2.8-3.2: 2.2-1.4, the bent arm is sunken towards the pair of vibrating arms, and the sunken depth is 28-65 microns. According to the invention, the vibration stress of the dispensing point is reduced, so that the vibration resistance and frequency consistency are improved, and the yield is improved.

Description

Technical Field

[0001] The present application relates to a four-arm micro quartz tuning fork chip, a vibration device, and an electronic device. Background Art

[0002] Electronic devices have built-in vibration devices that function as filters, resonators, reference clock sources, etc. Vibration devices play functions such as timing, timing, event recording, and low-power interruption in electronic devices, and are important unit modules of electronic devices.

[0003] At present, vibration devices generally adopt a quartz tuning fork wafer sealed in a package with a cavity. The quartz tuning fork wafer has a pair of vibration arms arranged in parallel and a base that fixes the base ends of the two vibration arms as a whole in the length direction, wherein a groove is provided on the vibration arm, and an excitation electrode is provided on the vibration arm in accordance with the groove. In addition, an assembly electrode connected to the excitation electrode is formed on the outer surface of the base, and when a predetermined voltage is applied to these electrodes, the excitation electrodes of the pair of vibration arms interact with each other, and the pair of vibration arms vibrate at a predetermined resonant frequency in a direction of approaching or moving away from each other.

[0004] A tuning fork crystal sheet and a tuning fork crystal resonator are disclosed in the relevant documents. The tuning fork crystal sheet includes a fixed portion, a vibrating portion and an electrical connection portion extending outward from one end of the fixed portion. The vibrating portion includes two vibrating arms, and the electrical connection portion includes two electrical connection arms. The opposite sides of the connection end of the electrical connection arm gradually shrink in volume toward the extension direction of the electrical connection arm to form a sharp-angle connection end. The electrical connection arm is penetrated by a support arm through hole on the upper and lower surfaces near the sharp-angle connection end, and a silver glue penetration cavity is formed in the support arm through hole.

[0005] The sharp corners of the tuning fork crystal piece are arranged through the through holes of the support arm, which promotes the penetration of silver glue into the inside to improve the tightness of the connection between the silver glue and the support arm, thereby reducing the influence of vibration stress on the fixation of the glue point. However, the arrangement of the through holes of the support arm will increase the difficulty of the process and weaken the strength of the welding arm.

[0006] With regard to the above-mentioned related technologies, how to reduce the vibration stress of the glue point while avoiding opening holes, so as to reduce the influence of the vibration stress on the fixation of the glue point, is a problem that needs to be solved urgently. Utility Model Content

[0007] In order to reduce the vibration stress at the dispensing point and reduce the influence of the vibration stress on the fixation at the dispensing point, the purpose of the present application is to provide a four-arm miniature quartz tuning fork chip, a vibration device, and an electronic device.

[0008] In the first aspect, the four-arm micro quartz tuning fork chip provided in the present application adopts the following technical solution:

[0009] A four-arm micro quartz tuning fork chip, comprising a pair of vibration arms, a base, and a pair of support arms connected in sequence, wherein the pair of support arms are arranged on both sides of the pair of vibration arms, and the pair of vibration arms extend along a first direction, wherein:

[0010] The support arm includes a first straight arm, a bent arm, and a second straight arm along a direction away from the base. The length ratio of the support arm, the bent arm, and the first straight arm along the first direction is 8:2.8-3.2:2.2-1.4. The bent arm is recessed toward a pair of vibration arms, and the recess depth is 28-65μm.

[0011] By adopting the above technical solution, firstly, the support arm is configured to include a first straight arm, a bent arm, and a second straight arm which are arranged in sequence, and the setting of the bent arm effectively disperses the transmission of vibration energy; secondly, the length of the bent arm and the first straight arm relative to the overall support arm is limited to further reduce the vibration stress; furthermore, under the condition that the length of the bent arm and the first straight arm relative to the overall support arm is certain, the depth of the recess of the bent arm is further limited to improve the effect of improving the vibration stress at the dispensing point, thereby improving the vibration resistance and frequency consistency, and improving the yield.

[0012] Optionally, a length of the first straight arm along the first direction is 140-220 μm.

[0013] By adopting the above technical solution, for the micro quartz tuning fork wafer, the length of the first straight arm is specifically limited to 140-220 μm. Within this length range, the vibration stress of the dispensing point can be reduced.

[0014] Optionally, the curved arm includes a lower oblique arm, a first middle straight arm, and an upper oblique arm which are arranged in sequence away from the first straight arm, and the length of the first middle straight arm along the first direction accounts for 26-34% of the length of the curved arm along the first direction.

[0015] By adopting the above technical solution, the bending arm is set to a bending type, and the length of the first straight arm relative to the bending arm is limited, which reduces the process difficulty while ensuring the effect of reducing the vibration stress of the dispensing point.

[0016] Optionally, a length ratio of the lower oblique arm to the upper oblique arm along the first direction is 1:0.8-1.2.

[0017] By adopting the above technical solution, the lengths of the lower oblique arm and the upper oblique arm along the first direction are controlled to be approximately equal, which reduces the process difficulty and ensures the effect of reducing the vibration stress of the dispensing point.

[0018] Optionally, the bent arm includes a first horizontal arm, a second middle straight arm, and a second horizontal arm which are arranged in sequence away from the first straight arm, wherein the first horizontal arm and the second horizontal arm are both perpendicular to the second middle straight arm.

[0019] By adopting the above technical solution, the bending arm is set to a U-shaped necking to reduce the vibration stress of the dispensing point.

[0020] Optionally, the base is located on both sides of a pair of the vibration arms and is recessed along the second direction with a notch to separate the base into an upper connecting member, a middle connecting member and a lower connecting member that are connected in sequence, wherein a pair of the vibration arms are supported on the end surface of the upper connecting member along the first direction, and a pair of the support arms are respectively provided on the two end surfaces of the lower connecting member along the second direction.

[0021] By adopting the above technical solution, the notch is set to reduce the stress transfer between the vibration arm and the support arm; further, the lower connecting member is protruding from the upper connecting member, and a pair of support arms are arranged at the two end surfaces of the lower connecting member along the second direction, thereby meeting the setting space requirements between the support arm and the vibration arm.

[0022] Optionally, each of the vibration arms includes a vibration rod connected to the base and a hammer head provided at a free end of the vibration rod, wherein along the first direction, a distance between the support arm and the hammer head is 60-200 μm.

[0023] By adopting the above technical solution, the distance between the support arm and the hammer head is set to 60-200 μm, which satisfies the requirement of reducing the vibration stress of the dispensing point while avoiding interference between the hammer head and the support arm.

[0024] In the second aspect, the vibration device provided by the present application adopts the following technical solution:

[0025] Vibration devices, including:

[0026] Four-arm micro-quartz tuning fork wafer;

[0027] A support base, which is glued to the second straight arm to support the four-arm micro quartz tuning fork chip;

[0028] The package has the support seat disposed therein and accommodates the four-arm micro quartz tuning fork chip.

[0029] By adopting the above technical solution, a vibration device is provided which can reduce the vibration stress at the dispensing point and reduce the influence of the vibration stress on the fixation of the dispensing point.

[0030] In a third aspect, the electronic device provided by the present application adopts the following technical solution:

[0031] An electronic device includes a vibration device.

[0032] By adopting the above technical solution, an electronic device is provided which can reduce the vibration stress of the glue dispensing point and reduce the influence of the vibration stress on the fixation of the glue dispensing point.

[0033] In summary, the present application includes at least one of the following beneficial technical effects:

[0034] After the chip is mounted on the corresponding support seat, the vibration arm is electrically excited to vibrate, and the vibration energy will be transmitted to the mounting position (glue dispensing point), thereby affecting the consistency of electrical properties / performance parameters such as frequency and resistance. The present application sets the support arm to include a first straight arm, a bent arm, and a second straight arm arranged in sequence. The setting of the bent arm effectively disperses the transmission of vibration energy; further, the length of the bent arm and the first straight arm relative to the overall support arm is limited, and the depth of the bent arm depression is limited to reduce the vibration stress of the glue dispensing point, thereby improving the vibration resistance and frequency consistency, and improving the yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 is a schematic structural diagram of a four-arm micro quartz tuning fork chip of Example 1 of the present application;

[0036] Figure 2 is a three-dimensional diagram of a four-arm micro quartz tuning fork wafer of Example 1 of the present application;

[0037] Figure 3 It is a schematic structural diagram of a four-arm micro quartz tuning fork chip according to one embodiment of the present application;

[0038] Figure 4 It is a schematic diagram of the structure of the four-arm micro quartz tuning fork chip of Example 1 of the present application.

[0039] Explanation of the accompanying drawings: 1. vibration arm; 10. vibration rod; 11. hammer head; 12. groove; 2. base; 20. upper base member; 21. lower base member; 22. upper connecting member; 23. middle connecting member; 24. lower connecting member; 3. notch; 4. support arm; 5. first straight arm; 6. bent arm; 60. lower oblique arm; 61. first middle straight arm; 62. upper oblique arm; 63. first horizontal arm; 64. second middle straight arm; 65. second horizontal arm; 7. second straight arm. DETAILED DESCRIPTION

[0040] The following is combined with Figure 1 -Attached Figure 4 , further details of this application are given.

[0041] Embodiment 1:

[0042] Embodiment 1 of the present application discloses a four-arm micro quartz tuning fork chip, referring to Figure 1 and Figure 2 The four-arm micro quartz tuning fork chip includes a vibration part, a base 2, and a pair of support arms 4 which are connected in sequence.

[0043] First of all, it should be noted that Figure 1The first direction is the length direction of a pair of vibration arms 1, that is, the Y direction; the second direction is parallel to the paper direction and perpendicular to the Y direction, that is, the X direction; the direction perpendicular to the paper direction and perpendicular to the Y direction is the Z direction.

[0044] The vibration part includes a pair of vibration arms 1 parallel to each other, each vibration arm 1 extending along a first direction; in one embodiment, each vibration arm 1 can be a reference Figure 1 , including hammer head 11; can also be a reference Figure 3 , does not include the hammer 11; in this embodiment, each vibration arm 1 includes a hammer 11, specifically, each vibration arm 1 includes a vibration rod 10 connected to the base 2, and a hammer 11 provided at the free end of the vibration rod 10. Further, in this embodiment, a pair of vibration arms 1 are provided with grooves 12, and the grooves 12 are extended along the Y direction. The pair of vibration arms 1 cooperate with the grooves 12 to form an excitation electrode (not shown) for causing the pair of vibration arms 1 to vibrate.

[0045] The base 2 is used to connect the vibration part and a pair of support arms 4, and the pair of support arms 4 are arranged on both sides of the vibration part to form a four-arm fork.

[0046] Regarding the base 2, in one embodiment, refer to Figure 3 The base 2 is arranged in a convex shape, including an upper base member 20 and a lower base member 21 which are stacked (integrally formed) in sequence away from the vibration part, the width of the lower base member 21 along the second direction is greater than the width of the upper base member 20 along the second direction, that is, both ends of the lower base member 21 along the second direction protrude from the upper base member 20, the vibration part support is arranged on the end surface of the upper base member 20 along the first direction (the side opposite to the connection end surface of the lower base member 21), and a pair of support arms 4 are respectively arranged on the two end surfaces of the lower base member 21 along the second direction;

[0047] In this embodiment, refer to Figure 1 and Figure 2 The base 2 is located on both sides of the vibration part and is recessed along the second direction with a notch 3 to separate the base 2 into an upper connecting member 22, a middle connecting member 23 and a lower connecting member 24 which are connected in sequence. The vibration part support is arranged on the end surface of the upper connecting member 22 along the first direction. The width of the lower connecting member 24 along the second direction is greater than the width of the upper connecting member 22 along the second direction, that is, the two ends of the lower connecting member 24 along the second direction protrude from the upper connecting member 22, and a pair of support arms 4 are arranged at the two end surfaces of the lower connecting member 24 along the second direction.

[0048] Each support arm 4 includes a first straight arm 5, a bent arm 6, and a second straight arm 7 connected in sequence in a direction away from the base 2. In this embodiment, an assembly electrode (not shown) is formed on the support arm 4, and the assembly electrode and the excitation electrode are electrically connected. The second straight arm 7 is used to assemble the quartz tuning fork chip in the package described later, that is, to be glued to the subsequent support seat. The assembly electrode is formed with a conductive connection point on each second straight arm 7 to form a glue point; a predetermined voltage is applied to the excitation electrode through the glue point, and the excitation electrodes of a pair of vibration arms 1 interact with each other, causing the pair of vibration arms 1 to vibrate at a predetermined resonant frequency in a direction of approaching or moving away from each other.

[0049] The first straight arm 5 and the second straight arm 7 are both extended along the first direction, and the length ratio of the support arm 4, the curved arm 6, and the first straight arm 5 along the first direction is 8:2.8-3.2:2.2-1.4, wherein, referring to Figure 1 , the length of the support arm 4 along the first direction is H2, the length of the bent arm 6 along the first direction is H3, H3=H31+H32+H33, and the length of the first straight arm 5 along the first direction is H4; that is, H2:H4=8:2.2-1.4. Specifically, the length ratio of the support arm 4 and the first straight arm 5 along the first direction can be 8:2.2, 8:1.8, or 8:1.4;

[0050] H2:H3=8:2.8-3.2, the length ratio of the support arm 4 and the curved arm 6 along the first direction can be 8:2.8, 8:3.0, or 8:3.2; the length ratio of the support arm 4, the curved arm 6, and the first straight arm 5 can be within the range of 8:2.8-3.2:2.2-1.4.

[0051] For a micro quartz tuning fork wafer, the length range along the first direction can be set to 1.15mm-1.25mm, and the width range along the second direction can be set to 0.55mm-0.65mm. Exemplarily, the length of the first straight arm 5 along the first direction is 140-220μm, and the length of the first straight arm 5 along the first direction can be 140μm, 180μm, or 220μm, as long as the set length can achieve the effect of reducing the vibration stress of the dispensing point.

[0052] The bent arm 6 is concave toward the vibration part, and the concave depth is 28-65 μm, refer to Figure 1 The depth of the depression is S1, that is, the maximum distance between the outer wall of the first straight arm 5 along the second direction and the inner wall of the depression, that is, reference Figure 1 As shown in S1, the recess depth can be 28 μm, 48 μm, or 65 μm, as long as the set depth can achieve the effect of reducing the vibration stress of the dispensing point.

[0053] The bent arm 6 can be any one of a bent shape, an arc shape, and a U shape; in this embodiment, refer to Figure 1 and Figure 2 The bent arm 6 is a bending type, including a lower oblique arm 60, a first middle straight arm 61, and an upper oblique arm 62 which are arranged in sequence away from the first straight arm 5. The lower oblique arm 60 and the upper oblique arm 62 are both inclined, and the first middle straight arm 61 extends along the first direction; in order to reduce the difficulty of etching, the length of the first middle straight arm 61 along the first direction accounts for 26-34% of the length of the bent arm 6 along the first direction, that is, along the first direction, the length H32 of the first middle straight arm 61 can account for 26% of the length H3 of the bent arm 6, H32 can also account for 30% of H3, and H32 can also account for 34% of the length of H3.

[0054] In another embodiment, the length ratio of the lower oblique arm 60 to the upper oblique arm 62 along the first direction is 1:0.8-1.2, that is, H33:H31 may be 1:0.8, H33:H31 may also be 1:1.0, or H33:H31 may also be 1:1.2.

[0055] In another embodiment, along the first direction, the distance H1 between the support arm 4 and the hammer head 11 is 60-200 μm, that is, the distance between the support arm 4 and the hammer head 11 can be 30 μm, the distance between the support arm 4 and the hammer head 11 can be 150 μm, and the distance between the support arm 4 and the hammer head 11 can be 200 μm.

[0056] Embodiment 2:

[0057] Example 2 of the present application discloses a four-arm micro quartz tuning fork chip, referring to Figure 4 The difference between this embodiment and embodiment 1 is that the bent arm 6 includes a first horizontal arm 63, a second middle straight arm 64, and a second horizontal arm 65 which are sequentially arranged away from the first straight arm 5, wherein the first horizontal arm 63 and the second horizontal arm 65 are both perpendicular to the second middle straight arm 64, that is, the first horizontal arm 63 and the second horizontal arm 65 are arranged along the second direction, and the second middle straight arm 64 is arranged along the first direction.

[0058] Embodiment 3:

[0059] Embodiment 3 of the present application discloses a vibration device. The vibration device includes a four-arm micro quartz tuning fork wafer, a support seat and a packaging component;

[0060] The support base is glued to the second straight arm 7 of the chip to support the four-arm micro quartz tuning fork chip, that is, the four-arm micro quartz tuning fork chip is supported and positioned by the support base;

[0061] The packaging component includes a container and a cover for packaging the container. A support seat is arranged in the container, and the four-arm micro quartz tuning fork chip is accommodated. Then, the four-arm micro quartz tuning fork chip is packaged through the cover to package the four-arm micro quartz tuning fork chip and accommodate the four-arm micro quartz tuning fork chip.

[0062] In one embodiment, for a four-arm micro quartz tuning fork wafer, the length range along the first direction can be set to 1.15 mm-1.25 mm, and the width range along the second direction can be set to 0.55 mm-0.65 mm.

[0063] Furthermore, the cavity size of the container for encapsulating the four-arm micro quartz tuning fork wafer can be set to a length range of 1.35 mm to 1.45 mm along the first direction, and a width range of 0.75 mm to 0.85 mm along the second direction;

[0064] Furthermore, the size of the package can be set to a length range of 1.55 mm to 1.65 mm along the first direction, and a width range of 0.95 mm to 1.05 mm along the second direction.

[0065] Embodiment 4:

[0066] Embodiment 4 of the present application discloses an electronic device, which includes a vibration device, that is, a vibration device that functions as a filter, a resonator, a reference clock source, etc. is built into the electronic device.

[0067] In one embodiment, the electronic device may be a computer, a telephone, a camera, a tablet terminal, a clock, an inkjet ejection device (such as an inkjet printer), a wearable terminal, a television, a video recorder, a car navigation device, or a pager;

[0068] In another embodiment, the electronic device may also be an electronic notepad with communication function, an electronic dictionary, a calculator, an electronic game device, a word processor, a monitor, an electronic telescope, a POS terminal, etc.

[0069] In another embodiment, the electronic device may also be a medical device such as an electronic thermometer, a blood pressure meter, a blood glucose meter, an electrocardiogram measuring device, an ultrasonic diagnostic device, or an electronic endoscope;

[0070] In another embodiment, the electronic device may also be a fish finder, various measuring equipment, measuring instruments for vehicles, aircraft, and ships, a base station for portable terminals, a flight simulator, and the like.

[0071] test

[0072] Based on Example 1, the length H1 of the support arm is set to 800μm, the length H1 of the bending arm is set to 300μm, the depth S1 of the recess is set to 48μm, and the length H4 of the first straight arm is adjusted to 140μm, 180μm, 220μm, and 260μm, respectively. The stress state of the tuning fork chip is analyzed by simulation, and the stress conditions corresponding to the glue point are obtained. It can be seen that when H4=140μm-220μm, the stress at the glue point is 1 order of magnitude. When it increases to 260μm, the stress at the glue point increases.

[0073] Based on Example 1, the length H1 of the support arm is set to 800μm, the length H1 of the bent arm is set to 300μm, the length ratio H4 of the first straight arm is set to 220μm, and the depression depth S1 is adjusted to 48μm, 28μm, and 18μm. The stress state of the tuning fork chip is analyzed by simulation, and the stress conditions corresponding to the glue point are obtained. It can be seen that when S1=28μm-48μm, the vibration stress at the glue point is 1 order of magnitude. When it is reduced to 18μm, the stress at the glue point increases.

[0074] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A four-arm micro quartz tuning fork chip, characterized in that: The invention comprises a pair of vibration arms (1), a base (2), and a pair of support arms (4) which are sequentially connected, wherein the pair of support arms (4) are arranged on both sides of the vibration part, and each of the vibration arms (1) extends along a first direction, wherein: The support arm (4) comprises a first straight arm (5), a bent arm (6), and a second straight arm (7) along a direction away from the base (2); the length ratio of the support arm (4), the bent arm (6), and the first straight arm (5) along a first direction is 8:2.8-3.2:2.2-1.4; the bent arm (6) is recessed toward the pair of vibration arms (1), and the recess depth is 28-65 μm.

2. The four-arm micro quartz tuning fork chip according to claim 1, characterized in that: The length of the first straight arm (5) along the first direction is 140-220 μm.

3. The four-arm micro quartz tuning fork chip according to claim 1, characterized in that: The curved arm (6) comprises a lower oblique arm (60), a first middle straight arm (61), and an upper oblique arm (62) which are arranged in sequence away from the first straight arm (5); the length of the first middle straight arm (61) along the first direction accounts for 26-34% of the length of the curved arm (6) along the first direction.

4. The four-arm micro quartz tuning fork chip according to claim 3, characterized in that: The length ratio of the lower oblique arm (60) to the upper oblique arm (62) along the first direction is 1:0.8-1.

2.

5. The four-arm micro quartz tuning fork chip according to claim 1, characterized in that: The curved arm (6) comprises a first horizontal arm (63), a second middle straight arm (64), and a second horizontal arm (65) which are arranged in sequence away from the first straight arm (5), wherein the first horizontal arm (63) and the second horizontal arm (65) are both perpendicular to the second middle straight arm (64).

6. The four-arm micro quartz tuning fork chip according to claim 1, characterized in that: The base (2) is located on both sides of a pair of vibration arms (1) and is recessed along the second direction and has a notch (3) to separate the base (2) into an upper connecting member (22), a middle connecting member (23) and a lower connecting member (24) which are connected in sequence, wherein a pair of vibration arms (1) are supported on the end surfaces of the upper connecting member (22) along the first direction, and a pair of support arms (4) are respectively arranged on the two end surfaces of the lower connecting member (24) along the second direction.

7. The four-arm micro quartz tuning fork chip according to claim 1, characterized in that: Each of the vibration arms (1) comprises a vibration rod (10) connected to the base (2) and a hammer head (11) arranged at the free end of the vibration rod (10), wherein along the first direction, the distance between the support arm (4) and the hammer head (11) is 60-200 μm.

8. A vibration device, characterized in that include: The four-arm micro quartz tuning fork chip according to any one of claims 1 to 7; A support base, which is glued to the second straight arm (7) to support the four-arm micro quartz tuning fork chip; The package has the support seat disposed therein and accommodates the four-arm micro quartz tuning fork chip.

9. An electronic device, characterized in that Comprising the vibration device as claimed in claim 8.

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