Single-stage corrugated pipe full-vacuum isolation angle valve for semiconductor equipment

Abstract

The utility model discloses a single-stage corrugated pipe full vacuum isolation angle valve for semiconductor equipment, which relates to the technical field of semiconductor equipment and comprises a valve body and a reinforcing component, a control valve rod is vertically mounted in the valve body, and the reinforcing component for preventing looseness is arranged at the upper end of the control valve rod. And the reinforcing assembly comprises a hand wheel, connecting rods, a synchronous ring, hydraulic rods and a reinforcing frame, the connecting rods are installed at the front end and the rear end of the hand wheel, the lower ends of the connecting rods are connected with the synchronous ring, the hydraulic rods are arranged at the upper ends of the two sides of the synchronous ring, and the reinforcing frame is installed at the output ends of the hydraulic rods. According to the single-stage corrugated pipe full-vacuum isolation angle valve for the semiconductor equipment, a synchronizing ring synchronously rotates when a hand wheel rotates, so that a hydraulic rod and a reinforcing frame are located above the hand wheel, the hydraulic rod controls height position adjustment of the reinforcing frame through stretching and retracting, and the reinforcing frame is downwards clamped to the outer side of the hand wheel through the hydraulic rod; the hand wheel is prevented from loosening, and the hand wheel is pressed down at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a single-stage bellows full-vacuum isolation angle valve for semiconductor equipment. Background Art

[0002] Semiconductor equipment refers to the instruments and equipment used to manufacture semiconductor devices and is the core of the semiconductor industry. The single-stage bellows on semiconductor equipment is a common structure used in pipeline systems for transporting liquids or gases. During transportation, a full vacuum isolation angle valve is used to control the opening and closing.

[0003] However, after being manually closed, the full vacuum isolation angle valve on the existing semiconductor equipment is prone to loosening, resulting in poor closing effect inside the valve, thereby affecting the transportation of the single-stage bellows in the semiconductor equipment.

[0004] Therefore, in view of this, research and improvement are conducted on the existing structure and defects, and a single-stage bellows full vacuum isolation angle valve for semiconductor equipment is provided. Utility Model Content

[0005] The utility model aims to provide a single-stage bellows full vacuum isolation angle valve for semiconductor equipment to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a single-stage bellows full-vacuum isolation angle valve for semiconductor equipment, comprising a valve body and a reinforcement assembly, a control valve stem is vertically installed inside the valve body, the reinforcement assembly for preventing loosening is arranged at the upper end of the control valve stem, and the reinforcement assembly comprises a handwheel, a connecting rod, a synchronization ring, a hydraulic rod and a reinforcement frame, the front and rear ends of the handwheel are equipped with connecting rods, and the lower end of the connecting rod is connected to the synchronization ring, the upper ends of both sides of the synchronization ring are equipped with hydraulic rods, and the output ends of the hydraulic rods are equipped with reinforcement frames.

[0007] Furthermore, the reinforcement frame and the hydraulic rod are symmetrically arranged in two groups about the center line of the synchronization ring, and the reinforcement frame and the hand wheel are snap-connected.

[0008] Furthermore, a bottom flange is connected to the lower end of the valve body, and the bottom flange and the valve body are welded.

[0009] Furthermore, a side interface is connected to the side of the valve body, and the valve body and the side interface are an integrated structure.

[0010] Furthermore, limit rings are arranged above and below the synchronizing ring, and the synchronizing ring and the valve body are sleeve-connected.

[0011] Furthermore, the end of the side interface is connected to a side flange, and a protective component for preventing blockage is arranged inside the side flange.

[0012] Furthermore, the protection component includes a mounting groove and a filter screen, and the filter screen is arranged inside the mounting groove.

[0013] Furthermore, the protection component also includes a mounting ring and a sealing gasket. The end of the filter screen is installed with a mounting ring, and the side of the mounting ring is provided with a sealing gasket.

[0014] The utility model provides a single-stage bellows full vacuum isolation angle valve for semiconductor equipment, which has the following beneficial effects:

[0015] 1. The utility model drives the control valve stem to open and close the valve body by rotating the handwheel, and the synchronization ring rotates synchronously with the handwheel through the connecting rod, so that the hydraulic rod and the reinforcement frame are located above the handwheel. The hydraulic rod controls the height position adjustment of the reinforcement frame by telescoping, and the reinforcement frame is clamped downward on the outside of the handwheel through the hydraulic rod, which prevents the handwheel from loosening and also presses it down.

[0016] 2. The utility model uses a limit ring to prevent the synchronous ring from moving in the vertical direction when the synchronous ring rotates synchronously outside the valve body. The installation groove is used for the clamping installation of the installation ring. The filter screen plays a filtering role in the side interface and the side flange to avoid blockage caused by accumulation of impurities inside the valve body. The sealing gasket fills the installation groove and covers the outside of the installation ring to increase the sealing degree. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the overall structure of a single-stage bellows full vacuum isolation angle valve for semiconductor equipment of the utility model;

[0018] Figure 2 This is a schematic diagram of the structure of a reinforcement component of a single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to the utility model;

[0019] Figure 3 The utility model is a schematic diagram of the structure of a protective component of a single-stage bellows full-vacuum isolation angle valve for semiconductor equipment.

[0020] In the figure: 1. valve body; 2. control valve stem; 3. reinforcement assembly; 301. hand wheel; 302. connecting rod; 303. synchronization ring; 304. hydraulic rod; 305. reinforcement frame; 4. bottom flange; 5. side interface; 6. side flange; 7. limit ring; 8. protection assembly; 801. installation groove; 802. filter screen; 803. installation ring; 804. sealing gasket. DETAILED DESCRIPTION

[0021] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0022] like Figure 1 As shown, a single-stage bellows full-vacuum isolation angle valve for semiconductor equipment includes a valve body 1 and a reinforcement component 3, a control valve stem 2 is vertically installed inside the valve body 1, a bottom flange 4 is connected to the lower end of the valve body 1, and the bottom flange 4 and the valve body 1 are welded, a side interface 5 is connected to the side of the valve body 1, and the valve body 1 and the side interface 5 are an integrated structure, limit rings 7 are arranged above and below the synchronization ring 303, the limit ring 7 prevents the synchronization ring 303 from moving in the vertical direction when the synchronization ring 303 rotates synchronously outside the valve body 1, and the synchronization ring 303 and the valve body 1 are sleeve-connected, and the end of the side interface 5 is connected to the side flange 6.

[0023] like Figure 2 As shown, the reinforcement component 3 for preventing loosening is arranged at the upper end of the control valve stem 2, and the reinforcement component 3 includes a hand wheel 301, a connecting rod 302, a synchronization ring 303, a hydraulic rod 304 and a reinforcement frame 305. The front and rear ends of the hand wheel 301 are installed with the connecting rod 302. The hand wheel 301 rotates to drive the control valve stem 2 to open and close the valve body 1, and the lower end of the connecting rod 302 is connected to the synchronization ring 303. The synchronization ring 303 rotates synchronously when the hand wheel 301 rotates through the connecting rod 302, so that the hydraulic rod 304 and the reinforcement frame 305 are located at Above the handwheel 301, hydraulic rods 304 are provided at the upper ends of both sides of the synchronous ring 303. The hydraulic rods 304 adjust the height position of the reinforcement frame 305 by telescopic control, and the output end of the hydraulic rod 304 is installed with the reinforcement frame 305. The reinforcement frame 305 and the hydraulic rod 304 are symmetrically arranged in two groups about the center line of the synchronous ring 303, and the reinforcement frame 305 and the handwheel 301 are snap-fitted. The reinforcement frame 305 is snapped downward on the outside of the handwheel 301 through the hydraulic rod 304, which prevents the handwheel 301 from loosening and also presses it down.

[0024] like Figure 3 As shown, a protective component 8 for preventing clogging is arranged inside the side flange 6, and the protective component 8 includes a mounting groove 801 and a filter screen 802, and the filter screen 802 is arranged inside the mounting groove 801, and the mounting groove 801 is used for the snap-fit ​​installation of the mounting ring 803, and the filter screen 802 plays a filtering role in the side interface 5 and the side flange 6 to avoid clogging caused by accumulation of impurities inside the valve body 1. The protective component 8 also includes a mounting ring 803 and a sealing gasket 804, and the mounting ring 803 is installed at the end of the filter screen 802, and the side of the mounting ring 803 is provided with a sealing gasket 804, and the sealing gasket 804 fills the mounting groove 801 and covers the outside of the mounting ring 803 to increase the sealing degree.

[0025] In summary, the semiconductor equipment uses a single-stage bellows full vacuum isolation angle valve, first according to Figure 1-Figure 3In the structure shown in the figure, the valve body 1 is connected to the single-stage bellows on the semiconductor device through the bottom flange 4 and the side flange 6. The filter screen 802 plays a filtering role in the side interface 5 and the side flange 6 to avoid blockage caused by accumulation of impurities inside the valve body 1. At the same time, the sealing gasket 804 fills the installation groove 801 and covers the outside of the installation ring 803, so that the side flange 6 has good sealing performance when connected. When opening and closing, the hand wheel 301 is rotated to drive the control valve stem 2 to open and close the valve body 1. When the hand wheel 301 is rotated, the synchronous ring 3 03 is made to rotate synchronously in the limit ring 7 when the hand wheel 301 rotates through the connecting rod 302. The limit ring 7 prevents the synchronous ring 303 from moving in the vertical direction when the synchronous ring 303 rotates synchronously outside the valve body 1, so that the hydraulic rod 304 and the reinforcement frame 305 are located above the hand wheel 301. When the hand wheel 301 rotates to close the valve body 1, the hydraulic rod 304 is controlled to extend and retract to drive the reinforcement frame 305 to engage downward on the outside of the hand wheel 301, which prevents the hand wheel 301 from loosening and also presses down to increase the sealing degree.

[0026] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment, comprising a valve body (1) and a reinforcement component (3), characterized in that: A control valve stem (2) is vertically installed inside the valve body (1); the reinforcement component (3) for preventing loosening is arranged at the upper end of the control valve stem (2); and the reinforcement component (3) comprises a hand wheel (301), a connecting rod (302), a synchronization ring (303), a hydraulic rod (304) and a reinforcement frame (305); the connecting rod (302) is installed at the front and rear ends of the hand wheel (301); the lower end of the connecting rod (302) is connected to the synchronization ring (303); the upper ends of both sides of the synchronization ring (303) are provided with hydraulic rods (304); and the output end of the hydraulic rod (304) is installed with a reinforcement frame (305).

2. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 1, characterized in that: The reinforcement frame (305) and the hydraulic rod (304) are symmetrically arranged in two groups about the center line of the synchronization ring (303), and the reinforcement frame (305) and the hand wheel (301) are in a snap-fit ​​connection.

3. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 1, characterized in that: The lower end of the valve body (1) is connected to a bottom flange (4), and the bottom flange (4) and the valve body (1) are connected by welding.

4. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 1, characterized in that: The side edge of the valve body (1) is connected to a side interface (5), and the valve body (1) and the side interface (5) are an integrated structure.

5. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 1, characterized in that: Limiting rings (7) are arranged above and below the synchronizing ring (303), and the synchronizing ring (303) and the valve body (1) are sleeve-connected.

6. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 4, characterized in that: The end of the side interface (5) is connected to a side flange (6), and a protective component (8) for preventing blockage is arranged inside the side flange (6).

7. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 6, characterized in that: The protection component (8) comprises a mounting groove (801) and a filter screen (802), and the filter screen (802) is arranged inside the mounting groove (801).

8. A single-stage bellows full vacuum isolation angle valve for semiconductor equipment according to claim 7, characterized in that: The protection assembly (8) further comprises a mounting ring (803) and a sealing gasket (804); the end of the filter screen (802) is mounted with the mounting ring (803), and the side of the mounting ring (803) is provided with a sealing gasket (804).

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