Hot plate cleaning device

Abstract

The utility model relates to a hot plate cleaning device. A hot plate cleaning device is used for cleaning a hot plate and comprises a shell, a first opening is formed in the side, away from the hot plate, of the shell, and a second opening is formed in the side, close to the hot plate, of the shell; the driving piece is arranged at the first opening of the shell, the driving piece comprises a mounting end and a driving end, and the driving end faces the interior of the shell; the first end of the rotating part is connected with the driving end of the driving part, the rotating part is driven by the driving part to rotate, and the second end of the rotating part faces the hot plate; and the cleaning assembly is arranged on the rotating part and rotates along with the rotating part, and the cleaning assembly is arranged in the second opening and used for cleaning the hot plate. According to the hot plate cleaning device, the hot plate can be automatically cleaned through the sweeping assembly.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a hot plate cleaning device. Background Art

[0002] Semiconductor coating developers usually use hot plates to control the temperature of the developer during the development process. A hot plate is a heating device that usually consists of an electric heating element, a heating plate, and a temperature control system. In the semiconductor manufacturing process, the development process needs to be carried out at a certain temperature to ensure the effectiveness and stability of the developer. During the manufacturing process, dust easily accumulates on the hot plate surface and needs to be cleaned.

[0003] In traditional technology, the cleaning of the hot plate is done manually. However, due to the small space inside the hot plate and the poor viewing angle, it is very difficult to clean, resulting in dust on the edge being difficult to remove. Dust easily adheres to the hot plate and contaminates the back of the wafer. Utility Model Content

[0004] Based on this, it is necessary to provide a hot plate cleaning device to address the technical problem that the hot plate is difficult to clean.

[0005] The utility model provides a hot disk cleaning device for cleaning a hot disk, the hot disk cleaning device comprising: a shell, a first opening is provided on a side of the shell away from the hot disk, and a second opening is provided on a side close to the hot disk; a driving member is arranged at the first opening of the shell, the driving member comprises a mounting end and a driving end, the driving end faces the inside of the shell; a rotating member, the first end of the rotating member is connected to the driving end of the driving member and is driven to rotate by the driving member, the second end of the rotating member faces the hot disk; and a cleaning component is arranged on the rotating member and is constructed to rotate with the rotating member, the cleaning component is configured at the second opening, and is used for cleaning the hot disk.

[0006] In the above-mentioned hot plate cleaning device, the side of the shell close to and away from the hot plate is respectively provided with a second opening and a first opening, the driving member is arranged at the first opening, the driving end of the driving member faces the inside of the shell, and is connected to the cleaning component through a rotating member, so that the cleaning component is located at the second opening and faces the hot plate. The driving member can drive the cleaning component to rotate through the rotating member, thereby cleaning the hot plate. Compared with the solution of manual cleaning in the traditional technology, the hot plate cleaning device provided by the utility model can realize automatic cleaning of the hot plate through the cleaning component.

[0007] In one embodiment, the hot plate cleaning device further comprises a support member, wherein a through hole is provided inside the support member, wherein a first end of the through hole is connected to the inside of the shell, and a second end of the through hole is used to connect to an exhaust member. The support member can be used as a gripping portion of a user, and the hot plate cleaning device can be moved by gripping the support member. Optionally, the exhaust member can be an exhaust device such as an air pump, which can exhaust air inside the shell to form a negative pressure in the shell, so that when the cleaning component sweeps up the dust on the hot plate, it can be sucked out by the exhaust member.

[0008] In one embodiment, the support member is a support rod, and a through hole inside the support rod is provided with a pipeline. When the support member is a rod-shaped structure, the user can hold the support member and extend the shell into the hot plate for cleaning. When the space where the hot plate is located is small, the shell can be extended into the space where the hot plate is located by holding the support member to clean it.

[0009] In one embodiment, a telescopic mechanism is provided on the side of the housing away from the hot plate, and the telescopic end of the telescopic mechanism is connected to the mounting end of the driving member, and is used to drive the driving member to move in a direction close to or away from the hot plate. When the telescopic end of the telescopic mechanism is extended, the driving member is driven to move in a direction away from the hot plate, thereby increasing the distance between the cleaning component and the hot plate and reducing the pressure between the two; when the telescopic end of the telescopic mechanism is shortened, the driving member is driven to move in a direction close to the hot plate, thereby reducing the distance between the cleaning component and the hot plate and increasing the pressure between the two.

[0010] In one embodiment, the telescopic mechanism includes a cylinder assembly and a pressure detector, wherein the pressure detector is used to detect the pressure of a piston in the cylinder assembly. The pressure of the piston in the cylinder assembly can reflect the telescopic length of the piston, thereby reflecting the cleaning strength of the cleaning assembly.

[0011] In one embodiment, the hot plate cleaning device further includes a controller, which is electrically connected to the driving member, the cylinder assembly and the pressure detector, and is used to control the start and stop of the driving member, and is also used to control the cylinder assembly based on the pressure value detected by the pressure detector to control the movement of the driving member. When the pressure value detected by the pressure detector is too low, the controller controls the piston to contract to increase the pressure based on the pressure value, and when the pressure value detected by the pressure detector is too high, the controller controls the piston to extend to reduce the pressure based on the pressure value.

[0012] In one embodiment, the hot plate cleaning device further comprises a touch control module, and the touch control module is electrically connected to the controller, so that the user can conveniently operate the touch control module to control the driving member, the cylinder assembly and the pressure detector.

[0013] In one embodiment, the cleaning assembly includes one or more first brush heads and a second brush head, wherein the rotation path of the first brush head is located within the rotation path of the second brush head. The first brush head can clean the surface of the hot plate, and the second brush head can clean the peripheral area of ​​the hot plate.

[0014] In one embodiment, the first brush head is disposed at the second end of the rotating member, the second brush head is located between the rotating member and the housing, and the second brush head is connected to the first end of the rotating member via a connecting member. The second brush head can clean the gap between the hot plate and other structures.

[0015] In one embodiment, when the cleaning assembly includes a plurality of first brush heads, the plurality of first brush heads are evenly distributed at the second end of the rotating member. The even distribution can improve the cleaning effect of the first brush heads on the surface of the hot plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG1 is a diagram showing the positional relationship between a hot plate cleaning device and a hot plate in one embodiment;

[0017] FIG2 is a schematic structural diagram of a hot plate cleaning device in one embodiment;

[0018] FIG3 is a schematic diagram of the connection relationship between the cleaning component and the rotating member in one embodiment;

[0019] FIG. 4 is a schematic structural diagram of an embodiment in which a cleaning component has a plurality of first brush heads.

[0020] Description of reference numerals:

[0021] 10. Hot plate cleaning device; 11. Shell; 12. Driving member; 13. Rotating member; 14. Cleaning assembly; 141. First brush head; 142. Second brush head; 143. Connecting member; 15. Support member; 151. Through hole; 16. Telescopic mechanism; 161. Cylinder assembly; 162. Pressure detector; 17. Touch module; 20. Hot plate. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0025] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0026] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0027] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0028] Semiconductor coating developers usually use a hot plate to control the temperature of the developer during the development process. The hot plate is a heating device that usually consists of an electric heating element, a heating plate, and a temperature control system. In the semiconductor manufacturing process, the development process needs to be carried out at a certain temperature to ensure the effect and stability of the developer.

[0029] The working principle of the hot plate is to generate heat through the electric heating element, conduct it to the heating plate, and then the heating plate transfers the heat to the developer, so that the developer is kept at the required temperature. The temperature control system can monitor the temperature of the developer and adjust the working state of the electric heating element according to the set value to maintain the stability of the developer temperature.

[0030] During the use of hot plates, due to the influence of semiconductor manufacturing process, some hot plate surfaces are dirty and easily accumulate dust, causing pollution to wafers. Therefore, the utility model provides a hot plate cleaning device capable of cleaning the hot plate surface.

[0031] Referring to FIG. 1 and FIG. 2 , FIG. 1 shows a positional relationship diagram of a hot disk cleaning device 10 and a hot disk 20 in one embodiment of the utility model. A hot disk cleaning device 10 provided in one embodiment of the utility model is used to clean a hot disk 20. FIG. 2 shows a schematic structural diagram of a hot disk cleaning device 10 in one embodiment of the utility model. The hot disk cleaning device 10 includes a housing 11, a driving member 12, a rotating member 13 and a cleaning assembly 14. The driving member 12, the rotating member 13 and the cleaning assembly 14 are arranged in the housing 11, and the housing 11 plays a role in protecting the internal structure. The driving member 12 is used to drive the rotating member 13 to rotate. The cleaning assembly 14 is arranged on the rotating member 13 and can rotate with the rotating member 13 to clean the hot disk 20.

[0032] Specifically, a first opening is provided on a side of the housing 11 away from the hot plate 20, the driving member 12 is provided at the first opening of the housing, a second opening is provided on a side of the housing 11 close to the hot plate 20, and the cleaning assembly 14 is provided at the second opening. Optionally, the driving member 12 and the housing 11 may be movably connected or fixedly connected, and when movably connected, the driving member 12 may move relative to the housing 11 at the first opening. Optionally, the opening area of ​​the first opening is smaller than that of the second opening, and the opening area of ​​the first opening only needs to be sufficient to accommodate the driving member 12. Since the cleaning assembly 14 is to be extended from the second opening, the opening area of ​​the second opening is larger.

[0033] The driving member 12 includes a mounting end and a driving end, wherein the mounting end is the side where the driving member 12 is mounted, and the driving end is the side where the drive output is provided, wherein the driving end faces the interior of the housing 11, thereby being connected to a rotating member 13 located inside the housing 11. This arrangement enables the driving member 12 to rotate inside the housing 11, and the housing 11 can block dust, impurities, etc. swept up by the cleaning component 14. Optionally, the driving member 12 can be a driving motor, wherein the base of the driving motor is the mounting end, and the output shaft is the driving end, and after the output shaft is connected to the rotating member 13, it can drive the rotating member 13 to rotate. Optionally, the driving member 12 can be a reduction motor, which is a motor that can reduce the output speed and increase the output torque through a built-in reduction device, thereby enhancing the cleaning effect.

[0034] The first end of the rotating member 13 is connected to the driving end of the driving member 12, and is driven to rotate by the driving member, and the second end of the rotating member 13 faces the hot plate 20, so that the cleaning assembly 14 faces the hot plate 20. When the rotating member 13 rotates, the cleaning assembly 14 can rotate accordingly to clean the hot plate 20. Optionally, the rotating member 13 can be a disc structure, and the driving end of the driving member 12 is connected to the center position of the disc structure, so that the disc can rotate with its center as the rotation center.

[0035] Specifically, the cleaning assembly 14 is disposed on the rotating member 13 and is configured to rotate with the rotating member 13. In a feasible implementation, the cleaning assembly 14 is detachably connected or fixedly connected to the rotating member 13 to achieve common rotation. The cleaning assembly 14 is disposed behind the rotating member 13 and is configured at the second opening for cleaning the hot plate 20.

[0036] In the above-mentioned hot plate cleaning device 10, the side of the housing 11 close to and away from the hot plate 20 is respectively provided with a second opening and a first opening, and the driving member 12 is arranged at the first opening, and the driving end of the driving member 12 faces the inside of the housing 11, and is connected to the cleaning assembly 14 through the rotating member 13, so that the cleaning assembly 14 is located at the second opening and faces the hot plate 20. The driving member 12 can drive the cleaning assembly 14 to rotate through the rotating member 13, thereby achieving cleaning of the hot plate 20. Compared with the solution of manual cleaning in the traditional technology, the hot plate cleaning device provided by the utility model can achieve automatic cleaning of the hot plate 20 through the cleaning assembly 14.

[0037] In an exemplary embodiment, the hot plate cleaning device 10 further includes a support member 15, wherein a through hole 151 is provided inside the support member 15, wherein a first end of the through hole 151 is connected to the inside of the housing 11, and a second end of the through hole 151 is used to connect to an exhaust member (not shown in the figure). The support member 15 can be used as a gripping portion of the user, and the hot plate cleaning device 10 can be moved by holding the support member 15. Optionally, the exhaust member can be an exhaust device such as an air pump, which can exhaust air inside the housing 11 to form a negative pressure in the housing 11, and when the cleaning component 14 sweeps up the dust on the hot plate 20, it can be sucked out by the exhaust member. In this arrangement, when the cleaning component 14 rotates to clean the hot plate 20, some dust is lifted up and enters the inside of the housing 11, and the exhaust member can collect the dust inside the housing 11 by exhausting air.

[0038] Optionally, the support member 15 is a support rod, that is, a rod-shaped structure, a through hole inside the support rod is provided with a pipeline, and the exhaust member is connected to the pipeline. When the support member 15 is a rod-shaped structure, the user can hold the support member 15 and extend the housing 11 into the hot plate 20 for cleaning. When the space where the hot plate 20 is located is small, the housing 11 can be extended into the space where the hot plate 20 is located by holding the support member 15 to clean it.

[0039] In an exemplary embodiment, a telescopic mechanism 16 is further provided on the side of the housing 11 away from the hot plate 20, and the mounting end of the telescopic mechanism 16 is arranged on the housing 11, and the telescopic end is connected to the mounting end of the driving member 12, and is used to drive the driving member 12 to move in a direction close to or away from the hot plate 20. Optionally, the telescopic end can be connected to the mounting end of the driving member 12 by a plate structure or a rod structure. Optionally, the telescopic mechanism 16 can be a cylinder, a hydraulic cylinder, etc. When the telescopic end of the telescopic mechanism 16 is extended, the driving member 12 is driven to move in a direction away from the hot plate 20, at which time the spacing between the cleaning component 14 and the hot plate 20 is increased and the pressure between the two is reduced; when the telescopic end of the telescopic mechanism 16 is shortened, the driving member 12 is driven to move in a direction close to the hot plate 20, at which time the spacing between the cleaning component 14 and the hot plate 20 is reduced and the pressure between the two is increased. Based on this, the cleaning pressure of the cleaning component 14 can be adjusted by controlling the telescopic end of the telescopic mechanism 16 for hot plates with different degrees of dirtiness, and the cleaning intensity can be adjusted.

[0040] Optionally, the telescopic mechanism 16 includes a cylinder assembly 161 and a pressure detector 162, and the pressure detector 162 is used to detect the pressure of the piston in the cylinder assembly 161. The pressure of the piston in the cylinder assembly 161 can reflect the telescopic length of the piston, thereby reflecting the cleaning strength of the cleaning assembly 14. After the piston pressure is detected by the pressure detector 162, the cleaning strength can be intuitively determined. The cylinder assembly is a common mechanical element in the industrial field, which is used to convert gas pressure into mechanical motion or perform specific actions. The cylinder is usually composed of several main components, including a cylinder barrel, a piston, a piston rod, a seal, a cylinder end cover and a connecting rod. The piston is a component that moves inside the cylinder and is usually made of metal, such as aluminum alloy. The piston can move linearly in the cylinder barrel and perform mechanical actions by pushing or pulling by gas pressure. In this embodiment, the movement of the driving member 12 can be controlled by the movement of the piston, thereby driving the rotating member 13 to move.

[0041] Furthermore, the hot disk cleaning device 10 also includes a controller (not shown in the figure), and optionally, the controller can be a computer device or a single chip microcomputer. The controller is electrically connected to the driving member 12, the cylinder assembly 161 and the pressure detector 162, and is used to control the start and stop of the driving member 12, and then control whether the cleaning assembly 14 rotates or not. When the controller controls the driving member 12 to start, the rotating member 13 rotates, and the cleaning assembly 14 rotates accordingly, and the hot disk is cleaned when it contacts the hot disk. When the controller controls the driving member 12 to stop, the rotating member 13 does not rotate. At this time, the cleaning assembly 14 can only be moved manually by the user, and the cleaning effect is deteriorated.

[0042] The controller is also used to control the cylinder assembly 161 based on the pressure value detected by the pressure detector 162 to control the movement of the driving member 12. The controller controls the cylinder assembly 161 to extend, driving the driving member 12 to move in a direction away from the hot plate 20, and the controller controls the cylinder assembly 161 to shorten, driving the driving member 12 to move in a direction close to the hot plate 20. Optionally, after determining the pressure value based on the cleaning intensity, when the pressure value detected by the pressure detector 162 is too low, the controller controls the piston to contract to increase the pressure based on the pressure value, and when the pressure value detected by the pressure detector 162 is too high, the controller controls the piston to extend to reduce the pressure based on the pressure value.

[0043] In one embodiment, the hot plate cleaning device 10 further includes a touch module 17, which is electrically connected to the controller. The controller is controlled by the touch module 17, thereby realizing control of the driving member 12, the cylinder assembly 161, and the pressure detector 162. The touch module 17 can send an electrical signal to the controller in response to the user's touch operation to realize control. The touch module 17 includes sensors and electronic components, which can detect the contact of human fingers or other objects, and convert these touch inputs into electrical signals for interaction with the controller. Optionally, the touch module 17 can be located outside the housing 11, so that the user can operate the touch module 17 conveniently.

[0044] Referring to FIG. 3 , FIG. 3 shows a schematic diagram of the connection relationship between the cleaning component 14 and the rotating member 13 in one embodiment. In one embodiment, the cleaning component 14 includes one or more first brush heads 141 and second brush heads 142, and the rotation path of the first brush head 141 is located within the rotation path of the second brush head 142. Optionally, the first brush head 141 and / or the second brush head 142 can be dust-free brush heads. Optionally, the first brush head can be a brush structure, and the second brush head 142 can be a disc brush structure. With this arrangement, the first brush head 141 can clean the surface of the hot plate 20, and the second brush head 142 can clean the peripheral area of ​​the hot plate 20.

[0045] The rotation path refers to the path that the first brush head 141 and the second brush head 142 pass through when they rotate. When the rotating member 13 rotates, the first brush head 141 and the second brush head 142 both rotate accordingly, so there are rotation paths for the first brush head 141 and the second brush head 142. The rotation path of the first brush head 141 is located within the rotation path of the second brush head 142, which means that the rotation path of the first brush head 141 is a small circle, and the rotation path of the second brush head 142 is a large circle.

[0046] In a feasible implementation, the first brush head 141 is disposed at the second end of the rotating member 13, in contact with the surface of the hot plate 20, and the second brush head 142 is located between the rotating member 13 and the housing 11, and the second brush head 142 is connected to the first end of the rotating member 13 through the connecting member 143. In this configuration, the first brush head 141 can directly clean the surface of the hot plate 20, while the second brush head 142 can clean the edge area of ​​the hot plate 20. Furthermore, the second brush head 142 can also clean the gap between the hot plate 20 and other structures.

[0047] Referring to FIG. 4 , FIG. 4 shows a schematic diagram of the structure when the cleaning component 14 has a plurality of first brush heads 141 in one embodiment. In one embodiment, when the cleaning component 14 includes a plurality of first brush heads 141, the plurality of first brush heads 141 are evenly distributed at the second end of the rotating member. Optionally, evenly distributed means evenly distributed with the center of the rotating member as the center. Optionally, when the number of the first brush heads 141 is three, the three first brush heads 141 are arranged in an equilateral triangle, and when the number of the first brush heads 141 is four, they are arranged in a square, and so on.

[0048] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A hot plate cleaning device, characterized in that: Used for cleaning a hot plate, the hot plate cleaning device comprises: A shell, wherein a first opening is formed on a side of the shell away from the hot plate, and a second opening is formed on a side of the shell close to the hot plate; A driving member, disposed at the first opening of the housing, the driving member comprising a mounting end and a driving end, the driving end facing the interior of the housing; a rotating member, wherein a first end of the rotating member is connected to a driving end of the driving member and is driven to rotate by the driving member, and a second end of the rotating member faces the hot plate; and A cleaning component is disposed on the rotating member and is configured to rotate along with the rotating member. The cleaning component is configured at the second opening and is used for cleaning the hot plate.

2. The hot plate cleaning device according to claim 1, characterized in that: The hot plate cleaning device further comprises a supporting member, wherein a through hole is provided inside the supporting member, a first end of the through hole is communicated with the inside of the shell, and a second end of the through hole is used to be connected with the suction member.

3. The hot plate cleaning device according to claim 2, characterized in that: The supporting member is a supporting rod, and a pipeline is arranged in a through hole inside the supporting rod.

4. The hot plate cleaning device according to claim 1, characterized in that: A telescopic mechanism is provided on one side of the shell away from the hot plate, and a telescopic end of the telescopic mechanism is connected to the mounting end of the driving member to drive the driving member to move in a direction close to or away from the hot plate.

5. The hot plate cleaning device according to claim 4, characterized in that: The telescopic mechanism comprises a cylinder assembly and a pressure detector, and the pressure detector is used to detect the pressure of the piston in the cylinder assembly.

6. The hot plate cleaning device according to claim 5, characterized in that: The hot plate cleaning device also includes a controller, which is electrically connected to the driving member, the cylinder assembly and the pressure detector, and is used to control the start and stop of the driving member, and is also used to control the cylinder assembly based on the pressure value detected by the pressure detector to control the movement of the driving member.

7. The hot plate cleaning device according to claim 6, characterized in that: The hot plate cleaning device further includes a touch control module, and the touch control module is electrically connected to the controller.

8. The hot plate cleaning device according to claim 1, characterized in that: The cleaning assembly includes one or more first brush heads and a second brush head, wherein a rotation path of the first brush head is located within a rotation path of the second brush head.

9. The hot plate cleaning device according to claim 8, characterized in that: The first brush head is arranged at the second end of the rotating member, the second brush head is located between the rotating member and the housing, and the second brush head is connected to the first end of the rotating member through a connecting member.

10. The hot plate cleaning device according to claim 8, characterized in that: When the cleaning component includes a plurality of first brush heads, the plurality of first brush heads are evenly distributed at the second end of the rotating member.

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