Charging barrel of single crystal furnace

Abstract

The utility model provides a charging barrel of a single crystal furnace, which comprises a barrel body, the inside of the barrel body is hollow, a feeding hole is formed in the top of the barrel body, the bottom of the barrel body is sealed, a discharging hole is formed in the side wall of the bottom of the barrel body, and a slot penetrating through the side wall of the barrel body up and down is formed in the side wall of the barrel body corresponding to the upper part of the discharging hole; the baffle assembly can move up and down along the inserting groove, and the baffle assembly is adjusted to ascend and descend so as to open / close the discharging opening; the molybdenum rod penetrates through the feeding opening and is arranged in the cylinder body, and the bottom of the molybdenum rod is connected with the bottom of the cylinder body. According to the feeding barrel of the single crystal furnace, the structure is simple, the operation is convenient, and compared with the design of the existing quartz feeding barrel, the integration degree is high, the damage rate of parts is low, the service life is long, and the feeding controllability is high.

Description

Technical Field

[0001] The utility model relates to the field of single crystal silicon manufacturing, in particular to a charging barrel for a single crystal furnace. Background Art

[0002] In the current single crystal silicon production, the charging barrel of the CZ single crystal furnace is a device used to feed solid raw materials into the furnace for single crystal silicon preparation. Quartz has high heat resistance and chemical stability and can withstand high temperatures and harsh environments, so quartz charging barrels are widely used in single crystal silicon production.

[0003] When adding materials to the single crystal furnace, it is necessary to follow the prescribed method and sequence to avoid splashing, jamming, cone drop, silicon explosion and other problems during the addition of raw materials. In addition, the feeding speed needs to be controlled within a predetermined range to ensure that the raw materials can be fully melted, and to avoid the risk of silicon materials clumping together due to slow or fast feeding, which may cause silicon overflow.

[0004] However, since the quartz cone in the quartz feeding barrel is connected to the quartz barrel by a molybdenum rod, there is a certain gap in the middle, which often causes the quartz cone to crack or fall off during the feeding process. Secondly, in the process of unloading the existing feeding barrel, due to the different sizes of the material blocks, uncontrollable conditions such as material jamming, uneven material feeding, and silicon material accumulation are prone to occur, resulting in one side of the silicon material in the furnace being high and the other side being low, affecting the input of the next barrel of silicon material. Furthermore, with the increase in the proportion of granular materials input during production and the increase in the amount of material input, the material blocks are prone to overflow and furnace simmering accidents after they are rolled over, which seriously affects the single crystal production efficiency. Utility Model Content

[0005] In view of this, the utility model provides a single crystal furnace charging barrel, which has a durable structure and is convenient for controlling and uniformly charging materials into the furnace.

[0006] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0007] The single crystal furnace charging barrel according to the embodiment of the utility model comprises:

[0008] A cylinder, wherein the interior of the cylinder is hollow, a feed port is formed on the top of the cylinder, the bottom of the cylinder is sealed, a discharge port is formed on the side wall of the bottom, and a slot is opened inside the side wall of the cylinder above the discharge port and penetrates the side wall of the cylinder from top to bottom;

[0009] A baffle assembly, the baffle assembly can move up and down along the slot, and the discharge port can be opened / closed by adjusting the lifting of the baffle assembly;

[0010] A molybdenum rod is arranged inside the cylinder through the feed port, and the bottom of the molybdenum rod is connected to the bottom of the cylinder.

[0011] Furthermore, the baffle assembly comprises:

[0012] An inserting plate, which is movably disposed inside the slot;

[0013] A connecting plate, the connecting plate is vertically arranged on the outer side of the side wall of the cylinder, the top end of the connecting plate is connected to the top of the plug plate, and is extended downward from the top end thereof;

[0014] A movable ring is sleeved on the outer side of the cylinder, one end of the movable ring is connected to the bottom end of the connecting plate, and the plug plate is moved up and down by driving the movable ring.

[0015] Furthermore, a boss extending outward is formed on the top of the cylinder.

[0016] The connecting plate includes a first portion extending transversely and a second portion extending vertically, wherein a first end of the first portion close to the central axis of the cylinder is connected to the plug plate, a second end of the first portion away from the central axis of the cylinder is connected to the top end of the second portion, and the second portion is adapted to the shape of the side wall of the cylinder and extends downward until the bottom end is connected to the movable ring.

[0017] The boss is located below the first part and between the second part and the inserting plate.

[0018] Furthermore, the single crystal furnace charging barrel also includes a limiting assembly, which is arranged on the upper half of the outer side wall of the barrel and is located above the movable ring.

[0019] Furthermore, the limiting assembly includes a first limiting ring, the inner side surface of the first limiting ring is connected to the upper half of the outer side wall of the cylinder, and the first limiting ring is located on the inner side of the connecting plate and above the movable ring.

[0020] Furthermore, the outer diameter of the first limiting ring is greater than the inner diameter of the movable ring.

[0021] Furthermore, the limiting assembly also includes a second limiting ring, which is sleeved on the upper half of the outer side wall of the cylinder and is lower than the first limiting ring and higher than the movable ring. The second limiting ring is connected to the first limiting ring at an adjustable distance relative to the first limiting ring by bolts.

[0022] Furthermore, the outer diameter of the second limiting ring is greater than the inner diameter of the movable ring.

[0023] Furthermore, a slope is formed at the bottom of the cylinder relative to the discharge port, and the height of the slope from the bottom of the cylinder gradually increases from the side close to the discharge port to the side far away from the discharge port.

[0024] Furthermore, the molybdenum rod comprises:

[0025] A molybdenum rod body, the bottom of which is screwed to the inclined surface, and the top of which extends out of the feed port;

[0026] A hook is connected to the top of the molybdenum rod body.

[0027] The above technical solution of the utility model has at least one of the following beneficial effects:

[0028] According to the single crystal furnace charging barrel of the embodiment of the utility model, a discharge port is opened on the bottom side wall of the hollow barrel, and a slot penetrating up and down is opened inside the side wall of the barrel corresponding to the position above the discharge port, and a baffle assembly that can be adjusted up and down is provided in the slot, so that when the barrel filled with silicon material is lifted into the single crystal furnace for feeding, the discharge port is opened by controlling the lifting of the baffle assembly to carry out directional feeding into the single crystal furnace. The structure is simple and the operation is convenient. Compared with the existing quartz feeding barrel design, it has a high degree of integration, a low component damage rate, a long service life and a high controllability of feeding.

[0029] In addition, when using the charging barrel of the single crystal furnace according to the embodiment of the utility model to add materials, the crucible in the furnace can be controlled to rotate so that the material is fed into the crucible in the furnace more evenly, and uncontrollable situations such as material jamming and silicon material accumulation in the furnace are less likely to occur, thereby avoiding accidents such as silicon overflow and furnace simmering, and improving the single crystal production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is a three-dimensional structural diagram of a charging barrel of a single crystal furnace according to an embodiment of the utility model;

[0031] Figure 2 A top view of a charging barrel of a single crystal furnace according to an embodiment of the utility model;

[0032] Figure 3 It is a top view of the single crystal furnace charging barrel of the embodiment of the utility model with the baffle assembly removed;

[0033] Figure 4 for Figure 2 AA section view in the figure;

[0034] Figure 5 for Figure 4 An enlarged schematic diagram of the A region in FIG.

[0035] Figure 6 for Figure 4An enlarged schematic diagram of the B region in FIG.

[0036] Figure 7 This is a schematic diagram of the state when the discharge port of the charging barrel of the single crystal furnace of the embodiment of the utility model is closed;

[0037] Figure 8 This is a schematic diagram of a state in which the discharge port of the charging barrel of a single crystal furnace according to an embodiment of the utility model is opened;

[0038] Fig. 9 This is a schematic diagram of the state of the single crystal furnace charging barrel when discharging materials according to an embodiment of the utility model.

[0039] Reference numerals: 100. cylinder; 110. feed port; 120. discharge port; 130. slot; 140. boss; 150. inclined surface;

[0040] 200. baffle assembly; 210. plug plate; 220. connecting plate; 221. first part; 222. second part; 230. movable ring;

[0041] 300. Molybdenum rod; 310. Molybdenum rod body; 320. Hanging buckle;

[0042] 400. Limiting assembly; 410. First limiting ring; 420. Second limiting ring;

[0043] 500. Furnace flange; 600. Crucible. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0045] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. The words "connect" or "connected" and the like are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0046] Below we first combine the attached Figure 1-6 The single crystal furnace charging barrel according to the embodiment of the utility model is described in detail.

[0047] According to the single crystal furnace charging barrel of the utility model, Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, it may include: a cylinder 100 , a baffle assembly 200 and a molybdenum rod 300 .

[0048] Among them, the interior of the cylinder 100 is hollow, a feed port 110 is formed on the top of the cylinder 100, the bottom of the cylinder 100 is sealed, a discharge port 120 is formed on the side wall of the bottom, and a slot 130 is opened inside the side wall of the cylinder 100 above the discharge port 120 and penetrates the side wall of the cylinder 100 from top to bottom.

[0049] The baffle assembly 200 can move up and down along the slot 130 , and the discharge port 120 can be opened / closed by adjusting the lifting of the baffle assembly 200 .

[0050] The molybdenum rod 300 passes through the feed port 110 and is disposed inside the cylinder 100 , and the bottom of the molybdenum rod 300 is connected to the bottom of the cylinder 100 .

[0051] Specifically, according to the single crystal furnace charging barrel of the embodiment of the utility model, a discharge port 120 is provided on the bottom side wall of the hollow cylinder 100, and a slot 130 penetrating vertically is provided inside the side wall of the cylinder 100 corresponding to the position above the discharge port 120. The shape of the slot 130 is adapted to the shape of the side wall of the cylinder 100, that is, it is arc-shaped and the length is equal to the length of the side wall of the cylinder 100. A baffle assembly 200 that can be adjusted up and down is provided in the slot 130, so that when the silicon material is filled into the cylinder 100 from the feed port 110 at the top of the cylinder 100, the cylinder 100 is lifted into the single crystal furnace by the molybdenum rod 300, and the baffle assembly 200 is controlled to lift and then open the discharge port 120 to charge the single crystal furnace. The structure is simple, the operation is convenient, and the controllability of feeding is high.

[0052] In addition, the single crystal furnace charging barrel according to the embodiment of the utility model reduces the damage rate of structural components through the integrated structural design, effectively improving the service life of the barrel. Moreover, the silicon material inside the barrel 100 is put into the furnace through the discharge port 120 on the bottom side wall of the barrel 100, that is, the single crystal furnace charging barrel of the present application can control the directional feeding of the single crystal furnace, and then can control the rotation of the crucible in the furnace to make the feeding of the crucible in the furnace more uniform, and it is not easy to have uncontrollable conditions such as material jamming and silicon material accumulation in the furnace, avoiding the accident of silicon overflow and furnace stewing, and improving the single crystal production efficiency.

[0053] In some embodiments, Figure 1 , Figure 2, Figure 4 and Figure 5 As shown, the baffle assembly 200 may include: a plug plate 210 , a connecting plate 220 and a movable ring 230 .

[0054] Among them, the plug plate 210 can be movably arranged up and down inside the slot 130. The shape of the plug plate 210 is adapted to the shape of the slot 130 and is arc-shaped. The length of the plug plate 210 is equal to the axial length of the cylinder 100 and is greater than the length of the slot 130, so that it can extend from the slot 130 to the bottom of the cylinder 100 to close the discharge port 120.

[0055] The connecting plate 220 is vertically arranged on the side of the cylinder 100, that is, the connecting plate 220 is arranged on the outside of the side wall of the cylinder 100 corresponding to the plug plate 210 inside the slot 130, specifically, it is arranged on the outside of the upper end of the side wall of the cylinder 100, the top end of the connecting plate 220 is connected to the top of the plug plate 210, the shape of the connecting plate 220 is adapted to the shape of the side wall of the cylinder 100, that is, it is arc-shaped, and the connecting plate 220 extends downward from its top end, and the length of the connecting plate 220 is less than the length of the side wall of the cylinder 100.

[0056] The movable ring 230 is sleeved on the outside of the cylinder 100, and one end of the movable ring 230 is connected to the bottom end of the connecting plate 220. By driving the movable ring 230 to move up and down along the outside of the cylinder 100, the connecting plate 220 is driven to move up and down, and then the plug plate 210 is driven to move up and down along the slot 130. When the plug plate 210 moves upward and completely enters the slot 130, the discharge port 120 on the side wall at the bottom of the cylinder 100 is opened, and the silicon material in the barrel can be added to the crucible through the discharge port 120; when the plug plate 210 moves downward and partially extends out of the slot 130 until it contacts the bottom of the cylinder 100, the discharge port 120 on the side wall at the bottom of the cylinder 100 is closed.

[0057] Therefore, the baffle assembly 200 is movably arranged in the slot 130 of the cylinder 100 through the plug plate 210, and the top of the plug plate 210 is connected to the connecting plate 220 placed on the side of the outer wall of the cylinder 100, and the bottom of the connecting plate 220 is connected to the movable ring 230 mounted on the outer wall of the cylinder 100. Then, by driving the movable ring 230 to rise and fall along the cylinder 100, the plug plate 210 can be adjusted to open / close the discharge port 120. The structure is stable and reliable, and the problem of offset interference is not easy to occur.

[0058] In some embodiments, Figure 4 and Figure 5 As shown, a boss 140 extending outward is formed on the top of the cylinder 100 .

[0059] The connecting plate 220 includes a first portion 221 extending laterally and a second portion 222 extending vertically. The first end of the first portion 221 close to the central axis of the cylinder 100 is connected to the plug plate 210, and the second end of the first portion 221 away from the central axis of the cylinder is connected to the top of the second portion 222. The second portion 222 is adapted to the shape of the side wall of the cylinder 100 and extends downward until the bottom end is connected to the movable ring 230. The boss 140 is located below the first portion 221 and between the second portion 222 and the plug plate 210.

[0060] Specifically, the cross section of the connecting plate 220 is L-shaped, the end of the short side of the L-shaped connecting plate 220 is connected to the top of the plug board 210 , and the short side of the connecting plate 220 is placed on the boss 140 .

[0061] Therefore, when the L-shaped connecting plate 220 descends to a predetermined position to close the discharge port 120, a boss 140 extending outward is formed on the top of the cylinder 100 to effectively limit the connecting plate 220 and prevent the bottom of the connecting plate 220 from colliding and being damaged with the bottom of the cylinder 100.

[0062] In some embodiments, Figure 1 and Figure 4 As shown, the single crystal furnace charging barrel may further include a limiting assembly 400 , which is disposed on the upper half of the outer wall of the barrel 100 and is located above the movable ring 230 .

[0063] Thus, the upward movable area of ​​the movable ring 230 can be limited to prevent the baffle assembly 200 from being separated from the cylinder 100 when being lifted.

[0064] In some embodiments, Figure 1 and Figure 4 As shown, the limiting assembly 400 may include a first limiting ring 410 , the inner side of the first limiting ring 410 is connected to the upper half of the outer side wall of the cylinder 100 , and the first limiting ring 410 is located on the inner side of the connecting plate 220 and above the movable ring 230 .

[0065] That is to say, by connecting the first limiting ring 410 to the upper half of the outer wall of the cylinder 100, the movable ring 230 is limited in upward lifting, and the structure is simple, stable and reliable.

[0066] Furthermore, the outer diameter of the first limiting ring 410 is greater than the inner diameter of the movable ring 230 .

[0067] As a result, the movable ring 230 is effectively blocked by the first limiting ring 410 when moving upward.

[0068] In some embodiments, Figure 1 , Figure 4 and Figure 6As shown, the limiting assembly 400 may further include a second limiting ring 420, which is sleeved on the upper half of the outer wall of the cylinder 100 and is lower than the first limiting ring 410 and higher than the movable ring 230. The second limiting ring 420 is connected to the first limiting ring 410 by bolts at an adjustable distance relative to the first limiting ring 410.

[0069] That is to say, by sleeved below the first limiting ring 410 a second limiting ring 420 with adjustable height relative to the first limiting ring 410, the upward movable range of the movable ring 230 can be adjusted, thereby adjusting and limiting the movable range of the baffle assembly 200, so that the movable distance of the baffle assembly 200 relative to the cylinder 100 is limited within the optimal range, thereby reducing the probability of component damage and increasing the service life.

[0070] Furthermore, the outer diameter of the second limiting ring 420 is greater than the inner diameter of the movable ring 230 .

[0071] As a result, the movable ring 230 is effectively blocked by the second limiting ring 420 when moving upward.

[0072] In some embodiments, Figure 4 As shown, a slope 150 is formed at the bottom of the cylinder 100 relative to the discharge port 120 , and the height of the slope 150 from the bottom of the cylinder 100 gradually increases from the side close to the discharge port 120 to the side far from the discharge port 120 .

[0073] As a result, the silicon material in the cylinder 100 can be discharged more conveniently and efficiently through the discharge port 120. The inclined surface 150 can be formed as an inclined plane or an inclined arc surface, for example.

[0074] In some embodiments, Figure 1 and Figure 4 As shown, the molybdenum rod 300 may include: a molybdenum rod body 310 and a hook 320.

[0075] The bottom of the molybdenum rod body 310 is screwed to the inclined surface 150 , and the top of the molybdenum rod body 310 extends out of the feed port 110 .

[0076] The hook 320 is connected to the top of the molybdenum rod body 310 .

[0077] Specifically, the bottom of the molybdenum rod body 310 is screwed with the inclined surface 150 inside the barrel 100, so that the connection is stable and reliable, and it is convenient to disassemble and maintain the molybdenum rod 300. A hook 320 is set on the top of the molybdenum rod body 310 to facilitate the lifting of the molybdenum rod 300 to control the lifting of the barrel.

[0078] Below, combined with the attached Figure 7-9 The operation method of the single crystal furnace charging barrel according to the embodiment of the utility model is further explained.

[0079] As an example, first, Figure 7 As shown, a furnace flange 500 is installed on the inner wall of the single crystal furnace (not shown), and the hook 310 on the molybdenum rod 300 of the single crystal furnace charging barrel is lifted by a lifting device to align the barrel with the opening of the furnace flange 500 in the single crystal furnace and slowly put it into the single crystal furnace. At this time, the movable ring 230 of the baffle assembly 200 is located above the furnace flange 500.

[0080] Secondly, if Figure 8 As shown, the driving hanger causes the barrel to continue to descend. At this time, the movable ring 230 of the baffle assembly 200 abuts against the flange 500 in the furnace, and moves upward due to the upward force of the flange 500 in the furnace, until the movable ring 230 moves upward to the limit assembly 400 under the action of the flange 500 in the furnace. The mutual support of the limit assembly 400 and the flange 500 in the furnace allows the barrel 100 to be suspended in the furnace. During the upward movement, the movable ring 230 drives the connecting plate 200 to move upward, and then drives the plug plate 210 to move upward, and the discharge port 120 is gradually opened until the discharge port 120 is fully opened.

[0081] Finally, if Fig. 9 As shown, when the discharge port 120 of the cylinder 100 is fully opened for directional feeding, the crucible 600 in the single crystal furnace is driven to rotate at a certain speed, so that the silicon material is evenly fed into the crucible 600, avoiding uncontrollable situations such as material jamming and material piling that may cause silicon overflow and furnace smothering accidents.

[0082] The above is a preferred embodiment of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention.

Claims

1. A single crystal furnace charging barrel, characterized in that: include: A cylinder, wherein the interior of the cylinder is hollow, a feed port is formed on the top of the cylinder, the bottom of the cylinder is sealed, a discharge port is formed on the side wall of the bottom, and a slot is opened inside the side wall of the cylinder above the discharge port and penetrates the side wall of the cylinder from top to bottom; A baffle assembly, the baffle assembly can move up and down along the slot, and the discharge port can be opened / closed by adjusting the lifting of the baffle assembly; A molybdenum rod is arranged inside the cylinder through the feed port, and the bottom of the molybdenum rod is connected to the bottom of the cylinder.

2. The single crystal furnace charging barrel according to claim 1, characterized in that: The baffle assembly comprises: An inserting plate, which is movably disposed inside the slot; A connecting plate, the connecting plate is vertically arranged on the outer side of the side wall of the cylinder, the top end of the connecting plate is connected to the top of the plug plate, and is extended downward from the top end thereof; A movable ring is sleeved on the outer side of the cylinder, one end of the movable ring is connected to the bottom end of the connecting plate, and the plug plate is moved up and down by driving the movable ring.

3. The single crystal furnace charging barrel according to claim 2, characterized in that: The top of the cylinder is formed with a boss extending outward. The connecting plate includes a first portion extending transversely and a second portion extending vertically, wherein a first end of the first portion close to the central axis of the cylinder is connected to the plug plate, a second end of the first portion away from the central axis of the cylinder is connected to the top end of the second portion, and the second portion is adapted to the shape of the side wall of the cylinder and extends downward until the bottom end is connected to the movable ring. The boss is located below the first part and between the second part and the inserting plate.

4. The single crystal furnace charging barrel according to claim 2, characterized in that: The single crystal furnace charging barrel also includes a limiting component, which is arranged on the upper half of the outer side wall of the barrel and is located above the movable ring.

5. The single crystal furnace charging barrel according to claim 4, characterized in that: The limiting assembly comprises a first limiting ring, the inner side surface of the first limiting ring is connected to the upper half of the outer side wall of the cylinder, and the first limiting ring is located on the inner side of the connecting plate and above the movable ring.

6. The single crystal furnace charging barrel according to claim 5, characterized in that: The outer diameter of the first limiting ring is greater than the inner diameter of the movable ring.

7. The single crystal furnace charging barrel according to claim 5, characterized in that: The limiting assembly also includes a second limiting ring, which is sleeved on the upper half of the outer wall of the cylinder and is lower than the first limiting ring and higher than the movable ring. The second limiting ring is connected to the first limiting ring by bolts at an adjustable distance relative to the first limiting ring.

8. The single crystal furnace charging barrel according to claim 7, characterized in that: The outer diameter of the second limiting ring is greater than the inner diameter of the movable ring.

9. The single crystal furnace charging barrel according to claim 1, characterized in that: The bottom of the cylinder forms an inclined surface relative to the discharge port, and the height of the inclined surface from the bottom of the cylinder gradually increases from the side close to the discharge port to the side far away from the discharge port.

10. The single crystal furnace charging barrel according to claim 9, characterized in that: The molybdenum rod comprises: A molybdenum rod body, the bottom of which is screwed to the inclined surface, and the top of which extends out of the feed port; A hook is connected to the top of the molybdenum rod body.

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