Crucible support assembly for single crystal drawing

Abstract

The utility model discloses a crucible support component for single crystal drawing, which comprises a support rod, an arc-shaped support plate, a plane tray, a rib plate and a guide post, the arc-shaped support plate is arranged at the edge of the plane tray in a turnover manner at intervals, the guide post is concentrically arranged at the bottom of the plane tray, the support rod is vertically arranged below the guide post, and the rib plate is arranged on the support rod. The rib plates are arranged at the bottom of the plane tray in an array mode, the inner ends of the rib plates are connected with the guide columns, and clamping grooves corresponding to the rib plates one to one are formed in the top of the supporting rod in an inwards-concave mode. According to the crucible supporting assembly for single crystal drawing, the structural strength of the plane tray is improved through the rib plates and the guide columns, the edge of the bottom of a crucible is limited through overturning of the arc-shaped supporting plate, the stability of supporting the crucible is improved, the supporting force of the supporting rods on the plane tray is dispersed through the rib plates, and therefore the stability of the crucible is improved. Concentrated stress of the plane tray is avoided, and deformation of the plane tray is avoided.

Description

Technical Field

[0001] The utility model relates to the field of single crystal pulling equipment, in particular to a crucible support component for single crystal pulling. Background Art

[0002] During the single crystal pulling process, the crucible in the single crystal furnace needs to rotate and lift. In the prior art, a support rod and a crucible support are often used to support the crucible, and the rotation and lifting of the support rod drive the movement of the crucible.

[0003] In order to increase the lifting stroke of the crucible, it is necessary to reduce the material thickness of the crucible support. However, the strength of the crucible support will also decrease after the crucible support is thinned, and it cannot meet the requirements of stable support for heavy crucibles. Especially when large-sized single crystals are pulled, more polysilicon materials need to be put into the crucible, which is heavy and requires higher support stability for the crucible support. In addition, grooves are usually made at the bottom of the crucible support to position the support rod. For example, the utility model patent with application number 201921977854X discloses an embedded crucible support suitable for pulling large-sized single crystals, that is, a groove is machined at the bottom of the crucible support body to position the top of the support rod, which further reduces the thickness of the crucible support body in the groove part. Moreover, the groove cooperates with the support rod, and the force is concentrated, which is not conducive to improving the support stability and needs to be improved. Utility Model Content

[0004] The utility model aims to provide a crucible support assembly for single crystal pulling, which controls the thickness of a plane tray and ensures stable support for the crucible.

[0005] To achieve this purpose, the utility model adopts the following technical solutions:

[0006] A crucible support assembly for single crystal pulling comprises: a support rod, an arc-shaped support plate, a plane tray, a rib plate and a guide column, wherein the arc-shaped support plate is flippably arranged at intervals on the edge of the plane tray, the guide column is concentrically arranged at the bottom of the plane tray, the support rod is vertically arranged below the guide column, the rib plate array is arranged at the bottom of the plane tray, the inner end of the rib plate is connected to the guide column, and the top of the support rod is concavely provided with a slot corresponding to the rib plate one by one.

[0007] Wherein, a guide hole corresponding to the guide column is concentrically arranged on the top of the support rod.

[0008] The crucible is arranged on a flat tray, and the inner side of the arc-shaped supporting plate is concavely provided with an arc surface corresponding to the bottom edge of the crucible.

[0009] Among them, the edge of the planar tray is provided with a pin seat corresponding to the arc-shaped supporting plate one by one, the arc-shaped supporting plate is arranged in the pin seat, and a pin shaft penetrating the arc-shaped supporting plate is horizontally arranged in the pin seat.

[0010] Wherein, a plane in contact with the bottom of the slot is arranged at the lower inner end of the rib plate.

[0011] Wherein, the outer end of the rib plate is provided with an inclined surface extending obliquely downward to the plane.

[0012] The beneficial effects of the utility model include: a crucible support assembly for single crystal pulling, which improves the structural strength of the flat tray by means of rib plates and guide columns without increasing the thickness of the flat tray, and uses the flipping of the arc-shaped support plate to limit the bottom edge of the crucible, thereby improving the stability of the crucible support, and uses the rib plate to cooperate with the slot on the top of the support rod for connection, which can not only avoid relative twisting of the support rod and the flat tray, but also disperse the supporting force of the support rod on the flat tray through the rib plate, thereby avoiding the situation where the flat tray is subjected to concentrated force, thereby avoiding deformation of the flat tray and improving the structural stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a structural schematic diagram of the utility model;

[0014] Figure 2 yes Figure 1 Schematic diagram of the structure after the support rod and crucible are disassembled. DETAILED DESCRIPTION

[0015] Combine the following Figure 1-2 The technical solution of the utility model is further illustrated by specific embodiments.

[0016] like Figure 1 and Figure 2 The crucible support assembly for single crystal pulling shown is used to support the crucible 8, and includes: a support rod 4, an arc-shaped support plate 3, a flat tray 1, a rib plate 2 and a guide column 11. The arc-shaped support plate 3 is flippably arranged at intervals on the edge of the flat tray 1, and the crucible 8 is arranged on the flat tray 1. The inner side of the arc-shaped support plate 3 is concavely provided with an arc surface corresponding to the bottom edge of the crucible 8. The bottom edge of the crucible 8 is limited by the arc surface to avoid radial movement, thereby improving the stability of the support for the crucible 8.

[0017] The number of arc-shaped support plates 3 is at least 3 and they are distributed in a circular array. In this embodiment, the edge of the plane tray 1 is provided with a pin seat 6 corresponding to the arc-shaped support plate 3. The arc-shaped support plate 3 is arranged in the pin seat 6. The pin seat 6 is horizontally provided with a pin shaft 7 that penetrates the arc-shaped support plate 3 to support the arc-shaped support plate 3 to be turned up and down. The crucible 8 is placed on the plane tray 1, and the bottom of the arc-shaped support plate 3 is pressed down by the crucible 8 to realize the turning of the arc-shaped support plate 3, so that the arc surface of the arc-shaped support plate 3 is attached to the bottom edge of the crucible 8, which improves stability and helps to ensure the concentricity of the crucible 8 and the plane tray 1.

[0018] The guide column 11 is concentrically arranged at the bottom of the flat tray 1, and the support rod 4 is vertically arranged below the guide column 11. A guide hole corresponding to the guide column 11 is concentrically arranged on the top of the support rod 4 to guide the guide column 11 when it is plugged in, which facilitates assembly.

[0019] The rib plate 2 array is arranged at the bottom of the flat tray 1, and the inner end of the rib plate 2 is connected to the guide column 11. In the present embodiment, the flat tray 1, the rib plate 2 and the guide column 11 can be integrally formed with high temperature resistant materials. Without increasing the thickness of the flat tray 1, the structural strength of the flat tray 1 is improved by the rib plate 2 and the guide column 11, so that a heavy crucible 8 can be supported. When large-sized single crystals are pulled, more polysilicon materials can be put into the crucible 8.

[0020] like Figure 1 As shown, the top of the support rod 4 is concavely provided with a slot 5 corresponding to the rib plate 2 one by one, and the slot 5 is used to position the rib plate 2 to avoid relative twisting between the support rod 4 and the flat pallet 1, thereby realizing the rotational drive of the flat pallet 1 by the support rod 4.

[0021] like Figure 2 As shown, a plane 10 in contact with the bottom of the slot 5 is provided at the lower inner end of the rib plate 2. Through the smooth contact between the plane 10 and the bottom of the slot 5, the rib plate 2 can disperse the supporting force of the support rod 4 on the flat pallet 1, avoiding the situation where the middle part of the flat pallet 1 is subjected to concentrated force, thereby avoiding deformation of the flat pallet 1 and improving the structural stability.

[0022] In this embodiment, the outer end of the rib plate 2 is provided with an inclined surface 9 extending obliquely downward to the plane 10, which reduces the weight of the rib plate 2 and helps avoid obstacles when the rib plate 2 moves downward, thereby increasing the downward travel of the crucible 8.

[0023] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The contents of this specification should not be understood as limiting the present invention.

Claims

1. A crucible support assembly for single crystal pulling, used for supporting a crucible, characterized in that: include: A support rod, an arc-shaped support plate, a flat tray, a rib plate and a guide column, wherein the arc-shaped support plate is flippably arranged at intervals on the edge of the flat tray, the guide column is concentrically arranged at the bottom of the flat tray, the support rod is vertically arranged below the guide column, the rib plate array is arranged at the bottom of the flat tray, the inner end of the rib plate is connected to the guide column, and the top of the support rod is concavely arranged with a slot corresponding to the rib plate one by one.

2. The single crystal pulling crucible support assembly according to claim 1, characterized in that: A guide hole corresponding to the guide column is coaxially arranged on the top of the support rod.

3. The single crystal pulling crucible support assembly according to claim 1, characterized in that: The crucible is arranged on a flat tray, and the inner side of the arc-shaped supporting plate is concavely provided with an arc surface corresponding to the bottom edge of the crucible.

4. The single crystal pulling crucible support assembly according to claim 1, characterized in that: The edge of the planar tray is provided with a pin seat corresponding to the arc-shaped supporting plate one by one, the arc-shaped supporting plate is arranged in the pin seat, and a pin shaft penetrating the arc-shaped supporting plate is horizontally arranged in the pin seat.

5. The single crystal pulling crucible support assembly according to claim 1, characterized in that: The lower part of the inner end of the rib plate is provided with a plane contacting the bottom of the slot.

6. The single crystal pulling crucible support assembly according to claim 5, characterized in that: The outer end of the rib plate is provided with an inclined surface extending obliquely downward to the plane.

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