Crystal growth cavity observation window assembly and crystal growth equipment
By using the structure of rotating shielding in the crystal growth equipment, the problem of water shadow interference during overheating and water cooling in high temperature environments is solved, and the effect of insulation and volatiles is achieved, and the observation clarity and observation is improved. Judgment accuracy.
Patent Information
- Application Number
- CN202420964595.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-06
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-05-06
AI Technical Summary
The observation windows of existing crystal growth equipment are prone to overheating in high temperature environments, and problems such as water shadow interference and infrared temperature measurement accuracy will occur during the water cooling process.
The structure of a rotating shield is adopted, and the rotating shield is driven to rotate to a preset angle through the rotating structure, blocking the observation window and the area to be observed, so as to achieve the effect of insulating heat and blocking volatiles.
It effectively avoids overheating of the observation window, reduces the adhesion of volatiles, improves the observation clarity and the accuracy of judging the crystal growth state, and reduces the need to clean the observation window.
Smart Images
Figure CN222524769U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor crystal growth equipment, in particular to a crystal growth cavity observation window component and crystal growth equipment. Background Art
[0002] Crystal growth equipment is a device used to prepare semiconductor crystal materials, which usually has a crystal growth furnace. In order to facilitate the observation of crystal growth and regularly detect the temperature of crystal growth, an observation window is usually opened in the cavity of the crystal growth furnace to install an infrared temperature detector and an industrial camera. Due to the obstruction of the crucible insulation layer, the observation window is generally installed on the top of the crystal growth furnace to observe the growth status of the seed crystal. During the crystal preparation process, in the crystal growth furnace, the induction coil will heat the crucible to 1800-2300 degrees Celsius, and the top of the cavity of the crystal growth furnace is the part with the highest thermal radiation temperature. Over time, the observation window is prone to cracking. Therefore, the observation window on the market now uses a double-layer hollow structure, and the double-layer hollow structure is cooled by water to prevent the observation window from reaching a high temperature.
[0003] However, when water flows inside the above observation window structure, the camera will see the presence of water shadows, which will affect the observation; in addition, the infrared light of the infrared thermometer will pass through water and affect the accuracy of temperature measurement. In addition, during the growth of gallium oxide crystals, a small part of the graphite crucible and gallium oxide will volatilize, and the volatiles will stick to the top of the furnace and the position of the observation window, affecting the observation. Utility Model Content
[0004] The main purpose of the utility model is to provide a crystal growth cavity observation window assembly and a crystal growth device, aiming to solve the problem of avoiding overheating of the observation window without adopting a water cooling scheme for the observation window.
[0005] To achieve the above-mentioned purpose, the crystal growth chamber observation window assembly proposed by the utility model is applied to the crystal growth furnace chamber, and an observation window body is provided on the top of the crystal growth furnace chamber, and the observation window body faces the area to be observed in the crystal growth furnace chamber, and the crystal growth chamber observation window assembly includes a rotating structure and a shielding member, the rotating structure is used to pass through the inner and outer sides of the top of the crystal growth furnace chamber and be rotatably connected to the crystal growth furnace chamber; the shielding member is connected to the bottom of the rotating structure; in the shielding state, the shielding member is used to rotate with the rotating structure to a first preset angle so that the shielding member blocks the observation window body and the area to be observed; in the observation state, the shielding member is used to rotate with the rotating structure to a second preset angle so that the area to be observed can be observed from the position of the observation window body.
[0006] In one embodiment, the rotating structure includes a shaft body and a sleeve; the bottom of the shaft body is connected to the shielding member; a first through hole is opened in the crystal growth furnace chamber, the sleeve is inserted into the first through hole, the outer wall of the sleeve is sealed with the hole wall of the first through hole, the shaft body is rotatably fitted in the inner cavity of the sleeve, and a sealing ring is provided between the shaft body and the inner cavity wall of the sleeve.
[0007] In one embodiment, a first recessed portion is provided on the top end surface of the sleeve, the first recessed portion is arranged around the central axis of the sleeve, the first recessed portion is communicated with the inner cavity wall of the sleeve, and a first accommodating groove is formed between the first recessed portion and the outer wall of the shaft body; the sealing ring is arranged in the first accommodating groove; the rotating structure also includes an end cover, the end cover is provided with a second through hole, the shaft body is passed through the second through hole, and the end cover is detachably connected to the top of the sleeve; the end cover has a pressing surface, and the pressing surface is used to press the sealing ring to deform the sealing ring and seal the gap between the sleeve and the shaft body.
[0008] In one embodiment, the first recessed portion is tilted downward in a radial direction close to the shaft body so that the first accommodating groove has a wedge-shaped structure; and / or, a second accommodating groove is formed between the pressing surface and the outer wall of the shaft body; the pressing surface is tilted upward in a radial direction close to the shaft body so that the second accommodating groove has a wedge-shaped structure.
[0009] In one embodiment, a second recessed portion is provided on the bottom end surface of the end cover, a pressing surface is provided on the top of the second recessed portion, an inner side wall of the second recessed portion is provided with an internal threaded section, an outer side wall of the top of the sleeve is provided with an external threaded section, and the second recessed portion is threadedly connected to the sleeve; and / or, the rotating structure also includes a threaded connector; the second recessed portion is sleeved on the top outer side of the sleeve; the end cover is provided with at least two fourth through holes, at least two of the fourth through holes are spaced at a preset interval in the vertical direction, a second screw hole is provided on the sleeve, the second screw hole is connected to the outer peripheral wall of the shaft body, and the second screw hole is opposite to the fourth through hole; the threaded connector passes through the fourth through hole and the second screw hole in sequence to lock the end cover on the sleeve.
[0010] In one embodiment, the outer wall of the sleeve is provided with a sealing pipe thread section, the first through hole is a threaded hole, and the sleeve is locked in the first through hole through the sealing pipe thread section; and / or, a flat portion is provided on the outer periphery of the shaft body.
[0011] In one embodiment, the shielding member is a plate-like structure, the shielding member is fan-shaped, and the center area of the shielding member is connected to the rotating structure.
[0012] In one embodiment, the crystal growth chamber observation window assembly further includes a handle, one end of which is connected to the top of the rotating structure.
[0013] The utility model also proposes a crystal growth device, comprising a crystal growth furnace chamber, an observation window body and the above-mentioned crystal growth chamber observation window assembly; the observation window body is installed on the top of the crystal growth furnace chamber; the crystal growth chamber observation window assembly is installed on the top of the crystal growth furnace chamber.
[0014] In one embodiment, the observation window body is in sealing cooperation with the crystal growth furnace chamber, and the crystal growth chamber observation window assembly is in sealing cooperation with the crystal growth furnace chamber.
[0015] The technical solution of the utility model achieves the effect of heat insulation and volatile blocking for the observation window body by adopting a rotating shielding member. In most cases, there is no need to observe the area to be observed during the crystal growth process in the crystal growth furnace chamber. The rotating structure located outside the crystal growth furnace chamber can be rotated to drive the shielding member located inside the crystal growth furnace chamber to rotate to a first preset angle, so that the shielding member blocks between the observation window body and the area to be observed, providing the observation window body with the effect of heat insulation and volatile blocking, avoiding overheating of the observation window body and avoiding excessive adhesion of volatiles such as graphite crucible and gallium oxide on the observation window body. When the crystal growth reaches a specific stage, for example, when the gallium oxide crystal starts to be seeded, it is necessary to observe it, then the rotating structure located outside the crystal growth furnace chamber can be rotated to move the shielding member away, so that the area to be observed can be observed from the position of the observation window body, thereby realizing the observation and recording of the crystal growth process. Compared with the traditional solution of water-cooling the observation window, in the observation state, the crystal growth chamber observation window assembly of the utility model has no components that will block the observation window body and the area to be observed, thereby improving the clarity of observation from the observation window body, thereby improving the accuracy of judging the crystal growth state; in addition, the traditional solution of water-cooling the observation window can only achieve cooling, but cannot block volatile substances, so it will inevitably affect the observation clarity of the observation window, and the observation window needs to be cleaned regularly. However, in the shielding state of the crystal growth chamber observation window assembly, the shielding member can also block volatile substances for the observation window body, reducing the need to clean the observation window and ensuring the clarity of observation. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.
[0017] Figure 1 A structural schematic diagram of an embodiment of a crystal growth chamber observation window assembly provided by the utility model;
[0018] Figure 2 A cross-sectional view of an embodiment of a crystal growth chamber observation window assembly provided by the utility model;
[0019] Figure 3 This is a structural schematic diagram of an embodiment of the crystal growth equipment provided by the utility model.
[0020] Description of Figure Numbers:
[0021] 1. Crystal growth chamber observation window assembly; 11. Rotating structure; 111. Axle body; 1111. Flat position; 112. Bushing; 1121. First recessed portion; 113. Sealing ring; 114. End cover; 1141. Pressing surface; 1142. Second recessed portion; 1143. Fourth through hole; 12. Shielding member; 13. Handle; 2. Crystal growth furnace chamber; 21. Area to be observed; 3. Observation window body.
[0022] The realization of the purpose, functional features and advantages of the utility model will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION
[0023] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0024] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back...), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.
[0025] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the utility model, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the utility model.
[0026] Crystal growth equipment is a device used to prepare semiconductor crystal materials, which usually has a crystal growth furnace. In order to facilitate the observation of crystal growth and regularly detect the temperature of crystal growth, an observation window is usually opened in the cavity of the crystal growth furnace to install an infrared temperature detector and an industrial camera. Due to the obstruction of the crucible insulation layer, the observation window is generally installed on the top of the crystal growth furnace to observe the growth status of the seed crystal. During the crystal preparation process, in the crystal growth furnace, the induction coil will heat the crucible to 1800-2300 degrees Celsius, and the top of the cavity of the crystal growth furnace is the part with the highest thermal radiation temperature. Over time, the observation window is prone to cracking. Therefore, the observation window on the market now uses a double-layer hollow structure, and the double-layer hollow structure is cooled by water to prevent the observation window from reaching a high temperature.
[0027] However, when water flows inside the above observation window structure, the camera will see the presence of water shadows, which will affect the observation; in addition, the infrared light of the infrared thermometer will pass through water and affect the accuracy of temperature measurement. In addition, during the growth of gallium oxide crystals, a small part of the graphite crucible and gallium oxide will volatilize, and the volatiles will stick to the top of the furnace and the position of the observation window, affecting the observation.
[0028] In order to solve the above technical problems, the utility model provides the following technical solutions.
[0029] The utility model provides a crystal growth cavity observation window component.
[0030] See also Figure 1 and 3In one embodiment of the utility model, the crystal growth chamber observation window assembly 1 is applied to the crystal growth furnace chamber 2, and an observation window body 3 is provided on the top of the crystal growth furnace chamber 2, and the observation window body 3 faces the area to be observed 21 in the crystal growth furnace chamber 2. The crystal growth chamber observation window assembly 1 includes a rotating structure 11 and a shielding member 12, and the rotating structure 11 is used to pass through the inner and outer sides of the top of the crystal growth furnace chamber 2 and is rotatably connected to the crystal growth furnace chamber 2; the shielding member 12 is connected to the bottom of the rotating structure 11; in the shielding state, the shielding member 12 is used to rotate with the rotating structure 11 to a first preset angle, so that the shielding member 12 blocks the observation window body 3 and the area to be observed 21; in the observation state, the shielding member 12 is used to rotate with the rotating structure 11 to a second preset angle, so that the area to be observed 21 can be observed from the position of the observation window body 3.
[0031] The technical solution of the utility model achieves the effect of heat insulation and volatile blocking for the observation window body 3 by adopting the method of rotating the shielding member 12. In most cases, there is no need to observe the area to be observed 21 during the crystal growth process of the crystal growth furnace chamber 2. Then, the rotating structure 11 located outside the crystal growth furnace chamber 2 can be rotated to drive the shielding member 12 located inside the crystal growth furnace chamber 2 to rotate to a first preset angle, so that the shielding member 12 blocks between the observation window body 3 and the area to be observed 21, providing the effect of heat insulation and volatile blocking for the observation window body 3, avoiding overheating of the observation window body 3 and avoiding excessive volatiles such as graphite crucible and gallium oxide from being attached to the observation window body 3. When the crystal growth reaches a specific stage, for example, when the gallium oxide crystal growth begins to be seeded, it is necessary to observe, then the rotating structure 11 located outside the crystal growth furnace chamber 2 can be rotated to move the shielding member 12 away, so that the area to be observed 21 can be observed from the position of the observation window body 3, thereby realizing the observation and recording of the crystal growth process. Compared with the traditional solution of water-cooling the observation window, in the observation state, the crystal growth chamber observation window assembly 1 of the utility model has no components blocking the observation window body 3 and the observed area 21, which improves the clarity of observation from the observation window body 3, thereby improving the accuracy of judging the crystal growth state; in addition, the traditional solution of water-cooling the observation window can only achieve cooling, but cannot block volatile substances, so it will inevitably affect the observation clarity of the observation window, and the observation window needs to be cleaned regularly. However, in the shielding state of the crystal growth chamber observation window assembly 1, the shielding member 12 can also block volatile substances for the observation window body 3, reducing the need to clean the observation window and ensuring the clarity of observation.
[0032] See also Figure 2 and 3In the embodiment of the utility model, since the interior of the crystal growth furnace chamber 2 needs to be evacuated during the seed crystal growth process, the crystal growth furnace chamber 2 needs to be sealed, and there is a possibility of vacuum pressure relief at the connection between the crystal growth chamber observation window assembly 1 and the crystal growth furnace chamber 2. In order to solve the sealing problem between the crystal growth chamber observation window assembly 1 and the crystal growth furnace chamber 2, the rotating structure 11 includes a shaft 111 and a sleeve 112; the bottom of the shaft 111 is connected to the shielding member 12; the crystal growth furnace chamber 2 is provided with a first through hole, the sleeve 112 is passed through the first through hole, the outer wall of the sleeve 112 is sealed with the hole wall of the first through hole, the shaft 111 is rotatably matched in the inner cavity of the sleeve 112, and a sealing ring 113 is provided between the shaft 111 and the inner cavity wall of the sleeve 112. Thus, in this embodiment, since a scheme is adopted in which the shaft body 111 is rotatably matched in the inner cavity of the sleeve 112 to avoid wear of the crystal growth furnace chamber 2 caused by the rotation of the shaft body 111, the connection parts between the crystal growth chamber observation window assembly 1 and the crystal growth furnace chamber 2 are mainly the sleeve 112 and the shaft body 111; wherein the sleeve 112 is in direct contact with the crystal growth furnace chamber 2, and thus a scheme is adopted in which the outer wall of the sleeve 112 is sealed with the hole wall of the first through hole to avoid pressure relief at the connection between the sleeve 112 and the crystal growth furnace chamber 2; and there is also a gap between the shaft body 111 and the inner cavity of the sleeve 112, and therefore a sealing ring 113 is provided between the shaft body 111 and the inner cavity wall of the sleeve 112, so that a seal is formed between the sleeve 112 and the shaft body 111, thereby reducing the possibility of pressure relief at the connection between the crystal growth chamber observation window assembly 1 and the crystal growth furnace chamber 2.
[0033] It should be noted that in the embodiment of the present application, the specific connection method between the sleeve 112 and the crystal growth furnace chamber 2 is not limited. As an optional embodiment, the outer diameter of the bottom outer wall of the sleeve 112 gradually decreases in the direction toward the shielding member 12, and a conical hole is provided on the top of the crystal growth furnace chamber 2, and the bottom outer wall of the sleeve 112 is used to be plugged with the top of the crystal growth furnace chamber 2. As another optional embodiment, the bottom of the sleeve 112 and the top of the crystal growth furnace chamber 2 are respectively provided with screw holes, and the sleeve 112 is locked with the crystal growth furnace chamber 2. It should be noted that no matter what connection method is used, the connection between the sleeve 112 and the crystal growth furnace chamber 2 needs to be sealed.
[0034] See also Figure 2In the embodiment of the utility model, the conventional installation method of the sealing ring 113 on the shaft sleeve 112 is improved. The conventional installation method of the sealing ring 113 on the shaft sleeve 112 is to open a sealing groove on the inner wall of the shaft sleeve 112. Since the sealing groove is located inside the shaft sleeve 112, the installation process of the sealing ring 113 is relatively cumbersome. In order to solve the problem of inconvenient installation of the sealing ring 113, a first recessed portion 1121 is provided on the top end surface of the sleeve 112, and the first recessed portion 1121 is arranged around the central axis of the sleeve 112, and the first recessed portion 1121 is communicated with the inner cavity wall of the sleeve 112, and a first accommodating groove is formed between the first recessed portion 1121 and the outer side wall of the shaft body 111; the sealing ring 113 is arranged in the first accommodating groove; the rotating structure 11 also includes an end cover 114, the end cover 114 is provided with a second through hole, the shaft body 111 is penetrated in the second through hole, and the end cover 114 is detachably connected to the top of the sleeve 112; the end cover 114 has a pressing surface 1141, and the pressing surface 1141 is used to press the sealing ring 113 to deform the sealing ring 113 and seal the gap between the sleeve 112 and the shaft body 111. Thus, in this embodiment, different from the conventional installation method in which the sealing groove is located inside the sleeve 112, this solution makes the first accommodating groove exposed, which makes it more convenient to arrange the sealing ring 113 in the first accommodating groove. After the sealing ring 113 is placed, it is only necessary to detachably connect the end cover 114 to the top of the sleeve 112 and press the sealing ring 113 to achieve the sealing effect between the sleeve 112 and the shaft body 111. The operation is simple and the sealing ring 113 can be easily disassembled for maintenance and replacement, thereby reducing maintenance costs.
[0035] In the embodiment of the utility model, regarding the material of each component on the crystal growth chamber observation window assembly 1, as an optional implementation, the material of the shielding member 12, the shaft body 111, the end cover 114 and the sleeve 112 are all set to stainless steel. Stainless steel has a strong high temperature resistance and high strength, and is suitable for use as the material of the shielding member 12, the shaft body 111, the end cover 114 and the sleeve 112. More specifically, the shaft body 111 can be made of 304 stainless steel, and the shielding member 12, the end cover 114 and the sleeve 112 can be made of 316 stainless steel. In addition, as an optional implementation, the material of the sealing ring 113 is set to fluororubber. When the high temperature generated during the operation of the crystal growth furnace chamber will be conducted to the sealing ring 113 along the shaft body 111. Since fluororubber has a good high temperature resistance, using fluororubber as the material of the sealing ring 113 can effectively prevent the deformation and melting of the sealing ring 113, and ensure the sealing performance of the sealing ring 113.
[0036] See also Figure 2In the embodiment of the utility model, in order to make the sealing effect between the sealing ring 113 and the shaft body 111 more reliable, the first recessed portion 1121 is tilted downwardly in the direction of radially approaching the shaft body 111, so that the first receiving groove is a wedge-shaped structure; and / or, the second receiving groove is formed between the pressing surface 1141 and the outer wall of the shaft body 111; the pressing surface 1141 is tilted upwardly in the direction of radially approaching the shaft body 111, so that the second receiving groove is a wedge-shaped structure. In this way, in this embodiment, by setting the first receiving groove as a wedge-shaped structure and the first recessed portion 1121 is tilted downwardly in the direction of radially approaching the shaft body 111, the first receiving groove can apply a component force in the horizontal direction to the sealing ring 113 placed thereon, and the component force is directed toward the direction of the shaft body 111. When the end cover 114 presses the sealing ring 113, the sealing ring 113 will be subjected to the extrusion component force in the direction of the shaft body 111, so that the contact between the sealing ring 113 and the shaft body 111 is closer, thereby improving the sealing effect of the sealing ring 113. Similarly, the second receiving groove on the end cover 114 enables the end cover 114 to apply a horizontal component force toward the direction of the shaft body 111 to the sealing ring 113 when squeezing the sealing ring 113, thereby also improving the sealing effect of the sealing ring 113, which will not be repeated here.
[0037] See also Figure 2 , since the pressing force of the end cover 114 on the sealing ring 113 needs to be controlled within a suitable range, if the pressing force is too large, it is easy to cause the sealing ring 113 to be excessively deformed, damaged or lose its sealing ability, and if the pressing force is too small, it is easy to cause the sealing ring 113 to be difficult to come into close contact with the shaft body 111, resulting in poor sealing effect. Therefore, in the embodiment of the utility model, in order to solve the problem that the degree of compression of the sealing ring 113 cannot be adjusted, as a first optional implementation, the bottom end face of the end cover 114 is provided with a second recessed portion 1142, the pressing surface 1141 is arranged at the top of the second recessed portion 1142, the inner side wall of the second recessed portion 1142 is provided with an internal thread section, the top outer side wall of the sleeve 112 is provided with an external thread section, and the second recessed portion 1142 is threadedly connected to the sleeve 112. Thus, by providing threaded sections on the second recessed portion 1142 of the end cover 114 and the shaft sleeve 112 respectively, the end cover 114 can be screwed onto the shaft sleeve 112, so that the end cover 114 can be moved up and down axially by screwing it, thereby adjusting the size of the compressive force on the sealing ring 113.
[0038] See also Figure 2As a second optional embodiment, the rotating structure 11 also includes a threaded connector; the second recessed portion 1142 is sleeved on the top outer side of the sleeve 112; the end cover 114 is provided with at least two fourth through holes 1143, and at least two fourth through holes 1143 have a preset interval in the vertical direction, and the sleeve 112 is provided with a second screw hole, which is connected to the outer peripheral wall of the shaft body 111, and the second screw hole is opposite to the fourth through hole 1143; the threaded connector passes through the fourth through hole 1143 and the second screw hole in sequence to lock the end cover 114 on the sleeve 112. In this way, by providing at least two fourth through holes 1143 on the end cover 114, the threaded connector can be passed through any one of the fourth through holes 1143 and threadedly connected to the second screw hole to achieve fixation of the relative position of the end cover 114 and the sleeve 112; when it is necessary to adjust the pressing force of the end cover 114 on the sealing ring 113, the threaded connector can be loosened, and the threaded connector can be passed through another fourth through hole 1143 and threadedly connected to the second screw hole. Since there is a preset interval between at least two fourth through holes 1143 in the vertical direction, when the threaded connector is selected to pass through different fourth through holes 1143 and threadedly connected to the sleeve 112, the relative position between the end cover 114 and the sleeve 112 can be adjusted up and down, and the pressing force can also be adjusted.
[0039] Furthermore, in order to avoid the problem that the shielding member 12 still rotates after rotating to the first preset angle or the second preset angle, as an optional embodiment, the second screw hole is connected to the outer peripheral wall of the shaft body 111; the threaded connector passes through the fourth through hole 1143 and the second screw hole in sequence and abuts against the outer peripheral wall of the shaft body 111 to hinder the rotation of the shaft body 111. In this way, since the threaded connector abuts against the outer peripheral wall of the shaft body 111, the friction between the threaded connector and the shaft body 111 avoids the problem that the shaft body 111 is still easy to rotate after reaching the first preset angle or the second preset angle; and the shaft body 111 is connected to the shielding member 12, thereby solving the problem that the shielding member 12 is still easy to rotate after the rotation is completed. When rotation is required, the operator can loosen the threaded connector to make the shielding member 12 easy to rotate again.
[0040] In the embodiment of the utility model, in order to improve the sealing effect between the sleeve 112 and the crystal growth furnace chamber 2, the outer wall of the sleeve 112 is provided with a sealing pipe thread section. In this way, the sealing pipe thread section can realize the sealing match between the sleeve 112 and the top of the crystal growth furnace chamber 2. Specifically, as an optional embodiment, the sealing pipe thread can be set as a PT sealing tooth, that is, a 55-degree sealing conical pipe outer thread section, and accordingly, a 55-degree sealing conical pipe inner thread section is provided at the conical hole at the top of the crystal growth furnace chamber 2, so that the outer wall of the sleeve 112 and the top of the crystal growth furnace chamber 2 are sealed and threaded.
[0041] See also Figure 1 In the embodiment of the utility model, in order to facilitate the installation of the shaft body 111, a flat portion 1111 is provided on the outer periphery of the shaft body 111. In this way, during the installation process, the operator can use installation tools such as a wrench to clamp the flat portion 1111 on the shaft body 111, thereby reducing slippage during clamping and facilitating installation.
[0042] See also Figure 1 and 2 In the embodiment of the utility model, in order to reduce the material consumed in making the shielding member 12, the shielding member 12 is set as a plate-like structure, the shielding member 12 is fan-shaped, and the center area of the shielding member 12 is connected to the rotating structure 11. In this way, the shielding member 12 is a plate-like structure, which can reduce the thickness of the shielding member 12 and save material costs; in addition, the shielding member 12 is fan-shaped, which can reduce the area of the shielding member 12 as much as possible while ensuring the shielding effect, further saving material costs.
[0043] See also Figure 1 In the embodiment of the utility model, in order to solve the problem of laborious rotation of the rotating structure 11, the crystal growth chamber observation window assembly 1 further includes a handle 13, one end of which is connected to the top of the rotating structure 11. In this way, by adding the handle 13, when the rotating structure 11 is rotated, the force arm increases, while the torque required for rotation remains unchanged, thereby reducing the torque required for rotation and achieving a labor-saving effect.
[0044] See also Figure 3 The present invention also proposes a crystal growth device, which includes a crystal growth furnace chamber 2, an observation window body 3 and the above-mentioned crystal growth chamber observation window assembly 1. The specific structure of the crystal growth chamber observation window assembly 1 refers to the above-mentioned embodiment. Since the present crystal growth device adopts all the technical solutions of all the above-mentioned embodiments, it at least has all the beneficial effects brought by the technical solutions of the above-mentioned embodiments, which will not be repeated here. Among them, the observation window body 3 is installed on the top of the crystal growth furnace chamber 2; the crystal growth chamber observation window assembly 1 is installed on the top of the crystal growth furnace chamber 2. In this way, after adopting the present crystal growth chamber observation window assembly 1, in the observation state of the crystal growth device of the present invention, no component will block between the observation window body 3 and the area to be observed 21, thereby improving the clarity of observation from the observation window body 3, and further improving the accuracy of judging the crystal growth state; in the shielding state, the crystal growth device of the present invention can not only insulate the observation window body 3 to prevent the observation window body 3 from overheating, but also block volatiles for the observation window body 3, reducing the need to clean the observation window and ensuring the clarity of observation.
[0045] In the embodiment of the present utility model, in order to solve the problem that the interior of the crystal growth furnace chamber 2 needs to be sealed, the observation window body 3 is sealed with the crystal growth furnace chamber 2, and the crystal growth cavity observation window assembly 1 is sealed with the crystal growth furnace chamber 2. Among them, the sealing method of the crystal growth cavity observation window assembly 1 and the crystal growth furnace chamber 2 can refer to the above embodiment, and will not be repeated here. The sealing cooperation between the observation window body 3 and the crystal growth furnace chamber 2 can be achieved by setting a sealing ring or a sealing pipe threaded section. In the embodiment of the present application, the sealing method between the observation window body 3 and the crystal growth furnace chamber 2 is not limited.
[0046] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.
Claims
1. A crystal growth chamber observation window assembly, characterized in that: Applied to a crystal growth furnace chamber, the top of the crystal growth furnace chamber is provided with an observation window body, the observation window body faces the area to be observed in the crystal growth furnace chamber, and the crystal growth chamber observation window assembly includes: A rotating structure, the rotating structure is used to penetrate the inner and outer sides of the top of the crystal growth furnace chamber and be rotatably connected to the crystal growth furnace chamber; A shielding member connected to the bottom of the rotating structure; In the blocking state, the blocking member is used to rotate with the rotating structure to a first preset angle so that the blocking member blocks the observation window body and the area to be observed; in the observing state, the blocking member is used to rotate with the rotating structure to a second preset angle so that the area to be observed can be observed from the position of the observation window body.
2. The crystal growth chamber observation window assembly according to claim 1, characterized in that: The rotating structure includes a shaft body and a shaft sleeve; The bottom of the shaft body is connected to the shielding member; The crystal growth furnace chamber is provided with a first through hole, the sleeve is inserted into the first through hole, the outer wall of the sleeve is sealed with the hole wall of the first through hole, the shaft body is rotatably fitted in the inner cavity of the sleeve, and a sealing ring is provided between the shaft body and the inner cavity wall of the sleeve.
3. The crystal growth chamber observation window assembly according to claim 2, characterized in that: A first recessed portion is provided on the top end surface of the sleeve, the first recessed portion is arranged around the central axis of the sleeve, the first recessed portion is communicated with the inner cavity wall of the sleeve, and a first receiving groove is formed between the first recessed portion and the outer side wall of the shaft body; the sealing ring is arranged in the first receiving groove; The rotating structure also includes an end cover, which is provided with a second through hole, and the shaft body is inserted into the second through hole. The end cover is detachably connected to the top of the sleeve; the end cover has a pressing surface, and the pressing surface is used to press the sealing ring to deform the sealing ring and seal the gap between the sleeve and the shaft body.
4. The crystal growth chamber observation window assembly according to claim 3, characterized in that: The first recessed portion is tilted downward in a radial direction close to the shaft body, so that the first receiving groove has a wedge-shaped structure; And / or, a second accommodating groove is formed between the pressing surface and the outer side wall of the shaft body; the pressing surface is inclined upward along the radial direction close to the shaft body, so that the second accommodating groove has a wedge-shaped structure.
5. The crystal growth chamber observation window assembly according to claim 3, characterized in that: The bottom end surface of the end cover is provided with a second recessed portion; The pressing surface is arranged at the top of the second recessed portion, the inner side wall of the second recessed portion is provided with an internal thread section, the top outer side wall of the sleeve is provided with an external thread section, and the second recessed portion is threadedly connected with the sleeve; And / or, the rotating structure also includes a threaded connector; the second recessed portion is sleeved on the top outer side of the sleeve; the end cover is provided with at least two fourth through holes, and at least two of the fourth through holes are spaced at a preset interval in the vertical direction; a second screw hole is provided on the sleeve, and the second screw hole is connected to the outer peripheral wall of the shaft body, and the second screw hole is opposite to the fourth through hole; the threaded connector passes through the fourth through hole and the second screw hole in sequence to lock the end cover on the sleeve.
6. The crystal growth chamber observation window assembly according to claim 2, characterized in that: The outer side wall of the shaft sleeve is provided with a sealing pipe thread section, the first through hole is a threaded hole, and the shaft sleeve is locked in the first through hole through the sealing pipe thread section; And / or, a flat portion is provided on the outer circumference of the shaft body.
7. The crystal growth chamber observation window assembly according to claim 1, characterized in that: The shielding member is a plate-like structure, the shielding member is fan-shaped, and the center area of the shielding member is connected to the rotating structure.
8. The crystal growth chamber observation window assembly according to claim 1, characterized in that: The crystal growth chamber observation window assembly also includes a handle, one end of which is connected to the top of the rotating structure.
9. A crystal growth device, characterized in that: include: Crystal growth furnace chamber; An observation window body, wherein the observation window body is installed on the top of the crystal growth furnace chamber; The crystal growth chamber observation window assembly according to any one of claims 1 to 8, wherein the crystal growth chamber observation window assembly is installed on the top of the crystal growth furnace chamber.
10. The crystal growth apparatus according to claim 9, wherein: The observation window body is in sealing cooperation with the crystal growth furnace chamber, and the crystal growth cavity observation window assembly is in sealing cooperation with the crystal growth furnace chamber.