Single crystal furnace thermal field splicing bottom heater

Abstract

The utility model relates to the technical field of single crystal furnace bottom heaters, in particular to a single crystal furnace thermal field splicing bottom heater. The bottom heater comprises a bottom heater body, a first splice plate and a second splice plate are arranged at the two ends of the bottom heater body respectively, adjusting devices are arranged at the positions, corresponding to the first splice plate and the second splice plate, of the surfaces of the two ends of the bottom heater body, and each adjusting device comprises an inlaying groove. The embedding grooves are formed in the surfaces of the two ends of the bottom heater body, the surfaces of the two embedding grooves are connected with the first splicing plate and the second splicing plate in an inserted mode correspondingly, and a plurality of bolt holes are formed in the positions, corresponding to the first splicing plate and the second splicing plate, of the surfaces of the two ends of the bottom heater body; and the inner walls of the plurality of bolt holes are in threaded connection with carbon-carbon bolts. The single crystal furnace thermal field splicing bottom heater provided by the utility model has the advantage that the bottom heater main body can be conveniently spliced and fixed.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnace bottom heaters, in particular to a single crystal furnace thermal field splicing bottom heater. Background Art

[0002] The bottom heater of the single crystal furnace thermal field is an important part of the single crystal furnace thermal field system. Its main function is to provide a heating environment for the melt during the growth of the single crystal furnace, which not only improves the melt efficiency, but also makes the thermal field temperature gradient uniform and ensures that the quartz crucible is heated evenly. It is common to damage the quartz crucible during graphite cutting operations.

[0003] Prior art includes a utility model with a publication number of CN217116429U, which discloses a spliced ​​bottom heater for a single crystal furnace, comprising a first heating strip and a second heating strip, the foot plate comprising a first foot plate and a second foot plate, the two ends of the first heating strip being detachably connected to the first foot plate and the second foot plate respectively, the two ends of the second heating strip being detachably connected to the first foot plate and the second foot plate respectively, the first heating strip and the second heating strip having the same structure, the first heating strip and the second heating strip both comprising a heating portion in the middle and overlapping portions on both sides of the heating portion, the first foot plate and the second foot plate having the same structure, the first foot plate and the second foot plate both comprising an electrode connecting portion in the middle and receiving portions on both sides of the electrode connecting portion, the overlapping portions of the first heating strip and the second heating strip both overlapping the receiving portions of the first foot plate and the second foot plate respectively.

[0004] When using the bottom heater of the single crystal furnace thermal field, it was found that during the process of cutting and grinding the graphite material, since the main function of the bottom heater of the single crystal furnace thermal field is to provide a heating environment for the molten material during the growth process of the single crystal furnace, once the bottom heater is damaged during use, the entire piece of graphite material will not be able to be reused, which will lead to the problem of inconvenience in replacing and splicing the bottom heater separately. Utility Model Content

[0005] The purpose of the utility model is to solve the problem in the prior art that during the process of cutting and grinding graphite materials, since the main function of the bottom heater of the single crystal furnace thermal field is to provide a heating environment for the molten material during the growth process of the single crystal furnace, once the bottom heater is damaged during use, the entire piece of graphite material will not be able to be reused, which makes it inconvenient to replace and splice the bottom heater separately.

[0006] In order to solve the above technical problems, the utility model provides a single crystal furnace thermal field spliced ​​bottom heater, including: a bottom heater body, a first splicing plate and a second splicing plate are respectively arranged at both ends of the bottom heater body, and adjustment devices are provided at the positions of the first splicing plate and the second splicing plate on the surfaces of both ends of the bottom heater body corresponding to the positions of the first splicing plate and the second splicing plate, and the adjustment device includes an inlay groove, and the inlay grooves are both opened on the two end surfaces of the bottom heater body, and the surfaces of the two inlay grooves are respectively plugged into the first splicing plate and the second splicing plate, and a plurality of bolt holes are opened on the two end surfaces of the bottom heater body corresponding to the positions of the first splicing plate and the second splicing plate, and the inner walls of the plurality of bolt holes are threadedly connected with carbon-carbon bolts, and one end of the plurality of carbon-carbon bolts are respectively threadedly connected to the surfaces of the first splicing plate and the second splicing plate.

[0007] The effect achieved by the above components is: the main function of the bottom heater of the single crystal furnace thermal field is to provide a heating environment for the molten material during the growth process of the single crystal furnace. Once the bottom heater is damaged during use, the entire piece of graphite material will be unable to be reused. At this time, in order to facilitate the individual and convenient replacement and limiting of the bottom heater of the single crystal furnace thermal field, the inlay grooves opened at both ends of the bottom heater body are respectively connected to the first splicing plate and the second splicing plate, and then the bolt holes opened on the surfaces of the first splicing plate and the second splicing plate at both ends of the bottom heater body are used to allow the bolt holes to be connected and fixed to the first splicing plate and the second splicing plate respectively with the help of multiple carbon-carbon bolts, so that the entire bottom heater body can be divided into multiple independent modules.

[0008] Preferably, a film is fixedly connected to the surface of one side of the first splicing plate and the second splicing plate close to the bottom heater body, and the film is a graphite film.

[0009] The effect achieved by the above components is: after the first splicing plate is docked and fixed with the second splicing plate and the bottom heater body, the graphite film fixed on one side of the splicing plate and the bottom heater body is heat-treated, so that the splicing plate and the bottom heater body are fixed more firmly.

[0010] Preferably, the first splicing plate and the second splicing plate are both clamped with a fixed frame at positions close to the bottom heater body, and the four corners of the fixed frame are rotatably connected with a rotating plate, and an extrusion frame is clamped with a side of the bottom heater body away from the fixed frame, and connecting grooves are provided on the side walls at both ends of the extrusion frame corresponding to the positions of the rotating plate, and the inner walls of the connecting grooves are clamped with the surface of the rotating plate, and the surfaces of the four rotating plates are slidably plugged with the same connecting plate, and a fixing column is fixedly connected to the surface of the extrusion frame, and the arc surface of the fixing column is plugged with the surface of the connecting plate, and the arc surface of the fixing column is threadedly connected with a rotating shaft.

[0011] The effect achieved by the above components is: after the first splicing plate is docked and fixed with the second splicing plate and the bottom heater, in order to facilitate better protection of the docking point, the position of the second splicing plate and the bottom heater body is clamped through the fixed frame, and then the extrusion frame is plugged in, and then the rotating plates at the four corners of the fixed frame are rotated to allow the rotating plates to be clamped with the connecting grooves opened at both ends of the extrusion frame. At this time, the connecting plate and the four rotating plates are plugged and fixed to prevent the positions of the four rotating plates from shifting, and then the rotating shaft of the arc surface of the fixed column on the surface of the extrusion frame is rotated to allow the rotating shaft to squeeze and fix the surface of the connecting plate until the entire rotating shaft can no longer be adjusted, thereby effectively protecting the docking point between the entire splicing plate and the bottom heater body.

[0012] Preferably, a plurality of friction grooves are formed on the surface of the rotating shaft, and the plurality of friction grooves are evenly distributed on the surface of the rotating shaft.

[0013] The effect achieved by the above components is that when the rotating shaft is rotated, the friction grooves provided on the surface of the rotating shaft can be used to assist the rotating operation.

[0014] Preferably, a gasket is sleeved on the arc surface of the fixing column, and the surface of the gasket abuts against one side of the rotating shaft.

[0015] The effect achieved by the above components is: in the process of allowing the rotating shaft to squeeze and limit the connecting plate, in order to effectively protect the rotating shaft, friction damage between the rotating shaft and the connecting plate is avoided.

[0016] Preferably, inner walls of the fixing frame and the extrusion frame are both fixedly connected with extrusion pads, and surfaces of the extrusion pads are provided with anti-slip grooves.

[0017] The effect achieved by the above components is that after the positions of the fixed frame and the extrusion frame are limited, the friction can be increased by the extrusion pad fixed to the inner wall of the extrusion frame and the fixed frame, so as to facilitate better protection and use.

[0018] Preferably, the cross section of one end of the rotating plate close to the extrusion frame is arc-shaped, and the cross-sectional size of the rotating plate is matched with the inner wall size of the connecting plate.

[0019] The effect achieved by the above components is: in order to facilitate the plugging and fixing of the rotating plate and the connecting plate, the rotating plate with an arc-shaped cross-section at one end is used for auxiliary operation.

[0020] Compared with the related art, the single crystal furnace thermal field splicing bottom heater provided by the utility model has the following advantages:

[0021] Beneficial effects:

[0022] The utility model provides a single crystal furnace thermal field splicing bottom heater. In the process of cutting and grinding graphite materials, it is easy to cause damage to the bottom heater. At this time, in order to facilitate the bottom heater body to be divided into separate modules, the first splicing plate and the second splicing plate are firstly connected to the two ends of the bottom heater body, and then the first splicing plate and the second splicing plate are glued and fixed by the graphite film fixed near the surface of the bottom heater body, and the entire first splicing plate and the second splicing plate are temporarily fixed to the bottom heater body, and then the carbon-carbon bolts are used to thread and limit the bolt holes opened on the two side surfaces of the bottom heater body. , so that the entire bottom heater body can be divided into separate modules, and then the fixed frame and the extrusion frame are plugged into the joints between the first splicing plate, the second splicing plate and the bottom heater body, and then the rotating plate on the surface of the fixed frame is rotated to allow the rotating plate and the connecting groove opened on the surface of the extrusion frame to be clamped and fixed, and then the connecting plate and the rotating plate are slidably plugged, and then the rotating shaft on the surface of the fixed column is rotated to allow the rotating shaft to squeeze and fix the position of the entire connecting plate, and through the operation of the adjusting device, the entire first splicing plate, the second splicing plate and the bottom heater body are docked and fixed, so that the entire bottom heater body can be divided into separate modules, and the limit fixation can be easily replaced. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the structure of the single crystal furnace thermal field splicing bottom heater provided by the utility model;

[0024] Figure 2 for Figure 1 A schematic diagram of a partial structure of the three-dimensional structure shown;

[0025] Figure 3 for Figure 1 The structural schematic diagram of the regulating device shown;

[0026] Figure 4 for Figure 3 Schematic diagram of the disassembled structure of the regulating device shown.

[0027] Numbers in the figure: 1. bottom heater body; 2. first splicing plate; 3. second splicing plate; 4. adjusting device; 401. inlay groove; 402. film; 403. bolt hole; 404. fixing frame; 405. extrusion frame; 406. rotating plate; 407. connecting plate; 408. fixing column; 409. rotating shaft; 410. gasket; 411. friction groove; 412. connecting groove; 413. extrusion pad. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0029] The specific implementation of the present utility model is described in detail below in conjunction with specific embodiments.

[0030] See also Figures 1 to 4 The single crystal furnace thermal field splicing bottom heater provided by the embodiment of the utility model comprises: a bottom heater body 1, a first splicing plate 2 and a second splicing plate 3 are respectively arranged at both ends of the bottom heater body 1, and adjustment devices 4 are arranged at the positions of the first splicing plate 2 and the second splicing plate 3 on the surfaces of the two ends of the bottom heater body 1.

[0031] In the embodiments of the present invention, please refer to Figure 2 , Figure 3 and Figure 4The adjusting device 4 includes an inlay groove 401, which is provided on the two end surfaces of the bottom heater body 1, and the surfaces of the two inlay grooves 401 are respectively plugged with the first splicing plate 2 and the second splicing plate 3, and a plurality of bolt holes 403 are provided on the two end surfaces of the bottom heater body 1 corresponding to the positions of the first splicing plate 2 and the second splicing plate 3, and the inner walls of the plurality of bolt holes 403 are threadedly connected with carbon-carbon bolts, and one end of the plurality of carbon-carbon bolts are respectively threadedly connected with the surfaces of the first splicing plate 2 and the second splicing plate 3, and the first splicing plate 2 and the second splicing plate 3 are fixedly connected with a film 402 on one side surface close to the bottom heater body 1, and the film 402 is a graphite film 402, and the first splicing plate 2 and the second splicing plate 3 are both clamped with a fixed frame 404 at the positions close to each other of the bottom heater body 1, and the four peripheral corners of the fixed frame 404 are rotatably connected with a rotating plate 406, and the side of the bottom heater body 1 away from the fixed frame 404 is clamped with an extrusion frame 405, and both ends of the extrusion frame 405 The side walls are provided with connecting grooves 412 at positions corresponding to the rotating plates 406, the inner walls of the connecting grooves 412 are engaged with the surfaces of the rotating plates 406, the surfaces of the four rotating plates 406 are all slidably plugged with the same connecting plate 407, the surface of the extrusion frame 405 is fixedly connected with a fixing column 408, the arc surface of the fixing column 408 is plugged with the surface of the connecting plate 407, the arc surface of the fixing column 408 is threadedly connected with a rotating shaft 409, and the surface of the rotating shaft 409 is provided with a plurality of friction grooves 41 1. Several friction grooves 411 are evenly distributed on the surface of the rotating shaft 409. The arc surface of the fixed column 408 is sleeved with a gasket 410. The surface of the gasket 410 abuts against one side of the rotating shaft 409. The inner walls of the fixed frame 404 and the extrusion frame 405 are fixedly connected with an extrusion pad 413. The surface of the extrusion pad 413 is provided with anti-slip grooves. The cross-section of one end of the rotating plate 406 close to the extrusion frame 405 is in an arc shape. The cross-sectional size of the rotating plate 406 is adapted to the inner wall size of the connecting plate 407.

[0032] The working principle of the single crystal furnace thermal field splicing bottom heater provided by the utility model is as follows: in the process of cutting and grinding the graphite material, it is easy to cause damage to the bottom heater. At this time, in order to facilitate the division of the bottom heater main body 1 into separate modules for splicing, the first splicing plate 2 and the second splicing plate 3 are first connected to the two ends of the bottom heater main body 1, and then the first splicing plate 2 and the second splicing plate 3 are glued and fixed by the graphite film 402 fixed close to the surface of the bottom heater main body 1, and the entire first splicing plate 2 and the second splicing plate 3 are temporarily fixed to the bottom heater main body 1, and then the carbon-carbon bolts are used to thread and fix with the bolt holes 403 opened on the two side surfaces of the bottom heater main body 1, so that the entire bottom heater main body 1 can be divided into Separate modules, then the fixed frame 404 and the extrusion frame 405 are inserted into the joint of the first splicing plate 2, the second splicing plate 3 and the bottom heater body 1, and then the rotating plate 406 on the surface of the fixed frame 404 is rotated, so that the rotating plate 406 and the connecting groove 412 opened on the surface of the extrusion frame 405 are clamped and fixed, and then the connecting plate 407 and the rotating plate 406 are slidably inserted, and then the rotating shaft 409 on the surface of the fixed column 408 is rotated, so that the rotating shaft 409 squeezes and fixes the position of the entire connecting plate 407, and through the operation of the adjusting device 4, the docking and fixation between the entire first splicing plate 2 and the second splicing plate 3 and the bottom heater body 1 is achieved, so that the entire bottom heater body 1 can be divided into separate modules, and the limit fixation can be conveniently replaced.

[0033] The circuits and controls involved in the present invention are all prior art and will not be described in detail here.

[0034] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. Single crystal furnace thermal field splicing bottom heater, characterized in that: include: A bottom heater body (1), wherein the two ends of the bottom heater body (1) are respectively provided with a first splicing plate (2) and a second splicing plate (3), and the surfaces of the two ends of the bottom heater body (1) are provided with adjustment devices (4) at positions corresponding to the first splicing plate (2) and the second splicing plate (3), and the adjustment device (4) comprises an inlay groove (401), and the inlay groove (401) is provided on the two end surfaces of the bottom heater body (1), and the surfaces of the two inlay grooves (401) are respectively plugged with the first splicing plate (2) and the second splicing plate (3), and the surfaces of the two end surfaces of the bottom heater body (1) are provided with a plurality of bolt holes (403) at positions corresponding to the first splicing plate (2) and the second splicing plate (3), and the inner walls of the plurality of bolt holes (403) are threadedly connected with carbon-carbon bolts, and one end of the plurality of carbon-carbon bolts is respectively threadedly connected with the surfaces of the first splicing plate (2) and the second splicing plate (3).

2. The single crystal furnace thermal field splicing bottom heater according to claim 1, characterized in that: The first splicing plate (2) and the second splicing plate (3) are both fixedly connected with a film (402) on one side surface close to the bottom heater body (1), and the film (402) is a graphite film (402).

3. The single crystal furnace thermal field splicing bottom heater according to claim 1, characterized in that: The first splicing plate (2) and the second splicing plate (3) are both clamped with a fixed frame (404) at positions close to the bottom heater body (1); the four peripheral corners of the fixed frame (404) are rotatably connected with a rotating plate (406); the side of the bottom heater body (1) away from the fixed frame (404) is clamped with an extrusion frame (405); the side walls at both ends of the extrusion frame (405) are provided with connecting grooves (412) at positions corresponding to the rotating plate (406); the inner wall of the connecting groove (412) is clamped with the surface of the rotating plate (406); the surfaces of the four rotating plates (406) are all slidably plugged with the same connecting plate (407); the surface of the extrusion frame (405) is fixedly connected with a fixed column (408); the arc surface of the fixed column (408) is plugged with the surface of the connecting plate (407); the arc surface of the fixed column (408) is threadedly connected with a rotating shaft (409).

4. The single crystal furnace thermal field splicing bottom heater according to claim 3, characterized in that: A plurality of friction grooves (411) are formed on the surface of the rotating shaft (409), and the plurality of friction grooves (411) are evenly distributed on the surface of the rotating shaft (409).

5. The single crystal furnace thermal field splicing bottom heater according to claim 3, characterized in that: The arc surface of the fixing column (408) is sleeved with a gasket (410), and the surface of the gasket (410) abuts against one side of the rotating shaft (409).

6. The single crystal furnace thermal field splicing bottom heater according to claim 3, characterized in that: The inner walls of the fixing frame (404) and the extrusion frame (405) are both fixedly connected with an extrusion pad (413), and the surface of the extrusion pad (413) is provided with anti-slip grooves.

7. The single crystal furnace thermal field splicing bottom heater according to claim 3, characterized in that: The cross section of one end of the rotating plate (406) close to the extrusion frame (405) is in an arc shape, and the cross-sectional size of the rotating plate (406) is matched with the inner wall size of the connecting plate (407).

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