Diaphragm valve
By designing a diaphragm valve with branch pipe interface and shunt control, the problem of debris entering the pipeline during assembly in the semiconductor field is solved, and the clean state of the pipeline and the convenience of assembly are achieved.
Patent Information
- Application Number
- CN202421074744.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-16
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-05-16
AI Technical Summary
In the semiconductor field, in order to ensure the clean state of the pipe, existing diaphragm valves require drilling and welding operations during assembly, causing debris to enter the pipe and affecting the cleanliness.
Design a diaphragm valve, connecting the main pipe through the interfaces on both sides of the valve body, and setting a branch pipe interface in the valve body, the main flow channel is connected to the intake and outlet flow channel, and the diaphragm is controlled through the actuator and valve stem to realize the fluid to avoid directly assembling branch pipes on the main pipes.
By reducing drilling and welding operations, the diaphragm valve avoids debris entering the pipeline, ensuring the clean state of the pipeline, while saving material costs and improving assembly efficiency and convenience.
Smart Images
Figure CN222526934U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of valves, in particular to a diaphragm valve. Background Art
[0002] The diaphragm valve is a stop valve that uses a diaphragm as a start and stop part to close the flow channel, cut off the fluid, and separate the inner cavity of the valve body from the inner cavity of the valve cover. The diaphragm is usually made of elastic, corrosion-resistant, and non-permeable materials such as rubber and plastic. The valve body is mostly made of plastic, fiberglass, ceramic or metal-lined rubber materials. The diaphragm valve has a simple structure, good sealing and corrosion resistance, and low fluid resistance. It is often used in low-pressure, low-temperature, highly corrosive media and media containing suspended matter.
[0003] In the actual use of diaphragm valves in factory workshop pipelines, the main pipeline needs to be connected to multiple branch pipelines according to actual conditions, and a diaphragm valve is installed on each branch pipeline for subsequent branch fluid control. During the installation process, the branch pipeline needs to be drilled on the main pipeline, and then the branch pipeline is welded or fixed to the main pipeline through connecting parts. In the semiconductor field, for ultra-high purity fluid control, it is necessary to ensure that the environment inside the pipeline is in a highly clean state, and drilling and welding the main pipeline at the assembly site will cause debris to enter the pipeline, thereby affecting the cleanliness of the pipeline. Utility Model Content
[0004] The purpose of the utility model is to provide a diaphragm valve to solve the problems raised in the above background technology.
[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a diaphragm valve, comprising: a valve body, interfaces on both sides of the valve body are connected to the main pipeline, the valve body is provided with a branch pipe interface for connecting the branch pipeline, the valve body has a main flow channel, the valve body has an inlet flow channel and an outlet flow channel, and the inlet flow channel is connected to the main flow channel.
[0006] Preferably, the outlet air passage is communicated with the branch pipe.
[0007] Preferably, the main flow channel is arranged between interfaces on both sides of the valve body.
[0008] Preferably, the main channel is communicated with the main pipeline.
[0009] Preferably, a diaphragm is arranged in the valve body.
[0010] Preferably, the diaphragm is located directly above the intake air passage.
[0011] Preferably, the valve body is connected to an actuator.
[0012] Preferably, a valve stem is arranged between the actuator and the diaphragm.
[0013] The diaphragm valve has the following beneficial effects:
[0014] The diaphragm valve is installed on the main pipeline through interfaces on both sides of the valve body, and a branch pipeline is installed at the branch pipe interface of the valve body. When the ultra-high purity fluid in the main pipeline is transported in the main flow channel of the valve body, a part of it is transported to the branch pipeline through the inlet flow channel and the outlet flow channel to realize branch fluid transportation, so that the branch pipeline does not need to be directly assembled on the main pipeline, eliminating the drilling and welding operations in the assembly process, thereby ensuring the cleanliness in the pipeline. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 A front view of a diaphragm valve provided in an embodiment of the present application;
[0016] Figure 2 A front cross-sectional view of a diaphragm valve provided in an embodiment of the present application;
[0017] Figure 3 A right side view of the diaphragm valve provided in an embodiment of the present application;
[0018] Figure 4 A side cross-sectional view of a diaphragm valve provided in an embodiment of the present application;
[0019] Figure 5 for Figure 4 Enlarged view of point A in the middle.
[0020] In the figure: 1. valve body; 11. main flow channel; 12. inlet flow channel; 13. outlet flow channel; 2. actuator; 3. branch pipe interface; 4. diaphragm; 5. valve stem. DETAILED DESCRIPTION
[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0022] like Figure 1 , Figure 3 As shown, the utility model provides a diaphragm valve, including: a valve body 1, interfaces on both sides of the valve body 1 are connected to the main pipeline, a plurality of pipelines are arranged axially to form the main pipeline, the valve body 1 is provided with a branch pipe interface 3 for connecting the branch pipe, the inner diameter of the main pipe is larger than the branch pipe, and the main pipe and the branch pipe are connected through the valve body 1.
[0023] Specifically, Figure 2 , Figure 4As shown, the valve body 1 is provided with a main flow channel 11 , which is arranged between interfaces on both sides of the valve body 1 , and the main flow channel 11 is connected with the main pipeline through the interfaces on both sides of the valve body 1 .
[0024] Furthermore, the valve body 1 is provided with an inlet flow channel 12 and an outlet flow channel 13 , the inlet flow channel 12 is connected with the main flow channel 11 , and the outlet flow channel 13 is connected with the branch pipe through the branch pipe interface 3 .
[0025] like Figure 5 As shown, a diaphragm 4 is arranged in the valve body 1 , and the diaphragm 4 is located directly above the intake flow passage 12 . The valve body 1 is connected to the actuator 2 , and a valve stem 5 is arranged between the actuator 2 and the diaphragm 4 .
[0026] In this embodiment, the valve body 1 is installed on the main pipeline through the interfaces on both sides of the valve body 1, and the branch pipeline is installed at the branch pipe interface 3 of the valve body 1. When the ultra-high purity fluid in the main pipeline is transported in the main channel 11 of the valve body 1, the actuator 2 is adjusted to push the valve stem 5 downward, and the valve stem 5 presses the diaphragm 4 downward, so that the diaphragm 4 closes the inlet flow channel 12, and the ultra-high purity fluid in the main channel 11 cannot enter the branch pipeline. The actuator 2 is adjusted to move the valve stem 5 upward, and the diaphragm 4 rebounds. At this time, a part of the ultra-high purity fluid in the main channel 11 enters the inlet flow channel 12, and then enters the outlet flow channel 13 from the inlet flow channel 12, and finally enters the branch pipeline through the branch pipe interface 3, so as to realize the branch fluid transportation, thereby controlling the opening and closing of the fluid in the branch pipeline.
[0027] In the present application, the main pipeline and the branch pipeline are connected through the valve body 1, and the branch pipeline does not need to be directly assembled on the main pipeline, eliminating the drilling and welding operations during the assembly process, thereby ensuring the cleanliness of the pipeline and saving material costs. The installation can be achieved in a smaller space, improving assembly efficiency, reducing assembly difficulty, and making pipeline assembly operations in the semiconductor field more convenient.
[0028] In addition, in the prior art, it is necessary to install a valve on the branch pipe so that the length of the entire fluid-controlled pipe is longer. The valve of the present application is arranged at the interface between the main pipe and the branch pipe, which can shorten the length of the fluid-controlled pipe and the installation volume while achieving the same effect, that is, a plurality of branch pipe interfaces 3 adapted to different branch pipe diameters are opened on the valve body 1, and each branch pipe interface 3 is connected to the outlet flow channel 13, so that the branch pipe fluid size and opening and closing can be operated using a single valve, and the combination of the main pipe and the valve body 1 not only does not affect the flow output of the main pipe, but also does not affect the fluid opening and closing and flow output of the branch pipe, thereby achieving no change in direction within a limited space and completing the pipeline assembly.
[0029] Working principle: the valve body 1 is installed on the main pipeline through the interfaces on both sides of the valve body 1, and the branch pipeline is installed at the branch pipe interface 3 of the valve body 1. When the ultra-high purity fluid in the main pipeline is transported in the main channel 11 of the valve body 1, the actuator 2 is adjusted to push the valve stem 5 downward, and the valve stem 5 presses the diaphragm 4 downward, so that the diaphragm 4 closes the inlet flow channel 12, and the ultra-high purity fluid in the main channel 11 cannot enter the branch pipeline. The actuator 2 is adjusted to move the valve stem 5 upward, and the diaphragm 4 rebounds. At this time, a part of the ultra-high purity fluid in the main channel 11 enters the inlet flow channel 12, and then enters the outlet flow channel 13 from the inlet flow channel 12, and finally enters the branch pipeline through the branch pipe interface 3 to realize the branch fluid transportation, thereby controlling the opening and closing of the fluid in the branch pipeline.
[0030] In summary, although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A diaphragm valve, characterized in that: include: A valve body (1), wherein interfaces on both sides of the valve body (1) are connected to a main pipeline, and the valve body (1) is provided with a branch pipe interface (3) for connecting to a branch pipeline; The valve body (1) is provided with a main flow channel (11); The valve body (1) is provided with an inlet flow channel (12) and an outlet flow channel (13), and the inlet flow channel (12) is connected to the main flow channel (11).
2. A diaphragm valve according to claim 1, characterized in that: The outlet flow channel (13) is in communication with the branch pipeline.
3. A diaphragm valve according to claim 1, characterized in that: The main flow channel (11) is arranged between the interfaces on both sides of the valve body (1).
4. A diaphragm valve according to claim 3, characterized in that: The main flow channel (11) is connected to the main pipeline.
5. A diaphragm valve according to claim 1, characterized in that: A diaphragm (4) is arranged inside the valve body (1).
6. A diaphragm valve according to claim 5, characterized in that: The diaphragm (4) is located directly above the inlet flow channel (12).
7. A diaphragm valve according to claim 5, characterized in that: The valve body (1) is connected to the actuator (2).
8. A diaphragm valve according to claim 7, characterized in that: A valve stem (5) is arranged between the actuator (2) and the diaphragm (4).