Multi-scale and multi-angle performance parameter testing device for electroluminescent device
By designing a performance parameter test device for multi-scale multi-angle electroluminescent devices, the rotation component and photoelectric detection component are used to collect multi-angle optical signals, which solves the problems of low sensitivity and inaccurate measurement results of existing test methods, and achieves high accuracy Multi-parameter detection.
Patent Information
- Application Number
- CN202420188456.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-25
- Publication Date
- 2025-02-25
- Estimated Expiration
- 2034-01-25
AI Technical Summary
The existing micro-nano electroluminescent device parameter testing methods have defects such as low sensitivity, easy to affect the light source position, and only testing optical parameters in a single direction or a small number of directions, which are difficult to accurately reflect the device performance.
Design a multi-scale multi-angle electroluminescent device performance parameter testing device, including a probe table, a photoelectric detection component and a rotating component. Through the rotating component, the photoelectric detection component is driven to rotate around the sample to be tested, and optical signals in different positions and directions are collected. And the spectral and light intensity parameters are detected through detectors such as spectrometer, photomultiplier tube, imaging CCD.
It realizes the testing of multiple parameters of the luminescent transistor device at all levels and angles, improves detection accuracy, simplifies the operation process, and improves testing efficiency.
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Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of micro-nano electroluminescent device parameter testing, and specifically relates to a multi-scale and multi-angle electroluminescent device performance parameter testing device, and in particular to a multi-scale and multi-angle (angle-resolved) light-emitting transistor performance parameter testing device. Background Art
[0002] Micro-nano electroluminescent devices refer to electroluminescent devices with micro-nano scale that need to be tested with a focusing and amplifying optical path, such as laser diodes (i.e. semiconductor lasers), light-emitting diodes, light-emitting triodes, etc. They have very important application prospects in the fields of display, lighting, communication, etc. It is very important to accurately and comprehensively measure the parameters of micro-nano electroluminescent devices. Traditional measuring devices generally fix the electroluminescent device to be tested first, measure the brightness in the normal direction with a brightness meter, and then calculate the overall luminous efficiency of the electroluminescent device based on the Lambertian body assumption.
[0003] However, studies have shown that not all micro-nano electroluminescent devices conform to the Lambert body assumption. For example, micro-nano electroluminescent devices based on single crystals have relatively strong light output in the lateral direction due to the optical waveguide effect, which conflicts with the assumption that the lateral light intensity of the Lambertian body is 0. At the same time, since the Lambertian body distribution of the device in practice is not a standard cosine distribution, there is a partial uneven distribution phenomenon. Therefore, the accuracy of the calculated results is relatively low.
[0004] The integrating sphere method collects the overall luminous flux of the electroluminescent device through an integrating sphere detector, and obtains the EQE (overall external quantum efficiency) of the device by calculation, which can effectively improve the defects based on the Lambertian body assumption. However, the light emitted by the light source of the integrating sphere method must undergo multiple light emissions and absorptions before reaching the luminous flux collection plate of the integrating sphere detector, resulting in low test sensitivity and the inability to measure micro-nano electroluminescent devices with weak signals. In addition, the position of the light source in the integrating sphere has a considerable impact on the results, and improper placement can easily cause significant deviations in the measurement results.
[0005] At the same time, the existing measurement methods have the following defects: (1) they can only test optical parameters in a single direction or a small number of directions and the test speed is slow; (2) they can usually only test the spectrum and brightness, and the test parameters are single, which makes it difficult to accurately reflect the performance of electroluminescent devices. Utility Model Content
[0006] In order to improve the deficiencies of the prior art, the utility model provides a multi-scale and multi-angle electroluminescent device performance parameter testing device, which can test multiple parameters of light-emitting transistor devices in all directions and at multiple angles, thereby improving detection accuracy.
[0007] In a first aspect, the utility model provides a multi-scale and multi-angle electroluminescent device performance parameter testing device, comprising a probe station, a photoelectric detection component and a rotating component;
[0008] The probe station is used to place the sample to be tested;
[0009] The photoelectric detection assembly is used to test the optical parameters of the sample to be tested;
[0010] The photoelectric detection component is connected to the rotating component, and the rotating component is used to drive the photoelectric detection component to rotate around the probe station to change the relative position and relative direction of the photoelectric detection component and the sample to be tested on the probe station. The photoelectric detection component is used to collect light signals emitted from different positions and directions of the sample to be tested.
[0011] According to the embodiment of the utility model, the sample to be tested is an electroluminescent device, and the electroluminescent device is selected from single crystal type, thin film type or powder type electroluminescent material.
[0012] According to an embodiment of the present invention, the electroluminescent device is a light emitting diode or a semiconductor laser, for example, the light emitting diode is a light emitting transistor, an organic light emitting diode or an organic light emitting transistor.
[0013] According to the implementation scheme of the utility model, the photoelectric detection component includes a light incident component, a plurality of spectroscopes and a plurality of testers. The light incident component can collect the light incident from the sample to be tested and transmit it to the spectroscope. The spectroscope can convert the light from the light collecting lens into parallel light and then transmit it to the corresponding tester.
[0014] According to an embodiment of the utility model, the light incident component is selected from a component that can collect and transmit light from the sample to be tested, such as a transparent lens, preferably an objective lens, and the magnification of the objective lens can be switched according to the sample size, for example, to different magnifications such as 5×, 10×, 20×, 50×, 100×, etc.
[0015] According to the implementation scheme of the utility model, the tester is selected from one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, and a polarimeter.
[0016] According to the implementation scheme of the utility model, the tester is connected to an information reading component, and the information reading component is selected from a device that can be connected to the tester and read the test data of the tester, and the information reading component is selected from devices such as computers, mobile phones, engineering machines, etc.
[0017] As an example, the imaging CCD and the spectrometer are connected to a computer.
[0018] According to the implementation scheme of the utility model, the connection between the tester and the information reading component includes a wired connection and / or a wireless connection, and the wireless connection includes WiFi and Bluetooth.
[0019] According to the implementation scheme of the utility model, a coupling lens is arranged between the photomultiplier tube and the corresponding spectroscope, and the coupling lens is used to focus the parallel light from the spectroscope to the photomultiplier tube, and the main focus coupled by the coupling lens is located at the light entrance of the photomultiplier tube.
[0020] According to the present embodiment, a coupling lens and an optical fiber are provided between the spectrometer and the corresponding spectroscope, one end of the optical fiber is located at the main focus of the coupling lens, and the other end is connected to the spectrometer.
[0021] According to the present embodiment, the optical fiber is a bifurcated optical fiber, one bifurcated end of the bifurcated optical fiber is connected to the spectrometer, and the other bifurcated end is connected to the alignment light source.
[0022] According to the present embodiment, the spectrometer is used to test the spectral information of the sample, and the spectral information includes the electrospectrum and the photospectrum.
[0023] According to the present embodiment, the alignment light source is used to assist in adjusting the position of the optical fiber to achieve lens coupling of the optical fiber.
[0024] According to the implementation scheme of the utility model, a coupling lens is arranged between the imaging CCD and the corresponding spectroscope, the main focus of the coupling of the coupling lens is located at the entrance of the imaging CCD, and the coupling lens is, for example, an eyepiece.
[0025] According to an embodiment of the utility model, the photoelectric detection assembly further comprises a housing, the light incident component and a plurality of spectroscopes are arranged inside the housing, and preferably, the photomultiplier tube is located inside the housing.
[0026] According to the implementation scheme of the utility model, the bottom of the housing is provided with an inclined surface, and the inclined surface is used to prevent the housing from colliding with the probe station during rotation, thereby expanding the sampling range.
[0027] According to the embodiment of the utility model, the imaging CCD and the spectrometer are located inside or outside the housing.
[0028] According to the implementation scheme of the utility model, the photomultiplier tube is used to test the light intensity of the sample to be tested, and preferably the photomultiplier tube is connected to a power supply.
[0029] According to an embodiment of the present utility model, the probe station includes an adjustment platform for placing a sample to be tested, and the adjustment platform includes a plurality of fixing members, and the fixing members are used to fix the sample to be tested on the adjustment platform.
[0030] According to the embodiment of the utility model, the adjustment platform is a transparent structure or a hollow structure, which is used to measure the bottom luminescence of the sample to be tested.
[0031] According to an embodiment of the present utility model, the testing device further comprises an excitation power supply, and the excitation power supply is used to excite the sample to be tested to emit light.
[0032] According to an embodiment of the present utility model, the excitation power supply is selected from a direct current power supply or an alternating current power supply.
[0033] According to an embodiment of the present utility model, the rotating assembly includes a connecting portion and a rotating portion, and the rotating portion is connected to the photoelectric detection assembly through the connecting portion.
[0034] According to an embodiment of the utility model, the connecting portion is fixedly connected or detachably connected to the photoelectric detection component.
[0035] According to the embodiment of the present utility model, the rotating part can move laterally, move longitudinally and rotate relative to the probe station.
[0036] According to an embodiment of the present utility model, the rotating assembly further comprises a base, and the base is connected to the connecting part via the rotating part.
[0037] According to the implementation scheme of the present utility model, the degree of freedom of the rotating part is ≥6, and preferably the rotating part can rotate arbitrarily, for example, it is a six-axis robotic arm.
[0038] According to the implementation scheme of the utility model, the six-axis robotic arm includes a base, a rotating platform, a large arm, a connecting arm and a small arm connected in sequence, the bottom of the rotating platform is rotatably connected to the base, the top of the rotating platform is rotatably connected to the lower end of the large arm, the lower end of the connecting arm is rotatably connected to the lower end of the large arm, the upper end of the connecting arm is rotatably connected to the lower end of the small arm, and the upper end of the small arm is connected to a photoelectric detection component.
[0039] According to an embodiment of the utility model, the forearm is connected to the housing.
[0040] According to an embodiment of the present utility model, the device further comprises a controller, and the computer, the rotating assembly, and the excitation light source are connected to the controller.
[0041] According to the implementation scheme of the utility model, the device also includes a magnetic field adjustment component, which is used to change the magnetic field strength of the sample to be detected on the detection platform. Preferably, the magnetic field adjustment component includes a controllable magnetic field distributed on the upper and lower parts of the detection platform.
[0042] According to an embodiment of the present utility model, the device further comprises a temperature condition component, and the temperature adjustment component is used to change the temperature of the sample to be detected on the detection platform.
[0043] The method for testing the performance of an electroluminescent device using a testing device of the utility model comprises the following steps:
[0044] The sample to be tested is placed on the sample probe station and fixed, the sample to be tested is excited to perform electroluminescence, and the luminescence of the sample to be tested at different angles is collected.
[0045] According to the implementation scheme of the utility model, collecting the light emission of the sample to be tested at different angles includes the following steps: rotating and changing the relative position of the photoelectric detection component and the sample to be tested on the probe station by a rotating component, staying at each position for 10μs to 15s to collect the light signal at the current position.
[0046] According to the implementation scheme of the utility model, the residence time at each position is 20μs to 10s, and preferably the residence time at each position is 100μs to 5s, for example, any value among 10μs, 30μs, 50μs, 80μs, 100μs, 1ms, 10ms, 50ms, 100ms, 200ms, 1s, 3s, 5s, 8s, 10s, 12s, 15s or any point value in the range value formed by any two point values.
[0047] Beneficial Effects
[0048] The utility model drives the photoelectric detection component to rotate around the sample to be tested through the rotating component, so that the photoelectric detection component can collect the full-space angle light signal of the sample to be tested, and detect the parameters such as spectrum, light intensity, spectrum, polarization degree, etc. through the spectrometer, photomultiplier tube, imaging CCD, etc., and the operation method is simple, the efficiency is high, and the test accuracy is high. BRIEF DESCRIPTION OF THE DRAWINGS
[0049] Figure 1 It is a schematic diagram of the structure of the multi-scale and multi-angle electroluminescent device performance parameter testing device in the utility model;
[0050] Figure 2 It is a structural schematic diagram of the photoelectric detection component in the utility model.
[0051] Among them, 1-rotation component, 2-photoelectric detection component, 3-probe station, 4-light collecting lens, 5-beam splitter, 6-eyepiece, 7-imaging CCD, 8-coupling lens, 9-optical fiber, 10-spectrometer, 11-alignment light source, 12-photomultiplier tube, 13-housing. DETAILED DESCRIPTION
[0052] The structure of the present utility model will be further described in detail below in conjunction with specific embodiments. It should be understood that the following embodiments are only exemplary descriptions and explanations of the present utility model, and should not be interpreted as limiting the scope of protection of the present utility model. All technologies implemented based on the above content of the present utility model are included in the scope of protection intended by the present utility model.
[0053] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.
[0054] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0055] Example 1
[0056] See also Figure 1 As shown, a multi-scale and multi-angle electroluminescent device performance parameter testing device includes a probe station 3, a photoelectric detection component 2 and a rotating component 1.
[0057] The probe station 3 is used to place the sample to be tested. The probe station 3 includes an adjustment table for placing the sample to be tested. The adjustment table includes several fixings, which are used to fix the sample to be tested on the adjustment table. The adjustment table is a transparent structure or a hollow structure, which is used to realize the measurement of bottom luminescence of the sample to be tested.
[0058] In this embodiment, the probe station 3 includes a base, which is connected to an adjusting platform via a support rod. The adjusting platform is suspended on the side away from the base. The position of the adjusting platform is set according to actual needs, and can be higher than the top of the base or lower than the top of the base, preferably higher than the top of the base, so that the photoelectric detection component 2 can rotate around the adjusting platform without colliding with the base or the support rod.
[0059] The photoelectric detection component 2 is used to test the optical parameters of the sample to be tested. The photoelectric detection group 2 is connected to the rotating component 1. The rotating component 1 is used to drive the photoelectric detection component 2 to rotate around the probe station 3 to change the relative position and relative direction of the photoelectric detection component 2 and the sample to be tested on the probe station 1. The photoelectric detection component 2 can collect light signals emitted from different positions and directions of the sample to be tested.
[0060] See also Figure 2 As shown, the photoelectric detection assembly 2 includes a housing 13, a light collecting lens 4, a plurality of spectroscopes 5 and a plurality of testers. The light collecting lens 4 is arranged outside the housing, such as at the bottom, the spectroscope 5 is arranged inside the housing 13, and the tester is arranged inside or outside the housing 13 according to actual needs.
[0061] The light collecting lens 4 can collect the light incident from the sample to be tested and transmit it to the spectroscope 5, which can convert the light from the light collecting lens 1 into parallel light and then transmit it to the corresponding tester; the light collecting lens 4 is selected from a component that can collect and transmit the light from the sample to be tested, and can be a transparent lens, preferably an objective lens.
[0062] The tester is selected from one or more of a spectrometer 10, a photomultiplier tube 12, and an imaging CCD7. In this embodiment, the photomultiplier tube 12 is located inside the housing 13, and the spectrometer 10 and the imaging CCD7 are located outside the housing 13. An inclined surface is provided at the bottom of the housing 13, and the inclined surface is used to prevent the housing 13 from colliding with the probe station 1 during rotation, thereby expanding the sampling range.
[0063] The photomultiplier tube 12 is used to measure the light intensity. The photomultiplier tube 12 is connected to a power supply. A coupling lens 8 is provided between the photomultiplier tube 12 and the corresponding spectroscope 5. The coupling lens 8 is used to focus the parallel light from the spectroscope 5 onto the photomultiplier tube 12. The main focus of the lens coupling 5 is located at the light entrance of the photomultiplier tube 12.
[0064] The spectrometer 10 is used to test the spectral information of the sample, and the spectral information includes the electrospectral spectrum and the photospectral spectrum; a coupling lens 8 and an optical fiber 9 are arranged between the spectrometer 10 and the corresponding spectroscope 5, one end of the optical fiber 9 is located at the main focus of the coupling lens 8, and the other end is connected to the spectrometer 10; the optical fiber 9 in this embodiment is a forked optical fiber, one forked end of the forked optical fiber is connected to the spectrometer 10, and the other forked end is connected to the alignment light source 11, and the alignment light 11 is used to assist in adjusting the position of the optical fiber 9 to achieve the coupling of the optical fiber 9 to the coupling lens 8.
[0065] An eyepiece 6 is arranged between the imaging CCD 7 and the corresponding beam splitter, and the main focus coupled by the eyepiece 6 is located at the entrance of the imaging CCD 7 .
[0066] The tester is connected to an information reading component, and the information reading component is selected from a device that can be connected to the tester and read the test data of the tester. The connection between the tester and the information reading component includes a wired connection and / or a wireless connection, and the wireless connection includes WiFi and Bluetooth; the information reading component is selected from devices such as computers, mobile phones, engineering machines, etc., for example, a computer, an imaging CCD, and a spectrometer are connected to the computer.
[0067] The rotating component 1 includes a connecting part and a rotating part. The rotating part is connected to the photoelectric detection component 2 through the connecting part. The connecting part is fixedly connected or detachably connected to the photoelectric detection component 2. The rotating part can move laterally, longitudinally and rotate relative to the probe 3.
[0068] In this embodiment, the rotating component 1 also includes a base, which is connected to the connecting part through a rotating part. The rotating component 1 is selected from a robotic arm, and the robotic arm has a degree of freedom of movement ≥ 3, preferably a four-axis robotic arm, a five-axis robotic arm or a six-axis robotic arm, for example, a six-axis robotic arm.
[0069] The six-axis robotic arm includes a base, a rotating platform, a main arm, a connecting arm and a forearm which are connected in sequence. The bottom of the rotating platform is rotatably connected to the base, the top of the rotating platform is rotationally connected to the lower end of the main arm, the lower end of the connecting arm is rotatably connected to the lower end of the main arm, the upper end of the connecting arm is rotatably connected to the lower end of the forearm, the upper end of the forearm is connected to the photoelectric detection component, and the forearm is connected to the outer shell.
[0070] The sample to be tested in this embodiment is an electroluminescent device, which includes single crystal, thin film and powder electroluminescent materials. Preferably, the electroluminescent device includes a light emitting diode, a semiconductor laser, an electroluminescent screen, such as a light emitting transistor.
[0071] The testing device also includes an excitation power supply and a controller. The excitation power supply is used to excite the sample to be tested to emit light. The excitation power supply is selected from a DC power supply or an AC power supply. The computer, the rotating component, and the excitation light source are all connected to the controller.
[0072] Example 2
[0073] A method for testing the performance of an electroluminescent device using the above-mentioned testing device comprises the following steps:
[0074] The sample to be tested is placed on the probe station 3 and fixed, and the sample to be tested is excited by an excitation light source to perform electroluminescence, and the luminescence of the sample to be tested at different angles is collected.
[0075] Collecting the light emission of the sample to be tested at different angles includes the following steps: rotating and changing the relative position of the photoelectric detection component 2 and the sample to be tested on the probe station 3 by the rotating component, staying at each position for 10μs to 15s and collecting the light signal at the current position.
[0076] The utility model drives the photoelectric detection component 2 to rotate around the sample to be tested through the rotating component, so that the photoelectric detection component 2 can collect the full-space angle light signal of the sample to be tested, and detect the spectrum, light intensity and other parameters through the spectrometer 10, the photomultiplier tube 12, the imaging CCD7, etc., and the operation method is simple, the efficiency is high, and the test accuracy is high.
[0077] The above examples illustrate the specific implementation of the present invention. However, the protection scope of the present invention is not limited to the above-mentioned exemplary implementation. Any modification, equivalent replacement, improvement, etc. made by those skilled in the art within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.
Claims
1. A multi-scale and multi-angle electroluminescent device performance parameter testing device, characterized in that: It includes a probe station, a photoelectric detection component and a rotating component; The probe station is used to place the sample to be tested; The photoelectric detection assembly is used to test the optical parameters of the sample to be tested; The photoelectric detection component is connected to a rotating component, and the rotating component is used to drive the photoelectric detection component to rotate around the probe station to change the relative position and relative direction of the photoelectric detection component and the sample to be tested on the probe station. The photoelectric detection component is used to collect light signals emitted from different positions and directions of the sample to be tested.
2. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 1, characterized in that: The sample to be tested is an electroluminescent device, and the electroluminescent device is selected from single crystal, thin film or powder electroluminescent materials.
3. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 1, characterized in that: The photoelectric detection assembly includes a light incident component, a plurality of spectroscopes and a plurality of testers. The light incident component can collect light incident from the sample to be tested and transmit it to the spectroscope. The spectroscope can convert light from the light collecting lens into parallel light and then transmit it to the corresponding tester.
4. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 3, characterized in that: The tester is selected from one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, and a polarimeter.
5. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: The tester is connected to an information reading component, and the information reading component is selected from a device that can be connected to the tester and read the test data of the tester, and the information reading component is selected from a computer, a mobile phone, and an engineering machine.
6. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 5, characterized in that: The connection between the tester and the information reading component includes a wired connection and / or a wireless connection.
7. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: A coupling lens is provided between the photomultiplier tube and the corresponding beam splitter, and the coupling lens is used to focus the parallel light from the beam splitter onto the photomultiplier tube, and the main focus coupled by the coupling lens is located at the light entrance of the photomultiplier tube.
8. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: The spectrometer is used to test the spectrum information of the sample, and the spectrum information includes the electrospectrum and the photospectrum.
9. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: A coupling lens and an optical fiber are arranged between the spectrometer and the corresponding beam splitter. One end of the optical fiber is located at the main focus of the coupling lens, and the other end is connected to the spectrometer.
10. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 9, characterized in that: The optical fiber is a bifurcated optical fiber, one bifurcated end of the bifurcated optical fiber is connected to the spectrometer, and the other bifurcated end is connected to the alignment light source.
11. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: A coupling lens is arranged between the imaging CCD and the corresponding beam splitter, and the main focus coupled by the coupling lens is located at the entrance of the imaging CCD.
12. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 4, characterized in that: The photoelectric detection assembly also includes a shell, the light incident component and a plurality of spectroscopes are arranged inside the shell, and the photomultiplier tube is located inside the shell.
13. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 12, characterized in that: The bottom of the shell is provided with an inclined surface, and the inclined surface is used to prevent the shell from colliding with the probe station during rotation, thereby expanding the sampling range.
14. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 13, characterized in that: The photomultiplier tube is used to test the light intensity of the sample to be tested, and the photomultiplier tube is connected to a power source.
15. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to any one of claims 1 to 14, characterized in that: The probe station comprises an adjustment platform for placing a sample to be tested, and the adjustment platform comprises a plurality of fixing members, and the fixing members are used to fix the sample to be tested on the adjustment platform.
16. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 15, characterized in that: The adjustment platform is a transparent structure or a hollow structure, and is used to measure the bottom luminescence of the sample to be tested.
17. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 5, characterized in that: The testing device further comprises an excitation power supply, and the excitation power supply is used to excite the sample to be tested to emit light.
18. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 17, characterized in that: The rotating component comprises a connecting portion and a rotating portion, and the rotating portion is connected to the photoelectric detection component through the connecting portion.
19. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 18, characterized in that: The rotating assembly also includes a base, and the base is connected to the connecting part through the rotating part.
20. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 19, characterized in that: The degree of freedom of the rotating part is ≥6.
21. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to claim 18, characterized in that: The device also includes a controller, and the computer, the rotating component, and the excitation light source are connected to the controller.
22. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to any one of claims 1 to 14, characterized in that: The device also includes a magnetic field adjustment component, which is used to change the magnetic field strength of the sample to be detected on the detection platform.
23. The multi-scale and multi-angle electroluminescent device performance parameter testing device according to any one of claims 1 to 14, characterized in that: The device also includes a temperature regulating component, which is used to change the temperature of the sample to be detected on the detection platform.