Online sampling system for high-purity electronic special gas

Abstract

The utility model relates to the technical field of integrated circuits, in particular to an on-line sampling system for high-purity electronic special gas, which comprises an electronic special gas conveying pipeline for conveying liquefied electronic special gas; the electronic special gas storage tank is communicated with the electronic special gas conveying pipeline and is used for storing liquefied electronic special gas; one end of the electronic special gas output pipeline is communicated with the electronic special gas storage tank and is used for outputting the liquefied electronic gas in the electronic special gas storage tank, and the other end of the electronic special gas output pipeline is communicated with the detection system; the nitrogen conveying pipeline is communicated with the electronic special gas conveying pipeline and is used for nitrogen purging; the two ends of the vacuum pipeline are communicated with the electronic special gas conveying pipeline and the electronic special gas output pipeline respectively, and the vacuum pipeline is used for vacuumizing. According to the utility model, the level of impurities carried by the pipeline can be greatly reduced, so that the purity of electronic special gas products and the input accuracy of an online detection system can be ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of integrated circuits, in particular to an online sampling system for high-purity electronic special gases. Background Art

[0002] Electronic special gases are key supporting materials for the integrated circuit industry. They can be divided into cleaning gases, silicon-based gases, doping gases, corrosive gases, and carrying gases according to their uses. Silicon-based gases are the basic raw materials for the preparation of semiconductor materials and are mainly used for crystal growth, chemical vapor deposition, and epitaxy. The quality of polysilicon and silicon-based electronic special gases directly determines the performance of semiconductor materials, electronic components, etc.

[0003] Professional testing equipment is required in the special gas filling system to achieve overall horizontal impurity measurement. A special connection form is used at the connection between the pipeline and the equipment. The sealing and cleanliness must meet the measurement indicators and complete real-time monitoring of the impurity content of the entire system product to ensure the purity of the final filled product and meet production needs.

[0004] However, during the sampling process, the impurities carried by the pipelines and related equipment themselves have a great influence on the analysis results of the special gas and will cause product contamination, resulting in a large deviation between the test data and the impurity content level of the special gas itself, making it impossible to characterize the actual impurity level of the product.

[0005] The information disclosed in this background technology section is only intended to deepen the understanding of the overall background technology of the present invention, and should not be regarded as acknowledging or suggesting in any form that the information constitutes the prior art already known to those skilled in the art. Utility Model Content

[0006] The utility model provides an online sampling system for high-purity electronic special gas, thereby effectively solving the problems in the background technology.

[0007] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: an online sampling system for high-purity electronic special gas, comprising:

[0008] Electronic special gas delivery pipeline, used for delivering liquefied electronic special gas;

[0009] An electronic special gas storage tank, which is connected to the electronic special gas delivery pipeline to store liquefied electronic special gas;

[0010] An electronic special gas output pipeline, one end of which is connected to the electronic special gas storage tank for outputting the liquefied electronic gas in the electronic special gas storage tank, and the other end of which is connected to the detection system;

[0011] A nitrogen delivery pipeline, which is connected to the electronic special gas delivery pipeline and is used for nitrogen purging;

[0012] A vacuum pipeline, both ends of which are respectively connected to the electronic special gas delivery pipeline and the electronic special gas output pipeline for vacuuming.

[0013] Furthermore, a heater is provided on the electronic special gas output pipeline, and the electronic special gas output pipeline is heated when the heater is started.

[0014] Furthermore, the heater comprises a heating pipe spirally arranged on the electronic special gas output pipe, and a steam inlet and a steam outlet are respectively arranged at two ends of the heating pipe.

[0015] Furthermore, a condensed water outlet is also provided on the heating pipe.

[0016] Furthermore, a vacuum pump and a flow limiting orifice are provided on the vacuum pipeline, the vacuum pump is used for vacuuming, and the flow limiting orifice is used for adjusting the kinetic energy of the fluid.

[0017] Furthermore, the flow limiting orifice plate comprises:

[0018] an annular seat, the annular seat being arranged on the vacuum pipe;

[0019] A fixed plate, the fixed plate is fixedly arranged on the annular seat, the fixed plate is a circular structure, an active flow hole is arranged at the center of the fixed plate, and a plurality of basic flow holes are arranged around the active flow hole;

[0020] The movable plate is rotatably arranged on the annular seat and rotates with the fluid flow direction as the rotation axis. The movable plate is provided with the movable flow holes and the basic flow holes corresponding to the fixed plate.

[0021] Furthermore, a rotating rod is provided on the side of the movable plate, and the movable plate is rotated by turning the rotating rod.

[0022] Furthermore, the flow limiting orifice is arranged behind the vacuum pump in the vacuuming direction.

[0023] Furthermore, a waste gas outlet is provided at the end of the electronic special gas output pipeline, and the waste gas outlet is used to discharge the waste gas and perform waste gas treatment.

[0024] Furthermore, the vacuum pipeline is connected to the electronic special gas delivery pipeline at one end, and is also connected to the electronic special gas output pipeline, and is provided with two switch valves. The vacuum pipeline is evacuated by adjusting the switch valves.

[0025] The beneficial effects of the utility model are as follows: the utility model arranges an electronic special gas delivery pipeline, an electronic special gas storage tank, an electronic special gas output pipeline, a nitrogen delivery pipeline and a vacuum pipeline. Before the electronic special gas is delivered and detected online, the electronic special gas delivery pipeline and the electronic special gas output pipeline are first systematically purged with high-purity nitrogen through the nitrogen delivery pipeline. During the system purging process, the electronic special gas storage tank needs to be isolated from the sampling system. After the nitrogen purging is completed, the nitrogen supply system is closed, and the electronic special gas is delivered. The special gas fluid is first used for preliminary rinsing to keep the entire pipeline in a special gas environment. After rinsing for a period of time, the vacuum pipeline is opened to evacuate the inside of the pipeline, which can greatly reduce the impurity level carried by the pipeline and related equipment itself, thereby ensuring the purity of the electronic special gas product and the accuracy of the input of the online detection system, and carrying out subsequent filling work. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a structural schematic diagram of the utility model system;

[0028] Figure 2 is a schematic diagram of the structure of the heater;

[0029] Figure 3 Schematic diagram of the structure of the flow limiting orifice plate. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0031] In the description of the present invention, it should be noted that the directions or positional relationships indicated by “center”, “up”, “down”, “left”, “right”, “vertical”, “horizontal”, “inside” and “outside”, etc., are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] like Figures 1 to 3 Shown: An online sampling system for high-purity electronic special gases, comprising:

[0034] Electronic special gas delivery pipeline 1, used for delivering liquefied electronic special gas;

[0035] The electronic special gas storage tank 2 is connected to the electronic special gas delivery pipeline 1 to store liquefied electronic special gas;

[0036] An electronic special gas output pipeline 3, one end of which is connected to the electronic special gas storage tank 2 for outputting the liquefied electronic gas in the electronic special gas storage tank 2, and the other end of which is connected to the detection system;

[0037] A nitrogen delivery pipeline 4, which is connected to the electronic special gas delivery pipeline 1 and is used for nitrogen purging;

[0038] The vacuum pipeline 5 has two ends which are respectively connected to the electronic special gas delivery pipeline 1 and the electronic special gas output pipeline 3 for vacuuming.

[0039] By setting up an electronic special gas delivery pipeline 1, an electronic special gas storage tank 2, an electronic special gas output pipeline 3, a nitrogen delivery pipeline 4 and a vacuum pipeline 5, before the electronic special gas is delivered and tested online, the electronic special gas delivery pipeline 1 and the electronic special gas output pipeline 3 are systematically purged with high-purity nitrogen through the nitrogen delivery pipeline 4. During the system purging process, the electronic special gas storage tank 2 needs to be isolated from the sampling system. After the nitrogen purging is completed, the nitrogen supply system is closed, and the electronic special gas is delivered. The special gas fluid is first used for preliminary rinsing to keep the entire pipeline in a special gas environment. After rinsing for a period of time, the vacuum pipeline 5 is opened to evacuate the pipeline, which can greatly reduce the impurity level carried by the pipeline and related equipment itself, thereby ensuring the purity of the electronic special gas product and the accuracy of the online detection system input, and carrying out subsequent filling work.

[0040] In this embodiment, a heater 6 is provided on the electronic special gas output pipeline 3 , and the electronic special gas output pipeline 3 is heated when the heater 6 is started.

[0041] The heater 6 comprises a heating pipe 61 which is spirally arranged on the electronic special gas output pipe 3 , and a steam inlet 62 and a steam outlet 63 are respectively arranged at two ends of the heating pipe 61 .

[0042] By setting a heater 6 on the electronic special gas output pipeline 3, during the rinsing process, the heater 6 is turned on, and the fluid in the electronic special gas delivery pipeline 1 is heated, and the electronic special gas is converted from liquid phase to gas phase. At this time, the electronic special gas is discharged in the pipeline as a gas-liquid mixture, which can increase the flushing of the pipeline and flush out impurities in the pipeline.

[0043] As a preference of the above embodiment, a condensed water outlet 64 is further provided on the heating pipe 61 .

[0044] In this embodiment, a vacuum pump 51 and a flow limiting orifice 52 are provided on the vacuum pipe 5. The vacuum pump 51 is used for vacuuming, and the flow limiting orifice 52 is used for adjusting the kinetic energy of the fluid.

[0045] The flow limiting orifice 52 includes:

[0046] An annular seat 521, the annular seat 521 is arranged on the vacuum pipe 5;

[0047] A fixed plate 522, the fixed plate 522 is fixedly disposed on the annular seat 521, the fixed plate 522 is a circular structure, an active flow hole 5221 is disposed at the center of the fixed plate 522, and a plurality of basic flow holes 5222 are also disposed around the active flow hole 5221;

[0048] The movable plate 523 is rotatably disposed on the annular seat 521 and rotates with the fluid flow direction as the rotation axis. The movable plate 523 is provided with movable flow holes 5221 and basic flow holes 5222 corresponding to the fixed plate 522 .

[0049] The movable plate 523 is provided with a rotating rod 5231 on the side thereof, and the movable plate 523 is rotated by turning the rotating rod 5231 .

[0050] By setting the flow limiting orifice 52, during the vacuum operation, the flow limiting orifice 52 is set behind the vacuum pump 51, and the electronic special gas is transported to the vacuum pipe 5 in the liquid phase. During the rinsing process, the rotating rod 5231 of the flow limiting orifice 52 is adjusted to displace the basic flow hole 5222 of the movable plate 523 and the basic flow hole 5222 of the fixed plate 522. At this time, only the movable flow hole 5221 in the flow limiting orifice 52 can pass the electronic special gas. At this time, the fluid is instantly transformed from gentle transportation to a jet state, and the kinetic energy of the fluid is greatly increased. At this time, the pressure difference value reaches the maximum, thereby ensuring that impurities in the pipeline can flow into the next stage with the fluid. The flow limiting orifice 52 uses an annular seat 521 to fix the movable plate 523 and the fixed plate 522 by bolts, and is connected to the pipeline in the form of a flange.

[0051] As a preference of the above embodiment, the flow limiting orifice 52 is arranged behind the vacuum pump 51 in the vacuuming direction.

[0052] In this embodiment, a waste gas outlet 31 is further provided at the end of the electronic special gas output pipeline 3, and the waste gas outlet 31 is used to discharge the waste gas and perform waste gas treatment.

[0053] During the nitrogen purging, electronic special gas rinsing and vacuuming process, the gas is discharged from the waste gas outlet 31, and the waste gas outlet 31 is connected to the waste gas treatment system to treat the discharged waste gas.

[0054] Among them, the vacuum pipe 5 is connected to the electronic special gas delivery pipe 1 at one end, and is also connected to the electronic special gas output pipe 3, and is provided with two switch valves 7. The vacuum pipe 5 is evacuated by adjusting the switch valves 7. By providing two switch valves 7, the position of the vacuum pipe 5 connection is controlled, so that the electronic special gas delivery pipe 1 or the electronic special gas output pipe 3 is evacuated.

[0055] like Figure 1 As shown, in this embodiment, before using the sampling system, confirm that all valves are in a closed state, and then use high-purity nitrogen for systematic purging. During the nitrogen purging process, the electronic special gas storage tank 2 needs to be isolated from the sampling system. After the nitrogen purging is completed, the nitrogen supply system is turned off, and the electronic special gas liquid is transported through the pipeline.

[0056] During the electronic special gas transportation process, first open the switch valves MV01, MV03 and related valves on the vent pipeline, and use special gas fluid for preliminary lubrication to ensure that the entire special gas and vent pipeline are in a special gas environment. After 30 minutes of lubrication, turn on the vacuum system and vacuum the discharge pipeline and special gas pipeline.

[0057] During the vacuum operation, a flow limiting orifice 52 is arranged behind the vacuum pump 51. The type of the flow limiting orifice 52 is shown in FIG. Figure 3 . The electronic special gas is transported to the vacuum pipe 5 in liquid phase. During rinsing, the rotating rod 5231 of the flow limiting orifice 52 is adjusted to misalign the circular hole of the movable plate 523 with the basic flow hole 5222. Only the movable flow hole 5221 in the flow limiting orifice 52 can pass the special gas. At this time, the fluid channel is passed from the original 1 / 2 pipeline to the 3-6mm active flow hole 5221. The fluid is instantly transformed from gentle transportation to a jet state, and the kinetic energy of the fluid is greatly increased. At this time, the pressure difference value reaches the maximum, thereby ensuring that impurities in the pipeline can flow into the next stage with the fluid. The flow limiting orifice 52 uses a fixing seat to fix the movable plate 523 and the fixed plate 522 by bolts, and is connected to the pipeline in the form of a flange.

[0058] like Figure 2As shown, the fluid passing through the discharge pipe enters the heater 6. The heater 6 uses 0.2mpag steam for heat exchange, instantly converting the electronic special gas from the liquid phase to the gas phase. At this time, the electronic special gas is discharged in the pipe as a gas-liquid mixture, and the impurities in the pipe can be discharged into the exhaust system by flushing.

[0059] Through repeated operation of this system, the impurity level carried by the pipeline and related equipment itself can be greatly reduced, thereby ensuring the purity of the electronic special gas products and the accuracy of the online detection system input for subsequent filling work.

[0060] The solution in this embodiment can solve the impurity content carried by the pipeline and the equipment itself. During the electronic special gas filling process, the impurity content of the product is characterized according to the actual level of the special gas, and the purity of the product itself is guaranteed without introducing other impurities. At the same time, after the filling is completed, the outlet valve of the special gas tank is opened and enters the above-mentioned system at the same time. At this time, the pipeline has been flushed, and the rotating shaft of the flow limiting orifice 52 is adjusted again to compound the basic flow hole 5222 on the movable plate 523 and the basic flow hole 5222 of the fixed plate 522. At this time, the pressure difference value drops, and the steam supply in the subsequent heater 6 is suspended, so as to carry out online detection of the product after the filling is completed, and form a comparison of the impurity levels before and after filling.

[0061] Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the description are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. An online sampling system for high-purity electronic special gases, characterized in that: include: Electronic special gas delivery pipeline, used for delivering liquefied electronic special gas; An electronic special gas storage tank, which is connected to the electronic special gas delivery pipeline to store liquefied electronic special gas; An electronic special gas output pipeline, one end of which is connected to the electronic special gas storage tank for outputting the liquefied electronic gas in the electronic special gas storage tank, and the other end of which is connected to the detection system; A nitrogen delivery pipeline, which is connected to the electronic special gas delivery pipeline and is used for nitrogen purging; A vacuum pipeline, both ends of which are respectively connected to the electronic special gas delivery pipeline and the electronic special gas output pipeline for vacuuming.

2. The online sampling system for high-purity electronic special gas according to claim 1, characterized in that: A heater is provided on the electronic special gas output pipeline, and the electronic special gas output pipeline is heated when the heater is started.

3. The online sampling system for high-purity electronic special gas according to claim 2 is characterized in that: The heater comprises a heating pipe which is spirally arranged on the electronic special gas output pipe, and a steam inlet and a steam outlet are respectively arranged at two ends of the heating pipe.

4. The online sampling system for high-purity electronic special gas according to claim 3 is characterized in that: The heating pipe is also provided with a condensed water outlet.

5. The online sampling system for high-purity electronic special gas according to claim 1, characterized in that: The vacuum pipeline is provided with a vacuum pump and a flow limiting orifice plate, wherein the vacuum pump is used for vacuuming, and the flow limiting orifice plate is used for adjusting the kinetic energy of the fluid.

6. The online sampling system for high-purity electronic special gas according to claim 5, characterized in that: The limiting orifice plate comprises: an annular seat, the annular seat being arranged on the vacuum pipe; A fixed plate, the fixed plate is fixedly arranged on the annular seat, the fixed plate is a circular structure, an active flow hole is arranged at the center of the fixed plate, and a plurality of basic flow holes are arranged around the active flow hole; The movable plate is rotatably arranged on the annular seat and rotates with the fluid flow direction as the rotation axis. The movable plate is provided with the movable flow holes and the basic flow holes corresponding to the fixed plate.

7. The online sampling system for high-purity electronic special gas according to claim 6, characterized in that: The movable plate is provided with a rotating rod on the side, and the movable plate is rotated by turning the rotating rod.

8. The online sampling system for high-purity electronic special gas according to claim 5, characterized in that: The flow limiting orifice is arranged behind the vacuum pump in the vacuuming direction.

9. The online sampling system for high-purity electronic special gas according to claim 1, characterized in that: The end of the electronic special gas output pipeline is also provided with an exhaust gas outlet, and the exhaust gas outlet is used to discharge the exhaust gas and perform exhaust gas treatment.

10. The online sampling system for high-purity electronic special gas according to claim 1, characterized in that: The vacuum pipeline is connected to the electronic special gas delivery pipeline at one end thereof and is also connected to the electronic special gas output pipeline and is provided with two switch valves. The vacuum pipeline is evacuated by adjusting the switch valves.

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