Space micro-clamping device

Abstract

The utility model provides a space micro clamping device, which comprises a base, a micro positioning platform and a micro clamper, the micro positioning platform is arranged on the base, a motion platform is arranged at the center of the micro positioning platform, and a voice coil motor is further arranged on the micro positioning platform and used for driving the motion platform to move. The motion platform is associated with the micro-positioning platform through symmetrical displacement conduction assemblies; the micro-gripper is arranged on the motion platform, and the micro-gripper comprises at least two single-finger assemblies which are arranged on the motion platform in an annular array mode with the piezoelectric actuator as the center. According to the space micro-clamping device, the micro-clamping device is driven by the single piezoelectric actuator, so that the single-finger assembly can perform synchronous displacement output, a target can be grabbed, and the motion platform is driven by the holosymmetric displacement conduction assembly, so that the motion of the motion platform can be fully decoupled; and a target can be grabbed more stably, so that a large displacement stroke can be output while the movement precision is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of clamps, in particular to a space micro clamping device. Background Art

[0002] With the development of micro-electromechanical system technology, automated micro-manipulation and micro-assembly technology have been widely studied, and these technologies have become indispensable tools in the fields of precision engineering, bioengineering, optical engineering, etc. As the objects of micro-manipulation develop towards multi-target and precision, the requirements for micro-manipulation are also getting higher and higher.

[0003] As a key component of a micromanipulation system, a microgripper is usually used to carry and manipulate target objects. Its performance is closely related to the multi-target operation and precision of the microgripper.

[0004] In the prior art, the micro-gripper jaws are generally fixed on a motion platform, and the overall movement of the micro-gripper is achieved by driving the motion platform to move, thereby realizing various operations such as grasping, carrying and assembling the operation object. However, the movement of the motion platform is easily disturbed by vibration, which makes the operation accuracy of the micro-gripper in the prior art lack of guarantee, which is not conducive to the efficient development of automated micro-operation and micro-assembly technology. Utility Model Content

[0005] Based on this, the purpose of the present invention is to provide a spatial micro-clamping device to at least solve the above-mentioned deficiencies in the prior art.

[0006] The utility model provides a spatial micro-clamping device, comprising:

[0007] A base, wherein a micro-positioning platform is provided on the base, and a receiving cavity is provided on the micro-positioning platform;

[0008] A motion platform, disposed in the accommodating cavity and movably connected to the micro-positioning platform via a displacement transmission mechanism;

[0009] A piezoelectric driver is disposed on the motion platform;

[0010] A micro-gripper is arranged on the motion platform, and the micro-gripper includes at least two single-finger components, each of which is arranged around the piezoelectric driver, and the active end of each of the single-finger components is aligned and matched with the output end of the piezoelectric driver;

[0011] The motion platform and the micro-positioning platform are movably connected via four groups of displacement conduction components, the displacement conduction components include an intermediate rod, and flexible hinges connected to the motion platform and the micro-positioning platform respectively by the intermediate rod, and two groups of flexible hinges connected to the micro-positioning platform by the intermediate rod are symmetrically arranged at intervals, the intermediate rod is transmission-connected to the voice coil motor, and the voice coil motor is fixedly connected to at least one of the base and the micro-positioning platform.

[0012] Optionally, the accommodating cavity is arranged in a cross shape to form four installation areas evenly surrounding the motion platform, each displacement conduction component is arranged one by one in each installation area, and two adjacent intermediate rods in the displacement conduction component are respectively connected to two voice coil motors, and four groups of flexible hinges connected to the micro-positioning platform by the intermediate rods are arranged in a cross shape.

[0013] Optionally, a single displacement conducting component is arranged in a T-shape or a Y-shape.

[0014] Optionally, each of the flexible hinges in a single displacement conducting component includes at least two hinge structures arranged in parallel.

[0015] Optionally, the single-finger component includes a secondary amplification module, a parallelogram module and a single fingertip, the secondary amplification module and the parallelogram module are both arranged on the motion platform, the bottom edge and the side edge of the parallelogram module are connected by a fourth flexible hinge, the output end of the secondary amplification module is connected to the side edge of the parallelogram module, and the single fingertip is arranged at the top of the parallelogram module.

[0016] Optionally, the secondary amplification module comprises a first rod, a second rod, a third rod and a fourth rod connected by a third flexible hinge, wherein:

[0017] The first rod, the second rod, the third rod and the fourth rod are arranged in sequence from top to bottom, and the first rod is the active end of the single-finger assembly;

[0018] The second rod is in a "7" shape, and two ends of the second rod are respectively connected to the first rod and one side of the parallelogram module through two third flexible hinges, and the middle part of the second rod is connected to the third rod through a third flexible hinge to form a lever transmission structure;

[0019] The fourth rod is fixed to the motion platform.

[0020] Optionally, the two third flexible hinges connecting the third rod to the second rod and the fourth rod are both vertically arranged, and the projections of the arrangement positions on the motion platform are spaced apart from each other.

[0021] Optionally, each side of the parallelogram module is connected by the fourth flexible hinge.

[0022] Optionally, the fourth flexible hinge is a circular notch hinge.

[0023] Optionally, the fourth rod and the bottom edge of the parallelogram module are fixedly connected to form an integrated structure.

[0024] The spatial micro-clamping device provided by the utility model is movably connected between the motion platform and the micro-positioning platform through four groups of displacement conduction components, the displacement conduction components include an intermediate rod, and flexible hinges respectively connected to the motion platform and the micro-positioning platform by the intermediate rod, and two groups of flexible hinges connected to the micro-positioning platform by the intermediate rod are symmetrically arranged at intervals, the intermediate rod is transmission-connected to the voice coil motor to drive the motion platform and the micro-clamp thereon to move through the displacement conduction components, wherein a plurality of displacement conduction components realize the transmission of driving force through the flexible hinges, and the vibration deviation and mutual coupling are offset, which can effectively improve the movement accuracy of the motion platform and the micro-clamp thereon, thereby improving the operation accuracy of the spatial micro-clamping device, and providing convenience for the efficient development of automated micro-operation and micro-assembly technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the three-dimensional structure of the spatial micro-clamping device in the embodiment of the utility model;

[0026] Figure 2 It is a schematic diagram of the three-dimensional structure of the base and the micro-positioning platform in the embodiment of the utility model;

[0027] Figure 3 A top view of the spatial micro-clamping device in an embodiment of the utility model;

[0028] Figure 4 It is a schematic diagram of the three-dimensional structure of the micro-gripper in the embodiment of the utility model;

[0029] Figure 5 It is a front view of a single-finger assembly in an embodiment of the utility model.

[0030] Description of main component symbols:

[0031] 10. Base; 11. Third bolt;

[0032] 20. Micro positioning platform; 21. Accommodating cavity;

[0033] 30. Motion platform; 31. Fourth bolt;

[0034] 40. displacement transmission mechanism; 41. X-axis displacement transmission assembly; 410. first transmission member; 4100. first flexible hinge; 4101. first intermediate rod; 411. first voice coil motor; 42. Y-axis displacement transmission assembly; 420. second transmission member; 4200. second flexible hinge; 4201. second intermediate rod; 421. second voice coil motor; 43. first bolt; 44. second bolt;

[0035] 50. Piezoelectric actuator;

[0036] 60. Micro gripper; 61. Single finger assembly; 610. Secondary amplification module; 6101. First rod; 6102. Second rod; 6103. Third rod; 6104. Fourth rod; 6105. Third flexible hinge; 611. Parallelogram module; 6110. Fifth rod; 6111. Fourth flexible hinge; 612. Single fingertip.

[0037] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0038] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Several embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thorough and comprehensive.

[0039] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0040] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0041] See also Figures 1 to 5, shown is a spatial micro-gripper device in an embodiment of the utility model, including a base 10, a motion platform 30, a piezoelectric driver 50 and a micro-gripper 60.

[0042] A micro-positioning platform 20 is provided on the base 10, and a accommodating cavity 21 is provided on the micro-positioning platform 20. The motion platform 30 is arranged in the accommodating cavity 21 and is connected to the inner wall of the micro-positioning platform 20 through a displacement transmission mechanism 40. The piezoelectric driver 50 is arranged on the upper surface of the motion platform 30. The micro-gripper 60 includes a plurality of single-finger components 61, and the plurality of single-finger components 61 are arranged in a circular array on the motion platform 30 with the piezoelectric driver 50 as the center, wherein the plurality of single-finger mechanisms are driven by the piezoelectric driver 50 to synchronize the displacement output of the plurality of single-finger mechanisms, and the output accuracy of the plurality of single-finger mechanisms is maintained through the displacement transmission mechanism 40 and the motion platform 30.

[0043] The motion platform 30 and the micro-positioning platform 20 are movably connected via four groups of displacement conduction components, which include an intermediate rod and flexible hinges connected to the motion platform 30 and the micro-positioning platform 20 by the intermediate rod, respectively. Two groups of flexible hinges connected to the micro-positioning platform 20 by the intermediate rod are symmetrically arranged at intervals. The intermediate rod is transmission-connected to the voice coil motor, and the voice coil motor is fixedly connected to at least one of the base and the micro-positioning platform. When the voice coil motor drives the intermediate rod to move, the intermediate rod drives the motion platform 30 to translate via the flexible hinge, wherein the flexible hinges are symmetrically arranged on the circumference of the motion platform 30. Relatively speaking, the flexible hinges can offset the influence of vibration, realize the independence of movement in two dimensions in two-dimensional movement, reduce mutual interference in two-dimensional drive, thereby realizing full decoupling drive control of the motion platform 30, and thus effectively improving the displacement accuracy of the motion platform 30.

[0044] To ensure effective arrangement of the intermediate rod, in the present embodiment, two groups of flexible hinges from the intermediate rod to the micro-positioning platform 20 are symmetrically arranged, and in a single displacement conduction component, the intermediate rod and the three groups of flexible hinges are T-shaped as a whole. In an optional embodiment, they are arranged in a Y-shape.

[0045] To ensure the driving effect, each group of flexible hinges in the displacement conduction component includes at least two hinge structures arranged in parallel, which can improve the singleness of the driving direction and thus improve the movement accuracy.

[0046] It can be understood that by starting the piezoelectric driver 50, in this embodiment, the piezoelectric driver 50 is a single piezoelectric ceramic brake, and the micro-gripper 60 is driven by the piezoelectric driver 50, so that several single-finger components 61 can achieve synchronous displacement output. In this embodiment, the single-finger components 61 are provided with three groups, and the three groups of single-finger components 61 move toward the axis at the same time, which can realize operations on different targets and can grasp targets more stably. Moreover, through the displacement transmission mechanism 40, it is possible to achieve output of a large displacement stroke while ensuring the movement accuracy.

[0047] It is worth noting that the micro positioning platform 20 is connected to the base 10 via the third bolt 11 , and the micro gripper 60 is connected to the motion platform 30 via the fourth bolt 31 .

[0048] Specifically, in this embodiment, the accommodating cavity 21 is arranged in a cross shape, and the displacement conduction mechanism 40 is respectively connected to the inner wall of the accommodating cavity 21 and the side wall of the motion platform 30, and the displacement conduction mechanism 40 includes an X-axis displacement conduction component 41 and a Y-axis displacement conduction component 42 which are arranged perpendicular to each other.

[0049] It is understandable that the movement of the motion platform 30 can be adjusted by the X-axis displacement conducting component 41 and the Y-axis displacement conducting component 42, so that the three groups of single-finger components 61 on the motion platform 30 can be more precise when performing displacement.

[0050] Specifically, in this embodiment, the X-axis displacement transmission component 41 includes two symmetrically arranged first transmission components 410 and a first voice coil motor 411, the first voice coil motor 411 is connected to one of the first transmission components 410 through a first bolt 43, the first transmission component 410 includes a plurality of groups of first flexible hinges 4100 and a first intermediate rod 4101, both sides of the first intermediate rod 4101 are connected to the inner wall of the accommodating cavity 21 through a plurality of first flexible hinges 4100, and the first intermediate rod 4101 is connected to the motion platform 30 through a plurality of groups of first flexible hinges 4100. 0, the Y-axis displacement conduction component 42 includes two symmetrically arranged second conduction components 420 and a second voice coil motor 421, the second voice coil motor 421 is connected to one of the second conduction components 420 through a second bolt 44, the second conduction component 420 includes a plurality of groups of second flexible hinges 4200 and a second intermediate rod 4201, both sides of the second intermediate rod 4201 are connected to the inner wall of the accommodating cavity 21 through a plurality of second flexible hinges 4200, and the side of the second intermediate rod 4201 close to the motion platform 30 is connected to the outer wall of the motion platform 30 through a plurality of groups of second flexible hinges 4200.

[0051] It should be explained that six groups of first flexible hinges 4100 are provided, and two groups of first flexible hinges 4100 are respectively provided on the two side walls of the first intermediate rod 4101. Two groups of first flexible hinges 4100 are also connected to the side wall of the first intermediate rod 4101 close to the moving platform 30, and are connected to the outer wall of the moving platform 30.

[0052] The second flexible hinges 4200 are also provided with six groups. Two side walls of the second intermediate rod 4201 are respectively provided with two groups of second flexible hinges 4200. A side wall of the second intermediate rod 4201 close to the motion platform 30 is also connected with two groups of second flexible hinges 4200 and connected to the outer wall of the motion platform 30.

[0053] It can be understood that when the motion platform 30 moves along the Y-axis, the first voice coil motor 411 is working and the second voice coil motor 421 is not working. The first voice coil motor 411 outputs displacement to the Y-axis and transmits it to the first intermediate rod 4101, and then transmits it to the motion platform 30 through the two groups of first flexible hinges 4100. At the same time, the six groups of first flexible hinges 4100 rotate, so that the coupling error of the micro-gripper 60 can be reduced through the motion platform 30.

[0054] In addition, when the motion platform 30 moves along the X-axis, the second voice coil motor 421 works and the first voice coil motor 411 does not work. The second voice coil motor 421 outputs displacement to the Y-axis and transmits it to the second intermediate rod 4201, and then transmits it to the motion platform 30 through the two groups of second flexible hinges 4200. At the same time, the six groups of second flexible hinges 4200 rotate, thereby reducing the coupling error of the micro-gripper 60 through the motion platform 30.

[0055] It is worth noting that the first voice coil motor 411 and the second voice coil motor 421 are disposed adjacent to each other to provide orthogonal drive outputs to achieve two-dimensional movement of the motion platform.

[0056] Specifically, in this embodiment, the single finger assembly 61 includes a secondary amplification module 610, a parallelogram module 611 and a single fingertip 612, the secondary amplification module 610 includes a first rod 6101, a second rod 6102, a third rod 6103, a fourth rod 6104 and four sets of third flexible hinges 6105, the first rod 6101, the second rod 6102, the third rod 6103 and the fourth rod 6104 are arranged in sequence from top to bottom, the first rod 6101 is connected to the second rod 6102 by a third flexible hinge 6105, the third rod 6103 and the fourth rod 6104 are arranged in sequence from top to bottom, The second rod 6102 is connected to the third rod 6103 through another third flexible hinge 6105, the third rod 6103 is connected to the fourth rod 6104 through another third flexible hinge 6105, the second rod 6102 is connected to the parallelogram module 611 through another third flexible hinge 6105, the parallelogram module 611 includes a fifth rod 6110 and a fourth flexible hinge 6111, the fourth flexible hinge 6111 is respectively connected to the top and bottom of the fifth rod 6110, and a single fingertip 612 is set on the top of the fifth rod 6110.

[0057] The second rod 6102 is in a "7" shape, and both ends of the second rod 6102 are respectively connected to the first rod 6101 and one side of the parallelogram module 611 through two third flexible hinges. The middle part of the second rod 6102 is connected to the third rod 6103 through a third flexible hinge to form a first lever transmission structure.

[0058] The two third flexible hinges from the third rod 6103 to the second rod 6102 and the fourth rod 6104 are both vertically arranged, and the projections of the arrangement positions on the motion platform are spaced apart from each other to form a second lever transmission structure.

[0059] When the first rod 6101 as the active end moves upward under the drive of the piezoelectric driver 50, the first lever transmission structure can drive the bottom end of the second rod 6102 to move toward the axis, thereby driving one side of the parallelogram module 611 to deflect toward the axis, so that the single fingertip 612 as the driven end connected to the top side of the parallelogram module 611 moves toward the axis to achieve clamping; at the same time, the second lever transmission structure can further drive the second rod 6102 to deflect toward the axis, increase the offset of the lower end of the second rod 6102, achieve secondary amplification, and improve the clamping drive effect.

[0060] It can be understood that, in a specific implementation, when the piezoelectric driver 50 is working, it outputs an upward displacement and simultaneously transmits it to the three groups of single-finger components 61, and is successively transmitted through the first rod 6101, the third flexible hinge 6105, the second rod 6102, another third flexible hinge 6105, the third rod 6103, another flexible hinge and the fourth rod 6104 in the secondary amplification module 610 to the fourth flexible hinge 6111, the fifth rod 6110 and another fourth flexible hinge 6111 in the parallelogram module 611, and finally to a single fingertip 612. Finally, the three groups of single fingertips 612 are displaced toward the axis to achieve grasping movement.

[0061] In this embodiment, the fourth flexible hinge 6111 is a circular notch hinge, which can improve the parallel edge maintenance effect of the parallelogram module 611, thereby improving the translation effect of the single fingertip 612 and improving the clamping effect.

[0062] To further improve the motion consistency of the parallelogram module 611 and the secondary amplification module 610, in this embodiment, the fourth rod 6104 and the bottom edge of the parallelogram module 612 are fixedly connected as an integral structure, or the fourth rod 6104 is reused as the bottom edge of the parallelogram module 612, which can ensure the consistency of their fixed reference points, thereby ensuring that their motion reference systems remain consistent, thereby effectively ensuring their motion accuracy. Specifically, in this embodiment, the fourth rod 6104 and the bottom edge of the parallelogram module 612 are composed of the chassis of the micro-gripper, which can also facilitate their synchronous fixation to the motion platform 30.

[0063] Specifically, the specific transmission process in the secondary amplification module 610 is that the piezoelectric driver 50 drives the first rod 6101 to move upward. At this time, the second rod 6102 and the third rod 6103 are pulled upward by the two groups of third flexible hinges 6105, thereby driving the third flexible hinge 6105 connected to the parallelogram module 611 to rotate. In this embodiment, one of the third flexible hinges 6105 is connected to the fifth rod 6110 on the parallelogram module 611. The rotating third flexible hinge 6105 drives the fifth rod 6110 to move toward the axis center, and finally drives the single fingertip 612 to move toward the axis center, so that the three groups of single fingertips 612 are all displaced toward the axis center to achieve grasping movement.

[0064] In summary, the spatial micro-gripper device in the above-mentioned embodiment of the utility model drives the micro-gripper 60 through the piezoelectric driver 50, so that several single-finger components 61 can perform synchronous displacement output, can realize operation on different targets, can grasp the target more stably, and through the displacement transmission mechanism, can achieve output of large displacement stroke while ensuring the accuracy of movement.

[0065] The spatial micro-clamping device provided by the utility model is movably connected between the motion platform and the micro-positioning platform through four groups of displacement conduction components, the displacement conduction components include an intermediate rod, and flexible hinges respectively connected to the motion platform and the micro-positioning platform by the intermediate rod, and two groups of flexible hinges connected to the micro-positioning platform by the intermediate rod are symmetrically arranged at intervals, the intermediate rod is transmission-connected to the voice coil motor to drive the motion platform and the micro-clamp thereon to move through the displacement conduction components, wherein a plurality of displacement conduction components realize the transmission of driving force through the flexible hinges, and the vibration deviation and mutual coupling are offset, which can effectively improve the movement accuracy of the motion platform and the micro-clamp thereon, thereby improving the operation accuracy of the spatial micro-clamping device, and can provide technical support for the efficient development of automated micro-operation and micro-assembly technology, and provide convenience for the development of micro-operation technology.

[0066] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0067] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A spatial micro-clamping device, characterized in that: include: A base, wherein a micro-positioning platform is provided on the base, and a receiving cavity is provided on the micro-positioning platform; A motion platform, disposed in the accommodating cavity and movably connected to the micro-positioning platform via a displacement transmission mechanism; A piezoelectric driver is disposed on the motion platform; A micro-gripper is arranged on the motion platform, and the micro-gripper includes at least two single-finger components, each of which is arranged around the piezoelectric driver, and the active end of each of the single-finger components is aligned and matched with the output end of the piezoelectric driver; The motion platform and the micro-positioning platform are movably connected via four groups of displacement conduction components, the displacement conduction components include an intermediate rod, and flexible hinges connected to the motion platform and the micro-positioning platform respectively by the intermediate rod, and two groups of flexible hinges connected to the micro-positioning platform by the intermediate rod are symmetrically arranged at intervals, the intermediate rod is transmission-connected to the voice coil motor, and the voice coil motor is fixedly connected to at least one of the base and the micro-positioning platform.

2. The spatial micro-clamping device according to claim 1, characterized in that: The accommodating cavity is arranged in a cross shape to form four installation areas evenly surrounding the motion platform, and each displacement conduction component is arranged in each installation area one by one, and two adjacent intermediate rods in the displacement conduction component are respectively connected to two voice coil motors, and four groups of flexible hinges connected to the micro-positioning platform by the intermediate rods are arranged in a cross shape.

3. The spatial micro-clamping device according to claim 2, characterized in that: A single displacement conducting component is arranged in a T-shape or a Y-shape.

4. The spatial micro-clamping device according to claim 1, characterized in that: Each of the flexible hinges in a single displacement conducting component includes at least two hinge structures arranged in parallel.

5. The spatial micro-clamping device according to claim 1, characterized in that: The single-finger component includes a secondary amplification module, a parallelogram module and a single fingertip. The secondary amplification module and the parallelogram module are both arranged on the motion platform. The bottom edge and the side edge of the parallelogram module are connected by a fourth flexible hinge. The output end of the secondary amplification module is connected to the side edge of the parallelogram module. The single fingertip is arranged on the top of the parallelogram module.

6. The spatial micro-clamping device according to claim 5, characterized in that: The secondary amplification module comprises a first rod, a second rod, a third rod and a fourth rod connected by a third flexible hinge, wherein: The first rod, the second rod, the third rod and the fourth rod are arranged in sequence from top to bottom, and the first rod is the active end of the single-finger assembly; The second rod is in a "7" shape, and two ends of the second rod are respectively connected to the first rod and one side of the parallelogram module through two third flexible hinges, and the middle part of the second rod is connected to the third rod through a third flexible hinge to form a lever transmission structure; The fourth rod is fixed to the motion platform.

7. The spatial micro-clamping device according to claim 6, characterized in that: The two third flexible hinges connecting the third rod to the second rod and the fourth rod are both vertically arranged, and the projections of the arrangement positions on the motion platform are spaced apart from each other.

8. The spatial micro-clamping device according to claim 5, characterized in that: Each side of the parallelogram module is connected by the fourth flexible hinge.

9. The spatial micro-clamping device according to claim 5 or 8, characterized in that: The fourth flexible hinge is a circular notch hinge.

10. The spatial micro-clamping device according to claim 6, characterized in that: The fourth rod and the bottom edge of the parallelogram module are fixedly connected to form an integrated structure.

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