Cooling water cover for blade of dicing saw

Abstract

The utility model discloses a dicing saw blade cooling water cover which comprises a water spraying cover mechanism main body, a blade axial spraying mechanism, a blade tangential spraying mechanism and a water spraying cover unfolding mechanism, the water spraying cover mechanism main body is fixed on a blade main shaft, and the blade axial spraying mechanism and the blade tangential spraying mechanism are arranged on the water spraying cover mechanism main body. And a water spraying cover unfolding mechanism is also arranged on the water spraying cover mechanism main body. By adopting the technical scheme, the blade cooling water cover of the scribing machine is convenient and practical. The blade cooling water spraying cover mechanism of the dicing saw is compact in structure, keeps a small appearance size under the condition of containing multiple paths of nozzles, and does not influence the working range of a blade main shaft. The multi-path nozzle design can achieve the effects of cooling the blade and washing away chippings, an expandable mechanism facilitates maintenance and blade replacement, and the cutting efficiency can be effectively improved.

Description

Technical Field

[0001] The utility model relates to the field of wafer dicing machines, in particular to a wafer dicing machine blade cooling water cover. Background Art

[0002] Wafer dicing machine, or dicing machine for short, is a key device used to cut semiconductor wafers (referred to as workpieces) into small-sized chips. During the manufacturing process, it uses a high-speed rotating diamond blade to cut and process the chips on the wafer, cutting large-sized wafers into small-sized chips. After cutting, these chips can be separated from the wafer and further used to manufacture various electronic products, such as mobile phones and computer chips.

[0003] When the dicing machine is cutting the wafer, the blade and the workpiece will have continuous collisions, which will 1. generate a lot of heat accumulation in the blade and the workpiece, 2. generate a lot of cutting debris, 3. the diamond particles and adhesive on the blade will fall off; all of these problems will seriously affect the cutting accuracy and increase the wear of the blade. Therefore, the dicing machine needs to be equipped with a dedicated blade cooling device.

[0004] The existing blade cooling water spray cover mechanism of the dicing machine is relatively simple, with fewer and fixed spray heads, and the cooling and flushing ability of the blade is not ideal, the blade temperature is unstable, and the entire mechanism needs to be opened manually to replace the blade and maintain the module. Utility Model Content

[0005] In order to solve the above problems, the utility model provides a convenient and practical dicing machine blade cooling water cover.

[0006] The utility model discloses a dicing machine blade cooling water hood, which comprises a water spray hood mechanism body, a blade axial spray mechanism, a blade tangential spray mechanism and a water spray hood deployment mechanism. The water spray hood mechanism body is fixed on the blade spindle, and the water spray hood mechanism body is provided with a blade axial spray mechanism and a blade tangential spray mechanism. The water spray hood mechanism body is also provided with a water spray hood deployment mechanism.

[0007] In the above scheme, the blade axial spray mechanism includes a blade axial spray mechanism fixing seat, a coolant spray pipe, a coolant quick-connect connector and a nitrogen pipeline quick-connect connector. The blade axial spray mechanism fixing seat is arranged on the water spray hood mechanism body. Two parallel coolant spray pipes are connected to the blade axial spray mechanism fixing seat. The center lines of the two parallel coolant spray pipes coincide with the center line of the blade. A coolant quick-connect connector and a nitrogen pipeline quick-connect connector are provided on the blade axial spray mechanism fixing seat. The coolant quick-connect connector is connected to the coolant spray pipe. The coolant quick-connect connector is used to connect the coolant delivery hose. The nitrogen pipeline quick-connect connector is used to connect the nitrogen delivery hose.

[0008] In the above scheme, the inner side of the coolant spray pipe facing the blade is provided with three fine grooves, and by adjusting the water pressure, three spray waters are sprayed out in a 60° fan shape to flush the blade part and the side of the blade.

[0009] In the above solution, a plug is installed at the end of the coolant spray pipe.

[0010] In the above solution, a nitrogen nozzle is provided on the fixing seat of the blade axial spray mechanism, and the nitrogen nozzle is connected to a nitrogen pipeline quick-connect connector.

[0011] In the above scheme, the blade axial spray mechanism fixing seat is provided with a long waist-shaped screw assembly slot hole.

[0012] In the above scheme, the blade tangential spray mechanism includes a blade tangential spray mechanism fixing seat, a workpiece spray water nozzle, a blade coolant nozzle, a workpiece spray water joint and a blade coolant joint. The lower part of the blade tangential spray mechanism fixing seat is provided with a workpiece spray water nozzle and a blade coolant nozzle, and the blade axial spray mechanism fixing seat is provided with a workpiece spray water joint and a blade coolant joint. The workpiece spray water nozzle is connected to the workpiece spray water joint, the blade coolant nozzle is connected to the blade coolant joint, the blade coolant joint is used to connect the blade coolant water supply hose, and the workpiece spray water joint is used to connect the workpiece spray water supply hose.

[0013] In the above solution, the blade coolant nozzle is installed in a horizontal direction, parallel to the tangent line of the blade, and its center line coincides with the tangential center line of the blade.

[0014] In the above scheme, the water spray hood deployment mechanism includes a blade axial spray mechanism connecting seat, a cylinder piston rod bracket, a cylinder and a cylinder driven gas connector. The blade axial spray mechanism connecting seat is arranged on the blade axial spray mechanism fixing seat, the blade axial spray mechanism connecting seat is installed on the cylinder piston rod bracket, the cylinder is fixed on the water spray hood mechanism body, and a cylinder driven gas connector is provided on the cylinder.

[0015] In the above solution, a cylinder position sensor is provided on the cylinder.

[0016] The advantages and beneficial effects of the utility model are as follows: the utility model provides a convenient and practical dicing machine blade cooling water cover. The dicing machine blade cooling water spray cover has a compact structure, and maintains a small outer size while accommodating a multi-way nozzle, and does not affect the working range of the blade spindle. The multi-way nozzle design can meet the functions of cooling the blade and flushing debris, and the expandable mechanism is convenient for maintenance and blade replacement, which can effectively improve cutting efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0018] Figure 1 It is a structural schematic diagram of the utility model.

[0019] In the figure: 1, blade axial spray mechanism fixing seat 2, coolant spray pipe 3, coolant quick plug connector 4, nitrogen pipeline quick plug connector 5, nitrogen nozzle 6, long waist screw assembly slot 7, blade tangential spray mechanism fixing seat 8, workpiece spray water nozzle 9, blade coolant nozzle 10, workpiece spray water connector 11, blade coolant connector 12, blade axial spray mechanism connecting seat 13, cylinder piston rod bracket 14, cylinder 15, cylinder drive gas connector 16 cylinder position sensor DETAILED DESCRIPTION

[0020] The following is a further description of the specific implementation of the present invention in conjunction with the accompanying drawings and embodiments. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0021] like Figure 1 As shown, the utility model is a dicing machine blade cooling water hood, the cooling water hood comprises a water spray hood mechanism body, a blade axial spray mechanism, a blade tangential spray mechanism and a water spray hood deployment mechanism, the water spray hood mechanism body as the main mechanism carries all components, is fixed on the blade spindle, the water spray hood mechanism body is provided with a blade axial spray mechanism and a blade tangential spray mechanism, and the water spray hood mechanism body is also provided with a water spray hood deployment mechanism.

[0022] The blade axial spray mechanism is fixedly installed on the right side of the water spray hood mechanism body. The blade axial spray mechanism includes a blade axial spray mechanism fixing seat 1, a coolant spray pipe 2, a coolant quick connector 3 and a nitrogen pipeline quick connector 4. The blade axial spray mechanism fixing seat 1 is arranged on the water spray hood mechanism body. Two parallel coolant spray pipes 2 are connected to the blade axial spray mechanism fixing seat 1. The center lines of the two parallel coolant spray pipes 2 coincide with the center line of the blade. A coolant quick connector 3 and a nitrogen pipeline quick connector 4 are provided on the blade axial spray mechanism fixing seat 1. The coolant quick connector 3 is connected to the coolant spray pipe 2. The coolant quick connector 3 is used to connect the coolant delivery hose. The nitrogen pipeline quick connector 4 is used to connect the nitrogen delivery hose.

[0023] The inner side of the coolant spray pipe 2 facing the blade is provided with three fine grooves. By adjusting the water pressure, three spray waters are sprayed out in a 60° fan shape to flush the blade part and the side of the blade.

[0024] A plug is installed at the end of the coolant spray pipe 2. When the pipeline needs to be maintained, the plug can be removed to clean the pipeline.

[0025] A nitrogen nozzle 5 is provided on the fixing seat of the blade axial spray mechanism, and the nitrogen nozzle 5 is connected to the nitrogen pipeline quick plug connector 4. The nitrogen nozzle 5 faces the side of the blade obliquely. After the blade cooling water supply is stopped, nitrogen can be sprayed while the blade rotates to achieve rapid drying of the blade.

[0026] The blade axial spray mechanism fixing seat 1 is provided with a long waist-shaped screw assembly slot hole 6, and the axial coolant spray pipe 2 can be adjusted up and down so that it can reach the best blade side flushing position.

[0027] The blade tangential spray mechanism is fixedly installed on the left side of the water spray cover mechanism body. The blade tangential spray mechanism includes a blade tangential spray mechanism fixing seat 7, a workpiece spray water nozzle 8, a blade coolant nozzle 9, a workpiece spray water joint 10 and a blade coolant joint 11. The lower part of the blade tangential spray mechanism fixing seat 7 is provided with a workpiece spray water nozzle 8 and a blade coolant nozzle 9. The blade axial spray mechanism fixing seat 7 is provided with a workpiece spray water joint 10 and a blade coolant joint 11. The workpiece spray water nozzle 8 is connected to the workpiece spray water joint 10, the blade coolant nozzle 9 is connected to the blade coolant joint 11, the blade coolant joint 11 is used to connect the blade coolant water supply hose, and the workpiece spray water joint 10 is used to connect the workpiece spray water supply hose.

[0028] The blade coolant nozzle 9 is installed in a horizontal direction, parallel to the tangent line of the blade, and its center line coincides with the tangential center line of the blade. The two workpiece spray water nozzles 8 are respectively located on both sides of the blade coolant nozzle 9, slightly staggered, and the two workpiece spray water nozzles 8 are inclined at an angle of 40° toward the blade coolant nozzle 9.

[0029] The water spray hood deployment mechanism includes a blade axial spray mechanism connection seat 12, a cylinder piston rod bracket 13, a cylinder 14 and a cylinder drive gas connector 15. The blade axial spray mechanism connection seat 12 is arranged on the blade axial spray mechanism fixing seat 1, the blade axial spray mechanism connection seat 12 is installed on the cylinder piston rod bracket 13, the cylinder 14 is fixed on the water spray hood mechanism body, and the cylinder 14 is provided with a cylinder drive gas connector 15. The cylinder 14 is provided with a cylinder position sensor 16 for monitoring the deployment / closing state of the deployment mechanism. When it is necessary to replace the blade or maintain the cooling water hood mechanism, the axial spray mechanism can be deployed by supplying air to the cylinder, providing a larger operating space for the operator.

[0030] The blade axial spray mechanism includes two parallel coolant spray pipes on the left and right sides, which flush the two side blade edges of the blade, and a nitrogen nozzle to dry the blade; the blade tangential spray mechanism includes a blade coolant nozzle tangential to the blade and two workpiece spray water nozzles; the water spray cover deployment mechanism is used for blade replacement and mechanism maintenance. During cutting, when the blade rotates, the blade coolants from all channels are concentrated to flush the blade edge (front, back, and both sides), which plays a role in cooling the blade and flushing debris.

[0031] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A dicing machine blade cooling water cover, characterized in that: The cooling water hood comprises a water spray hood mechanism body, a blade axial spray mechanism, a blade tangential spray mechanism and a water spray hood deployment mechanism. The water spray hood mechanism body is fixed on the blade spindle. The water spray hood mechanism body is provided with a blade axial spray mechanism and a blade tangential spray mechanism. The water spray hood mechanism body is also provided with a water spray hood deployment mechanism. The blade axial spray mechanism comprises a blade axial spray mechanism fixing seat, a coolant spray pipe, a coolant quick connector and a nitrogen pipeline quick connector. The blade axial spray mechanism fixing seat is arranged on the water spray hood mechanism body. Two parallel coolant spray pipes are connected to the blade axial spray mechanism fixing seat. The center lines of the two parallel coolant spray pipes coincide with the center line of the blade. The blade axial spray mechanism fixing seat is provided with a coolant quick connector and a nitrogen pipeline quick connector. The coolant quick connector is connected to the coolant spray pipe. The coolant quick connector is used to connect the coolant delivery hose, and the nitrogen pipeline quick connector is used to connect the nitrogen delivery hose.

2. A dicing machine blade cooling water cover according to claim 1, characterized in that: The inner side of the coolant spray pipe facing the blade is provided with three fine grooves, and by adjusting the water pressure, three spray waters are sprayed out in a 60° fan shape to flush the blade part and the side of the blade.

3. A dicing machine blade cooling water cover according to claim 1, characterized in that: A plug is installed at the end of the coolant spray pipe.

4. A dicing machine blade cooling water cover according to claim 1, characterized in that: A nitrogen nozzle is provided on the blade axial spray mechanism fixing seat, and the nitrogen nozzle is connected to a nitrogen pipeline quick-plug connector.

5. A dicing machine blade cooling water cover according to claim 1, characterized in that: The blade axial spray mechanism fixing seat is provided with a long waist-shaped screw assembly slot hole.

6. A dicing machine blade cooling water cover according to claim 1, characterized in that: The blade tangential spray mechanism includes a blade tangential spray mechanism fixing seat, a workpiece spray water nozzle, a blade coolant nozzle, a workpiece spray water joint and a blade coolant joint. The lower part of the blade tangential spray mechanism fixing seat is provided with a workpiece spray water nozzle and a blade coolant nozzle. The blade axial spray mechanism fixing seat is provided with a workpiece spray water joint and a blade coolant joint. The workpiece spray water nozzle is connected to the workpiece spray water joint, the blade coolant nozzle is connected to the blade coolant joint, the blade coolant joint is used to connect the blade coolant water supply hose, and the workpiece spray water joint is used to connect the workpiece spray water supply hose.

7. A dicing machine blade cooling water cover according to claim 6, characterized in that: The blade coolant nozzle is installed in a horizontal direction, parallel to the tangent line of the blade, and its center line coincides with the tangential center line of the blade.

8. The dicing machine blade cooling water cover according to claim 1, characterized in that: The water spray hood deployment mechanism includes a blade axial spray mechanism connecting seat, a cylinder piston rod bracket, a cylinder and a cylinder driving gas joint. The blade axial spray mechanism connecting seat is arranged on the blade axial spray mechanism fixing seat, the blade axial spray mechanism connecting seat is installed on the cylinder piston rod bracket, the cylinder is fixed on the water spray hood mechanism body, and a cylinder driving gas joint is provided on the cylinder.

9. A dicing machine blade cooling water cover according to claim 8, characterized in that: A cylinder position sensor is arranged on the cylinder.

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