Coating carrier plate and coating equipment

Abstract

The utility model discloses a film coating support plate and film coating equipment, the film coating support plate comprises a support plate body, the support plate body has a first surface and a second surface opposite to each other, the first surface is provided with a plurality of material loading units, and the material loading units are provided with bearing surfaces; the first face comprises a middle area and an edge area surrounding the periphery of the middle area, and a height difference exists between the bearing face, located in the middle area, of the material carrying unit and the bearing face, located in the edge area, of the material carrying unit. The height difference exists between the bearing surface of the material carrying unit located in the middle area of the carrier plate body and the bearing surface of the material carrying unit located in the edge area, so that the coating uniformity difference of workpieces at different positions caused by the difference of coating parameters is made up, and the coating uniformity of the workpieces at different positions in the coating carrier plate is improved; and the coating quality can be improved, and the use cost is low.

Description

Technical Field

[0001] The present application belongs to the field of film coating technology, and specifically relates to a film coating carrier and a film coating device. Background Art

[0002] In the production process of solar cells, it is usually necessary to use vapor deposition technology to form a coating layer on the surface of the cell. For example, PECVD technology can be used to form a passivation film on the surface of the heterojunction cell. An air box is provided in the coating chamber, in which the RF transmission belt, RF feed point, heating wire, gas uniformity plate, etc. are all arranged on the top of the air box.

[0003] In the related art, a coating carrier is usually used to carry multiple cells into the coating chamber at the same time. During the coating process, the carrier is located at the bottom of the gas box, and the silicon wafer is placed on the coating carrier for coating. However, the coating method of the related art has a large difference in the quality of the coating layer on the cells at different positions in the carrier. Utility Model Content

[0004] The present application aims to provide a coating carrier and coating equipment, which can solve the problem of large differences in the quality of the coating layer on the battery cells at different positions in the carrier when using the coating method of the related technology.

[0005] In order to solve the above technical problems, this application is implemented as follows:

[0006] In the first aspect, an embodiment of the present application proposes a coating carrier, comprising: a carrier body, the carrier body having a first surface and a second surface opposite to each other, a plurality of loading units being provided in the first surface, and the loading units being provided with a loading surface; the first surface comprising a middle area and an edge area surrounding the middle area, and there is a height difference between the loading surface of the loading unit located in the middle area and the loading surface of the loading unit located in the edge area.

[0007] Optionally, along a direction perpendicular to the first surface, the carrying surface of each of the loading units is

[0008] The distance of the first surface is set as the loading depth; from the edges of the first surface to the center, the loading depth of the loading unit gradually increases.

[0009] Optionally, along a direction perpendicular to the first surface, the distance from the carrying surface of each loading unit to the first surface is set as a loading depth; and the loading depth of the loading unit gradually decreases from the edges to the center of the first surface.

[0010] Optionally, the height difference between the carrying surfaces of two adjacent loading units is: -10mm-10mm.

[0011] Optionally, a limiting boss is provided in the loading unit 12 around the bearing surface, and the limiting boss protrudes from the bearing surface toward the first surface.

[0012] Optionally, a side surface of the limiting boss facing the bearing surface forms a preset angle with the bearing surface, and a size of the preset angle is positively correlated with a height of the limiting boss.

[0013] Optionally, along the direction perpendicular to the bearing surface, the height of the limiting boss is: 0-10 mm;

[0014] And / or, a preset angle between a side surface of the limiting boss facing the bearing surface and the bearing surface is 90°-180°.

[0015] Optionally, a hollow structure is provided in the carrying surface, and the hollow structure passes through the carrying board body;

[0016] Alternatively, a groove is provided in the middle of the bearing surface, and the groove is recessed from the bearing surface toward the second surface.

[0017] Optionally, a plurality of the material loading units are arranged in an array; and / or, the carrying surfaces of a plurality of the material loading units are all parallel and parallel to the first surface.

[0018] In a second aspect, an embodiment of the present application proposes a coating device, comprising: a device body and a coating carrier as described in any one of the above items, wherein a coating cavity is provided in the device body, and the coating carrier is used to carry a workpiece in and out of the coating cavity.

[0019] In an embodiment of the present application, a plurality of loading units are arranged in the first surface of the carrier body, each loading unit is provided with a loading surface for carrying the workpiece to be plated, and further, a height difference is provided between the loading surface of the loading unit located in the middle area of ​​the carrier body and the loading surface of the loading unit located in the edge area, so as to compensate for the difference in coating uniformity of the workpieces at different positions caused by the difference in coating parameters, thereby improving the coating uniformity of the workpieces at different positions in the coating carrier, which helps to improve the coating quality and has a low cost of use.

[0020] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0022] Figure 1 is a top view of a coating carrier according to an embodiment of the present application;

[0023] Figure 2 is a side view of a coating carrier according to an embodiment of the present application;

[0024] Figure 3 is a side view of another coating carrier according to an embodiment of the present application;

[0025] Figure 4 Is a coated substrate corresponding to Figure 2 The middle circle shows the enlarged view of point A;

[0026] Figure 5 Is another coated substrate corresponding to Figure 2 The middle circle shows the enlarged view of point A;

[0027] Figure 6 yes Figure 5 A local structural diagram of the coating carrier at the joint of two adjacent material loading units;

[0028] Figure 7 It is another coated substrate corresponding to Figure 2 The middle circle shows the enlarged view of point A;

[0029] Figure 8 Another coating substrate corresponds to Figure 2 The middle circle shows the enlarged view of point A;

[0030] Fig. 9 Schematic diagram of the arrangement of different material loading units in a coating carrier according to an embodiment of the present application.

[0031] Reference numerals:

[0032] 10: Coating carrier; 11: Carrier body; 111: First surface; 111a: Middle area; 111b: Edge area; 112: Second surface; 12: Loading unit; 121: Loading surface; 122: Position limiting boss; 123: Hollow structure; 124: Groove. DETAILED DESCRIPTION

[0033] The embodiments of the present application will be described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and should not be construed as limitations on the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present application.

[0034] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this application, unless otherwise specified, "plurality" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0035] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0036] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0037] The coating carrier and coating equipment provided in the embodiments of the present application are described in detail below through specific embodiments and their application scenarios in combination with the accompanying drawings.

[0038] like Figure 1 As shown, according to some embodiments of the present application, the coating carrier 10 includes: a carrier body 11, the carrier body 11 has a first surface 111 and a second surface 112 relative to each other, a plurality of loading units 12 are provided in the first surface 111, and the loading units 12 are provided with a carrying surface 121; the first surface 111 includes a middle area 111a and an edge area 111b surrounding the middle area 111a, and there is a height difference between the carrying surface 121 of the loading unit 12 located in the middle area 111a and the carrying surface 121 of the loading unit 12 located in the edge area 111b.

[0039] In the embodiment of the present application, a plurality of loading materials are arranged on the first surface 111 of the carrier body 11.

[0040] Unit 12, each loading unit 12 is provided with a carrying surface 121 for carrying the workpiece to be plated, and further, there is a height difference between the carrying surface 121 of the loading unit 12 located in the middle area 111a of the carrier body 11 and the carrying surface 121 of the loading unit 12 located in the edge area 111b, so as to compensate for the difference in coating uniformity of the workpieces at different positions caused by the difference in coating parameters, thereby improving the coating uniformity of the workpieces at different positions in the coating carrier 10, which is helpful to improve the coating quality and has a low cost of use.

[0041] It is understandable that the coating carrier 10 of the present application can be applied to a vapor deposition coating process, for example, it can be applied to a process of forming a passivation layer on the surface of a solar cell using a PECVD coating device. The following will be explained using the scenario where the coating carrier 10 is used to support a solar cell for coating using a PECVD coating process. When the coating carrier 10 is applied to other application scenarios, it can be implemented with reference to the above, and no further description will be given here.

[0042] Usually, a gas box is provided on the upper layer of the coating chamber of the PECVD coating equipment, and the RF transmission belt, RF feeding point, heating wire, gas uniformizing plate, etc. are all arranged on the top of the gas box. During the coating operation, a coating carrier 10 is used to carry multiple battery cells into the coating chamber for coating at the same time. Since the electromagnetic field, temperature field, gas flow rate and other process parameters are different in different places inside the gas box, the coating quality of the battery cells at different positions in the coating carrier 10 will be different.

[0043] Although in the process of gas box design, the uniformity of electromagnetic field can be improved by designing curved electrodes, the uniformity of temperature field can be improved by reasonable arrangement of heating wires, and the uniformity of gas can be improved by setting a spray-type uniform gas structure. However, with the adjustment of process parameters (such as gas flow, temperature, power, frequency and other parameters), the electromagnetic field, temperature field, gas flow, etc. will also change accordingly. Therefore, simply optimizing the gas box structure cannot fully meet the needs of process parameter changes, and the cost of gas box optimization is high.

[0044] To this end, in the embodiment of the present application, the structure of the coating carrier 10 is optimized to compensate for the differences in coating quality caused by differences in process parameters such as electromagnetic fields, temperature fields, and gas field flow rates, thereby improving the coating uniformity of workpieces at different positions in the coating carrier 10.

[0045] Specifically, the coated carrier 10 includes a carrier body 11, which has a first surface 111 and a second surface 112 relative to each other. A plurality of loading units 12 are provided in the first surface 111, and the loading units 12 extend from the first surface 111 to the second surface 112 to form a loading surface 121 for loading battery cells.

[0046] Among them, Figure 1 As shown, the first surface 111 has a middle area 111a located within the dotted line frame and an edge area 111b located outside the dotted line frame. Figure 2 As shown, along a direction perpendicular to the first surface 111, there is a height difference between the carrying surface 121 of the loading unit 12 located in the edge area 111b and the carrying surface 121 of the loading unit 12 located in the middle area 111a, so that the height difference is used to compensate for the difference in the uniformity of the battery cell coating at different positions in the carrier body 11 caused by the difference in coating parameters.

[0047] Among them, Figure 1 The positions of the dashed boxes are only for illustration, and the sizes of the middle area 111a and the edge area 111b in the first surface 111 can be flexibly set according to actual conditions. The number and position of the loading units 12 in the edge area 111b, and the number and position of the loading units 12 in the middle area 111a can be flexibly set according to needs.

[0048] In addition, the loading unit 12 may be a groove structure directly processed in the carrier body 11 , or may be a separately processed module structure embedded in the carrier body 11 , and this application does not limit this.

[0049] It should be noted that the outer contour shape of the carrying surface 121 in each loading unit 12 can be square, rectangular, circular or other polygonal structures, wherein the outer contour shape of the carrying surface 121 can be determined according to the structure of the workpiece to be plated, and the embodiment of the present application does not limit this.

[0050] Alternatively, if Figure 2 As shown, along the direction perpendicular to the first surface 111 , the distance from the carrying surface 121 of each loading unit 12 to the first surface 111 is set as a loading depth H0 ; from the edges of the first surface 111 to the center, the loading depth H0 of the loading unit 12 gradually increases.

[0051] In the embodiment of the present application, the loading depth H0 of the loading unit 12 is gradually increased from the edges of the first surface 111 to the center, that is, the multiple loading surfaces 121 in the carrier body 11 present a structure with a low middle and high surroundings, so as to utilize the height difference of the loading surfaces 121 in different loading units 12 to compensate for the difference in coating quality at different positions. At the same time, the height of the multiple loading surfaces 121 in the carrier body 11 is uniformly changed, which can further improve the coating uniformity of the battery cells (that is, the workpiece to be plated) at different positions in the carrier body 11.

[0052] It is understandable that when the coating carrier 10 is used to carry the battery cell for coating operation,

[0053] As the loading depth H0 of the carrying surface 121 in the loading unit 12 increases, the thickness of the coating layer formed on the corresponding battery cell will decrease. Therefore, in actual application, the loading depth H0 of the carrying surface 121 in the loading unit 12 can be flexibly set according to the coating layer quality of the battery cells in the loading unit 12 at different positions in the coating carrier 10 to adjust the coating quality of the battery cells at different positions.

[0054] Alternatively, if Figure 3 As shown, along the direction perpendicular to the first surface 111 , the distance from the carrying surface 121 of each loading unit 12 to the first surface 111 is the loading depth H0 ; from the edges to the center of the first surface 111 , the loading depth H0 of the loading unit 12 gradually decreases.

[0055] In the embodiment of the present application, the loading depth H0 of the loading unit 12 is gradually reduced from the edges to the center of the first surface 111, that is, the plurality of loading surfaces 121 in the carrier body 11 present a structure with a high middle and low surroundings. Furthermore, the height difference of the loading surfaces 121 in different loading units 12 is used to compensate for the difference in coating quality at different positions. At the same time, the height of the plurality of loading surfaces 121 in the carrier body 11 is made to change evenly, which can further improve the coating uniformity of the battery cells at different positions in the carrier body 11.

[0056] Alternatively, if Figure 4 As shown, the height difference between the carrying surfaces 121 of two adjacent loading units 12 is: -10mm-10mm.

[0057] In the embodiment of the present application, the height difference range of the carrying surfaces 121 of two adjacent loading units 12 is set to adjust the coating effect of the battery cells in the two adjacent loading units 12, thereby improving the coating uniformity of the two battery cells. If the height difference of the carrying surfaces 121 of the two loading units 12 is too large, it will affect the coating uniformity of the battery cells.

[0058] like Figure 4 As shown, among two adjacent loading units 12, the loading depth of the carrying surface 121 of one loading unit 12 is H01, and the loading depth of the carrying surface 121 of the other loading unit 12 is H02, then the height difference between the carrying surfaces 121 of the two adjacent loading units 12 is H01-H02, that is, the range of H01-H02 is: -10mm-10mm.

[0059] Exemplarily, the height difference between the carrying surfaces 121 of two adjacent loading units 12 can be set to any value such as -10mm, -8mm, -5mm, -3mm, 0mm, 2mm, 5mm, 7mm, 10mm, or a range between any two values.

[0060] Alternatively, if Figure 4 and Figure 5 As shown, the loading unit 12 is provided with a limiter around the loading surface 121.

[0061] The boss 122 , the limiting boss 122 protrudes from the bearing surface 121 toward the first surface 111 .

[0062] In the embodiment of the present application, a limiting boss 122 is arranged around the carrying surface 121, and the limiting boss 122 protrudes from the carrying surface 121 toward the first surface 111, so that when the carrying surface 121 carries the battery cell, the limiting boss 122 is used to limit the four sides of the battery cell to avoid large displacement of the battery cell during the coating process.

[0063] Alternatively, if Figure 6 As shown, a side surface of the limiting boss 122 facing the bearing surface 121 forms a preset angle θ with the bearing surface 121 , and the preset angle θ is positively correlated with a height H1 of the limiting boss 122 .

[0064] It is understandable that in each loading unit 12, by setting the limiting boss 122 around the bearing surface 121, the limiting boss 122 is used to limit the battery cell in the bearing surface 121. However, if the height H1 of the limiting boss 122 is too high, it will affect the coating effect of the edge portion around the battery cell. To this end, the inclination angle θ of the side surface of the limiting boss 122 facing the bearing surface 121 can be set to reduce the influence of the limiting boss 122 on the coating effect of the edge portion around the battery cell.

[0065] Furthermore, when the height H1 of the limiting boss 122 is higher, the preset angle θ between the corresponding side surface of the limiting boss 122 facing the bearing surface 121 and the bearing surface 121 is larger; and when the height H1 of the limiting boss 122 is smaller, the preset angle θ between the corresponding side surface of the limiting boss 122 facing the bearing surface 121 and the bearing surface 121 is smaller. In this way, the limiting effect of the limiting boss 122 on the battery cell can be ensured, and the coating effect of the edges around the battery cell can be taken into account, which is helpful to improve the coating quality of a single battery cell.

[0066] It should be noted that the height H1 of the limiting boss 122 refers to the straight-line distance from the end surface of the limiting boss 122 facing the second surface 112 to the bearing surface 121 along a direction perpendicular to the bearing surface 121 .

[0067] Alternatively, if Figure 6 As shown, along the direction perpendicular to the bearing surface 121, the height H1 of the limiting boss 122 is 0-10 mm. Preferably, the height H1 of the limiting boss 122 is 0-5 mm.

[0068] In the embodiment of the present application, by setting a height range of the limiting boss 122 , the limiting boss 122 is used to limit the battery cell in the carrying surface 121 , while preventing the height H1 of the limiting boss 122 from being too high to affect the coating effect of the edge of the battery cell.

[0069] Exemplarily, the height H1 of the limiting boss 122 can be set to any value such as 0 mm, 1 mm, 3 mm, 5 mm, 7 mm, 9 mm, 10 mm, or a range between any two values.

[0070] Alternatively, if Figure 6 As shown, a preset angle θ between a side surface of the limiting boss 122 facing the bearing surface 121 and the bearing surface 121 is 90°-180°.

[0071] In the embodiment of the present application, a preset angle θ is set between the side surface of the limiting boss 122 facing the carrying surface 121 and the carrying surface 121 to adjust the effect of the limiting boss 122 on the coating effect of the edge positions around the battery cell. At the same time, by setting the side surface of the limiting boss 122 facing the carrying surface 121 to have a certain inclination, it can play a guiding role when placing the battery cell, facilitating the actual operation.

[0072] Exemplarily, the preset angle θ between the side surface of the limiting boss 122 facing the bearing surface 121 and the bearing surface 121 can be set to any angle such as 90°, 100°, 120°, 145°, 150°, 175°, 180°, or a range between any two angles.

[0073] In some embodiments, the thickness of the limiting boss 122 is set to 0.1 mm-10 mm along the direction parallel to the bearing surface 121 to ensure that the limiting boss 122 can limit the battery cell while avoiding the limiting boss 122 being too thick and occupying more space.

[0074] Alternatively, if Figure 7 As shown, a hollow structure 123 is provided in the bearing surface 121, and the hollow structure 123 penetrates the carrier body 11. By providing the hollow structure 123 in the bearing surface 121, the weight of the carrier body 11 can be reduced, the coating carrier 10 can be lightweighted, and processing materials can be saved.

[0075] The hollow structure 123 may be a regular hole structure, and the hole structure passes through the carrier body 11. For example, the hollow structure 123 may be a round hole, an elliptical hole, a square hole, or other polygonal holes provided in the bearing surface 121. The hollow structure 123 may also be an irregular penetrating structure provided in the bearing surface 121, and may be flexibly provided according to actual needs, and is not limited here.

[0076] Alternatively, if Figure 8 As shown, a groove 124 is defined in the center of the supporting surface 121 , and the groove 124 is recessed from the supporting surface 121 toward the second surface 112 .

[0077] Specifically, a groove 124 can be set in the middle position of the carrying surface 121, and the groove 124 is recessed from the carrying surface 121 toward the second surface 112. The carrying surface 121 around the groove 124 is partially used to support the battery cell, that is, the battery cell is in a suspended state at the position corresponding to the groove 124. The groove 124 can be used to collect impurities in the coating process to prevent the impurities from abutting against the surface of the battery cell and causing damage to the battery cell.

[0078] In some embodiments, the cross-sectional shape of the groove 124 along the direction perpendicular to the bearing surface 121 can be rectangular, inverted trapezoidal, inverted triangle, etc. Of course, the groove 124 can also be set to other structures, which is not limited in the embodiments of the present application.

[0079] It should be noted that, along the direction parallel to the bearing surface 121, the size of the hollow structure 123 or the groove 124 is smaller than the size of the bearing surface 121, so as to reserve a part of the area in the bearing surface 121 for supporting the battery cell. For example, along the direction parallel to the bearing surface 121, the size of the bearing surface 121 is 125mm-230mm, and accordingly, the size of the hollow structure 123 or the groove 124 can be set to 124-228mm. Of course, the specific size of the hollow structure 123 or the groove 124 can be flexibly set according to actual conditions, and the embodiment of the present application does not limit this.

[0080] In some embodiments, the plurality of loading units 12 in the carrier body 11 are arranged in an array, which helps to improve the compactness of the distribution of the loading units 12 in the carrier body 11 and facilitates the design and processing of the loading units 12. At the same time, it is also convenient to use the carrier body 11 to carry more battery cells for coating operations.

[0081] Among them, the array arrangement of the plurality of loading units 12 can be a rectangular array arrangement, a hexagonal array arrangement, a circular array arrangement, etc., and can be flexibly arranged according to actual conditions, and the embodiment of the present application is not limited here.

[0082] In other embodiments, the carrying surfaces 121 of the plurality of loading units 12 are parallel and parallel to the first surface 111. This helps the deposition of the coating material in the corresponding areas of different carrying surfaces 121, thereby improving the coating uniformity of the cells in different loading units 12.

[0083] In some embodiments, a conventional coating carrier and a coating carrier in the present application are respectively used to carry the battery cell into a PECVD device for coating operation to form a passivation film layer on the surface of the battery cell. Except for the height difference of the carrying surface 121 in the coating carrier 10, other coating process conditions are the same.

[0084] Among them, the comparative example uses a conventional coating carrier 10 for coating operation, and the embodiment uses the coating carrier 10 of the present application for coating operation, and the structure, quantity and arrangement of the material loading units 12 in the two coating carriers are the same. The only difference is that the height of the loading surface 121 of each material loading unit 12 in the coating carrier 10 of the comparative example is consistent, and there is no height difference; the loading height of the loading surface 121 of each material loading unit 12 in the coating carrier 10 of the embodiment is set according to the trend of gradually increasing from the edge to the center.

[0085] Then, the coating operation is performed using the coating carrier 10, such as Fig. 9 As shown, the cell pieces at 20 positions A1 to A5, B1 to B5, C1 to C5 and D1 to D5 corresponding to each coated carrier 10 were taken to test the film thickness and refractive index of the passivation film layer. The specific test results are shown in Table 1:

[0086] Table 1

[0087]

[0088] It can be seen from Table 1 above that when the comparative coating carrier is used for coating operation, the film thickness of the passivation film layer on the battery cells in the loading unit 12 located in the edge area and the middle area of ​​the coating carrier is

[0089] and refractive index are quite different. Among them, the maximum difference in the thickness of the passivation film in the comparative example is more than 4.8%, and the maximum difference in the refractive index is more than 2.3%.

[0090] When the coating operation is performed using the comparative coating carrier, the differences in the film thickness and refractive index of the passivation film on the cells in the loading unit 12 located in the edge area and the middle area of ​​the coating carrier are small, wherein the maximum difference in the film thickness of the passivation film is within 2%, and the maximum difference in the refractive index is within 1%. It can be seen that the use of the coating carrier 10 structure in the present application can significantly improve the uniformity of the thickness and refractive index of the coating layer of the cells at different positions, thereby improving the overall coating quality.

[0091] Optionally, an embodiment of the present application further provides a coating device, comprising: a device body and the coating carrier 10 in the above embodiment, wherein a coating cavity is provided in the device body, and the coating carrier 10 is used to carry a workpiece in and out of the coating cavity.

[0092] In an embodiment of the present application, a coating carrier 10 can be used to carry workpieces in and out of a coating chamber for coating operations, wherein the coating carrier 10 includes a carrier body 11, and a plurality of loading units 12 are arranged in a first surface 111 of the carrier body 11, each loading unit 12 is provided with a loading surface 121 for carrying a workpiece to be plated, and further, a height difference is provided between the loading surface 121 of the loading unit 12 located in the middle area 111a of the carrier body 11 and the loading surface 121 of the loading unit 12 located in the edge area 111b, so as to compensate for the difference in coating uniformity of workpieces at different positions caused by the difference in coating parameters, thereby improving the coating uniformity of workpieces at different positions in the coating carrier 10, which helps to improve the coating quality, and has a low cost of use.

[0093] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0094] Although the embodiments of the present application have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the claims and their equivalents.

Claims

1. A coating carrier, characterized in that: include: A carrier body, the carrier body having a first surface and a second surface relative to each other, a plurality of loading units being arranged in the first surface, and the loading units being provided with a loading surface; the first surface comprising a middle area and an edge area surrounding the middle area, and there being a height difference between the loading surface of the loading unit located in the middle area and the loading surface of the loading unit located in the edge area.

2. The coating carrier according to claim 1, characterized in that: Along the direction perpendicular to the first surface, the distance from the carrying surface of each loading unit to the first surface is set as the loading depth; from the edges of the first surface to the center, the loading depth of the loading unit gradually increases.

3. The coating carrier according to claim 1, characterized in that: Along the direction perpendicular to the first surface, the distance from the carrying surface of each loading unit to the first surface is set as the loading depth; from the edges of the first surface to the center, the loading depth of the loading unit gradually decreases.

4. The coating carrier according to any one of claims 1 to 3, characterized in that: The height difference between the carrying surfaces of two adjacent loading units is: -10mm-10mm.

5. The coating carrier according to claim 1, characterized in that: A limiting boss is disposed in the loading unit around the carrying surface, and the limiting boss protrudes from the carrying surface toward the first surface.

6. The coating carrier according to claim 5, characterized in that: A side surface of the limiting boss facing the bearing surface forms a preset angle with the bearing surface, and the size of the preset angle is positively correlated with the height of the limiting boss.

7. The coating carrier according to claim 5, characterized in that: Along the direction perpendicular to the bearing surface, the height of the limiting boss is: 0-10mm; And / or, a preset angle between a side surface of the limiting boss facing the bearing surface and the bearing surface is 90°-180°.

8. The coating carrier according to claim 5, characterized in that: A hollow structure is provided in the carrying surface, and the hollow structure passes through the carrying plate body; Alternatively, a groove is provided in the middle of the bearing surface, and the groove is recessed from the bearing surface toward the second surface.

9. The coating carrier according to claim 1, characterized in that: The plurality of material loading units are arranged in an array; and / or the carrying surfaces of the plurality of material loading units are parallel and parallel to the first surface.

10. A coating device, characterized in that: include: An equipment body and a coating carrier as described in any one of claims 1 to 9, wherein a coating cavity is provided in the equipment body, and the coating carrier is used to carry workpieces in and out of the coating cavity.

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