Vacuum coating machine capable of accurately rectifying deviation of reel

Abstract

The utility model relates to a vacuum coating machine capable of accurately correcting a reel, belongs to the field of vacuum coating equipment, and solves the technical problem that the existing vacuum coating machine is not ideal in correction effect on the reel. The vacuum coating machine comprises a shell, a through hole is formed in the side wall, and a magnetic fluid sealing mechanism is installed in the through hole and provided with a transmission shaft; the reel is rotationally installed in the shell through a transmission shaft, and a sensor used for detecting the axial offset of the reel is further installed in the shell; the fixed seat is mounted on the outer wall of the shell, and the sliding seat is mounted on the fixed seat in a sliding manner; the rotary driving mechanism is mounted on the sliding seat, and the transmission shaft is in transmission connection between the rotary driving mechanism and the reel; and the electric actuator is mounted on the fixed seat and electrically connected with the sensor, and the electric actuator is connected with the sliding seat. By means of the structure, when the reel generates axial deviation, the vacuum coating machine can feed back in real time and rectify deviation in time, the deviation rectifying precision is higher, and the effect is more ideal.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and in particular relates to a vacuum coating machine capable of accurately correcting the deviation of a reel. Background Art

[0002] The organic electrolyte of lithium-ion batteries is volatile, flammable and explosive, which poses a great safety problem when used. All-solid-state lithium batteries can solve this problem very well. In the production process of all-solid-state lithium batteries, a vacuum coater is required to complete the winding coating process to coat the lithium layer on the electrode surface. The winding coating process is very demanding, especially the position accuracy of the reel is very high. However, in the specific production process, the reel of the vacuum coater often produces axial deviation, so a correction device is required to correct the position of the reel in real time.

[0003] At present, in the conventional winding coating correction method, in order to achieve effective correction, it is necessary to ensure that the correction roller can tilt forward to the deviation side at a corresponding angle, and with the friction on the roller, the material strip will have a reverse drift, and the correction can be achieved. The correction system contains a signal amplifier, a photoelectric detection device, an actuator, a drive unit, a control device, etc. During the deviation of the material strip, the electric sensor device detects the offset and converts it into a voltage signal. The signal amplifier can effectively amplify the operation and properly handle it with the help of the control device. The control device combines the correction control operation method to effectively control the drive device and the motor execution algorithm. The actuator will drive the correction to maintain the motion state, and the closed-loop control is formed, which can realize the correction control in real time. Because it is used in a high vacuum state, considering the airtightness, the actuator is mostly rotated by gears, and the gears have backlash, resulting in low correction accuracy, so that the correction effect is not ideal. Utility Model Content

[0004] The utility model provides a vacuum coating machine capable of accurately correcting the deviation of a reel, which is used to solve the technical problem that the deflection correction effect of the vacuum coating machine on the reel in the prior art is not ideal.

[0005] The utility model is realized by the following technical solutions:

[0006] A vacuum coating machine capable of accurately correcting the deflection of a reel, comprising:

[0007] The housing has a through hole on its side wall, a magnetic fluid sealing mechanism is installed in the through hole, and the magnetic fluid sealing mechanism is provided with a transmission shaft capable of slight movement in the axial direction;

[0008] A reel is rotatably mounted inside the housing via the transmission shaft, and a sensor for detecting an axial displacement of the reel is also mounted inside the housing;

[0009] A fixed seat, mounted on the outer wall of the housing, on which a sliding seat is slidably mounted;

[0010] A rotary drive mechanism is mounted on the sliding seat, and the transmission shaft is drivingly connected between the rotary drive mechanism and the reel;

[0011] An electric actuator is installed on the fixed seat and electrically connected to the sensor. The electric actuator is connected to the sliding seat to drive the sliding seat to drive the transmission shaft and the reel to produce corresponding axial movement according to the detection result of the sensor.

[0012] Furthermore, in order to better implement the present invention, it also includes:

[0013] The outer layer leakage-proof component is installed between the sliding seat and the shell, and the outer layer leakage-proof component is sleeved outside the magnetic fluid sealing mechanism.

[0014] Furthermore, in order to better implement the utility model, the outer anti-leakage component is a bellows.

[0015] Furthermore, in order to better implement the utility model, a first flange and a second flange are respectively fixed at both ends of the bellows, and the first flange and the second flange are respectively bolted and fixed to the housing and the sliding seat;

[0016] Sealing rings are installed between the first flange and the housing and between the second flange and the sliding seat.

[0017] Furthermore, in order to better implement the present utility model, the rotary drive mechanism includes:

[0018] A motor, fixedly mounted on the sliding seat;

[0019] A brake, fixedly mounted on the sliding seat, the brake having a power input end and a rotation output shaft;

[0020] A transmission pair, transmission-connected between the power input end of the brake and the rotating shaft of the motor;

[0021] The transmission shaft of the magnetic fluid sealing mechanism is connected to the rotating output shaft of the brake through a coupling.

[0022] Furthermore, in order to better implement the present utility model, the transmission pair includes:

[0023] A driving pulley mounted on the rotating shaft of the motor;

[0024] A driven pulley mounted on a power input end of the brake;

[0025] A belt is wound between the driving pulley and the driven pulley.

[0026] Furthermore, in order to better implement the present utility model, the rotary drive mechanism includes:

[0027] The motor is mounted on the sliding seat, and the transmission shaft of the magnetic fluid sealing mechanism is connected to the rotating shaft of the motor through a coupling.

[0028] Furthermore, in order to better implement the present utility model, the electric actuator includes:

[0029] An electric push rod having a telescopic shaft, wherein the electric push rod is mounted on the fixing seat, and the telescopic shaft faces the housing;

[0030] The sliding seat is provided with a connecting seat, and the telescopic shaft is connected to the connecting seat.

[0031] Furthermore, in order to better implement the present invention, a linear guide rail is installed on the fixing seat, and the length direction of the linear guide rail is in the same direction as the axial direction of the reel;

[0032] A sliding block is installed on the sliding seat, and the sliding block is slidably installed on the linear guide rail, so that the sliding seat is slidably installed on the fixed seat.

[0033] Furthermore, in order to better implement the present invention, the number of the linear guide rails is two, the two linear guide rails are respectively located on both sides of the sliding seat, and the sliding block is slidably mounted on each of the linear guide rails.

[0034] Compared with the prior art, the utility model has the following beneficial effects:

[0035] The vacuum coating machine capable of accurately correcting the deviation of a reel provided by the utility model comprises a shell, a reel, a fixed seat, a sliding seat, a rotary drive mechanism and an electric actuator. A through hole is opened on the side wall of the shell, and a magnetic fluid sealing mechanism is installed in the through hole. The magnetic fluid sealing mechanism is provided with a transmission shaft capable of slight movement in the axial direction. The magnetic fluid sealing mechanism blocks the through hole to prevent leakage, and the transmission shaft of the magnetic fluid sealing mechanism can rotate. The reel is connected to the transmission shaft, so that the reel is rotatably installed inside the shell through the transmission shaft. A sensor for detecting the axial deviation of the reel is also installed inside the shell. Of course, a roller is also rotatably installed inside the shell. The strip is reeled in and out through the reel and wound around the roller. The sensor The device detects the axial displacement of the reel by detecting the position displacement of the strip. The fixed seat is installed on the outer wall of the shell, the sliding seat is slidably installed on the fixed seat, and the rotary drive mechanism is installed on the sliding seat to slide on the fixed seat with the sliding seat, and then slide relative to the shell. The transmission shaft of the above-mentioned magnetic fluid sealing mechanism is connected between the rotary drive mechanism and the above-mentioned reel, so that the rotary drive mechanism is used to drive the reel to rotate in the shell to achieve the function of retracting and releasing the strip. The electric actuator is installed on the fixed seat and electrically connected to the above-mentioned sensor. The electric actuator is connected to the above-mentioned sliding seat to drive the sliding seat to drive the transmission shaft and the reel to produce corresponding axial movement according to the detection result of the sensor, and then correct the axial displacement of the reel.

[0036] Through the above structure, the vacuum coating machine drives the reel to rotate in the housing by means of a rotary drive mechanism, and detects the axial offset of the reel during operation by means of a sensor, and then controls the electric actuator to produce a corresponding action to drive the sliding seat to move on the fixed seat, and the sliding seat drives the rotary drive mechanism, the transmission shaft of the magnetic fluid sealing mechanism and the reel to produce a corresponding axial movement, thereby correcting the axial offset of the reel to achieve the correction effect of the reel. Compared with the prior art, the electric actuator in this embodiment is arranged outside the housing, so it does not occupy the internal space of the housing, and the through hole on the side wall of the housing is blocked by the magnetic fluid sealing mechanism, and the sealing effect is good. Even when the housing is vacuum, no leakage will occur, and the electric actuator drives the sliding seat, the transmission shaft of the magnetic fluid sealing mechanism and the reel to translate synchronously, and the electric actuator acts according to the detection result of the sensor, so when the reel produces an axial offset, it can provide real-time feedback and timely correction, and the correction accuracy is higher and the effect is more ideal. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0038] Figure 1 It is a structural schematic diagram of a vacuum coating machine capable of accurately correcting the deviation of a reel provided by an embodiment of the utility model (in the figure, the housing 1 is schematically illustrated by a flat plate);

[0039] Figure 2 yes Figure 1 A schematic diagram of the structure when the bellows is not installed in the structure shown;

[0040] Figure 3 It is a schematic diagram of the installation structure of the rotary drive mechanism in the embodiment of the utility model;

[0041] Figure 4 yes Figure 1 A schematic diagram of the main structure of the structure shown;

[0042] Figure 5 It is a schematic diagram of the connection structure of the strip on the reel, the roller and the sensor in the embodiment of the utility model;

[0043] Figure 6 It is a schematic diagram of the structure of the bellows in the embodiment of the utility model.

[0044] In the figure:

[0045] 1-housing, 2-magnetic fluid sealing mechanism, 21-transmission shaft, 3-reel, 4-sensor, 5-fixed seat, 6-sliding seat, 61-connecting seat, 7-rotational drive mechanism, 71-motor, 72-brake, 73-driving pulley, 74-driven pulley, 75-belt, 8-electric push rod, 9-bellows, 91-first flange, 92-second flange, 93-sealing ring, 10-linear guide, 11-slider, 12-roller, 13-strip. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0047] The utility model provides a vacuum coating machine capable of accurately correcting the deviation of a reel, such as Figure 1-Figure 4 As shown, it includes a housing 1, a reel 3, a fixed seat 5, a sliding seat 6, a rotary drive mechanism 7 and an electric actuator, wherein:

[0048] The shell 1 is a container, and a crucible assembly for heating the coating material and a roller group for winding the strip 13 are arranged inside it. The reel 3 is a winding roller, an unwinding roller or a coating roller in the roller group. The shell 1 is also connected to a vacuum system for extracting the gas in the shell 1 to form a vacuum in the shell 1. A heating assembly is also installed in the shell 1 to heat the internal space of the shell 1. The crucible assembly, the vacuum system and the heating assembly are the same as those in the prior art, so they will not be described in detail here. Specifically, the strip 13 is wound around the roller group, and the roller group also includes a roller 12, and the strip 13 is also wound around the roller 12. The coating vapor formed by the heating of the crucible assembly reaches the surface of the strip 13 on the coating roller, and will adhere to the surface of the strip 13, thereby forming a coating on the surface of the strip 13. However, during operation, due to installation errors, changes in the weight of the strip 13, etc., the reel 3 of the roller group will produce a slight axial offset. In order to ensure the coating accuracy, the axial offset of the reel 3 needs to be corrected in time. Optionally, the reel 3 in this embodiment is an inflatable shaft. For the convenience of illustration, the housing 1 in this embodiment uses a flat plate as a structural schematic.

[0049] A through hole is provided in the side wall of the housing 1, and a magnetic fluid sealing mechanism 2 is installed in the through hole. The magnetic fluid sealing mechanism 2 is provided with a transmission shaft 21 capable of slight movement in the axial direction. It should be noted that the transmission shaft 21 of some magnetic fluid sealing mechanisms 2 in the prior art can produce slight reciprocating movement in the axial direction. The magnetic fluid sealing mechanism 2 blocks the through hole to prevent leakage, and the transmission shaft 21 of the magnetic fluid sealing mechanism 2 can rotate, and the reel 3 is connected to the transmission shaft 21, so that the reel 3 is rotatably installed inside the housing 1 through the transmission shaft 21.

[0050] A sensor 4 for detecting the axial displacement of the reel 3 is also installed inside the housing 1. Of course, a roller 12 is also rotatably installed inside the housing 1. The strip 13 is reeled and unreeled through the reel 3 and wound around the roller 12. The sensor 4 detects the axial displacement of the reel 3 by detecting the position displacement of the strip 13. The sensor 4 is widely used in existing vacuum coating machines, and its detection principle and electrical connection method are the same as those in the prior art. Specifically, the sensor 4 is electrically connected to the control unit of the vacuum coating machine. Therefore, the signal related to the axial displacement of the reel 3 detected by the sensor 4 is directly transmitted to the controller for processing. Specifically, as Figure 5 As shown, the strip 13 passes through the roller 12 after coming out from the reel 3 , and then passes through the sensor 4 .

[0051] The fixed seat 5 is installed on the outer wall of the shell 1, and the fixed seat 5 is fixed relative to the shell 1. The sliding seat 6 is slidably installed on the fixed seat 5, so that the sliding seat 6 can slide relative to the shell 1, and the sliding direction of the sliding seat 6 on the fixed seat 5 is the same as the axial direction of the above-mentioned reel 3.

[0052] The rotary drive mechanism 7 is installed on the sliding seat 6 to slide on the fixed seat 5 with the sliding seat 6, and then slide relative to the outer shell 1. The transmission shaft 21 of the above-mentioned magnetic fluid sealing mechanism 2 is transmission-connected between the rotary drive mechanism 7 and the above-mentioned reel 3, so that the rotary drive mechanism 7 is used to drive the reel 3 to rotate in the outer shell 1 to achieve the function of retracting and releasing the strip 13. The connection between the above-mentioned sliding seat 6, the rotary drive mechanism 7, the transmission shaft 21 and the reel 3 is a rigid connection, so the sliding seat 6, the rotary drive mechanism 7, the transmission shaft 21 and the reel 3 can be regarded as a whole that can synchronously translate along the axial direction of the reel 3.

[0053] The electric actuator is installed on the fixed seat 5 and is electrically connected to the above-mentioned sensor 4. Specifically, the electric actuator is electrically connected to the above-mentioned control unit, and the electric actuator is connected to the above-mentioned sliding seat 6 to drive the sliding seat 6 to drive the transmission shaft 21 and the reel 3 to produce corresponding axial movement according to the detection result of the sensor 4, and then correct the axial offset of the reel 3.

[0054] Through the above structure, the vacuum coating machine drives the reel 3 to rotate in the housing 1 by means of the rotary drive mechanism 7, and detects the axial offset of the reel 3 during operation by means of the sensor 4, and then controls the electric actuator to produce corresponding actions to drive the sliding seat 6 to move on the fixed seat 5, and the sliding seat 6 drives the rotary drive mechanism 7, the transmission shaft 21 of the magnetic fluid sealing mechanism 2 and the reel 3 to produce corresponding axial movements, thereby correcting the axial offset of the reel 3 to achieve the correction effect of the reel 3. Compared with the prior art, the electric actuator in this embodiment is arranged outside the housing 1, so it does not occupy the internal space of the housing 1, and the through hole on the side wall of the housing 1 is blocked by the magnetic fluid sealing mechanism 2, and the sealing effect is good. Even when the housing 1 is vacuum, no leakage will occur, and the electric actuator drives the sliding seat 6, the transmission shaft 21 of the magnetic fluid sealing mechanism 2 and the reel 3 to translate synchronously, and the electric actuator acts according to the detection result of the sensor 4, so when the reel 3 produces axial offset, it can provide real-time feedback and timely correction, and the correction accuracy is higher and the effect is more ideal.

[0055] In order to further avoid leakage from the above-mentioned through holes, optionally, the vacuum coating machine capable of accurately correcting the deviation of the reel provided in this embodiment also includes an outer leak-proof part, which is installed between the sliding seat 6 and the outer shell 1, and is sleeved on the outside of the above-mentioned magnetic fluid sealing mechanism 2. In this way, it can further achieve a sealing effect and further reduce the probability of external air entering the outer shell 1 through the through hole.

[0056] Alternatively, if Figure 1 , Figure 3 , Figure 4 as well as Figure 6 As shown, the outer layer leakage-proof component is a bellows 9, and a first flange 91 and a second flange 92 are respectively fixed at both ends of the bellows 9. The first flange 91 is fixed to the shell 1 by bolts, and the second flange 92 is fixed to the sliding seat 6 by bolts. In this way, when the sliding seat 6 translates relative to the shell 1, the bellows 9 expands and contracts. Sealing rings 93 are installed between the first flange 91 and the shell 1 and between the second flange 92 and the sliding seat 6, so as to better seal, so that the magnetic fluid sealing mechanism 2 in the bellows 9 is in a space with better sealing effect.

[0057] Of course, the outer leak-proof member may also be a rubber tube, in which case the two ends of the rubber tube are respectively bonded and fixed to the outer shell 1 and the sliding seat 6; the outer leak-proof member may also be a plastic bag, which is bonded between the outer shell 1 and the sliding seat 6. In addition, the outer leak-proof member may also be other flexible and retractable structures as long as they can achieve sealing.

[0058] As an optional implementation of this embodiment, the rotation drive mechanism 7 in this embodiment includes a motor 71, a brake 72 and a transmission pair, wherein:

[0059] The motor 71 is fixed to the above-mentioned sliding seat 6 by bolts, and the brake 72 is also fixed to the above-mentioned sliding seat 6 by bolts. The brake 72 has a power input end and a rotation output shaft. The transmission pair is connected between the power input end of the brake 72 and the rotating shaft of the motor 71. The transmission shaft 21 of the magnetic fluid sealing mechanism 2 is connected to the rotation output shaft of the brake 72 through a coupling. In this way, the rotational power output by the motor 71 is transmitted to the power input end of the above-mentioned brake 72 through the transmission pair, and then transmitted to the rotation output end of the above-mentioned brake 72, and finally transmitted to the transmission shaft 21 of the magnetic fluid sealing mechanism 2 through the coupling, and transmitted to the above-mentioned reel 3 through the transmission shaft 21. Since the brake 72 and the motor 71 are both bolted to the sliding seat 6, and the transmission shaft 21 is connected to the rotating output shaft of the brake 72 via a coupling, the motor 71, the brake 72, the transmission pair and the above-mentioned transmission shaft 21 are all rigidly connected to the sliding seat 6. When the electric actuator drives the sliding seat 6 to translate, the transmission shaft 21 and the reel 3 can be driven to translate in real time.

[0060] As another optional implementation of this embodiment, the rotary drive mechanism 7 in this embodiment includes a motor 71 fixed to the sliding seat 6 by bolts, and the rotating shaft of the motor 71 is directly connected to the transmission shaft 21 of the magnetic fluid sealing mechanism 2 through a coupling.

[0061] The motor 71 is electrically connected to a control unit of the vacuum coating machine, so that the motor 71 is controlled by the control unit of the vacuum coating machine.

[0062] Of course, the rotation drive mechanism 7 can also be any other mechanism that can output a rotation motion, as long as it can be rigidly connected to the sliding seat 6 and the transmission shaft 21 of the magnetic fluid sealing mechanism 2. In addition, a turntable can be rigidly mounted on the sliding seat 6, the transmission shaft 21 is rigidly connected to the turntable, and the rotation drive mechanism 7 is mounted on the sliding seat 6. In this case, the connection between the rotation drive mechanism 7 and the transmission shaft 21 can be flexible.

[0063] Through the above arrangement, in this embodiment, the rotary drive mechanism 7 can drive the transmission shaft 21 to drive the reel 3 to rotate, and the rotary drive mechanism 7, the sliding seat 6, the transmission seat and the reel 3 can translate synchronously, equally and in the same direction, so as to correct the reel 3 in real time.

[0064] Optionally, the transmission pair includes a driving pulley 73, a driven pulley 74 and a belt 75, wherein the driving pulley 73 is mounted on the rotating shaft of the motor 71, the driven pulley 74 is mounted on the power input end of the brake 72, and the belt 75 is wound between the driving pulley 73 and the driven pulley 74, so that the rotating shaft of the motor 71 drives the driving pulley 73 to rotate synchronously, the driving pulley 73 drives the driven pulley 74 to rotate synchronously through the belt 75, and the driven pulley 74 then drives the power input end of the brake 72 to rotate synchronously, thereby driving the rotating output shaft of the brake 72 to rotate synchronously, and then driving the transmission shaft 21 and the reel 3 to rotate. In addition, the brake 72 can be replaced by a reducer.

[0065] Of course, the transmission pair may also be a chain transmission assembly or a gear transmission assembly.

[0066] As an optional implementation of this embodiment, the electric actuator in this embodiment includes an electric push rod 8 with a telescopic shaft, which is installed on the fixed seat 5, and its telescopic shaft faces the housing 1. A connecting seat 61 is provided on the sliding seat 6, and the telescopic shaft is connected to the connecting seat 61, so that the electric push rod 8 can drive the sliding seat 6 to move horizontally on the fixed seat 5 when it is running. Of course, the above-mentioned electric actuator can also be a combination of a motor and a screw nut pair, a cylinder or a hydraulic cylinder, as long as it can achieve driving the sliding seat 6 to move linearly on the fixed seat 5. The electric push rod 8 is electrically connected to the control unit of the above-mentioned vacuum coating machine, so that the control unit is used to control the operation of the electric push rod 8 in real time according to the detection result of the sensor 4. Optionally, a push-pull mechanism is also provided between the above-mentioned housing 1 and the above-mentioned connecting seat 61, and the push-pull mechanism can be a cylinder or a hydraulic cylinder. The push-pull mechanism and the above-mentioned electric push rod 8 are respectively located on both sides of the connecting seat 61. When the electric push rod 8 is extended, the above-mentioned push-pull mechanism pulls back the connecting seat 61, and when the electric push rod 8 is retracted, the above-mentioned push-pull mechanism pushes the connecting seat 61 outward. Of course, the above-mentioned push-pull mechanism may not be provided.

[0067] In order to ensure that the sliding seat 6 moves linearly on the fixed seat 5, in this embodiment, a linear guide 10 is installed on the fixed seat 5, and the length direction of the linear guide 10 is in the same direction as the axial direction of the reel 3. A slider 11 is installed on the sliding seat 6, and the slider 11 is slidably installed on the linear guide 10, so that the sliding seat 6 is slidably installed on the fixed seat 5. As another implementation of this embodiment, in this embodiment, a straight guide rod is provided on the outer wall of the housing 1, and the axial direction of the guide rod is in the same direction as the axial direction of the reel 3. A guide hole is provided on the sliding seat 6, and the guide rod is slidably connected in the guide hole, so as to guide the sliding of the sliding seat 6 on the fixed seat 5. At this time, the sliding seat 6 is overlapped on the fixed seat 5.

[0068] More preferably, there are two linear guide rails 10, which are respectively located on both sides of the sliding seat 6, and the above-mentioned slider 11 is slidably installed on each linear guide rail 10. In this way, the sliding seat 6 is guided and supported by multiple sliders 11, so that the sliding seat 6 can slide on the fixed seat 5 more flexibly and smoothly.

[0069] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope recorded in the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A vacuum coating machine capable of accurately correcting the deflection of a reel, characterized in that: include: A housing (1) has a through hole on its side wall, a magnetic fluid sealing mechanism (2) is installed in the through hole, and the magnetic fluid sealing mechanism (2) is provided with a transmission shaft (21) capable of slight movement in the axial direction; A reel (3) is rotatably mounted inside the housing (1) via the transmission shaft (21), and a sensor (4) for detecting an axial displacement of the reel (3) is also mounted inside the housing (1); A fixed seat (5) is mounted on the outer wall of the housing (1), and a sliding seat (6) is slidably mounted on the fixed seat (5); A rotary drive mechanism (7) is mounted on the sliding seat (6), and the transmission shaft (21) is drivingly connected between the rotary drive mechanism (7) and the reel (3); An electric actuator is mounted on the fixed seat (5) and electrically connected to the sensor (4). The electric actuator is connected to the sliding seat (6) so as to drive the sliding seat (6) to drive the transmission shaft (21) and the reel (3) to produce corresponding axial movement according to the detection result of the sensor (4).

2. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 1, characterized in that: Also includes: The outer layer leakage-proof component is installed between the sliding seat (6) and the outer shell (1), and the outer layer leakage-proof component is sleeved outside the magnetic fluid sealing mechanism (2).

3. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 2, characterized in that: The outer leak-proof component is a bellows (9).

4. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 3, characterized in that: A first flange (91) and a second flange (92) are respectively fixedly provided at both ends of the bellows (9), and the first flange (91) and the second flange (92) are respectively bolted and fixed to the housing (1) and the sliding seat (6); A sealing ring (93) is installed between the first flange (91) and the housing (1), and between the second flange (92) and the sliding seat (6).

5. The vacuum coating machine capable of accurately correcting the deflection of a reel according to any one of claims 1 to 4, characterized in that: The rotary drive mechanism (7) comprises: An electric motor (71) is fixedly mounted on the sliding seat (6); A brake (72) is fixedly mounted on the sliding seat (6), and the brake (72) has a power input end and a rotation output shaft; A transmission pair, which is transmission-connected between a power input end of the brake (72) and a rotating shaft of the motor (71); The transmission shaft (21) of the magnetic fluid sealing mechanism (2) is connected to the rotating output shaft of the brake (72) via a coupling.

6. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 5, characterized in that: The transmission pair comprises: A driving pulley (73) mounted on the rotating shaft of the motor (71); A driven pulley (74) mounted on a power input end of the brake (72); A belt (75) is wound between the driving pulley (73) and the driven pulley (74).

7. The vacuum coating machine capable of accurately correcting the deflection of a reel according to any one of claims 1 to 4, characterized in that: The rotary drive mechanism (7) comprises: The motor (71) is mounted on the sliding seat (6), and the transmission shaft (21) of the magnetic fluid sealing mechanism (2) is connected to the rotating shaft of the motor (71) via a coupling.

8. The vacuum coating machine capable of accurately correcting the deflection of a reel according to any one of claims 1 to 4, characterized in that: The electric actuator comprises: an electric push rod (8) having a telescopic shaft, the electric push rod (8) being mounted on the fixing seat (5), the telescopic shaft facing the housing (1); The sliding seat (6) is provided with a connecting seat (61), and the telescopic shaft is connected to the connecting seat (61).

9. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 8, characterized in that: A linear guide rail (10) is installed on the fixed seat (5), and the length direction of the linear guide rail (10) is in the same direction as the axial direction of the reel (3); A slider (11) is installed on the sliding seat (6), and the slider (11) is slidably installed on the linear guide rail (10) so that the sliding seat (6) is slidably installed on the fixed seat (5).

10. The vacuum coating machine capable of accurately correcting the deflection of a reel according to claim 9, characterized in that: There are two linear guide rails (10), which are respectively located on two sides of the sliding seat (6), and each linear guide rail (10) is slidably mounted with a sliding block (11).

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