Vacuum coating machine with better internal water vapor removal effect

Abstract

The utility model relates to a vacuum coating machine with a better internal water vapor removal effect, belongs to the technical field of vacuum coating equipment, and solves the technical problem that the vacuum degree required by vacuum coating can be obtained for a long time due to the fact that water vapor in the conventional vacuum coating machine is difficult to remove. The vacuum coating machine comprises a shell, an evaporation source crucible, a base material winding and unwinding roller set and a coating roller are arranged in the shell, the evaporation source crucible is arranged under the coating roller, the shell is connected with a vacuum pumping system, and the vacuum pumping system is used for pumping air in the shell so as to form a vacuum environment needed by vacuum coating in the shell; the heating piece is installed on the inner wall of the shell and used for heating the inner space of the shell; and the cryogenic water vapor removal assembly is mounted in the shell and is used for adsorbing and discharging water vapor in the shell. By means of the structure, the vacuum coating machine can remove water vapor in the shell more efficiently, and the vacuum degree needed by vacuum coating can be obtained more quickly.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating equipment, and in particular relates to a vacuum coating machine with better internal water vapor removal effect. Background Art

[0002] Vacuum coating technology has been widely used in the preparation of semiconductor materials, chip metal electrodes, core components of new energy batteries, etc. The process is roughly as follows: the substrate is reeled in and out using a reel assembly, the substrate is reversed by a roller and the substrate is wound around a coating roller, an evaporation source crucible is set under the coating roller, and the evaporation source crucible is used to heat the coating material, so that the coating material evaporates to form steam, and when the steam rises to the substrate on the surface of the coating roller, it can adhere to the surface of the substrate, thereby coating the coating material on the surface of the substrate.

[0003] One of the key elements of vacuum coating technology is the degree of vacuum in the equipment. Currently, vacuum coating machines all use a vacuum system to extract the air inside the machine so that the inside of the machine can reach the required process conditions. Before vacuuming, heating technology is also used to evaporate the water molecules attached to the internal components of the machine and the evaporation source crucible and the water molecules in the coating material to form water vapor, which is then extracted using the vacuum system.

[0004] However, during actual use, we found that the vacuum system was not very effective in extracting water vapor. To achieve the vacuum level and water vapor content required by the process, the vacuum system needed to work for a long time, which delayed the vacuum coating process and also caused a waste of time.

[0005] Based on this, a vacuum coating machine that can more efficiently remove internal water vapor is urgently needed. Utility Model Content

[0006] The utility model provides a vacuum coating machine with better internal water vapor removal effect, which is used to solve the technical problem that water vapor in the existing vacuum coating machine is difficult to remove and the equipment takes a long time to obtain the vacuum degree required for vacuum coating.

[0007] The utility model is realized by the following technical scheme: a vacuum coating machine with better internal water vapor removal effect, comprising:

[0008] An outer shell, in which an evaporation source crucible, a substrate retracting roller group and a coating roller are arranged, the evaporation source crucible is placed directly below the coating roller, and the outer shell is connected to a vacuum pumping system, which is used to extract the air in the outer shell to form a vacuum environment required for vacuum coating in the outer shell;

[0009] A heating element is installed on the inner wall of the shell, and the heating element is used to heat the inner space of the shell;

[0010] A deep-cold desiccant component is installed in the shell, and the deep-cold desiccant component is used to absorb and discharge the water vapor in the shell.

[0011] Furthermore, in order to better implement the utility model, the deep cooling water vapor removal component includes:

[0012] The water receiving tray is provided with a water leakage hole, and the water leakage hole is connected to a drainage pipe connected to a water pump;

[0013] A cylinder body is mounted on the water receiving tray through a bracket;

[0014] A refrigerant flow pipe is installed on the outer wall of the cylinder, and the refrigerant flow pipe is connected to a refrigerant source;

[0015] An electric heating rod is installed on the cylinder, and the electric heating rod is used to heat the cylinder.

[0016] Furthermore, in order to better implement the present invention, a mounting frame is provided on the inner wall of the shell, and the water receiving tray is detachably fixedly connected to the mounting frame.

[0017] Furthermore, in order to better realize the utility model, the shape of the cylinder is cylindrical, and the refrigerant flow pipe is coiled on the outer wall of the cylinder.

[0018] Furthermore, in order to better realize the utility model, the temperature of the refrigerant circulating in the refrigerant circulation pipe is -100°C to -150°C, and the heating temperature of the electric heating rod is 20°C to 30°C.

[0019] Furthermore, in order to better realize the utility model, a partition is installed in the shell, and the internal space of the shell is divided into an upper chamber and a lower chamber by the partition, the substrate retracting roller group and the coating roller are located in the upper chamber, the evaporation source crucible is located in the lower chamber, and the partition is provided with a gap located between the coating roller and the evaporation source crucible;

[0020] The heating element is installed on the side wall of the upper chamber, and the vacuum system is connected to the upper chamber;

[0021] The cryogenic desiccant assembly is installed on the top wall of the upper chamber, the top wall and the side wall of the lower chamber.

[0022] Furthermore, in order to better realize the utility model, the heating element is an armored heating wire.

[0023] Furthermore, in order to better implement the present utility model, the vacuum system includes:

[0024] a first vacuum pump, connected and arranged on the side wall of the upper chamber, and used for drawing the vacuum degree in the shell to a preset value;

[0025] A second vacuum pump is connected and arranged on the top wall of the upper chamber, and the second vacuum pump is used to draw the vacuum degree in the shell from the preset value to a required value.

[0026] Furthermore, in order to better realize the utility model, a detection unit is also installed in the shell, and the detection unit is used to detect the vacuum degree inside the shell. The first vacuum pump and the second vacuum pump are electrically connected to the detection unit to open and close the first vacuum pump and the second vacuum pump according to the vacuum degree inside the shell.

[0027] Furthermore, in order to better implement the present invention, a solenoid valve is installed at the position where the second vacuum pump is connected to the shell, and the solenoid valve is electrically connected to the detection part to open and close the solenoid valve according to the vacuum degree in the shell.

[0028] Compared with the prior art, the utility model has the following beneficial effects:

[0029] The utility model provides a vacuum coating machine with better internal water vapor removal effect, which includes a shell, a heating element and a deep-cold water vapor removal component. The shell is equipped with an evaporation source crucible, a substrate retracting roller group and a coating roller. The evaporation source crucible is used to evaporate the coating material, and the substrate retracting roller group is used to retract the substrate. The substrate passes through the coating roller during the retraction process. The evaporation source crucible is located directly below the coating roller. In this way, the coating material vapor evaporated from the evaporation source crucible can directly reach the substrate at the coating roller, thereby coating the substrate surface. The shell is connected with a vacuum coating device for extracting air from the shell. A vacuum pumping system is used to form a vacuum environment required for vacuum coating in the shell. The heating element is installed on the inner wall of the shell. The heating element is used to heat the internal space of the shell, so that the water molecules attached to the inner wall of the shell evaporate to form water vapor. Of course, when the evaporation source crucible is heated, the water molecules on it and the water molecules in the coating material will also evaporate to form water vapor. All water vapor gathers to form water vapor. A deep cold desiccant assembly is installed in the shell. The deep cold desiccant assembly can generate low temperature, so that the water vapor in the shell is adsorbed on it and condensed into ice, and then the adsorbed water is discharged.

[0030] Through the above structure, the vacuum coating machine provided by the utility model utilizes a deep-cold moisture removal component to generate low temperature so that the moisture in the outer shell gathers and is adsorbed on its surface and then discharged. In this way, the vacuum system draws out less moisture (almost zero) when evacuating the outer shell, which not only protects the vacuum system, but also the process of removing moisture by the deep-cold moisture removal component is synchronized with the process of evacuating the outer shell by the vacuum system, thereby saving the time to form the required vacuum environment in the outer shell, allowing the required process vacuum conditions to be quickly obtained in the outer shell, thereby speeding up efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0032] Figure 1 It is a schematic diagram of the structure of a vacuum coating machine with better internal water vapor removal effect provided by an embodiment of the utility model;

[0033] Figure 2 It is a schematic structural diagram of a deep-cold water vapor removal component in an embodiment of the utility model.

[0034] In the figure: 1-housing, 2-evaporation source crucible, 3-winding roller, 4-unwinding roller, 5-passing roller, 6-coating roller, 7-first vacuum pump, 8-second vacuum pump, 9-heating element, 10-deep cooling and dehumidification component, 101-water receiving tray, 102-drain pipe, 103-cylinder, 104-refrigerant circulation pipe, 105-electric heating rod, 11-mounting frame, 12-partition, 13-detection part, 14-solenoid valve, 100-substrate. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be described in detail below. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other implementation methods obtained by ordinary technicians in this field without creative work belong to the scope of protection of the utility model.

[0036] The vacuum coating machine with better internal water vapor removal effect provided by the utility model comprises a housing 1, a heating element 9 and a deep cooling water vapor removal component 10, wherein:

[0037] The shell 1 is a container, and an evaporation source crucible 2, a substrate retracting roller group and a coating roller 6 are arranged in the shell 1. The evaporation source crucible 2 is used to evaporate the coating material, and the substrate retracting roller group is used to retract the substrate 100 (that is, the strip to be coated). The substrate retracting roller group mainly includes a reeling roller 3 and an unreeling roller 4, and of course, also includes a passing roller 5. The substrate 100 is wound around the reeling roller 3, the passing roller 5 and the unreeling roller 4. The unreeling roller 4 unwinds the substrate 100, and then the substrate 100 is rewound by the passing roller 5 to the reeling roller 3, and the substrate 100 passes through the coating roller 6 during the retracting process. The evaporation source crucible 2 is located directly below the coating roller 6, so that the coating material vapor evaporated from the evaporation source crucible 2 can directly reach the substrate 100 at the coating roller 6, so that the coating layer is coated on the surface of the substrate 100. The shell 1 is connected to a vacuum system for extracting air from the shell 1 to form a vacuum environment required for vacuum coating in the shell 1.

[0038] The heating element 9 can generate heat. The heating element 9 is installed on the inner wall of the shell 1 and is used to heat the internal space of the shell 1, so that the water molecules attached to the inner wall of the shell 1 evaporate to form water vapor. Of course, when the evaporation source crucible 2 is heated, the water molecules on it and the water molecules in the coating material will also evaporate to form water vapor. All water vapors gather to form water vapor. The water vapor is diffused in the air in the shell 1. Optionally, the above-mentioned heating element 9 can be an armored heating wire. Of course, the heating element 9 can also be an electric heating plate installed on the inner wall of the shell 1.

[0039] The cryogenic desiccant assembly 10 is installed in the outer shell 1. The cryogenic desiccant assembly 10 can generate low temperature, so that when the water vapor in the outer shell 1 reaches the position of the cryogenic desiccant assembly 10, the water vapor is adsorbed by the cryogenic desiccant assembly 10 and condensed into ice, and then the cryogenic desiccant assembly 10 is used to discharge the adsorbed water.

[0040] When in use, first turn on the heating element 9 and heat the evaporation source crucible 2 to a certain temperature, so that the water molecules attached to the inner wall of the shell 1 and the surface of each component evaporate to form water vapor. The temperature of the evaporation source crucible 2 causes the water molecules thereon and the water molecules in the coating material to evaporate to form water vapor. All the water vapor converges inside the shell 1 to form water vapor. In this process, start the deep cold water vapor removal component 10, and use the deep cold water vapor removal component 10 to generate low temperature at its location. When the water vapor approaches the location of the deep cold water vapor removal component 10, it will be adsorbed by the deep cold water vapor removal component 10 and condensed into And attached to its surface, and then the adsorbed water is discharged by the deep cooling desiccant component 10, and then the air in the shell 1 is evacuated by the vacuum system. Because before the vacuum is evacuated, most of the water vapor contained in the air has been discharged by the deep cooling desiccant component 10, and the water vapor content in the air evacuated during the vacuum is very low (almost zero), so the vacuum system can more easily and quickly evacuate the environment in the shell 1 to the required vacuum degree, which not only avoids excessive water vapor from gathering in the vacuum system and protects the vacuum system, but also reduces the time required for evacuating the shell 1, saving vacuum coating time.

[0041] Through the above structure, the vacuum coating machine provided by the utility model utilizes a deep-cold moisture removal component 10 to generate low temperature, so that the moisture in the outer shell 1 is gathered and adsorbed on its surface, and then discharged. In this way, the vacuum system draws out less moisture (almost zero) when evacuating the outer shell, which not only protects the vacuum system, but also saves the time for forming the required vacuum environment in the outer shell 1, so that the required process vacuum conditions can be quickly obtained in the outer shell 1, thereby increasing efficiency.

[0042] As an optional implementation of this embodiment, the cryogenic dehumidification component 10 in this embodiment includes a water receiving tray 101, a cylinder 103, a refrigerant flow pipe 104 and an electric heating rod 105, wherein:

[0043] The refrigerant flow pipe 104 is installed on the outer wall of the cylinder 103 and is connected to the refrigerant source. When the deep cold water vapor component is turned on, the refrigerant in the refrigerant source enters the refrigerant flow pipe 104, thereby generating a low temperature at the refrigerant flow pipe 104 and the cylinder 103. Optionally, the refrigerant source can be a high-pressure gas cylinder containing hydraulic nitrogen, or a combination of a refrigerant bottle and a compressor. In this case, the compressor is used to send the refrigerant in the refrigerant bottle into the refrigerant flow pipe 104. Optionally, in this embodiment, the temperature of the refrigerant circulating in the refrigerant flow pipe 104 is -100°C to -150°C, such as -100°C, -110°C, -120°C, -130°C, -140°C or -150°C, thereby generating a deep cold environment at the deep cold water vapor removal component 10.

[0044] When refrigerant flows through the refrigerant circulation pipe 104, the coldness in the refrigerant is transferred to its surroundings and the above-mentioned cylinder 103 through the refrigerant circulation pipe 104, thereby forming a low temperature near the location of the deep-cold moisture removal component 10, and the surrounding moisture condenses into ice cubes when it is cooled and adheres to the outer walls of the refrigerant circulation pipe 104 and the cylinder 103. In this way, a group of deep-cold moisture removal components 10 can efficiently remove part of the moisture in the outer shell 1. By installing multiple groups of the above-mentioned deep-cold moisture removal components 10 in the outer shell 1, most of the moisture in the outer shell 1 can be removed more quickly and more efficiently.

[0045] The cylinder 103 is mounted on the water receiving pan 101 through a bracket. The water receiving pan 101 is a pan body. A water leakage hole is opened in the middle of the water receiving pan 101. The water receiving pan 101 is connected to a drain pipe 102 that is connected to the water leakage hole and the water pump. The bracket is set so that the bottom end of the cylinder 103 does not block the water leakage hole. Of course, the bottom end of the cylinder 103 can also be directly connected to the water receiving pan 101. In this case, it is only necessary to open a water hole at the bottom end of the cylinder 103 so that the water in the water receiving pan 101 can flow smoothly to the water leakage hole.

[0046] When no refrigerant flows in the refrigerant circulation pipe 104, the temperature of the deep-cold dehumidification component 10 will gradually return to normal temperature. At this time, the ice condensed on the surface of the cylinder 103 and the refrigerant circulation pipe 104 will melt to form water droplets and drip onto the water receiving tray 101, and the water in the water receiving tray 101 will flow into the drain pipe 102 from the leakage hole. In order to better drain the water, a water pump connected to the drain pipe 102 is used to suck the water in the drain pipe 102, so that the water received by the water receiving tray 101 can be discharged from the outer shell 1 more quickly and smoothly. Since it still takes a lot of time for the cryogenic dehumidification component 10 to return to normal temperature after the refrigerant supply is stopped in the refrigerant circulation pipe 104, in order to accelerate the melting of ice condensed thereon to form water droplets, the above-mentioned electric heating rod 105 in this embodiment is installed on the above-mentioned cylinder 103, so when the refrigerant supply is stopped in the refrigerant circulation pipe 104, the electric heating rod 105 is immediately powered, so that the cylinder 103 is heated by the electric heating rod 105, so that the ice condensed thereon can be melted to form water droplets in a shorter time. Optionally, the heating rod in this embodiment can be a ceramic rod with an electric heating wire wrapped around it. Optionally, the heating temperature of the above-mentioned electric heating rod 105 is 20°C to 30°C, such as 20°C, 25°C or 30°C, etc., as long as the cylinder 103 and the refrigerant circulation pipe 104 circulation pipe can return to normal temperature as soon as possible.

[0047] It should be noted that the time point when the refrigerant flow pipe 104 stops supplying refrigerant is after the vacuum coating is completed.

[0048] Optionally, the deep-cold moisture removal component 10 in this embodiment can also be a semiconductor refrigeration plate installed on the inner wall of the outer shell 1. A water receiving box placed below the semiconductor refrigeration plate is also connected to the inner wall of the outer shell 1. The water receiving box is connected to a water pipe, and the water pipe is connected to a water pump. The semiconductor refrigeration plate is energized to generate cold air, so that the water vapor in the outer shell 1 condenses into ice on it. After the semiconductor refrigeration plate is powered off, the ice on it melts to form water droplets that drip into the water receiving box. Finally, the water in the water receiving box is pumped away by the water pump through the water pipe.

[0049] Optionally, in this embodiment, a mounting frame 11 is provided on the inner wall of the housing 1, and the water receiving tray 101 is bolted to the mounting frame 11 by bolts, so that the water receiving tray 101 is located below the cylinder 103. Of course, the water receiving tray 101 can also be detachably connected to the mounting frame 11 by a snap-on method. In addition, a suspension rod can also be provided on the inner wall of the housing 1, and the cylinder 103 can be connected to the suspension rod by bolts, as long as the water receiving tray 101 is located below the cylinder 103.

[0050] Optionally, the cylinder 103 in this embodiment is cylindrical, so that the contact area between the cylinder 103 and the environment inside the shell 1 is larger to attach more water vapor. Of course, the cylinder 103 can also be any other shape, using a prism. The refrigerant circulation pipe 104 is spirally coiled on the outer wall of the cylinder 103. Of course, the refrigerant circulation pipe 104 can also be connected to the outer wall of the cylinder 103 in a pasting manner. In this case, the contour shape of the refrigerant circulation pipe 104 may not be spiral, but may be any shape.

[0051] As an optional implementation of this embodiment, a partition 12 is installed in the shell 1, and the internal space of the shell 1 is divided into an upper chamber and a lower chamber by the partition 12. The substrate retracting roller group and the coating roller 6 are located in the upper chamber, and the evaporation source crucible 2 is located in the lower chamber. The partition 12 is provided with a gap between the coating roller 6 and the evaporation source crucible 2. The partition 12 can play a certain separation effect, and the coating vapor formed by evaporation of the evaporation source crucible 2 can directly pass through the gap upward to reach the surface of the substrate 100 on the coating roller 6. The heating element 9 is installed on the side wall of the upper chamber to heat the space of the upper chamber, while the space of the lower chamber can be heated by the heat generated by the above-mentioned evaporation source crucible 2 assembly. The vacuum system is connected to the upper chamber.

[0052] The top wall of the upper chamber, the top wall of the lower chamber, and the side walls are all equipped with cryogenic dehumidification components 10. The cryogenic dehumidification components 10 installed on the top wall of the upper chamber can better and faster absorb and remove the water vapor formed in the upper chamber, and the cryogenic dehumidification components 10 installed on the top wall and the side walls of the lower chamber can better and faster absorb and remove the water vapor formed in the lower chamber. In this way, the water vapor in each area inside the housing 1 can be removed more quickly and more thoroughly.

[0053] As an optional implementation of this embodiment, the vacuum system in this embodiment includes a first vacuum pump 7 and a second vacuum pump 8, wherein:

[0054] The first vacuum pump 7 is a combination of a rotary vane pump and a Roots pump, which can perform rough vacuuming. Specifically, the first vacuum pump 7 is connected and arranged on the side wall of the upper chamber. The first vacuum pump 7 is used to pump the vacuum degree in the housing 1 to a preset value. The second vacuum pump 8 is a molecular pump, which is connected and arranged on the top wall of the upper chamber. The second vacuum pump 8 is turned on only after the vacuum degree in the housing 1 reaches a preset value. When the second vacuum pump 8 is turned on, the first vacuum pump 7 is turned off. The turned-on second vacuum pump 8 pumps the vacuum degree in the housing 1 from the preset value to the required value (i.e., the vacuum degree required for vacuum coating).

[0055] The housing 1 is also provided with a detection unit 13 (such as a vacuum gauge or a resistance gauge or an ionization gauge). The detection unit 13 is used to detect the vacuum degree in the housing 1. The first vacuum pump 7 and the second vacuum pump 8 are both electrically connected to the detection unit 13, so as to start and close the first vacuum pump 7 and the second vacuum pump 8 according to the vacuum degree in the housing 1. It is easy to understand that the vacuum coating machine provided in this embodiment also includes a control unit. The detection unit 13, the first vacuum pump 7 and the second vacuum pump 8 are all electrically connected to the control unit, so that the first vacuum pump 7 and the second vacuum pump 8 are both electrically connected to the detection unit 13. When the first vacuum pump 7 is turned on to roughly evacuate the internal environment of the housing 1, the control unit controls the second vacuum pump 8 to turn off. When the vacuum gauge detects that the vacuum degree in the housing 1 reaches a preset value, the control unit controls the first vacuum pump 7 to turn off and controls the second vacuum pump 8 to turn on until the vacuum degree in the housing 1 reaches the required value.

[0056] In this way, by using the first vacuum pump 7 and the second vacuum pump 8 to evacuate in stages, the required vacuum environment can be obtained in the housing 1 more efficiently.

[0057] Preferably, a solenoid valve 14 is installed at the position where the second vacuum pump 8 is connected to the housing 1, and the solenoid valve 14 is electrically connected to the detection unit 13, so as to open and close the solenoid valve 14 according to the vacuum degree in the housing 1. Specifically, when the vacuum degree in the housing 1 does not reach a preset value, the solenoid valve 14 is powered off to disconnect the communication channel between the second vacuum pump 8 and the housing 1. When the vacuum degree in the housing 1 reaches a preset value, the control unit controls the solenoid valve 14 to be powered on to open the communication channel between the second vacuum pump 8 and the housing 1. Optionally, the solenoid valve 14 may be a gate valve.

[0058] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope recorded in the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A vacuum coating machine with better internal water vapor removal effect, characterized in that: include: An outer shell (1) is provided with an evaporation source crucible (2), a substrate retracting roller group and a coating roller (6) inside, the evaporation source crucible (2) is placed directly below the coating roller (6), and the outer shell (1) is connected to a vacuum pumping system, the vacuum pumping system is used to extract air from the outer shell (1) to form a vacuum environment required for vacuum coating in the outer shell (1); A heating element (9) is installed on the inner wall of the outer shell (1), and the heating element (9) is used to heat the inner space of the outer shell (1); A deep-cold desiccant component (10) is installed in the outer shell (1), and the deep-cold desiccant component (10) is used to absorb and discharge the water vapor in the outer shell (1).

2. The vacuum coating machine with better internal water vapor removal effect according to claim 1, characterized in that: The cryogenic desiccant assembly (10) comprises: The water receiving tray (101) is provided with a water leakage hole, and the water leakage hole is connected to a drainage pipe (102) connected to a water pump; A cylinder (103) is mounted on the water receiving tray (101) via a bracket; A refrigerant flow pipe (104) is installed on the outer wall of the cylinder (103), and the refrigerant flow pipe (104) is connected to a refrigerant source; An electric heating rod (105) is installed on the barrel (103), and the electric heating rod (105) is used to heat the barrel (103).

3. The vacuum coating machine with better internal water vapor removal effect according to claim 2, characterized in that: A mounting frame (11) is provided on the inner wall of the outer shell (1), and the water receiving tray (101) is detachably fixedly connected to the mounting frame (11).

4. The vacuum coating machine with better internal water vapor removal effect according to claim 2, characterized in that: The cylinder (103) is cylindrical in shape, and the refrigerant flow pipe (104) is coiled on the outer wall of the cylinder (103).

5. The vacuum coating machine with better internal water vapor removal effect according to claim 2, characterized in that: The temperature of the refrigerant circulating in the refrigerant circulation pipe (104) is -100°C to -150°C, and the heating temperature of the electric heating rod (105) is 20°C to 30°C.

6. The vacuum coating machine with better internal water vapor removal effect according to claim 3, characterized in that: A partition (12) is installed in the shell (1), and the internal space of the shell (1) is divided into an upper chamber and a lower chamber by the partition (12); the substrate retracting roller group and the coating roller (6) are located in the upper chamber, and the evaporation source crucible (2) is located in the lower chamber; the partition (12) is provided with a notch located between the coating roller (6) and the evaporation source crucible (2); The heating element (9) is installed on the side wall of the upper chamber, and the vacuum system is connected to the upper chamber; The cryogenic dehumidification component (10) is installed on the top wall of the upper chamber and the top wall and side walls of the lower chamber.

7. The vacuum coating machine with better internal water vapor removal effect according to claim 6, characterized in that: The heating element (9) is an armored heating wire.

8. The vacuum coating machine with better internal water vapor removal effect according to claim 6, characterized in that: The vacuum system comprises: a first vacuum pump (7) connected and arranged on the side wall of the upper chamber, the first vacuum pump (7) being used to draw the vacuum degree in the housing (1) to a preset value; A second vacuum pump (8) is arranged on the top wall of the upper chamber, and the second vacuum pump (8) is used to draw the vacuum degree in the shell (1) from the preset value to the required value.

9. The vacuum coating machine with better internal water vapor removal effect according to claim 8, characterized in that: The housing (1) is also provided with a detection unit (13) for detecting the vacuum degree in the housing (1). The first vacuum pump (7) and the second vacuum pump (8) are both electrically connected to the detection unit (13) so as to start and close the first vacuum pump (7) and the second vacuum pump (8) according to the vacuum degree in the housing (1).

10. The vacuum coating machine with better internal water vapor removal effect according to claim 9, characterized in that: A solenoid valve (14) is also installed at the position where the second vacuum pump (8) is connected to the housing (1); the solenoid valve (14) is electrically connected to the detection unit (13) so as to open and close the solenoid valve (14) according to the vacuum degree in the housing (1).

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