Tail gas liquid cooling device

Abstract

The utility model discloses a tail gas liquid cooling device, which comprises a cylinder body, a liquid cooling device, a liquid cooling device, a liquid cooling device, a liquid cooling device and a liquid cooling device, wherein the cylinder body is provided with a first end flange and a second end flange; a first end head; a second end sealing head; the first cooling assembly is located in the barrel and installed on the first end socket, and a first piping set of the first cooling assembly penetrates out of a first via hole formed in the first end socket; the second cooling assembly is located in the barrel and installed on the second end socket, and a second piping set of the second cooling assembly penetrates out of a second via hole formed in the second end socket; the second cooling assembly is separated from the first cooling assembly. The tail gas cooling device disclosed by the utility model is relatively good in maintainability.

Description

Technical Field

[0001] The utility model relates to a tail gas liquid cooling device. Background Art

[0002] The exhaust gas generated by semiconductor equipment is also called semiconductor process waste gas. Its composition is relatively complex, mainly fluorine-containing gases and volatile organic gases, such as CF4, NF3, SF6, C2F6, CHF3, CH2F2, etc. Different types of semiconductor processes produce different exhaust gas compositions. Different exhaust gas treatment methods are required for different exhaust gases. However, the temperature of semiconductor process waste gas is generally high when it is discharged, and most of the subsequent treatment processes need to cool it down before treating the semiconductor process waste gas to facilitate subsequent treatment.

[0003] Even if the subsequent treatment process does not have any temperature requirements for semiconductor process waste gas, its transportation equipment also has temperature requirements. The semiconductor process waste gas often needs to be pumped to the predetermined tail gas treatment equipment through a pump. The working temperature of the pump cannot be too high, otherwise it will affect its working efficiency and service life, especially for oil pumps. Excessive temperature will cause the working oil to volatilize. At the same time, for subsequent treatments, such as activated carbon adsorption tanks, the adsorption temperature should not be too high. It should be known that for activated carbon, the desorption temperature is 200℃~220℃. In other words, if the temperature of semiconductor process waste gas is relatively high, the activated carbon will be saturated in advance, and even desorption will occur, that is, the already adsorbed semiconductor process waste gas will be removed from the activated carbon. In view of this, in general, in order to meet the transportation of semiconductor process waste gas and subsequent process treatment, semiconductor process waste gas generally needs to be cooled in advance.

[0004] Due to the complex composition of semiconductor process exhaust gas, the device used to cool the semiconductor exhaust gas usually requires periodic maintenance. Therefore, the tail gas liquid cooling device used for semiconductor exhaust gas cooling needs to meet the maintainability requirements in addition to the cooling requirements.

[0005] A relatively common exhaust gas liquid cooling device for cooling semiconductor exhaust gas is configured as a straight cooling tube or a U-shaped cooling tube in a cylindrical shell with a circulating cooling medium. If a straight cooling tube is used, the axial direction of the cooling tube is parallel to the axial direction of the shell. At the same time, heat exchange fins are provided on the cooling tube to increase the heat exchange area of ​​the cooling tube. When it is necessary to maintain the heat exchange assembly formed by the cooling tube and the heat exchange fins, the shell needs to be dismantled or the heat exchange assembly needs to be taken out. Under this condition, it is necessary to consider the mutual influence between the disassembly and assembly of the heat exchange assembly and its axial length in the shell. Specifically, if the axial length of the heat exchange assembly in the shell is relatively large, its disassembly will become difficult, but if it is relatively small, it will inevitably affect its heat exchange capacity.

[0006] Furthermore, in order to improve the heat exchange capacity under the condition that the overall length of the heat exchange component is relatively small, a serpentine tube or a coil is used to replace the straight cooling tube or the U-shaped cooling tube. However, in the axial direction of the shell, the contradiction between the length of the heat exchange component and the maintainability is still a technical problem that needs to be solved. Utility Model Content

[0007] In view of this, the purpose of the present invention is to provide an exhaust gas liquid cooling device with relatively high heat exchange efficiency and relatively good maintainability.

[0008] In an embodiment of the present utility model, a tail gas liquid cooling device is provided for cooling semiconductor process waste gas, and the tail gas liquid cooling device comprises:

[0009] A cylinder having a first end flange and a second end flange opposite to the first end flange;

[0010] A first end seal head is provided with a first end flange to form a first end flange connection structure, and the first end seal head is provided with a first port;

[0011] A second end seal head is provided with a second end flange to form a second end flange connection structure, and the second end seal head is provided with a second port;

[0012] A first cooling assembly is located in the cylinder and mounted on the first end cover, and a first pipe group of the first cooling assembly passes through a first through hole provided on the first end cover; and

[0013] The second cooling assembly is located in the cylinder and installed on the second end cover. The second pipe group of the second cooling assembly passes through the second through hole provided on the second end cover. The second cooling assembly is separated from the first cooling assembly.

[0014] Optionally, the first cooling assembly is fixed to the first end cap through a first pipe group;

[0015] The second cooling assembly is fixed to the second end cover through the second pipe group.

[0016] Optionally, the first cooling assembly and the second cooling assembly are provided with auxiliary brackets supported on the inner wall of the cylinder.

[0017] Optionally, the distance between the first cooling component and the second cooling component is 20 mm to 150 mm.

[0018] Optionally, the first cooling assembly and the second cooling assembly are coil-type cooling pipes;

[0019] Correspondingly, the coil-type cooling pipe is provided with a first refrigerant medium port corresponding to the end seal side thereof, and a second refrigerant medium port is provided at the opposite end, and the second refrigerant medium port is connected back to the end seal of the coil-type cooling pipe.

[0020] Optionally, the coil-type cooling tube is provided with heat exchange fins or each coil is provided with a cooling fin with a central hole.

[0021] Optionally, the cooling fin is conical, and the side where the large end of the cone is located is the intake side of the exhaust gas.

[0022] Optionally, a third opening is further provided on the side of the cylinder.

[0023] Optionally, the first port and the second port have LF flanges.

[0024] Optionally, a first joint surface between the first end seal and the first end flange, and a second end joint surface between the second end seal and the second end flange are formed with an annular positioning groove;

[0025] Accordingly, the axis of the positioning groove is colinear with the axis of the cylinder;

[0026] The positioning groove is positioned with a sealing ring.

[0027] It should be known that, since the semiconductor process waste gas contains more corrosive components and more volatile organic gases and dust, the maintenance cycle of the cooling component is relatively short, and the difficulty of its assembly and disassembly on the cylinder has a greater impact on the maintainability of the tail gas liquid cooling device. According to the tail gas liquid cooling device of the embodiment of the utility model, it is equivalent to dividing the cooling component into two parts, which correspond to each of the heads mounted at both ends of the cylinder. The cooling component uses the head as the mounting base. During maintenance, the head is removed and the cooling component with the head as the mounting base is taken out together for maintenance. Since it is equivalent to dividing the cooling component into two parts, the two parts are disengaged from each other, so that under the condition that the length of the cylinder is determined, a cooling component with half the length is used, which greatly reduces the assembly and disassembly of the cooling component on the cylinder, and improves the maintainability of the tail gas liquid cooling device. At the same time, since the cooling component is divided into two parts, the difficulty of its assembly and disassembly is reduced, so that the obstacle to extending the cooling distance is reduced, and a longer cylinder can be provided, which is conducive to constructing a tail gas liquid cooling device with better cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the main cross-sectional structure of the exhaust gas liquid cooling device in one embodiment.

[0029] Figure 2 for Figure 1 Enlarged view of part I.

[0030] Figure 3 It is a schematic diagram of the left side structure of the exhaust gas liquid cooling device in one embodiment.

[0031] Figure 4 It is a schematic diagram of the three-dimensional structure of the exhaust gas liquid cooling device in one embodiment.

[0032] Figure 5 It is a schematic diagram of the assembly structure formed by the first cooling coil and the first end head in one embodiment.

[0033] In the figure: 1. first port, 2. first end cap, 3. third port, 4. LF flange end cover, 5. first cooling coil, 6. cooling fin, 7. heat exchange chamber, 8. cylinder, 9. second cooling coil, 10. second port, 11. second end cap, 12. dovetail groove, 13. O-ring, 14. cylinder flange, 15. liquid inlet pipe, 16. liquid outlet pipe. DETAILED DESCRIPTION

[0034] It should be known that the tail gas liquid cooling device used for cooling semiconductor process waste gas usually includes a cylindrical barrel 8, and has a certain axial, circumferential and radial directions, wherein the axial direction determines the two ends of the barrel 8. At the same time, the space enclosed by the barrel 8 is its internal space, which is used to circulate the tail gas to be cooled and to accommodate the cooling component. The cooling medium circulates in the cooling component. The used coolant is mostly liquid, including fluids that can change phases during the heat exchange process. It should be known that the fluid that can change phases is usually in a liquid state on the cooling component side. Due to the phase change caused by heat, the fluid after the phase change is generally a gas, but it can still be understood as liquid cooling as a whole.

[0035] Since the embodiments of the present invention do not involve improvements on the refrigerant used and its selection, but mainly involve improvements on the cooling components, the rest of the exhaust gas liquid cooling device will not be described in detail, and technicians in this field can still directly use the general configuration of the known exhaust gas liquid cooling device.

[0036] Correspondingly, the exhaust gas liquid cooling device according to the embodiment of the utility model includes, in addition to the cylinder 8, a head located at each end of the cylinder 8 and a cooling component located inside the cylinder 8, as well as inlet and outlet pipe interfaces of the exhaust gas to be cooled installed on the head.

[0037] The cylinder 8 can be arranged horizontally or vertically in the use state. For the convenience of description and display, Figure 1 The structure shown shows the structure and construction of the exhaust gas liquid cooling device in a horizontal manner, but it does not mean that the cylinder 8 must be arranged in a horizontal manner in the exhaust gas liquid cooling device.

[0038] The barrel 8 is generally a cylinder, and for the convenience of description, each of its two ends has a flange, which is called a first end flange and a second end flange, and is collectively referred to as a barrel mouth flange 14. Obviously, the two barrel mouth flanges 14 are arranged relative to each other.

[0039] The main purpose of adopting the flange connection structure is to facilitate the installation and disassembly of the corresponding head.

[0040] Furthermore, each barrel mouth flange 14 corresponds to a head, the barrel mouth flange 14 matched with the first end flange is called the first end head 2, and the barrel mouth flange 14 matched with the second end flange is called the second end head 11.

[0041] exist Figure 1 In the illustrated structure, both the first end seal 2 and the second end seal 11 are disc-shaped seals, while in some embodiments, one or both of the first end seal 2 and the second end seal 11 are hemispherical seals.

[0042] Figure 1 In the embodiment, the first end cap 2 is provided with a first port 1, and the second end cap 11 is provided with a second port 10. The first port 1 and the second port 10 are also flange interfaces. For the convenience of description, the first port 1 to the third port 3 are collectively referred to as interfaces. In a more preferred embodiment, the first port, the second port, and the optional third port 3 in some embodiments all use LF flanges, and are matched with LF flange end covers 4, so that piping or connection can be quickly performed according to the selected interfaces to adapt to the treatment of exhaust gas in different passages.

[0043] LF flange is a standard flange. The corresponding LF flange standard was first formulated by the American Society of Mechanical Engineers. It is a relatively common flange. Technical personnel in this field should have a clear understanding of this, so I will not go into details here.

[0044] The interface and the head are coaxially arranged. At the same time, under ideal conditions, the interface, the head and the cylinder 8 are coaxial and the coaxiality is maintained as good as possible.

[0045] Different from the prior art where there is only one cooling assembly, in the embodiment of the utility model, two cooling assemblies are provided accordingly, so that under the condition that the length of the cylinder 8 is determined, the length of each cooling assembly is shortened, which is convenient for the assembly of the cooling assembly.

[0046] Accordingly, the cooling assembly fixed on the first end cap 2 is called the first cooling assembly, and when the first end cap 2 is removed, the first cooling assembly can be taken out together with it. Similarly, the cooling assembly fixed on the second end cap 11 is called the second cooling assembly, and when the second end cap 11 is removed, the second cooling assembly can be taken out together with it. Figure 5 It can be clearly seen in the illustrated structure that the first cooling coil 5 is fixed to the first end head 2 through the liquid inlet pipe 15 and the liquid outlet pipe 16. When the first end head 2 is removed from the cylinder 8, the first cooling coil 5 connected to the first end head 2 as a whole can be taken out together.

[0047] Since the conventional single cooling assembly is divided into two, the axial length of the single cooling assembly in the cylinder 8 is shortened, and the difficulty of assembling the cooling assembly is greatly reduced. The cost is only one more set of piping sets.

[0048] Correspondingly, the first cooling assembly is equipped with a first pipe group, and the second cooling assembly is equipped with a second pipe group. The pipe group generally includes a liquid inlet pipe 15 and a liquid outlet pipe 16.

[0049] exist Figure 1 In the illustrated structure, the first cooling coil 5 serving as the first cooling component is disconnected from the second cooling coil 9 serving as the second cooling component, and the liquid inlet pipe 15 in each piping group can be connected from the proximal end of the corresponding cooling component (relative to the head on which it is installed) or from the distal end of the cooling component.

[0050] Specifically, if the two cooling components are considered as a whole, and the coolant is transported from left to right as a whole, then the liquid inlet pipe 15 of the first cooling coil 5 needs to be located at the proximal end (relative to the first end cap 2), and the coolant is gradually heated until it reaches the rightmost end of the first cooling coil 5, and then connected back to a liquid outlet pipe 16, at which time the liquid outlet pipe 16 is connected from the distal end of the first cooling coil 5. The distal end of the second cooling coil 9 (relative to the second end cap 11) is correspondingly connected to the inlet pipe 15, and then gradually heated from left to right, and finally discharged through the liquid outlet pipe 16 connected from the proximal end of the second cooling coil 9.

[0051] Correspondingly, a pair of through holes are opened on the first end cap 2 for connecting the liquid inlet pipe 15 and the liquid outlet pipe 16 of the adapted first cooling coil 5; similarly, a pair of through holes are opened on the second end cap 11 for connecting the liquid inlet pipe 15 and the liquid outlet pipe 16 of the adapted second cooling coil 9.

[0052] The liquid inlet pipe 15 and the liquid outlet pipe 16 are preferably integrated with the through-holes by welding. In some embodiments, the liquid inlet pipe 15 and the liquid outlet pipe 16 are divided into multiple parts at the corresponding through-holes, one of which is the middle part and is fixed to the corresponding through-hole by welding, for example. Pipe joints can be provided at both ends of the middle part to be connected to the part located inside the cylinder 8 and the cooling pipeline located outside the cylinder, respectively.

[0053] The middle part and the through hole can also be connected by threads, and the thread pair formed is coated with sealant to achieve sealing.

[0054] Considering that the exhaust gas may have a high temperature and affect the sealing performance of the adhesive sealing structure, in some implementations, for example, the thread pair formed between the middle portion and the via hole can be sealed using, for example, a packing seal or other solid sealing medium.

[0055] In some embodiments, the first cooling assembly is fixed to the first end cap via a first piping group; the second cooling assembly is fixed to the second end cap via a second piping group. In this case, the piping group is both a component of the corresponding cooling assembly and a component fixed to the corresponding end cap.

[0056] It should be noted that, although the cooling coil is made of metal, its overall weight is not large in the empty state, and the corresponding piping group can meet the requirements of fixing it on the corresponding head.

[0057] However, it should be noted that in the liquid-filled state, the weight of the cooling coil plus the injected liquid is usually 1 to 3 times or more of its own weight. Under this condition, for example, the portion of the cooling coil inside the cylinder 8 is preferably provided with auxiliary support.

[0058] It should be noted that since the auxiliary support reacts to gravity, the auxiliary support is located below the corresponding cooling assembly. Figure 1 As shown, for example, a certain distance is maintained between the first cooling coil 5 and the inner wall of the cylinder 8. In other words, when an auxiliary support is provided below the first cooling coil 5, there is still a margin above it, which does not affect the installation of the first cooling coil 5 in the cylinder 8.

[0059] Furthermore, the auxiliary support may be fixedly arranged at the bottom of the cylinder 8, so when the cooling assembly is taken out and placed, the corresponding auxiliary support is not taken out and placed together.

[0060] In some embodiments, the auxiliary support can be supported in the cylinder 8 in a placed rather than fixed manner, while the auxiliary support can be conveniently taken out and placed without affecting its support for the cooling assembly.

[0061] The auxiliary support is configured as an auxiliary bracket. Considering that, for example, the heat exchange coil is a spiral coil with a predetermined number of turns, the upper surface of the auxiliary bracket can be an arc groove to match the outer contour of the cooling coil.

[0062] In addition, the number of auxiliary brackets can be one or two. When one is used, the auxiliary bracket is supported at the inner end of the corresponding cooling assembly, such as Figure 1 The first cooling coil 5 illustrated in the figure has its right end as the inner end and its left end as the outer end. If only one auxiliary bracket is provided, the auxiliary bracket is supported on the lower side of the right end of the first cooling coil 5 .

[0063] If two auxiliary brackets are provided, one is provided at the lower side of the inner end of the cooling assembly and one is provided at the lower side of the middle portion of the cooling assembly.

[0064] In order to make full use of the space and avoid assembly interference, the spacing between the first cooling component and the second cooling component is 20mm~150mm. Due to thermal expansion and contraction, a certain spacing is left between the two cooling components to avoid direct interference between the two. At the same time, it is also avoided that the two interfere with each other in the middle of the cylinder 8 during assembly. Therefore, at room temperature, the design spacing between the first cooling component and the second cooling component should not be less than 20mm.

[0065] At the same time, in order to make full use of the space, the distance between the first cooling assembly and the second cooling assembly should not be too large, otherwise the space in the cylinder 8 will be wasted, and the distance between the two should not be greater than 150 mm.

[0066] exist Figure 1 In the illustrated structure, the first cooling assembly and the second cooling assembly are both coil-type cooling pipes. It should be noted that the first improvement in the embodiment of the utility model is to change the configuration of the traditional single cooling assembly into two cooling assemblies without involving the selection of the type of cooling assembly. In other words, in the embodiment of the utility model, other types of cooling assemblies may also be selected.

[0067] For the coil cooling tube, a first refrigerant port is provided at the corresponding end of the end cap, and a second refrigerant port is provided at the opposite end. Figure 1 The first cooling coil 5 shown in the figure is connected back to the first end cap 2 corresponding to the first cooling coil 5 through, for example, a liquid outlet pipe 16 .

[0068] It should be known that the coil cooling tube itself has a relatively large heat exchange area. In some embodiments, the coil cooling tube may also be provided with heat exchange fins on its surface. Figure 1 In the illustrated structure, a cooling fin 6 with a central hole is provided on each turn of the coil-type cooling pipe.

[0069] The cooling fin 6 can also be used as a supporting fin. The cooling fin 6 is welded to the coil-type cooling tube. The lower end of the cooling fin 6 extends downward to be supported on the lower wall of the cylinder 8. In this case, there is no need to set up an independent component for supporting the coil-type cooling tube.

[0070] exist Figure 1 In the illustrated structure, the exhaust gas to be cooled is transported from left to right. Under the condition that the cooling fins 6 are configured, the cooling fins 6 are configured to be conical, and the side where the large end of the cone is located is the intake side of the exhaust gas, so that the exhaust gas to be cooled can fully contact with the cooling fins 6, which is beneficial to the function of the cooling fins 6.

[0071] exist Figure 1 and Figure 4 In the illustrated structure, the side of the cylinder 8 is further provided with a third port 3, which is offset from the side of the first port 1 and can be used as an air inlet. The advantage of the multi-port design is that the gas inlet and outlet of the exhaust gas to be cooled can be selected as needed.

[0072] As mentioned above, the detachability of the head is the basis for the maintainability of the inner wall of the cylinder 8 and other components built into the cylinder 8. The head and the cylinder 8 are detachable based on the flange connection. At the same time, the sealing problem should be considered. Therefore, the first joint surface between the first end head 2 and the first end flange, and the second end joint surface between the second end head 11 and the second end flange are formed with an annular positioning groove, such as Figure 2 The dovetail groove 12 shown in FIG. Accordingly, the axis of the positioning groove is colinear with the axis of the cylinder 8; furthermore, the positioning groove is positioned with a sealing ring, such as Figure 2 O-ring seal shown in .

Claims

1. A tail gas liquid cooling device for cooling semiconductor process waste gas, characterized in that: The tail gas liquid cooling device comprises: A cylinder having a first end flange and a second end flange opposite to the first end flange; A first end seal head is provided with a first end flange to form a first end flange connection structure, and the first end seal head is provided with a first port; A second end seal head is provided with a second end flange to form a second end flange connection structure, and the second end seal head is provided with a second port; A first cooling assembly is located in the cylinder and mounted on the first end cover, and a first pipe group of the first cooling assembly passes through a first through hole provided on the first end cover; and The second cooling assembly is located in the cylinder and installed on the second end cover. The second pipe group of the second cooling assembly passes through the second through hole provided on the second end cover. The second cooling assembly is separated from the first cooling assembly.

2. The exhaust gas liquid cooling device according to claim 1, characterized in that: The first cooling assembly is fixed to the first end cover through the first pipe group; The second cooling assembly is fixed to the second end cover through the second pipe group.

3. The tail gas liquid cooling device according to claim 1 or 2, characterized in that: The first cooling assembly and the second cooling assembly are provided with auxiliary brackets supported on the inner wall of the cylinder.

4. The exhaust gas liquid cooling device according to claim 1, characterized in that: The distance between the first cooling component and the second cooling component is 20mm~150mm.

5. The exhaust gas liquid cooling device according to claim 1, characterized in that: The first cooling assembly and the second cooling assembly are coil-type cooling pipes; Correspondingly, the coil-type cooling pipe is provided with a first refrigerant medium port corresponding to the end seal side thereof, and a second refrigerant medium port is provided at the opposite end, and the second refrigerant medium port is connected back to the end seal of the coil-type cooling pipe.

6. The exhaust gas liquid cooling device according to claim 5, characterized in that: The coil-type cooling tube is provided with heat exchange fins or each coil is provided with a cooling fin with a central hole.

7. The exhaust gas liquid cooling device according to claim 6, characterized in that: The cooling fin is conical, and the side where the large end of the cone is located is the intake side of the exhaust gas.

8. The exhaust gas liquid cooling device according to claim 1, characterized in that: The side surface of the cylinder is also provided with a third opening.

9. The exhaust gas liquid cooling device according to claim 1, characterized in that: The first port and the second port have LF flanges.

10. The exhaust gas liquid cooling device according to claim 1, characterized in that: A first joint surface between the first end seal and the first end flange, and a second joint surface between the second end seal and the second end flange are formed with an annular positioning groove; Accordingly, the axis of the positioning groove is colinear with the axis of the cylinder; The positioning groove is positioned with a sealing ring.

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