Microscope system and microscope

By introducing the function of automatically identifying and switching objective magnification in the microscope system, as well as the combination of auxiliary image acquisition and Z-axis modules, the problem of limiting the depth of field range of traditional microscopes is solved, and the effect of clear observation within the full depth range of the sample to be tested is achieved.

CN222561853UActive Publication Date: 2025-03-04HANGZHOU HIKVISION DIGITAL TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202420648400.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-29
Publication Date
2025-03-04
Estimated Expiration
2034-03-29

AI Technical Summary

Technical Problem

The depth of field range of traditional optical microscopes limits clear observations over the full depth range of the sample to be tested, resulting in clear images of some images with a depth less than the depth range, while blurred images of some images with a depth beyond the range.

Method used

By introducing an objective lens conversion module and an objective lens recognition module in the microscope system, the objective lens magnification is automatically recognized and switched, and through the auxiliary image acquisition module and the Z-axis module, the relative distance between the objective lens and the sample to be tested is adjusted, multiple depth images are collected, and the image processing module is analyzed and fused to generate two-dimensional or three-dimensional images carrying depth information.

Benefits of technology

The problem of mismatch between the depth of field range of the objective lens and the depth of the sample to be tested is overcome, and the imaging quality is improved, so that the sample to be tested can be displayed clearly and completely in the microscope system, reducing the adverse impact of depth of field on imaging quality.

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Abstract

The embodiment of the utility model provides a microscope system and a microscope, and relates to the technical field of microscopes, the microscope system comprises a host control subsystem and a microscope, the microscope comprises a machine head imaging subsystem and a machine body operation control subsystem, and the machine body operation control subsystem comprises a Z-axis module, an objective table and an auxiliary image acquisition module. The machine head imaging subsystem comprises an objective lens, an image acquisition module, an objective lens conversion module and an objective lens identification module; the host control subsystem comprises an image processing module and a display control module; the host control subsystem is in communication connection with the machine head imaging subsystem, and the host control subsystem is in communication connection with the machine body operation control subsystem; the machine head imaging subsystem is installed on the machine body operation control subsystem. The objective table is used for placing a sample to be tested, and under the driving of the Z-axis module, the distance between an objective lens of the machine head imaging subsystem and the objective table changes along the Z axis. According to the embodiment of the invention, the adverse effect of the depth of the traditional optical microscope group on the imaging quality is reduced.
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Description

Technical Field

[0001] The present application relates to the field of microscope technology, and in particular to a microscope system and a microscope. Background Art

[0002] A microscope is an optical instrument composed of one lens or a combination of several lenses, which is used to magnify tiny objects to make them visible to the human eye. Common microscopes include stereo microscopes, tool microscopes, and metallographic microscopes, but the imaging quality of the above microscopes is limited by the depth of the sample to be tested. If the depth is less than the depth of field range of the microscope optical lens group, a clear image with full-frame focus can be obtained; if the depth is greater than the depth of field range of the microscope optical lens group, there will be a problem of clear imaging within the depth of field range and blurred imaging outside the depth of field range, making it impossible to achieve clear observation of the sample to be tested within the full depth range. Utility Model Content

[0003] The purpose of the embodiments of the present application is to provide a microscope system and a microscope to reduce the adverse effects of the shallow depth of field of a conventional optical microscope on the imaging quality. The specific technical solution is as follows:

[0004] In a first aspect, an embodiment of the present application provides a microscope system, including: a host control subsystem and a microscope, the microscope including a head imaging subsystem and a body operation and control subsystem, the body operation and control subsystem including a Z-axis module, a stage, and an auxiliary image acquisition module, the head imaging subsystem including an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module, and the host control subsystem including an image processing module and a display control module;

[0005] The host control subsystem is connected to the nose imaging subsystem in communication, and the host control subsystem is connected to the body operation and control subsystem in communication; the nose imaging subsystem is installed on the body operation and control subsystem;

[0006] The stage is used to place the sample to be tested. Driven by the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis.

[0007] In one embodiment of the present application, the objective lens recognition module includes an electromagnetic wave sensor, or a distance sensor;

[0008] The objective lens is arranged on the objective lens conversion module, and the objective lens identification module is arranged on the objective lens conversion module and is located at one side of the objective lens.

[0009] In one embodiment of the present application, the Z-axis module includes an upper Z-axis module, the upper Z-axis module includes an upper Z motion axis, a first drive circuit and a first control circuit, the upper Z motion axis is connected to the first drive circuit, and the first drive circuit is connected to the first control circuit;

[0010] The upper Z motion axis is arranged in the Z axis plane, and can move in the Z axis plane under the drive of the first drive circuit; the head imaging subsystem is arranged on the upper Z motion axis;

[0011] The upper Z-axis module also includes an upper Z-axis electromagnetic brake submodule, and the upper Z-axis electromagnetic brake submodule is connected to the upper Z motion axis;

[0012] The upper Z-axis electromagnetic brake submodule is used to lock the upper Z-motion axis when the upper Z-motion axis is powered off.

[0013] In one embodiment of the present application, the fuselage operation and control subsystem further includes: a tilt rotation module and a tilt locking module;

[0014] The upper Z-axis module is arranged on the tilting and rotating module, and the upper Z-axis module can rotate in the Z-axis plane under the drive of the tilting and rotating module; the tilting and rotating module is connected to the tilt locking module;

[0015] The tilt locking module is used to lock the tilt rotation module when the microscope system is powered off.

[0016] In one embodiment of the present application, the head imaging subsystem further includes: a zoom module, and the zoom module includes a zoom lens group composed of at least two optical lenses.

[0017] In one embodiment of the present application, the head imaging subsystem further includes a bright field illumination module and a dark field illumination module, and the light emitting sides of the bright field illumination module and the dark field illumination module face the stage;

[0018] The fuselage operation and control subsystem further includes a transmission illumination module, which is disposed in the object stage, and a light emitting side of the transmission illumination module faces the objective lens.

[0019] In one embodiment of the present application, the fuselage operation and control subsystem further includes an XY axis module, a rotation module and a seismic isolation module; the Z axis module includes a lower Z axis module, the lower Z axis module includes a lower Z motion axis, a second drive circuit and a third control circuit, the lower Z motion axis is connected to the second drive circuit, and the second drive circuit is connected to the second control circuit;

[0020] The seismic isolation module is arranged at the supporting position of the fuselage operation and control subsystem;

[0021] The stage is arranged on the XY axis module, the XY axis module is arranged on the rotation module, and the rotation module is arranged on the lower Z motion axis;

[0022] The lower Z motion axis is arranged in the Z axis plane and can move in the vertical direction under the drive of the second driving circuit;

[0023] The object carrier moves along the XY axis plane under the drive of the XY axis module, and the XY axis module rotates within the XY axis plane under the drive of the rotation module.

[0024] In one embodiment of the present application, the system further includes:

[0025] An external control subsystem is communicatively connected with the host control subsystem.

[0026] In a second aspect, an embodiment of the present application provides a microscope, including a head imaging subsystem and a body operation and control subsystem, wherein the body operation and control subsystem includes a Z-axis module, a stage, and an auxiliary image acquisition module, and the head imaging subsystem includes an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module;

[0027] The nose imaging subsystem is installed on the fuselage operation and control subsystem;

[0028] The stage is used to place the sample to be tested. Driven by the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis.

[0029] Beneficial effects of the embodiments of the present application:

[0030] The microscope system and microscope provided by the embodiment of the present application, through the cooperation of the objective lens conversion module and the objective lens recognition module, automatically identify the installation of the objective lens, and can clearly locate the magnification corresponding to each objective lens and directly switch according to the demand, so as to facilitate the switching of the objective lens magnification in the process of collecting images, make the operation simpler, and the system automation and intelligence are higher, and the applicability and convenience of the microscope system are improved. The relative distance between the objective lens and the sample to be tested is obtained by the auxiliary image acquisition module, and the Z axis is continuously adjusted by the Z axis module until the relative distance between the objective lens and the sample to be tested meets the preset distance condition, and multiple depth images are collected at multiple relative distances that meet the preset distance condition, and the multiple depth images are analyzed and fused by the image processing module to obtain a two-dimensional image or three-dimensional modeling carrying the depth information of the sample to be tested, thereby overcoming the problem of the mismatch between the depth of field range of the objective lens and the samples to be tested at different depths, reducing the adverse effects of the shallow depth of field of the traditional optical microscope group on the imaging quality, and then displaying the target image by the display control module, so that the sample to be tested can be clearly and completely displayed by the microscope system, further reducing the adverse effects that the different depths of the sample to be tested may have on the imaging quality.

[0031] Of course, implementing any product or method of the present application does not necessarily require achieving all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application, and for ordinary technicians in this field, other embodiments can also be obtained based on these drawings.

[0033] Figure 1 A schematic diagram of the structure of a first microscope system provided in an embodiment of the present application;

[0034] Figure 2 A schematic diagram of the structure of the first head imaging subsystem provided in the embodiment of the present application;

[0035] Figure 3 A schematic diagram of the structure of a first fuselage operation and control subsystem provided in an embodiment of the present application;

[0036] Figure 4 A schematic diagram of the structure of a second fuselage operation and control subsystem provided in an embodiment of the present application;

[0037] Figure 5 A schematic diagram of the structure of a second head imaging subsystem provided in an embodiment of the present application;

[0038] Figure 6A schematic diagram of the structure of a third nose imaging subsystem and a third body operation and control subsystem provided in an embodiment of the present application;

[0039] Figure 7 A schematic diagram of the structure of a first host control subsystem provided in an embodiment of the present application;

[0040] Figure 8 A schematic diagram of the structure of a fourth fuselage operation and control subsystem provided in an embodiment of the present application;

[0041] Fig. 9 A schematic diagram of the structure of a second host control subsystem provided in an embodiment of the present application;

[0042] Figure 10-1 A schematic diagram of the structure of a second microscope system provided in an embodiment of the present application;

[0043] Figure 10-2 A schematic diagram of the structure of a third microscope system provided in an embodiment of the present application;

[0044] Fig.11 A schematic diagram of the structure of a microscope provided in an embodiment of the present application. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field based on the present application belong to the scope of protection of the present application.

[0046] In the related art, the imaging quality of a microscope is limited by the depth of the sample to be tested. If the depth is less than the depth of field of the microscope optical lens assembly, a full-frame image with clear focus can be obtained; if the depth is greater than the depth of field of the microscope optical lens assembly, the image will be clear within the depth of field and blurred outside the depth of field, making it impossible to achieve clear observation of the sample to be tested within the full depth range. In order to solve this problem, an embodiment of the present application provides a microscope system.

[0047] First, the professional terms that may exist in the embodiments of the present application are explained:

[0048] Microscope (microscope system): An optical instrument consisting of a lens or a combination of lenses, used to magnify tiny objects to a size that can be seen by the naked eye.

[0049] Depth of field: The range of distances in front of and behind the subject measured by the front edge of the lens or other imager that can produce a clear image.

[0050] Focus: The point where parallel light rays converge after being refracted by a lens or reflected by a curved mirror.

[0051] Objective lens: Uses light to form the first image of the object being inspected; each group of lenses is made of one or several lenses made of different materials and with different parameters glued together.

[0052] Bright field: The paths of the incident light beam from the objective lens to the sample and the receiving light beam from the sample to the objective lens overlap, and the objective lens collects the reflected light beam.

[0053] Dark field: The incident light beam from the objective lens to the sample and the receiving light beam from the sample to the objective lens do not overlap, and the objective lens collects the scattered light beam.

[0054] The following describes it in detail through specific embodiments.

[0055] See also Figure 1 , the embodiment of the present application provides a structural schematic diagram of a first microscope system, including: a host control subsystem and a microscope, the microscope includes a head imaging subsystem and a body operation and control subsystem, the body operation and control subsystem includes a Z-axis module, a stage, and an auxiliary image acquisition module, the head imaging subsystem includes an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module, and the host control subsystem includes an image processing module and a display control module;

[0056] The host control subsystem is connected to the nose imaging subsystem in communication, and the host control subsystem is connected to the body operation and control subsystem in communication; the nose imaging subsystem is installed on the body operation and control subsystem;

[0057] The stage is used to place the sample to be tested. Under the drive of the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis;

[0058] The objective lens recognition module is used to identify the installation status of the objective lens on the objective lens conversion module, and when the objective lens has been installed on the objective lens conversion module, send a signal indicating that the objective lens has been installed to the host control subsystem, so that the display control module displays the magnification of the installed objective lens;

[0059] The objective lens conversion module is used to implement the switching of the objective lens according to the objective lens switching control instruction of the host control subsystem.

[0060] The auxiliary image acquisition module is used to obtain the relative distance between the objective lens and the sample to be measured;

[0061] The Z-axis module is used to adjust the Z motion axis according to the movement control instruction issued by the host control subsystem when the relative position does not meet the preset distance condition, until the relative distance between the objective lens and the sample to be measured meets the preset distance condition;

[0062] The image acquisition module is used to acquire multiple depth images of the sample to be tested at multiple relative distances through the objective lens;

[0063] The image processing module is used to perform image analysis and fusion processing on each of the depth images to obtain a target image of the sample to be tested, wherein the target image is a two-dimensional image or a three-dimensional modeling carrying depth information;

[0064] The display control module is used to display the target image.

[0065] The sample to be tested refers to an object that needs to be magnified by a microscope system to be visible to the human eye, such as a tiny object at the micrometer level. The objective lens refers to a lens group consisting of a plurality of lenses close to the sample to be tested, which is used to magnify the sample to be tested. Any lens group that can meet the functional requirements can be selected according to actual needs.

[0066] In one example, the sample to be tested is placed on a stage, and the stage is connected to a motion axis, which can drive the sample to be tested to adjust its position. The material of the stage can be set according to actual needs, for example, it can be glass or other materials with load-bearing capacity. The Z axis is perpendicular to the loading plane of the stage. Generally, when the microscope is placed normally, the loading plane of the stage is parallel to the ground, and the Z axis is perpendicular to the ground.

[0067] The objective lens conversion module supports the installation of at least two objective lenses. Before collecting the image of the sample to be tested, the objective lens recognition module identifies whether the objective lens has been installed on each objective lens conversion module, thereby ensuring that the objective lens can be directly switched with the objective lens conversion module. If the recognition result indicates that there is an objective lens conversion module without an objective lens installed, a signal indicating that it is not installed is sent to the host control subsystem, and the display control module will not display the magnification corresponding to the uninstalled objective lens. Exemplarily, the display control module will display a prompt indicating which objective lens conversion module has no objective lens installed, prompting the staff to install the objective lens in time.

[0068] If the recognition result indicates that each objective lens conversion module has been installed with an objective lens, a signal indicating that it has been installed is sent to the host control subsystem, and the display control module will display the magnification of the objective lens installed on each objective lens conversion module to provide a magnification selection for objective lens switching. If the recognition result is inconsistent with the previous recognition result, the display control module is made to delete the magnification display of the objective lens that is not currently installed / has been removed.

[0069] In the process of collecting the image of the sample to be tested, according to the actual required objective lens magnification, the host control subsystem is used to issue an objective lens switching instruction, and the objective lens of different magnifications is switched through the objective lens conversion module. Exemplarily, if the objective lens conversion module has a control circuit and a drive circuit, the objective lens can be electrically switched through the objective lens conversion module; if the objective lens conversion module does not have a control circuit and a drive circuit, the objective lens can be switched by manually switching the objective lens conversion module.

[0070] Considering that the depth and size of the sample to be tested and the degree of matching with the depth of field range of the objective lens will affect the imaging quality, before acquiring the image of the sample to be tested, the relative distance between the objective lens and the sample to be tested is first acquired through the auxiliary image acquisition module of the fuselage operation and control subsystem, and it is determined whether the relative distance meets the preset distance condition. Specifically, the preset distance condition can be pre-set according to the depth range and size range of the sample to be tested, indicating that when the relative distance between the objective lens and the sample to be tested meets the preset distance range in the preset distance condition, the microscope system can acquire a relatively complete image of the sample to be tested.

[0071] If the currently acquired relative distance between the objective lens and the sample to be tested does not meet the preset distance condition, the host control subsystem sends a movement control instruction to the Z-axis module in the fuselage operation control subsystem. The Z-axis module adjusts the Z motion axis according to the movement control instruction so that the relative distance between the objective lens and the sample to be tested meets the preset distance condition. Specifically, if the currently acquired relative distance between the objective lens and the sample to be tested is less than the preset distance range, the Z motion axis is adjusted so that the stage drives the sample to be tested to move in a direction away from the objective lens, otherwise, the sample to be tested is adjusted to move in a direction close to the objective lens. Until the relative distance between the objective lens and the sample to be tested meets the preset distance condition, it means that a relatively complete image of the sample to be tested can be collected at present.

[0072] In this case, the image acquisition module in the head imaging subsystem collects a depth image of the sample to be tested after being magnified by the objective lens. Specifically, by continuously adjusting the Z motion axis, the relative distance between the objective lens and the sample to be tested is continuously changed, and multiple depth images of the sample to be tested are collected at multiple relative distances during the relative distance change. The image processing module in the host control subsystem performs image analysis and fusion processing on each depth image, and the target image of the sample to be tested obtained is the complete image of the sample to be tested. Specifically, the target image can be a two-dimensional image carrying the depth information of the sample to be tested, or it can be a three-dimensional image or three-dimensional model restored based on the depth information and the two-dimensional image.

[0073] Exemplarily, the image acquisition module may be any photodetector such as a CMOS (Complementary Metal Oxide Semiconductor) sensor, a CCD (Charge Coupled Device) sensor, or the like.

[0074] After obtaining the target image of the sample to be tested, the target image is displayed through the display control module in the host control subsystem so that the staff can obtain a clear and complete image of the sample to be tested and perform further processing required for the study of the target image or the sample to be tested.

[0075] As can be seen from the above, the microscope system provided in the embodiment of the present application can automatically identify the installation status of the objective lens through the cooperation of the objective lens conversion module and the objective lens recognition module, and can clearly locate the magnification corresponding to each objective lens and directly switch it according to needs, thereby facilitating the switching of the objective lens magnification during the image acquisition process, making the operation simpler, the system automation and intelligence higher, and improving the applicability and convenience of the microscope system. The relative distance between the objective lens and the sample to be tested is acquired through the auxiliary image acquisition module, and the Z motion axis is continuously adjusted through the Z-axis module until the relative distance between the objective lens and the sample to be tested meets the preset distance condition, multiple depth images are acquired at multiple relative distances that meet the preset distance conditions, and the multiple depth images are subjected to image analysis and fusion processing through the image processing module to obtain a two-dimensional image or three-dimensional modeling carrying the depth information of the sample to be tested, thereby overcoming the problem of possible mismatch between the depth of field range of the objective lens and the samples to be tested at different depths, reducing the adverse effects of the shallow depth of field of the traditional optical microscope group on the imaging quality, and then displaying the target image through the display control module, so that the sample to be tested can be clearly and completely displayed through the microscope system, further reducing the adverse effects of different depths of the samples to be tested on the imaging quality.

[0076] In one embodiment of the present application, Figure 2 As shown, a schematic diagram of the structure of a first head imaging subsystem is provided, wherein the objective lens recognition module includes an electromagnetic wave sensor or a distance sensor;

[0077] The objective lens is arranged on the objective lens conversion module, and the objective lens identification module is arranged on the objective lens conversion module and is located at one side of the objective lens;

[0078] The electromagnetic wave sensor is used to emit electromagnetic waves to the position where the objective lens is installed on the objective lens conversion module, and determine that the objective lens has been installed on the objective lens conversion module when a reflection signal or a scattered signal is collected;

[0079] The distance sensor is used to obtain a test distance between the distance sensor and the objective lens, and when the test distance matches a preset calibration distance, it is determined that the objective lens conversion module has been installed with the objective lens.

[0080] When the objective lens recognition module includes an electromagnetic wave sensor, in the process of determining whether the objective lens is installed on the objective lens conversion module, the electromagnetic wave sensor emits electromagnetic waves to the position where the objective lens is installed on the objective lens conversion module. If the reflected or scattered signal can be collected from the surface of the objective lens, it indicates that the objective lens has been installed at the position; if the reflected or scattered signal cannot be collected, it indicates that the objective lens has not been installed at the position and the corresponding objective lens conversion module. Specifically, the electromagnetic wave sensor can be an electromagnetic wave sensor of any band such as visible light, infrared light, ultraviolet light, microwave, etc.

[0081] When the objective lens recognition module includes a distance sensor, in the process of determining whether the objective lens is installed on the objective lens conversion module, the distance sensor obtains a test distance between the distance sensor and the objective lens, and if the test distance matches a preset calibration distance, it indicates that the objective lens conversion module has been installed with the objective lens. Specifically, the preset calibration distance indicates the distance between the distance sensor and the position where the objective lens is installed on each objective lens conversion module. If the test distance does not match the preset calibration distance, it indicates that the objective lens conversion module has not been installed with the objective lens.

[0082] As can be seen from the above, in the microscope system provided in the embodiment of the present application, the objective lens recognition system detects whether the objective lens is installed through an electromagnetic wave sensor or a distance sensor, thereby improving the accuracy of the detection.

[0083] In one embodiment of the present application, Figure 3 As shown, a structural schematic diagram of a first fuselage operation and control subsystem is provided, wherein the Z-axis module includes an upper Z-axis module, the upper Z-axis module includes an upper Z motion axis, a first drive circuit and a first control circuit, the upper Z motion axis is connected to the first drive circuit, and the first drive circuit is connected to the first control circuit;

[0084] The upper Z motion axis is arranged in the Z axis plane, and can move in the Z axis plane under the drive of the first drive circuit; the head imaging subsystem is arranged on the upper Z motion axis;

[0085] The upper Z-axis module also includes an upper Z-axis electromagnetic brake submodule, and the upper Z-axis electromagnetic brake submodule is connected to the upper Z motion axis;

[0086] The first control circuit is used to drive the upper Z motion axis to move in the Z-axis plane through the first drive circuit according to the movement control instruction issued by the host control subsystem, until the head imaging subsystem moves to a specified position, wherein the specified position indicates that the relative distance between the objective lens and the sample to be measured meets a preset distance condition;

[0087] The upper Z-axis electromagnetic brake submodule is used to lock the upper Z-motion axis when the upper Z-motion axis is powered off.

[0088] The Z motion axis includes an upper Z axis and a lower Z axis, the upper Z motion axis refers to the Z motion axis located above the stage, and the lower Z motion axis refers to the Z motion axis located below the stage. In the case where the relative distance between the sample to be measured and the objective lens does not meet the preset distance condition, through the movement control instruction issued by the host control subsystem, the first control circuit drives the upper Z motion axis to move in the Z axis plane through the first drive circuit until the head imaging subsystem moves to a specified position, and the specified position represents a position where the relative distance between the objective lens and the sample to be measured can meet the preset distance condition.

[0089] Initially, the upper Z motion axis is in the vertical direction, and the first drive circuit drives the upper Z motion axis to move up and down along the Z axis. When the inclination angle of the upper Z motion axis and the head imaging subsystem changes, the upper Z motion axis is no longer in the vertical direction, and it moves up and down along the direction of the tilted upper Z motion axis.

[0090] In one example, the first driving circuit and the second control circuit support the movement of the upper Z motion axis in a step-by-step and linked manner, and feed back the current position coordinates of the sample to be tested to the host control subsystem in real time.

[0091] When the upper Z axis is powered off, the upper Z axis electromagnetic brake submodule locks the upper Z axis to prevent the upper Z axis from falling and causing damage to the sample to be tested.

[0092] As can be seen from the above, the microscope system provided in the embodiment of the present application moves the upper Z motion axis through the upper Z-axis module, and moves the head imaging subsystem to a specified position where the relative distance between the objective lens and the sample to be measured meets the preset distance condition, thereby realizing automatic movement of the head imaging subsystem; when the upper Z motion axis is powered off, the upper Z-axis electromagnetic braking submodule locks the upper Z motion axis, thereby avoiding damage to the sample to be measured that may be caused by the upper Z motion axis falling.

[0093] In one embodiment of the present application, Figure 4 As shown, a structural schematic diagram of a second fuselage operation and control subsystem is provided, wherein the fuselage operation and control subsystem further comprises: a tilt rotation module and a tilt locking module;

[0094] The upper Z-axis module is arranged on the tilting and rotating module, and the upper Z-axis module can rotate in the Z-axis plane under the drive of the tilting and rotating module; the tilting and rotating module is connected to the tilt locking module;

[0095] The tilt rotation module is used to drive the upper Z-axis module and the head imaging subsystem to rotate in the Z-axis plane under the rotation control command issued by the host control subsystem, and send the current angle information of the upper Z-axis module and the head imaging subsystem to the host control subsystem through the angle sensor;

[0096] The tilt locking module is used to control the brake switch by current when the microscope system is powered off, so as to activate the self-locking function and lock the tilt rotation module.

[0097] During the process of acquiring the image of the sample to be tested, the host control subsystem issues a rotation control instruction, and the tilt rotation module drives the upper Z-axis module and the head imaging subsystem to rotate in the Z-axis plane through the tilt rotation axis, and sends the current angle information to the host control subsystem in real time through the angle sensor, so that the host control subsystem can determine whether the angle of the upper Z-axis module and the head imaging subsystem meets the preset angle required for acquiring the image of the sample to be tested, and accordingly, the tilt rotation module drives the upper Z-axis module and the head imaging subsystem to rotate until the preset angle required for acquiring the image of the sample to be tested is met.

[0098] In one example, the tilt rotation module supports rotation from -90 degrees to 90 degrees.

[0099] The tilt locking module is a rotating electromagnetic brake device. The brake switch is controlled by current. The self-locking function is disabled when power is on, ensuring that the tilt rotation module can drive the upper Z-axis module and the head imaging subsystem to rotate. When power is off, the self-locking function is activated to lock the tilt rotation module, so that the tilt rotation axis cannot rotate and is in a locked state.

[0100] As can be seen from the above, in the microscope system provided by the embodiment of the present application, the tilt rotation module drives the upper Z-axis module and the head imaging subsystem to rotate in the vertical direction through the tilt rotation axis to meet the angle required for collecting the image of the sample to be tested. The tilt locking module can activate the self-locking function to lock the tilt rotation module when the power is off, so as to prevent the tilt axis from falling due to incorrect operation and damaging other parts of the microscope system or the sample to be tested.

[0101] In one embodiment of the present application, Figure 5 As shown, a schematic diagram of the structure of a second head imaging subsystem is provided, wherein the head imaging subsystem further comprises: a zoom module, wherein the zoom module comprises a zoom lens group composed of at least two optical lenses;

[0102] The zoom module is used to adjust the distance between each of the optical lenses by driving the mechanical structure to move according to the zoom control instruction issued by the host control subsystem, so as to achieve discrete or continuous magnification change of the effective focal length of the zoom lens group.

[0103] The zoom module includes a zoom lens group composed of two or more optical lenses, and is an optical system that can achieve a zoom ratio greater than 1. In the process of collecting the image of the sample to be tested, the host control subsystem sends a zoom control command according to actual needs, and the zoom module drives the mechanical structure of the motor in the zoom module to move the zoom lens group according to the zoom control command, adjust the distance between the optical lenses in the zoom lens group, and change the effective focal length of the zoom lens group.

[0104] The specific head imaging subsystem combines the zoom module with the objective lens to achieve discrete or continuous magnification changes.

[0105] As can be seen from the above, the microscope system provided in the embodiment of the present application, by combining the zoom module with the objective lens, uses the zoom module to discretely or continuously change the magnification, thereby achieving a magnification variation range with a magnification ratio greater than 1, thereby providing the applicability of the microscope system.

[0106] In one embodiment of the present application, Figure 6 As shown, a schematic diagram of the structure of a third nose imaging subsystem and a third body operation and control subsystem is provided, wherein the nose imaging subsystem further comprises a bright field lighting module and a dark field lighting module; the light emitting sides of the bright field lighting module and the dark field lighting module face the stage;

[0107] The fuselage operation and control subsystem further includes a transmission illumination module, which is disposed in the stage, and the light emitting side of the transmission illumination module faces the objective lens;

[0108] The bright field illumination module is used to provide a light source for bright field illumination, wherein the light source includes at least one central light source and at least two areas of bright field sheet light sources distributed around the central light source, or only includes at least two areas of bright field sheet light sources;

[0109] The dark field lighting module is used to provide a light source for dark field lighting, and the light source includes at least two areas of dark field sheet light sources;

[0110] The transmission illumination module is used to provide a light source for illuminating the sample to be tested from the bottom.

[0111] Brightfield illumination refers to the illumination condition in which most of the light passes through the sample to be tested directly into the objective lens, resulting in a bright field of view. Darkfield illumination refers to the illumination condition in which a strong and narrow light beam is used to illuminate the sample to be tested, preventing most of the light from directly entering the objective lens and allowing the particles in the sample to scatter light into the objective lens, resulting in a darker field of view.

[0112] The bright field illumination module may include a central light source and bright field sheet light sources distributed around the central light source, or may not have a central light source and only be composed of bright field sheet light sources around the central light source, or may include at least two central light sources and bright field sheet light sources distributed around each central light source. The bright field sheet light source is divided into at least two areas. Specifically, the bright field illumination module may be an LED (light-emitting diode) light source, or may be other light-emitting elements.

[0113] Exemplarily, the bright field lighting module also includes a control circuit and a drive circuit for controlling the switching and brightness of the light source.

[0114] The dark field light source is divided into at least two areas, which can be an LED light source or other light-emitting elements. Exemplarily, it also includes a control circuit and a drive circuit for controlling the light source switch and brightness.

[0115] The light source of the bright field illumination module, the dark field illumination module or the transmitted illumination module is irradiated onto the sample to be tested through the optical lens group. After being reflected or scattered by the sample to be tested, the reflected light or scattered light carrying the information of the sample to be tested is imaged on the image acquisition module in the imaging subsystem of the machine head after passing through the objective lens and the zoom module, thereby realizing image acquisition of the sample to be tested.

[0116] As can be seen from the above, the microscope system provided in the embodiment of the present application realizes illumination of the sample to be tested through a bright field illumination module, a dark field illumination module, or a transmission illumination module, and provides different illumination conditions for different types of samples to be tested.

[0117] In one embodiment of the present application, Figure 7 As shown, a structural schematic diagram of a host control subsystem is provided, and the host control subsystem also includes a lighting control module;

[0118] The lighting control module is used to issue lighting control instructions so that the bright field lighting module controls the lighting switch and brightness adjustment of the bright field sheet light source area corresponding to the bright field sheet light source, and / or the dark field lighting module controls the lighting switch and brightness adjustment of the dark field sheet light source area corresponding to the dark field sheet light source, or the lighting switch and brightness adjustment of the transmitted lighting.

[0119] The lighting control module can issue lighting control instructions to control the lighting switch and brightness adjustment of a single area or multiple areas of the bright field sheet light source area. The multiple areas can be adjacent areas or non-adjacent areas. The lighting switch and brightness adjustment can be controlled according to actual needs. When the lighting switches of all bright field sheet light source areas are turned on, the sample to be tested is in bright field epi-illumination.

[0120] The lighting control module can issue lighting control instructions to control the lighting switch and brightness adjustment of a single area or multiple areas of the dark field sheet light source area. The multiple areas can be adjacent areas or non-adjacent areas. The lighting switch and brightness adjustment can be controlled according to actual needs. When the lighting switches of all dark field sheet light source areas are turned on, the sample to be tested is in dark field illumination.

[0121] The lighting control module can also issue lighting control instructions, switch the lighting on and off, and adjust the brightness of the transmitted lighting.

[0122] The lighting control module can also issue lighting control instructions to control the mixed lighting of any two types of lighting, namely, bright field illumination, dark field illumination, and transmitted illumination. When the lighting switches of all bright field illumination areas and dark field illumination areas are turned on, the sample to be tested is in a mixed lighting of bright field illumination and dark field illumination. At this time, the lighting intensity ratio of the mixed lighting of bright field illumination and dark field illumination can be adjusted according to demand.

[0123] As can be seen from the above, the microscope system provided in the embodiment of the present application controls bright field illumination, dark field illumination and transmitted illumination through the illumination control module, thereby providing different illumination conditions for different types of samples to be tested.

[0124] In one embodiment of the present application, Figure 8 As shown, a structural schematic diagram of a fourth fuselage operation and control subsystem is provided, wherein the fuselage operation and control subsystem further includes an XY axis module, a rotation module and a seismic isolation module; the Z axis module includes a lower Z axis module, the lower Z axis module includes a lower Z motion axis, a second drive circuit and a third control circuit, the lower Z motion axis is connected to the second drive circuit, and the second drive circuit is connected to the second control circuit;

[0125] The seismic isolation module is arranged at the supporting position of the fuselage operation and control subsystem;

[0126] The stage is arranged on the XY axis module, the XY axis module is arranged on the rotation module, and the rotation module is arranged on the lower Z motion axis;

[0127] The lower Z motion axis is arranged in the Z axis plane and can move in the vertical direction under the drive of the second driving circuit;

[0128] The stage moves along the XY axis plane under the drive of the XY axis module, and the XY axis module rotates within the XY axis plane under the drive of the rotation module;

[0129] The seismic isolation module is used to isolate the vibration of the platform where the microscope system is located;

[0130] The XY axis module is used to move the XY motion axis along the XY axis plane according to the movement control instruction issued by the host control subsystem until the stage and the sample to be tested move to the specified position;

[0131] The rotating module is used to rotate the stage until the sample to be tested is at a preset angle.

[0132] The second control circuit is used to drive the lower Z motion axis to move in the vertical direction through the second drive circuit according to the movement control instruction issued by the host control subsystem until the stage and the sample to be tested move to the specified position.

[0133] The XY axis module also includes a drive circuit and a control circuit, which are used to receive the mobile control instructions issued by the host control subsystem, realize the left and right forward and backward movement of the XY axis, and support the linkage of the XY axis to move the stage and the sample to be tested to the specified position. The specified position indicates the position where the relative distance between the objective lens and the sample to be tested meets the preset distance condition. And the current position coordinates are fed back to the host control subsystem in real time. The XY axis is a general term for the X axis and the Y axis. The X axis and the Y axis are perpendicular to each other, and the X axis and the Y axis are parallel to the loading plane of the stage. Under normal circumstances, when the microscope is placed normally, the loading plane of the stage is parallel to the ground, and the XY axis is parallel to the ground at this time.

[0134] The rotation module is a θ rotation module, which is used to rotate the stage so that the sample to be tested is at a preset angle that meets the requirements. For example, when the sample to be tested is upside down, the stage is rotated so that the sample to be tested is in the correct direction. Specifically, the rotation can be achieved according to the rotation control command issued by the host control subsystem, or it can be manually rotated to the required angle.

[0135] The seismic isolation module isolates the vibration of the platform for the microscope system, ensuring that the imaging is not affected by the vibration of the platform and does not cause jitter.

[0136] The Z motion axis includes an upper Z axis and a lower Z axis, the upper Z motion axis refers to the Z motion axis located above the stage, and the lower Z motion axis refers to the Z motion axis located below the stage. In the case where the relative distance between the sample to be tested and the objective lens does not meet the preset distance condition, through the movement control instruction issued by the host control subsystem, the second control circuit drives the lower Z motion axis to move up and down in the vertical direction through the second drive circuit until the stage and the sample to be tested move to a specified position, and the specified position represents a position where the relative distance between the objective lens and the sample to be tested can meet the preset distance condition.

[0137] Initially, the upper Z axis and the lower Z axis are both in the vertical direction, and the X axis, the Y axis and the upper Z axis / lower Z axis represent three mutually perpendicular directions, forming a three-dimensional coordinate system. The XY axis module drives the stage and the sample to be tested to move along the XY axis. When the tilt rotation module drives the module and the head imaging subsystem to rotate in the Z axis plane, the upper Z axis is no longer in the vertical direction; after the rotation module drives the XY axis module, the stage and the sample to be tested to rotate, the X axis and the Y axis still maintain a perpendicular relationship, and the three-way perpendicular relationship with the lower Z axis is still maintained, but the XY axis is no longer perpendicular to the upper Z axis, the stage moves along the plane where the XY axis is located, and the XY axis module rotates in the XY axis plane.

[0138] In one example, the second driving circuit and the second control circuit support the movement of the lower Z motion axis in a step-by-step and linked manner, and feed back the current position coordinates of the sample to be tested to the host control subsystem in real time.

[0139] As can be seen from the above, the microscope system provided in the embodiment of the present application utilizes the XY axis module to drive the sample to be tested to move in the XY axis direction until the sample to be tested moves to the specified position; the rotation module drives the sample to be tested to rotate to a preset angle that meets the requirements, thereby realizing the free movement of the sample to be tested; the lower Z motion axis is moved up and down by the lower Z axis module, so that the stage and the sample to be tested are moved to a specified position where the relative distance between the objective lens and the sample to be tested meets the preset distance condition, thereby realizing the automatic movement of the stage and the sample to be tested, and the seismic isolation module isolates the platform vibration, thereby avoiding the adverse effects of the platform vibration on the imaging and improving the imaging quality.

[0140] In one embodiment of the present application, Fig. 9 As shown, a schematic diagram of the structure of a second host control subsystem is provided, wherein the image processing module includes an image pre-processing sub-module and an image post-processing sub-module;

[0141] The image preprocessing submodule is used to perform image preprocessing on each of the depth images;

[0142] The image post-processing submodule is used to perform algorithm fusion and parallel data calculation on each of the depth images to obtain the target image of the sample to be tested.

[0143] The image preprocessing submodule performs image preprocessing, including simple image processing such as format conversion, color, resolution cropping, noise processing, image enhancement, and shadow correction on the depth image. Specifically, it can be implemented in the core processor (CPU) of the microscope system or in the image processing integrated circuit existing in the microscope system.

[0144] The image post-processing submodule performs algorithm fusion and parallel data calculation on each depth image after pre-processing, including complex image processing such as optical shadow enhancement, 3D (three-dimensional) synthesis, reflection elimination, dark field halo elimination, high dynamic range imaging, etc., and fuses each depth image to obtain a target image which is a complete two-dimensional image, three-dimensional image or three-dimensional model of the sample to be tested.

[0145] As can be seen from the above, the microscope system provided in the embodiment of the present application performs algorithm fusion and parallel data calculation after preprocessing the depth image, thereby further improving the image quality.

[0146] In one embodiment of the present application, Figure 10-1 and Figure 10-2 As shown, schematic diagrams of the structures of the second and third microscope systems are provided.

[0147] The nose imaging subsystem is suspended on the body operation and control subsystem through a mechanical structure. The body operation and control subsystem is used to provide a stable base for the nose imaging subsystem so that the nose imaging subsystem can perform stable imaging. In addition, the microscope system also includes a display subsystem, an external control subsystem (which may include but is not limited to a handle, a console, etc., with corresponding buttons for quick function implementation), and a keyboard and mouse subsystem (including a keyboard and a mouse). Other subsystems are connected to the host control subsystem through corresponding interfaces. The user controls the host control subsystem to issue instructions to the nose imaging subsystem and the body operation and control subsystem through the external control subsystem and the keyboard and mouse subsystem on the operation interface of the display subsystem. The information fed back by the nose imaging subsystem and the body operation and control subsystem to the host control subsystem will also be displayed on the interface of the display subsystem.

[0148] The display subsystem may include a color display screen, which may or may not have a touch screen function, and is used to display an operation interface and an image of a sample to be tested on the display screen.

[0149] In one embodiment of the present application, the host control subsystem further includes a storage module for storing client programs, calibration data, temporary data generated during operation, images collected from samples to be tested, etc. The storage module may specifically include a read-only memory (ROM), a random access memory (RAM), and may also include a non-volatile memory (NVM), such as at least one disk storage.

[0150] The host control subsystem also includes an illumination module interface, a head module interface, a body module interface, an image acquisition interface, a display module interface, and a peripheral interface. The illumination module interface is used to power and control the bright field illumination module and the dark field illumination module; the head module interface is used to power and control the control mainboard in the head imaging subsystem, and the mainboard in the head imaging subsystem can control the zoom module, the objective lens recognition module, the objective lens conversion module, etc. The body module interface is used to power and control the control mainboard in the body operation and control subsystem, and the mainboard in the body operation and control subsystem can control the upper Z-axis submodule, the upper Z-axis electromagnetic brake submodule, the auxiliary image acquisition module, the XY-axis module, the rotation module, the lower Z-axis module, the transmission illumination module, the tilt rotation module, the tilt locking module, etc. The image acquisition interface is used to power and control the image acquisition module in the head imaging subsystem. The image acquisition module can also transmit image data to the host control subsystem through this interface, which can be a network port, a USB (Universal Serial Bus) interface, or a camera link (the interface between a digital camera and an image acquisition card) interface. The display module interface is used to connect with the display control module, and transmit the data to be displayed to the display control module for display. The peripheral interface is used to connect with the external control subsystem and the keyboard and mouse subsystem. After the user operates the operation interface, the corresponding instructions are transmitted to the host control subsystem.

[0151] The microscope system provided in the embodiment of the present application can obtain a clearly focused image of the sample under test within the full depth range, integrating a visual microscope, a tool microscope and a metallographic microscope, effectively solving the problem of small depth of field and unclear imaging of existing traditional microscopes. In addition, the highly automated design has an operation and control system that can automatically control magnification switching, sample movement, focus, etc., which optimizes the user experience and reduces the complexity of use.

[0152] In one embodiment of the present application, a schematic diagram of the structure of a microscope is provided, such as Fig.11 As shown, the fuselage operation and control subsystem includes a Z-axis module, a stage, and an auxiliary image acquisition module, and the head imaging subsystem includes an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module;

[0153] The nose imaging subsystem is installed on the fuselage operation and control subsystem;

[0154] The stage is used to place the sample to be tested. Under the drive of the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis;

[0155] The objective lens conversion module is used to realize the switching of the objective lens;

[0156] The objective lens recognition module is used to recognize the installation status of the objective lens on the objective lens conversion module;

[0157] The auxiliary image acquisition module is used to obtain the relative distance between the objective lens and the sample to be measured;

[0158] The Z-axis module is used to adjust the Z motion axis until the relative distance between the objective lens and the sample to be measured meets a preset distance condition;

[0159] The image acquisition module is used to acquire multiple depth images of the sample to be tested at multiple relative distances through the objective lens.

[0160] In one embodiment of the present application, a use process of a microscope is provided, a sample to be tested is placed on the stage, the operating software of the microscope system is opened, the software interface is displayed in the display subsystem, the corresponding function on the software interface is clicked through the external control subsystem or the keyboard and mouse subsystem, and the host control subsystem sends a control instruction to the head imaging subsystem according to the functional requirements to control the zoom module to zoom, control the objective lens conversion module to switch the objective lens, control the image acquisition module to collect the original image (depth image), and control the lighting switch and brightness adjustment of the bright field lighting module and the dark field lighting module. The host control subsystem also sends instructions to the fuselage operation control subsystem to control the upper Z-axis submodule to move to the specified position according to the instruction, control the XY-axis module to move to the specified position according to the instruction, control the lower Z-axis module to move to the instruction position according to the instruction, control the lighting switch and brightness adjustment of the transmission lighting module, and control the auxiliary image acquisition module to collect images. At the same time, the image of the image acquisition module in the head imaging subsystem is transmitted to the host control subsystem, the objective lens recognition module transmits the information whether the objective lens is installed to the host control subsystem, and the objective lens conversion module transmits the objective lens position currently combined with the zoom module to the host control subsystem. In the fuselage operation and control subsystem, the upper Z-axis submodule, XY-axis module, rotation module, lower Z-axis module, and tilt rotation module transmit their respective position information to the host control subsystem, and the auxiliary image acquisition module transmits the acquired image to the host control subsystem. The host control subsystem processes the various types of information received through software and algorithms to obtain the target image of the sample to be tested, and displays it to the user in the display subsystem through the display control module, so that the user can perform microscopic magnification imaging analysis of the sample to be tested through the microscope system.

[0161] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0162] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for some system embodiments, since they are basically similar to the previous embodiments, the description is relatively simple, and the relevant parts can be referred to the partial description of the previous embodiments.

[0163] The above description is only a preferred embodiment of the present application and is not intended to limit the protection scope of the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application are included in the protection scope of the present application.

Claims

1. A microscope system, characterized in that: include: A host control subsystem and a microscope, the microscope comprising a head imaging subsystem and a body operation and control subsystem, the body operation and control subsystem comprising a Z-axis module, a stage, and an auxiliary image acquisition module, the head imaging subsystem comprising an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module, and the host control subsystem comprising an image processing module and a display control module; The host control subsystem is connected to the nose imaging subsystem in communication, and the host control subsystem is connected to the body operation and control subsystem in communication; the nose imaging subsystem is installed on the body operation and control subsystem; The stage is used to place the sample to be tested. Driven by the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis.

2. The system according to claim 1, characterized in that The objective lens recognition module includes an electromagnetic wave sensor or a distance sensor; The objective lens is arranged on the objective lens conversion module, and the objective lens identification module is arranged on the objective lens conversion module and is located at one side of the objective lens.

3. The system according to claim 1, characterized in that The Z-axis module includes an upper Z-axis module, the upper Z-axis module includes an upper Z motion axis, a first drive circuit and a first control circuit, the upper Z motion axis is connected to the first drive circuit, and the first drive circuit is connected to the first control circuit; The upper Z motion axis is arranged in the Z axis plane and can move in the Z axis plane under the drive of the first drive circuit; The head imaging subsystem is arranged on the upper Z motion axis; The upper Z-axis module also includes an upper Z-axis electromagnetic brake submodule, and the upper Z-axis electromagnetic brake submodule is connected to the upper Z motion axis; The upper Z-axis electromagnetic brake submodule is used to lock the upper Z-motion axis when the upper Z-motion axis is powered off.

4. The system according to claim 3, characterized in that The fuselage operation and control subsystem also includes: a tilt rotation module and a tilt locking module; The upper Z-axis module is arranged on the tilting and rotating module, and the upper Z-axis module can rotate in the Z-axis plane under the drive of the tilting and rotating module; the tilting and rotating module is connected to the tilt locking module; The tilt locking module is used to lock the tilt rotation module when the microscope system is powered off.

5. The system according to claim 1, characterized in that The head imaging subsystem also includes: a zoom module, and the zoom module includes a zoom lens group composed of at least two optical lenses.

6. The system according to claim 1, characterized in that The head imaging subsystem further includes a bright field lighting module and a dark field lighting module, wherein the light emitting sides of the bright field lighting module and the dark field lighting module face the stage; The fuselage operation and control subsystem further includes a transmission illumination module, which is disposed in the object stage, and a light emitting side of the transmission illumination module faces the objective lens.

7. The system according to claim 3, characterized in that The fuselage operation and control subsystem further includes an XY axis module, a rotation module and a seismic isolation module; the Z axis module includes a lower Z axis module, the lower Z axis module includes a lower Z motion axis, a second drive circuit and a third control circuit, the lower Z motion axis is connected to the second drive circuit, and the second drive circuit is connected to the second control circuit; The seismic isolation module is arranged at the supporting position of the fuselage operation and control subsystem; The stage is arranged on the XY axis module, the XY axis module is arranged on the rotation module, and the rotation module is arranged on the lower Z motion axis; The lower Z motion axis is arranged in the Z axis plane and can move in the vertical direction under the drive of the second driving circuit; The object carrier moves along the XY axis plane under the drive of the XY axis module, and the XY axis module rotates within the XY axis plane under the drive of the rotation module.

8. The system according to claim 1, characterized in that The system further comprises: An external control subsystem is communicatively connected with the host control subsystem.

9. A microscope, characterized in that: It includes a nose imaging subsystem and a body operation and control subsystem, wherein the body operation and control subsystem includes a Z-axis module, a stage, and an auxiliary image acquisition module, and the nose imaging subsystem includes an objective lens, an image acquisition module, an objective lens conversion module, and an objective lens recognition module; The nose imaging subsystem is installed on the fuselage operation and control subsystem; The stage is used to place the sample to be tested. Driven by the Z-axis module, the distance between the objective lens of the head imaging subsystem and the stage changes along the Z-axis.

10. The microscope according to claim 9, characterized in that The Z-axis module includes an upper Z-axis module, the upper Z-axis module includes an upper Z motion axis, a first drive circuit and a first control circuit, the upper Z motion axis is connected to the first drive circuit, and the first drive circuit is connected to the first control circuit; The upper Z motion axis is arranged in the Z axis plane and can move in the Z axis plane under the drive of the first drive circuit; The head imaging subsystem is arranged on the upper Z motion axis; The upper Z-axis module also includes an upper Z-axis electromagnetic brake submodule, and the upper Z-axis electromagnetic brake submodule is connected to the upper Z motion axis; The upper Z-axis electromagnetic brake submodule is used to lock the upper Z-motion axis when the upper Z-motion axis is powered off.

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