Ejector pin clamp shaped like Chinese character'mi '

Abstract

The utility model relates to the technical field of semiconductor manufacturing, in particular to a star-shaped ejector pin clamp which comprises a cylindrical clamp body, an ejector pin seat is arranged at one end of the clamp body, the ejector pin seat is of a trumpet-shaped structure and is evenly divided into eight clamping petals, only two clamping holes are formed between every two clamping petals, and the clamping petals are arranged in the clamping holes. The clamping holes are distributed in a star shape; according to the utility model, the ejector pin seat is fastened through the ejector pin fastening ring and the fastening ring fixing nut so as to clamp the ejector pin, and the ejector pin seat is provided with the *-shaped clamping hole sites, so that the hole sites are distributed more uniformly and can be suitable for chips with larger sizes; and the ejector pin fastening ring is clamped in a 360-degree surrounding manner, so that the fastening force in each clamping hole is uniform, the flatness of the ejector pins in the moving process is ensured, and the coplanarity between the ejector pins can be effectively kept.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a cross-shaped ejector clamp. Background Art

[0002] In the process flow of packaged chip production, ejector pins are needed to assist chip demolding and separate the chip from the support film on its surface. Due to the miniaturization of chip design, the chip is becoming thinner and thinner, and multiple ejector pins are usually set on the ejector pin seat to distribute the stress of the ejector pin on the chip to prevent the chip from breaking due to excessive local stress concentration.

[0003] Existing ejector pin fixtures are usually arranged in a cross shape, which can accommodate a limited number of ejector pins and are relatively dispersed. When faced with larger chips, it is difficult to meet the demolding requirements of large-size chips due to insufficient holes. Due to the cross-shaped design, the distribution between the ejector pins is not uniform, resulting in poor demolding effect. The stress is relatively concentrated, which can easily lead to cracking problems in large-size thin chips. Utility Model Content

[0004] The utility model aims to provide a cross-shaped ejector fixture which can solve the problems of insufficient ejector hole positions and uneven hole position distribution.

[0005] Based on the above purpose, the utility model adopts the following technical solutions:

[0006] A '-shaped ejector clamp comprises a cylindrical clamp body, characterized in that one end of the clamp body is an ejector seat, and the ejector seat is provided with clamping holes arranged in a '-shaped' shape; an ejector fastening ring is sleeved on the outer side of the clamp body, and a fastening ring fixing nut is sleeved on the clamp body on the side of the ejector fastening ring away from the ejector seat.

[0007] Preferably, the ejector seat is a trumpet-shaped structure, and the ejector seat is evenly divided into eight clamping petals, and there is a clearance fit between every two clamping petals; a pair of clamping grooves are matched between every two adjacent clamping petals, and each pair of clamping grooves cooperates with each other to form a clamping hole;

[0008] Preferably, two clamping holes are arranged between every two clamping petals, and the eight clamping holes arranged on the inner side and the eight clamping holes arranged on the outer side are arranged in a square array; the inner clamping holes are arranged in a square array with a side length of not less than 2.8 mm, and the outer clamping holes are arranged in a square array with a side length of not less than 5.6 mm.

[0009] Preferably, the diameter of each clamping hole is not less than 0.71 mm, and the gap between each two clamping petals is not less than 0.15 mm.

[0010] Preferably, the ejector fastening ring is a circular ring structure, and a slope is provided on the inner side surface of the ejector fastening ring close to the ejector seat of the fixture body; the slope angle matches the trumpet-shaped inclination angle of the ejector seat of the fixture body.

[0011] Preferably, an annular anti-drop ring groove is provided on the clamp body near the mounting end, and a fixing nut anti-drop ring is provided in the anti-drop ring groove.

[0012] The beneficial effects of the utility model are:

[0013] The utility model changes the commonly used cross-shaped ejector clamp into a 'M' shape, and uses a trumpet-shaped ejector seat equally divided into eight parts to fix and clamp the ejector; the ejector is installed and clamped through a clamping hole formed between every two clamping petals, and the clamping hole is tightened by using a fastening ring to tighten the trumpet-shaped split ejector seat to achieve a clamping and fixing effect; by upgrading the cross-shaped ejector seat originally divided into four petals to an eight-petal 'M'-shaped ejector seat, the number of clamping hole positions is greatly increased, the ejector hole positions are more evenly distributed, and the coplanarity when the chip is lifted is better, so as to improve the chip demolding effect.

[0014] The utility model is provided with two groups of sixteen clamping holes in total, forming an outer circle and an inner circle respectively; the outer circle and the inner circle are arranged in a square array, and the eight clamping holes of each group are respectively distributed at the four corners and the midpoints of the four sides of the square; the clamping holes are evenly arranged in the inner and outer circles, so that the force distribution of the large-size chip during demolding is more uniform, which can avoid the problem of easy cracking due to the large size of the thin chip; since the number of holes is increased and the division is more reasonable, the hole setting can be reasonably arranged according to the actual use needs, and it can adapt to the use of more chips of different sizes without replacing the ejector fixture.

[0015] The utility model adopts an ejector pin fastening ring to tighten the ejector pin clamp to achieve the effect of clamping the ejector pin; a slope is arranged on the inner side surface of the ejector pin fastening ring on a side close to the ejector pin seat; the angle of the slope matches the slope angle of the trumpet-shaped structure of the ejector pin seat, and when the ejector pin fastening ring is pushed toward one side of the ejector pin seat, the clamping petals of the ejector pin seat can be gradually tightened until the ejector pin is clamped; a fastening ring fixing nut can be used to advance the ejector pin fastening ring and fix the ejector pin fastening ring, and the ejector pin seat can be tightened to clamp the ejector pin by screwing the fastening ring fixing nut forward, and the position of the ejector pin fastening ring can be maintained so that it will not fall off; in order to facilitate the installation and use of the fastening ring fixing nut, a fixing nut anti-drop ring is arranged on one side of the installation end of the fixture body, so that the fastening ring fixing nut will not fall off easily when being removed, thereby facilitating installation and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0017] Figure 2It is a structural schematic diagram of the clamp body of the utility model;

[0018] Figure 3 This is a schematic diagram of the front structure of the ejector seat of the utility model;

[0019] Figure 4 This is a front view of the ejector fastening ring of the utility model;

[0020] Figure 5 for Figure 4 Sectional view at the AA mark in the middle;

[0021] Figure 6 It is a schematic diagram of the structure of the fixing nut anti-dropping ring of the utility model.

[0022] In the figure: the clamp body 1, the ejector seat 11, the clamping hole 12, the anti-drop ring groove 13, the ejector fastening ring 2, the fastening ring fixing nut 3, and the fixing nut anti-drop ring 4. DETAILED DESCRIPTION

[0023] like Figure 1 As shown, this embodiment is a cross-shaped ejector clamp, which is used to clamp ejectors and perform chip demolding. The cross-shaped ejector clamp includes a clamp body 1, which is a cylindrical structure, one end of which is provided with a trumpet-shaped ejector seat 11, and the ejector seat 11 is provided with regularly arranged clamping holes 12 for installing and clamping ejectors.

[0024] like Figure 2 As shown, the ejector seat 11 is evenly divided into eight clamping petals, and there is a clearance fit between every two adjacent clamping petals, so that the gap between each clamping petal is in the shape of a cross; the clamping hole 12 is located in the gap between each clamping petal, and two clamping holes 12 are arranged between every two clamping petals; the clamping hole 12 is composed of a pair of clamping grooves matched on two adjacent clamping petals. Since the ejector seat 11 is divided into eight clamping petals with clearance fit, when the eight clamping petals shrink, each clamping hole 12 will be tightened, so that the gap in the middle of the clamping hole 12 becomes smaller, so as to clamp the ejector arranged in the clamping hole 12, thereby achieving a clamping effect.

[0025] like Figure 3As shown, there is a certain regularity in the arrangement of the clamping holes 12 on the ejector seat 11. Since two clamping holes 12 are provided in the gap between every two clamping petals, the clamping holes 12 can be divided into two groups, an inner circle and an outer circle. The inner circle and the outer circle each contain eight clamping holes 12, and the eight clamping holes 12 are arranged and combined in a square array. That is, the eight clamping holes are respectively provided at the four vertices and the midpoints of the four sides of the square. In this embodiment, the side length of the square array of the inner circle is 2.8 mm, while the side length of the square array of the outer circle is 5.6 mm. The maximum inner diameter of each clamping hole is 0.71 mm, and the gap between every two adjacent clamping petals is 0.15 mm. Such a setting can meet the requirements for chip demolding with a minimum diameter of 2.8 mm to a diameter of more than 5.6 mm, and can meet the requirements for the use of large-size thin chips.

[0026] A thimble fastening ring 2 is sleeved on the outer side of the fixture body. The thimble fastening ring 2 is a circular ring structure. Figure 4 A slope is provided on the inner wall of the ejector fastening ring 2, the angle of the slope matches the trumpet-shaped inclination angle of the ejector seat 11, as shown Figure 5 As shown; the ejector fastening ring 2 is a device for clamping the ejector seat 11 after the ejector is set. When the ejector seat 11 needs to be clamped to fix the ejector, the ejector fastening ring 2 can be pushed in the direction of the ejector seat 11. As the ejector fastening ring 2 is pushed forward, the ejector seat 11 will gradually shrink until the ejector is firmly clamped to complete the fixation of the ejector.

[0027] A fastening ring fixing nut 3 is also sleeved on the outside of the clamp body 1; the fastening ring fixing nut 3 is used to assist in the advancement and fixation of the ejector fastening ring 2, and a thread that cooperates with the fastening ring fixing nut 3 is provided in the corresponding area of ​​the clamp body 1, so that the fastening ring fixing nut 3 can move back and forth on the clamp body 1 through thread cooperation; when the ejector needs to be clamped, the fastening ring fixing nut 3 can be tightened in the direction of the ejector seat 11, and as the fastening ring fixing nut 3 moves in the direction of the ejector seat 3, it will push The ejector fastening ring 2 moves forward together until the ejector is clamped and fixed; at this time, due to the cooperation between the fastening ring fixing nut 3 and the thread on the outer wall of the clamp body 1, the ejector fastening ring 2 will be fixed in this position, and will not slip off easily, resulting in the ejector seat 11 not being able to clamp the ejector tightly and causing the ejector to fall off; when the ejector needs to be removed, the fastening ring fixing nut 3 can be rotated in the opposite direction, the ejector fastening ring 2 can be slid down in the opposite direction, and the ejector seat 11 can be loosened. At this time, the gap in the clamping hole 12 in the ejector seat 11 is enlarged, and the ejector can be removed.

[0028] like Figure 2 As shown, an annular anti-drop ring groove 13 is provided at a position of the fixture body 1 away from the ejector seat 11 and close to the mounting end; a fixing nut anti-drop ring 4 can be installed in the anti-drop ring groove 13; the structure of the fixing nut anti-drop ring 4 is as shown in Figure 6As shown, its open design allows the fixing nut anti-drop ring 4 to be clamped in the anti-drop ring clamping groove 13, and can rotate freely for easy installation and disassembly; the fixing nut anti-drop ring 4 is used to protect the fastening ring fixing nut 3. When the fastening ring fixing nut 3 is removed, it can be supported from the back so that the fastening ring fixing nut 3 will not fall off directly after removal, but will still be sleeved on the outside of the clamp body 1 under the restriction of the fixing nut anti-drop ring 4. When clamping is needed again, it can be installed more conveniently, maintaining the integrity of the design during use.

[0029] In actual use, the utility model needs to use an ejector coplanar jig to assist in the installation and adjustment of the ejector; first, the fixture body 1 is installed on the ejector coplanar jig, and the fixing screws of the ejector coplanar jig are tightened to fix the fixture body 1; then, according to actual production needs, a suitable ejector model is selected and the ejector layout is designed, and then tweezers are used to place the ejector into the clamping hole 12 on the ejector seat 11.

[0030] After completing the ejector pin setting, lay the ejector pin coplanar fixture flat and then slowly close it until the marking module is completely closed, and observe through a microscope whether the needle tips of each ejector pin are coplanar; after the ejector pins are coplanar, use a wrench to tighten the fastening ring fixing nut 3 upwards, push the ejector pin fastening ring 2 toward the ejector pin seat 11 to tighten the ejector pin seat 11, and complete the clamping and fixing of the ejector pins by the clamping hole 12, so that the ejector pin tips can be kept at the same height, and the force can be evenly applied when the chip is lifted, avoiding the risk of chip cracking. After completing the ejector pin coplanar setting, the fixture body 1 can be installed on the workbench to perform chip demolding.

[0031] The coplanarity of the ejector pins is maintained by clamping the ejector pin fastening ring 2 of the clamping hole 12, and the ejector pin fastening ring 2 is maintained in position by the fastening ring fixing nut 3 to keep it in a fixed clamped state; when the ejector pin needs to be removed, it is only necessary to reversely loosen the fastening ring fixing nut 3 to loosen the ejector pin fastening ring 2 and the clamping hole 12 at the same time, so that the ejector pin can be freely taken out.

[0032] The above description is only a further explanation of the present invention in combination with specific embodiments. All descriptions do not limit the protection scope of the present invention. Any changes or replacement solutions that can be easily thought of by technicians in this field within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A 'Piece-shaped' ejector fixture, comprising a cylindrical fixture body, characterized in that: One end of the clamp body is an ejector seat, and the ejector seat is provided with clamping holes arranged in a cross-shaped pattern; an ejector fastening ring is sleeved on the outer side of the clamp body, and a fastening ring fixing nut is sleeved on the clamp body on the side of the ejector fastening ring away from the ejector seat; the ejector seat is a trumpet-shaped structure, and the ejector seat is evenly divided into eight clamping petals, and there is a clearance fit between every two clamping petals; a pair of clamping grooves are cooperated between every two adjacent clamping petals, and each pair of the clamping grooves cooperate with each other to form the clamping hole.

2. The M-shaped ejector fixture according to claim 1, characterized in that: Two clamping holes are arranged between every two clamping petals, and the eight clamping holes arranged on the inner side and the eight clamping holes arranged on the outer side are arranged in a square array; the inner clamping holes are arranged in a square array with a side length of not less than 2.8 mm, and the outer clamping holes are arranged in a square array with a side length of not less than 5.6 mm.

3. The M-shaped ejector fixture according to claim 2, characterized in that: The diameter of each clamping hole is not less than 0.71 mm, and the gap between each two clamping petals is not less than 0.15 mm.

4. The M-shaped ejector fixture according to claim 3, characterized in that: The ejector fastening ring is a circular ring structure, and a slope is arranged on the inner side surface of the ejector fastening ring close to the ejector seat of the fixture body; the slope angle matches the trumpet-shaped inclination angle of the ejector seat of the fixture body.

5. The M-shaped ejector fixture according to claim 4, characterized in that: An annular anti-drop ring retaining groove is arranged on the clamp body near the mounting end, and a fixing nut anti-drop ring is arranged in the anti-drop ring retaining groove.

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