Electric control box

Abstract

The utility model provides an electric control box, which is applied to a semiconductor manufacturing system and comprises a box body, a branch switch unit, an alternating current plugging unit and a switching power supply, the input end of the switching power supply is connected with an AC power supply; the output end of the switching power supply is connected with the input ends of a plurality of different branch switch units; the output end of each branch switch unit is connected with different alternating current plugging units; when the branch switch unit is in a working state, the detection module is used for detecting electrical parameters of the output end of the branch switch unit; when the electrical parameter exceeds a rated range, the branch switch unit is used for triggering an overload signal; when the branch switch unit obtains a circuit break signal, the branch switch unit is used for cutting off a circuit at the output end of the branch switch unit; the alternating current plugging unit is used for plugging alternating current electric equipment; when the electrical parameters are within a rated range, the alternating current plugging unit is connected with the alternating current electric equipment; the branch switch unit, the AC plugging unit and the switching power supply are all fixed in the box body.

Description

Technical Field

[0001] The utility model relates to the field of power supply control, in particular to an electric control box. Background Art

[0002] The main function of the electric control box is to quickly and accurately cut off the power supply when a fault occurs in the power system to protect electrical equipment and personal safety. With the continuous expansion of the scale of the power system and the continuous increase of power equipment, the semiconductor system has higher and higher requirements for the electric control box.

[0003] At present, when a fault occurs in the power system, the electric control box usually cuts off the power supply immediately to prevent the electrical equipment from being damaged. However, in actual applications, some semiconductor electrical equipment will allow the electrical equipment to be overloaded temporarily. The electric control box in the prior art is difficult to control the allowed overload time. If the allowed overload time is too long, the semiconductor electrical equipment will burn out. If the allowed overload time is too short, the semiconductor electrical equipment will be powered off prematurely. Therefore, a new type of electric control box is urgently needed to improve the above problems. Utility Model Content

[0004] The utility model aims to provide an electric control box, which is used to prevent AC electrical equipment from entering an overload state or being in an overload state for a long time.

[0005] In the first aspect, the utility model provides an electrical control box, which is applied to a semiconductor manufacturing system, comprising: a box body, a branch switch unit, an AC plug unit and a switching power supply; the input end of the switching power supply is connected to an AC power supply; the output end of the switching power supply is connected to the input ends of several different branch switch units; the output end of each branch switch unit is connected to a different AC plug unit; when the branch switch unit is in a working state, it is used to detect the electrical parameters of the output end of the branch switch unit; when the electrical parameters exceed the rated range, the branch switch unit is used to trigger an overload signal; when the branch switch unit obtains a circuit breaker signal, the branch switch unit is used to cut off the circuit of the output end of the branch switch unit; the AC plug unit is used to plug in AC electrical equipment; when the electrical parameters are within the rated range, the AC plug unit remains connected to the AC electrical equipment; the branch switch unit, the AC plug unit and the switching power supply are all fixed to the box body.

[0006] The beneficial effects of the electric control box of the utility model are as follows: the utility model is used to detect the electrical parameters of the output end of the branch switch unit when the branch switch unit is in a working state; when the electrical parameters exceed the rated range, the branch switch unit is used to trigger an overload signal. It is convenient to confirm the load state of the output end of the branch switch unit, which is conducive to adjusting the power supply according to the load state. When the branch switch unit obtains a circuit breaker signal, the branch switch unit is used to cut off the circuit of the output end of the branch switch unit, which is conducive to preventing AC electrical equipment from entering an overload state or being in an overload state for a long time.

[0007] Optionally, the branch switch unit is connected to a control end, and the control end is used to send the disconnection signal to the branch switch unit after receiving the overload signal.

[0008] Optionally, the branch switch unit includes a control unit, and the control unit is used to trigger a circuit breaker signal after triggering the overload signal.

[0009] Optionally, when the control end is used to send the disconnect signal to the branch switch unit after receiving the overload signal, it is also used to: trigger a delay state according to the value of the overload signal, and trigger a disconnect signal when the delay state ends. The beneficial effect is that the delay state is triggered according to the value of the overload signal, and the disconnect signal is triggered when the delay state ends. The overload timing of the AC power equipment is realized, and the power supply of the AC power equipment is cut off when the overload timing is reached, so as to avoid long-term overload of the AC power equipment, which is beneficial to extend the service life of the AC power equipment.

[0010] Optionally, the AC plug unit is connected to the branch switch unit in a one-to-one correspondence; the AC plug unit is also provided with a signal terminal; the input end of the signal terminal is connected to the branch switch unit, the output end of the signal terminal is connected to the control end, and the signal terminal is used to transmit at least one of the overload signal and the circuit breaker signal.

[0011] Optionally, it also includes a rectifier unit; the output end of the switching power supply is connected to the input end of the rectifier unit; the output end of the rectifier unit is connected to a DC plug unit; the DC plug unit is connected to a DC power-consuming device.

[0012] Optionally, a main switch unit is also connected in series between the switching power supply and the branch switch unit; when the main switch unit is in working state, it is used to detect the total electrical parameters of the output end of the main switch unit. When the total electrical parameters exceed the total rated range, the main switch unit is used to cut off the circuit of the output end of the main switch unit.

[0013] Optionally, a filter is connected in series between the switching power supply and the branch switch unit; the filter is used to filter out high-frequency noise in the power line.

[0014] Optionally, an alarm is also included; the alarm is connected to the branch switch unit, and when the circuit at the output end of the branch switch unit is cut off, the alarm enters a working state.

[0015] Optionally, the branch switch unit includes at least one of a circuit breaker, an air switch and a motor protector; the AC power-consuming equipment includes at least one of a motor, a manipulator and a wafer lifting equipment; the DC power-consuming equipment includes at least one of an alarm, a sensor and a solenoid valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the circuit structure of an electric control box provided with 6 AC sockets provided by the utility model;

[0017] Figure 2 A schematic diagram of a top-view cross-sectional structure of an electric control box provided by the utility model;

[0018] Figure 3 A schematic diagram of the circuit structure of an electric control box provided with 4 AC sockets provided by the utility model;

[0019] Figure 4 The utility model provides a circuit structure diagram of a rectifier and a DC socket.

[0020] Numbers in the figure:

[0021] 1. Switching power supply; 2. Branch switch unit; 3. AC plug unit; 31. Signal terminal; 4. Box. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0023] In view of the problems existing in the existing technology, such as Figure 1 and Figure 2 As shown, this embodiment provides an electric control box, which is applied to a semiconductor manufacturing system, including: a box body 4, a branch switch unit 2, an AC plug unit 3 and a switching power supply 1; the input end of the switching power supply 1 is connected to an AC power supply; the output end of the switching power supply 1 is connected to the input ends of several different branch switch units 2; the output end of each branch switch unit 2 is connected to a different AC plug unit 3; when the branch switch unit 2 is in a working state, it is used to detect the electrical parameters of the output end of the branch switch unit 2; when the electrical parameters exceed the rated range, the branch switch unit 2 is used to trigger an overload signal; when the branch switch unit 2 obtains a circuit breaker signal, the branch switch unit 2 is used to cut off the circuit of the output end of the branch switch unit 2; the AC plug unit 3 is used to plug in an AC power device; when the electrical parameters are within the rated range, the AC plug unit 3 remains connected to the AC power device; the branch switch unit 2, the AC plug unit 3 and the switching power supply 1 are all fixed to the box body 4.

[0024] In some embodiments, the branch switch unit 2 includes at least one of a circuit breaker, an air switch, and a motor protector; the AC power-consuming equipment includes at least one of a motor, a robot, and a wafer lifting device.

[0025] Specifically, the branch switch unit 2 is configured as a motor protector, and the AC power device is configured as a motor. In some other specific embodiments, the branch switch unit 2 is configured as an air switch, and the AC power device is configured as a manipulator.

[0026] In some other specific embodiments, the electrical parameter is set to a voltage value or a current value. Correspondingly, the rated range is set to a rated voltage or a rated current.

[0027] It is worth noting that, in this embodiment, when the branch switch unit 2 is in working state, it is used to detect the electrical parameters of the output end of the branch switch unit 2; when the electrical parameters exceed the rated range, the branch switch unit 2 is used to trigger the overload signal. It is convenient to confirm the load state of the output end of the branch switch unit 2, which is conducive to adjusting the power supply according to the load state. When the branch switch unit 2 obtains the disconnection signal, the branch switch unit 2 is used to cut off the circuit of the output end of the branch switch unit 2, which is conducive to preventing the AC electrical equipment from entering the overload state or being in the overload state for a long time.

[0028] In some embodiments, the branch switch unit 2 is connected to a control end, and the control end is used to send the disconnection signal to the branch switch unit 2 after receiving the overload signal.

[0029] Specifically, the control end is set as a controller, the number of controllers and the number of branch switch units 2 are both N, N is a positive integer, and the controllers are connected one-to-one with the branch switch units 2. The control end is set as a host computer, and N branch switch units 2 are connected to the same host computer.

[0030] In some embodiments, the branch switch unit 2 includes a control unit, which is used to trigger a disconnection signal after triggering the overload signal.

[0031] Specifically, the control unit is configured as a control chip in the branch switch unit 2. When the control chip runs an instruction, it is used to trigger a disconnection signal after triggering the overload signal. Exemplarily, the control chip is used to update the overload signal to the disconnection signal after a preset delay.

[0032] In some embodiments, the control end is used to send the disconnect signal to the branch switch unit after receiving the overload signal, and is also used to: trigger a delay state according to the value of the overload signal, and trigger a disconnect signal when the delay state ends. This embodiment triggers a delay state according to the value of the overload signal, and triggers a disconnect signal when the delay state ends. The overload timing of the AC power equipment is realized, and the power supply of the AC power equipment is cut off when the overload timing is reached, so as to avoid long-term overload of the AC power equipment, which is beneficial to extend the service life of the AC power equipment.

[0033] Exemplarily, the delay state corresponds to the process of the AC power equipment heating up to a preset temperature value. The overload signal corresponds to the temperature value signal of the AC power equipment. When the temperature of the AC power equipment exceeds the preset temperature value, a high temperature alarm signal is triggered, and a circuit breaker signal is triggered according to the high temperature alarm signal.

[0034] In another example, the delay state corresponds to a timing duration, and the timing is triggered to start according to the value of the overload signal, and when the timing ends, the circuit breaker signal is triggered.

[0035] Specifically, the control unit is set as a control chip in the branch switch unit 2, the delay value can be set to 0, and when the control chip receives the overload signal, the disconnection signal is immediately triggered, and the disconnection signal can be the amplified overload signal. In this embodiment, the control chip includes an amplifier circuit.

[0036] In some other specific embodiments, the control end is set as a host computer, and the delay value can be set to any positive value. The host computer performs delays of different lengths when receiving overload signals triggered by different branch switch units 2. This embodiment allows different overload delays to be set for different AC electrical equipment, which can meet different production needs.

[0037] In some embodiments, the AC plug unit 3 is connected to the branch switch unit 2 in a one-to-one correspondence; the AC plug unit 3 is also provided with a signal terminal 31; the input end of the signal terminal 31 is connected to the branch switch unit 2, the output end of the signal terminal 31 is connected to the control end, and the signal terminal 31 is used to transmit at least one of the overload signal and the disconnection signal. Specifically, the AC plug unit 3 is configured as an AC socket.

[0038] In some other specific embodiments, the AC power device is configured as a standard mechanical interface (SMIF) lifting platform, and the signal terminal 31 may not be configured. The branch switch unit 2 sends an overload signal to the host computer through the signal line, and the host computer sends a circuit breaker signal to the branch switch unit 2 through the signal line.

[0039] As shown in FIG. 2, in some examples, the three terminals of the switching power supply 1 are connected to the live wire, the neutral wire and the ground wire. The branch switch unit 2 is configured as 6 air switches, namely the first air switch QF1, the second air switch QF2, the third air switch QF3, the fourth air switch QF4, the fifth air switch QF5 and the sixth air switch QF6, and the electrical input end of each air switch is connected to the live wire. The AC plug unit 3 is configured as the first AC socket XA1, the second AC socket XA2, the third AC socket XA3, the fourth AC socket XA4, the fifth AC socket XA5 and the sixth AC socket XA6.

[0040] In the example, 6 AC sockets are arranged along the X direction, and each AC socket is sequentially provided with a live terminal, a neutral terminal and a ground terminal along the X direction. The live terminal is connected to the electrical output end of the corresponding air switch. The neutral terminal is connected to the neutral line, and the ground terminal is connected to the ground line. The first AC socket XA1, the second AC socket XA2, the fifth AC socket XA5 and the sixth AC socket XA6 are also each provided with a pair of signal terminals 31.

[0041] In some embodiments, a main switch unit is also connected in series between the switching power supply 1 and the branch switch unit 2; when the main switch unit is in working state, it is used to detect the total electrical parameters of the output end of the main switch unit. When the total electrical parameters exceed the total rated range, the main switch unit is used to cut off the circuit of the output end of the main switch unit.

[0042] In some embodiments, a filter is connected in series between the switching power supply 1 and the branch switch unit 2; the filter is used to filter out high-frequency noise in the power line.

[0043] Specifically, Figure 3As shown, the main switch unit is set as the main air switch group QF0, and the two sub-switches in the main air switch group QF0 are respectively connected to the live wire and the neutral wire. The other ends of the two sub-switches are commonly connected to a filter Z1, and the output end of the filter Z1 is set as the filtered live wire output terminal L1 and the filtered neutral wire output terminal N1. The branch switch unit 2 is set as 4 groups of air switch groups, namely the seventh air switch group QF7, the eighth air switch group QF8, the ninth air switch group QF9 and the tenth air switch group QF10. The two sub-switches in each of the four air switch groups are respectively connected to the filtered live wire output terminal L1 and the filtered neutral wire output terminal N1. The AC plug unit 3 is set as the seventh AC socket XA7, the eighth AC socket XA8, the ninth AC socket XA9 and the tenth AC socket XA10.

[0044] In the example, four AC sockets are arranged along the X direction, and each AC socket is sequentially provided with a live terminal, a neutral terminal and a ground terminal along the X direction. The live terminal and the neutral terminal are both connected to the corresponding air switch group. The ground terminal is connected to the ground wire. It is worth noting that the AC sockets can be arranged in any direction. The AC plug unit 3 can be set to any positive integer.

[0045] like Figure 4 As shown, in some embodiments, a rectifier unit is also included; the output end of the switching power supply 1 is connected to the input end of the rectifier unit; the output end of the rectifier unit is connected to a DC plug unit; and the DC plug unit is connected to a DC power-consuming device.

[0046] Specifically, the rectifier unit includes a rectifier G1, and the three electrical input terminals of the rectifier G1 are connected to the live wire, the neutral wire and the ground wire, and are used to convert the alternating current into direct current. The output end of the rectifier G1 can be defined as a direct current power supply. The two electrical output terminals (24V and 0V) of the rectifier are connected to a direct current plug unit. In other specific embodiments, the direct current plug unit is connected to an independent ground wire TP.

[0047] Exemplarily, the DC plug-in unit is configured as a DC socket XB. The DC power-consuming device includes at least one of an alarm, a sensor, and a solenoid valve. Specifically, the alarm is connected to the branch switch unit 2, and when the circuit at the output end of the branch switch unit 2 is cut off, the alarm enters a working state. In other specific embodiments, the alarm is configured as an alarm light or a buzzer.

[0048] like Figure 2As shown, in some possible embodiments, the rectifier G1 and the filter Z1 are both arranged on the inner side of the box 4. The switching power supply 1 and a part of the branch switch unit 2 are arranged on the outer side of the box 4. This embodiment facilitates the switch unit to connect the live wire and the neutral wire, and facilitates the branch switch unit 2 to output an overload signal and receive a disconnection signal.

[0049] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. An electrical control box, used in a semiconductor manufacturing system, characterized in that: include: Box, branch switch unit, AC plug unit and switching power supply; The input end of the switching power supply is connected to an AC power supply; the output end of the switching power supply is connected to the input ends of a plurality of different branch switch units; The output end of each branch switch unit is connected to a different AC plug unit; when the branch switch unit is in working state, it is used to detect the electrical parameters of the output end of the branch switch unit; when the electrical parameters exceed the rated range, the branch switch unit is used to trigger an overload signal; when the branch switch unit obtains a disconnection signal, the branch switch unit is used to cut off the circuit of the output end of the branch switch unit; The AC plug-in unit is used to plug in an AC power device; when the electrical parameters are within the rated range, the AC plug-in unit remains connected to the AC power device; The branch switch unit, the AC plug unit and the switch power supply are all fixed to the box.

2. The electric control box according to claim 1, characterized in that: The branch switch unit is connected to a control end, and the control end is used to send the disconnection signal to the branch switch unit after receiving the overload signal.

3. The electric control box according to claim 1, characterized in that: The branch switch unit comprises a control unit, and the control unit is used to trigger a disconnection signal after triggering the overload signal.

4. The electric control box according to claim 2, characterized in that: The control end is used to send the disconnection signal to the branch switch unit after receiving the overload signal, and is also used to: trigger the disconnection signal after a delay according to the overload signal.

5. The electric control box according to claim 2, characterized in that: The AC plug-in units are connected to the branch switch units in a one-to-one correspondence; The AC plug unit is also provided with a signal terminal; the input end of the signal terminal is connected to the branch switch unit, the output end of the signal terminal is connected to the control end, and the signal terminal is used to transmit at least one of the overload signal and the disconnection signal.

6. The electric control box according to any one of claims 1 to 3, characterized in that: It also includes a rectifier unit; the output end of the switching power supply is connected to the input end of the rectifier unit; The output end of the rectifier unit is connected to a DC plug-in unit; The DC plug-in unit is connected to a DC power-consuming device.

7. The electric control box according to claim 1, characterized in that: A main switch unit is also connected in series between the switch power supply and the branch switch unit; When the main switch unit is in working state, it is used to detect the total electrical parameter of the output end of the main switch unit. When the total electrical parameter exceeds the total rated range, the main switch unit is used to cut off the circuit of the output end of the main switch unit.

8. The electric control box according to claim 1 or 7, characterized in that: A filter is also connected in series between the switching power supply and the branch switch unit; The filter is used to filter out high-frequency noise in the power line.

9. The electric control box according to any one of claims 1 to 3, characterized in that: It also includes an alarm; the alarm is connected to the branch switch unit, and when the circuit at the output end of the branch switch unit is cut off, the alarm enters a working state.

10. The electric control box according to claim 6, characterized in that: The branch switch unit includes at least one of a circuit breaker, an air switch and a motor protector; The AC power-consuming equipment includes at least one of a motor, a manipulator, and a wafer lifting device; The DC power-consuming equipment includes at least one of an alarm, a sensor and a solenoid valve.

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