Degumming agent filtering tank convenient to clean

Abstract

The utility model discloses a photoresist removing agent filtering tank convenient to clean, and relates to the technical field of semiconductor photoresist removing agent production, the photoresist removing agent filtering tank convenient to clean comprises a filtering tank body, a cleaning assembly and a filtering assembly, a partition plate is fixed on the inner side of the filtering tank body, and the inner side and the outer side of the partition plate are respectively provided with a filtering cavity and a liquid storage cavity; a lower filter plate is fixed below the partition plate, a cleaning assembly is mounted at the upper part in the filter tank body, and the cleaning assembly comprises an outer cleaning ring, a water inlet pipe, a connecting pipe, an inner cleaning ring, a lower cleaning ring and a cleaning nozzle. According to the adhesive removing agent filtering tank convenient to clean, multiple sets of cleaning nozzles at different positions of the cleaning assembly can fully clean the inner wall of a partition plate, the filtering assembly and a liquid storage cavity, three sets of sealing rings on the outer side of a filtering net are convenient to lift, so that a gap between the filtering net and the inner wall of a lower filtering plate is vacated, and discharging of impurities in the cleaning process is facilitated; therefore, pollution discharge is facilitated, and the problem that impurities are accumulated on the filter screen and are inconvenient to discharge is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor degumming agent production, in particular to a degumming agent filtering tank which is easy to clean. Background Art

[0002] Glue remover is a synthetic chemical agent that can effectively remove chemical components such as quick-drying glue and grease. Semiconductor glue remover is used to remove photoresist in the graphic process of semiconductor chip manufacturing. In the production process of semiconductor glue remover, it needs to be filtered, so a filter tank is needed.

[0003] For example, the utility model with application number CN201520561851.3 discloses a filtering device for producing electrolytic degumming agents for the semiconductor industry. The degumming agent filtering device similar to the above application currently has the following shortcomings: it is not convenient to clean the filter tank and needs to be disassembled for cleaning, and it is easy to cause impurity accumulation after long-term filtration, which makes it inconvenient to discharge the impurities after filtration in time, and there are limitations in use.

[0004] Therefore, in view of this, the existing structure and defects are studied and improved, and a degumming agent filter tank that is easy to clean is proposed. Utility Model Content

[0005] The utility model aims to provide a degumming agent filter tank which is easy to clean, so as to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a degumming agent filter tank that is easy to clean, comprising a filter tank body, a cleaning assembly and a filter assembly, a partition plate is fixed on the inner side of the filter tank body, and the inner and outer sides of the partition plate are respectively arranged as a filter chamber and a liquid storage chamber, and a lower filter plate is fixed below the partition plate, a cleaning assembly is installed above the interior of the filter tank body, and the cleaning assembly comprises an outer cleaning ring, a water inlet pipe, a connecting pipe, an inner cleaning ring, a lower cleaning ring and a cleaning nozzle, a water inlet pipe is connected to the right side of the outer cleaning ring, and an inner cleaning ring is installed on the inner side of the outer cleaning ring through a connecting pipe, a lower cleaning ring is installed on the lower side of the outer cleaning ring through a connecting pipe, and cleaning nozzles are installed below the outer cleaning ring, the inner cleaning ring and the lower cleaning ring, and the lower cleaning ring is located above the interior of the liquid storage chamber, and a filter assembly is installed in the middle of the interior of the filter chamber.

[0007] Furthermore, the filter assembly includes a filter screen and a sealing ring. The filter screen is fixed to the inner side of the lower filter plate by a fixing rod, and the filter screen has a conical structure. A sealing ring is arranged in the gap between the filter screen and the inner wall of the lower filter plate, and the sealing ring is two semi-annular structures that are symmetrical on the left and right.

[0008] Furthermore, the filter assembly also includes a connecting rod and a telescopic rod. The filter screen and the sealing ring are provided in three groups, upper and lower. Connecting rods are fixed between the sealing rings, and a telescopic rod is installed above the uppermost sealing ring.

[0009] Furthermore, a tank cover is installed above the filtering tank body, and feed pipes are arranged on the front and rear sides of the tank cover, and an anti-blocking component is installed in the middle of the tank cover and the filtering tank body.

[0010] Furthermore, the anti-blocking component includes a rotating motor, a rotating shaft and an anti-blocking brush. The rotating motor is installed above the middle part of the tank cover, and a rotating shaft is provided on the lower side of the rotating motor. The rotating shaft is located in the middle of the filter tank body, and an anti-blocking brush is installed on the outside of the rotating shaft.

[0011] Furthermore, the anti-blocking component also includes a cleaning brush, which has an inclined structure, and the lower side of the anti-blocking brush fits the upper side of the filter screen. The cleaning brush is fixed to the outer side of the bottom of the rotating shaft, and the cleaning brush has an "L"-shaped structure.

[0012] Furthermore, a sewage discharge pipe is installed below the middle of the filter cavity, and a feed pipe is connected below the liquid storage cavity.

[0013] The utility model provides a degumming agent filter tank which is easy to clean and has the following beneficial effects:

[0014] The utility model is provided with a cleaning component, which is convenient for delivering clean water to the inside of the outer cleaning ring through a connecting pipe, so that multiple cleaning nozzles at different positions of the cleaning component can fully clean the inner wall of the partition plate, the filter component and the liquid storage cavity. The telescopic rod is convenient for driving the lifting and lowering of the three sets of upper and lower sealing rings, so that the gap between the filter screen and the inner wall of the lower filter plate is vacated to facilitate the discharge of impurities during the cleaning process, thereby facilitating the discharge of sewage through the sewage discharge pipe at the bottom, avoiding the problem of impurities accumulating on the filter screen and being inconvenient to discharge.

[0015] The utility model is provided with a filter assembly and an anti-blocking assembly. The filter screen has a conical structure so that the filtered impurities can flow to the sealing ring position of the outer ring under the action of gravity. The lower filter plate is used to re-filter the degumming agent so that the degumming agent can enter the interior of the liquid storage cavity, so as to discharge the filtered degumming agent through the discharge pipe. The anti-blocking assembly facilitates the cleaning of the upper side of the filter screen, the bottom surface of the filter cavity and the inner wall of the lower filter plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the internal half-section structure of a degumming agent filter tank that is easy to clean according to the utility model;

[0017] Figure 2This is a schematic diagram of a half-section explosion structure of a degumming agent filter tank that is easy to clean according to the utility model;

[0018] Figure 3 The utility model is a schematic diagram of the external structure of a degumming agent filter tank which is easy to clean.

[0019] In the figure: 1. filter tank body; 2. partition plate; 3. filter chamber; 4. lower filter plate; 5. liquid storage chamber; 6. cleaning assembly; 601. outer cleaning ring; 602. water inlet pipe; 603. connecting pipe; 604. inner cleaning ring; 605. lower cleaning ring; 606. cleaning nozzle; 7. tank cover; 8. feed pipe; 9. filter assembly; 901. filter net; 902. sealing ring; 903. connecting rod; 904. telescopic rod; 10. anti-blocking assembly; 1001. rotating motor; 1002. rotating shaft; 1003. anti-blocking brush; 1004. cleaning brush; 11. drain pipe; 12. discharge pipe. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figure 1-Figure 3 As shown, a degumming agent filter tank that is easy to clean includes a filter tank body 1, a cleaning component 6 and a filter component 9, a partition plate 2 is fixed on the inner side of the filter tank body 1, and the inner and outer sides of the partition plate 2 are respectively arranged as a filter chamber 3 and a liquid storage chamber 5, and a lower filter plate 4 is fixed below the partition plate 2, and a filter component 9 is installed in the middle of the filter chamber 3; the filter component 9 includes a filter screen 901 and a sealing ring 902, the inner side of the lower filter plate 4 is fixed with a filter screen 901 by a fixing rod, and the filter screen 901 is a conical structure, and a sealing ring 902 is arranged in the gap between the filter screen 901 and the inner wall of the lower filter plate 4, and the sealing ring 902 is two semi-annular structures that are symmetrical on the left and right; the filter component 9 also includes a connecting rod 903 and a telescopic rod 904, the filter screen 901 and the sealing ring 902 are both provided with three groups, and a connecting rod 903 is fixed between the sealing rings 902, and a telescopic rod 904 is installed above the uppermost sealing ring 902;

[0022] The specific operation is as follows: the degumming agent is filtered through the three-layer filter screen 901. The filter screen 901 has a conical structure so that the filtered impurities can flow to the sealing ring 902 of the outer ring under the action of gravity. The sealing rings 902 are connected by a connecting rod 903. The telescopic rod 904 is convenient for driving the upper and lower three groups of sealing rings 902 to rise and fall, so that the gap between the filter screen 901 and the inner wall of the lower filter plate 4 is vacated to facilitate the discharge of impurities during the cleaning process, thereby facilitating the discharge of sewage through the sewage pipe 11 at the bottom, avoiding the problem of impurities accumulating on the filter screen 901 and being inconvenient to discharge.

[0023] like Figure 1-Figure 2 As shown, a cleaning assembly 6 is installed above the interior of the filter tank body 1, and the cleaning assembly 6 includes an outer cleaning ring 601, a water inlet pipe 602, a connecting pipe 603, an inner cleaning ring 604, a lower cleaning ring 605 and a cleaning nozzle 606. The right side of the outer cleaning ring 601 is connected to the water inlet pipe 602, and the inner side of the outer cleaning ring 601 is installed with the inner cleaning ring 604 through the connecting pipe 603, and the lower side of the outer cleaning ring 601 is installed with the lower cleaning ring 605 through the connecting pipe 603, and the outer cleaning ring 601, the inner cleaning ring 604 and the lower cleaning ring 605 are all installed with cleaning nozzles 606 below, and the lower cleaning ring 605 is located above the interior of the liquid storage chamber 5, a sewage pipe 11 is installed below the middle of the filter chamber 3, and a feed pipe 12 is connected below the liquid storage chamber 5;

[0024] The specific operation is as follows: the connecting pipe 603 is used to facilitate the delivery of clean water to the interior of the outer cleaning ring 601, so that the outer cleaning ring 601 can deliver clean water to the connected inner cleaning ring 604 and lower cleaning ring 605 through the connecting pipe 603, so that the outer cleaning ring 601 and the cleaning nozzle 606 clean the inner wall of the partition plate 2, the inner cleaning ring 604 and the cleaning nozzle 606 clean the filter assembly 9, and the lower cleaning ring 605 and the cleaning nozzle 606 clean the liquid storage chamber 5, thereby achieving sufficient cleaning.

[0025] like Figure 1-Figure 2 As shown, a tank cover 7 is installed above the filter tank body 1, and a feed pipe 8 is provided on the front and rear sides of the tank cover 7, and an anti-blocking component 10 is installed in the middle of the tank cover 7 and the filter tank body 1; the anti-blocking component 10 includes a rotating motor 1001, a rotating shaft 1002 and an anti-blocking brush 1003, the rotating motor 1001 is installed above the middle of the tank cover 7, and a rotating shaft 1002 is provided on the lower side of the rotating motor 1001, the rotating shaft 1002 is located in the middle of the filter tank body 1, and an anti-blocking brush 1003 is installed on the outer side of the rotating shaft 1002; the anti-blocking component 10 also includes a cleaning brush 1004, the anti-blocking brush 1003 is in an inclined structure, and the lower side of the anti-blocking brush 1003 is in contact with the upper side of the filter screen 901, and the cleaning brush 1004 is fixed to the outer side of the bottom of the rotating shaft 1002, and the cleaning brush 1004 is in an "L"-shaped structure;

[0026] The specific operation is as follows: the anti-blocking brush 1003 and the cleaning brush 1004 are driven to rotate by the rotating motor 1001 and the rotating shaft 1002, so that the anti-blocking brush 1003 can perform anti-blocking cleaning on the upper side of the filter screen 901, and is also beneficial to the removal of impurities on the surface of the filter screen 901 during the cleaning process, and the "L"-shaped cleaning brush 1004 can simultaneously clean the bottom surface of the filter chamber 3 and the inner wall of the lower filter plate 4. The lower filter plate 4 is used to re-filter the degumming agent so that the degumming agent can enter the interior of the liquid storage chamber 5, so as to facilitate the discharge of the filtered degumming agent through the discharge pipe 12.

[0027] In summary, if Figure 1-Figure 3 As shown, the degumming agent filter tank which is easy to clean, when in use, can firstly feed the semiconductor degumming agent to be filtered into the filter chamber 3 inside the filter tank body 1 through the feed pipe 8 and increase the pressure, so that the three-layer filter screen 901 filters the degumming agent. In this process, the anti-blocking brush 1003 and the cleaning brush 1004 can be driven to rotate by the rotating motor 1001 and the rotating shaft 1002, so that the anti-blocking brush 1003 can prevent the upper side of the filter screen 901 from blocking and clean it, and at the same time, the "L"-shaped cleaning brush 1004 can clean the bottom surface of the filter chamber 3 and the inner side wall of the lower filter plate 4 at the same time. At this time, the valve at the drain pipe 11 is closed, and then the lower filter plate 4 re-filters the degumming agent so that the semiconductor degumming agent inside the filter chamber 3 can enter the liquid storage chamber 5, so as to facilitate the discharge of the filtered semiconductor degumming agent through the discharge pipe 12;

[0028] When cleaning is required, clean water can be sent to the inside of the outer cleaning ring 601 through the connecting pipe 603, so that the outer cleaning ring 601 can send clean water to the connected inner cleaning ring 604 and lower cleaning ring 605 through the connecting pipe 603, so that the outer cleaning ring 601 and the cleaning nozzle 606 clean the inner wall of the partition plate 2, the inner cleaning ring 604 and the cleaning nozzle 606 clean the filter assembly 9, and the lower cleaning ring 605 and the cleaning nozzle 606 clean the liquid storage chamber 5. At this time, the upper and lower three groups of sealing rings 902 can be driven to rise and fall by the telescopic rod 904, so that the gap between the filter screen 901 and the inner wall of the lower filter plate 4 is vacated. The filter screen 901 has a conical structure so that the filtered impurities can flow to the sealing ring 902 position of the outer ring under the action of gravity, so as to facilitate the discharge of impurities during the cleaning process, and finally discharge sewage through the sewage pipe 11 at the bottom, thus completing the use process of the easy-to-clean degumming agent filter tank.

[0029] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A degumming agent filter tank that is easy to clean, comprising a filter tank body (1), a cleaning component (6) and a filter component (9), characterized in that: A partition plate (2) is fixed on the inner side of the filtering tank body (1), and the inner and outer sides of the partition plate (2) are respectively provided with a filtering chamber (3) and a liquid storage chamber (5), and a lower filter plate (4) is fixed below the partition plate (2). A cleaning assembly (6) is installed above the interior of the filtering tank body (1), and the cleaning assembly (6) comprises an outer cleaning ring (601), a water inlet pipe (602), a connecting pipe (603), an inner cleaning ring (604), a lower cleaning ring (605) and a cleaning nozzle (606). The right side of the outer cleaning ring (601) is provided with a filter chamber (3) and a liquid storage chamber (5). The outer side of the outer cleaning ring (601) is connected to a water inlet pipe (602), and an inner cleaning ring (604) is installed on the inner side of the outer cleaning ring (601) through a connecting pipe (603), and a lower cleaning ring (605) is installed on the lower side of the outer cleaning ring (601) through a connecting pipe (603), and cleaning nozzles (606) are installed below the outer cleaning ring (601), the inner cleaning ring (604) and the lower cleaning ring (605), and the lower cleaning ring (605) is located above the inside of the liquid storage chamber (5), and a filter assembly (9) is installed in the middle of the inside of the filter chamber (3).

2. The degumming agent filter tank that is easy to clean according to claim 1, characterized in that: The filter assembly (9) comprises a filter screen (901) and a sealing ring (902); the filter screen (901) is fixed to the inner side of the lower filter plate (4) via a fixing rod, and the filter screen (901) is in a conical structure; a sealing ring (902) is provided in the gap between the filter screen (901) and the inner wall of the lower filter plate (4), and the sealing ring (902) is in the form of two semi-annular structures that are symmetrical on the left and right.

3. The easy-to-clean degumming agent filter tank according to claim 2, characterized in that: The filter assembly (9) further comprises a connecting rod (903) and a telescopic rod (904); the filter net (901) and the sealing ring (902) are both provided with three groups, one above the other; the connecting rod (903) is fixed between the sealing rings (902); and the telescopic rod (904) is installed above the uppermost sealing ring (902).

4. The easy-to-clean degumming agent filter tank according to claim 2, characterized in that: A tank cover (7) is installed above the filtering tank body (1), and a feed pipe (8) is provided on the front and rear sides of the tank cover (7), and an anti-blocking component (10) is installed in the middle of the tank cover (7) and the filtering tank body (1).

5. The easy-to-clean degumming agent filter tank according to claim 4, characterized in that: The anti-blocking assembly (10) comprises a rotating motor (1001), a rotating shaft (1002) and an anti-blocking brush (1003); the rotating motor (1001) is installed above the middle of the tank cover (7), and a rotating shaft (1002) is provided on the lower side of the rotating motor (1001); the rotating shaft (1002) is located in the middle of the filter tank body (1), and an anti-blocking brush (1003) is installed on the outer side of the rotating shaft (1002).

6. The easy-to-clean degumming agent filter tank according to claim 5, characterized in that: The anti-blocking component (10) further comprises a cleaning brush (1004); the anti-blocking brush (1003) is in an inclined structure, and the lower side of the anti-blocking brush (1003) is in contact with the upper side of the filter screen (901); the cleaning brush (1004) is fixed to the outer side of the bottom of the rotating shaft (1002), and the cleaning brush (1004) is in an "L"-shaped structure.

7. The easy-to-clean degumming agent filter tank according to claim 1, characterized in that: A sewage discharge pipe (11) is installed below the middle of the filter chamber (3), and a feed discharge pipe (12) is connected below the liquid storage chamber (5).

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