Translation cleaning module of full-automatic cutting and sorting all-in-one machine

Abstract

According to the translation cleaning module of the full-automatic cutting and sorting all-in-one machine, the rolling sponge, the brush and two fluids are arranged to carry out selectable process cleaning on products, the air knife carries out air drying treatment on the products, the air knife is provided with a row of air outlets, and the air knife is adjusted to provide air drying airflow with an inclined angle to the surfaces of the products, so that the products are cleaned more thoroughly. The rolling sponge and the brush are internally provided with water injection channels, the rolling sponge is driven to rotate through a first motor connected with a first rotating shaft, the brush is lifted and adjusted through a lifting air cylinder, a second motor and a second rotating shaft are connected through a gear belt, and a sliding piece is provided with a gear groove matched with the gear belt. The sliding part translates along the sliding rail under the action of the second motor, the sliding part drives the two-fluid to perform repeated translation cleaning, the two-fluid provides high-pressure water flow and high-pressure air flow, the second motor is a speed adjusting motor, the translation rate of the two-fluid can be adjusted to improve the cleaning efficiency, and the rolling sponge, the brush and the two-fluid are convenient to replace. And the rolling sponge, the brush and the two fluid are matched, so that the cleaning quality of the product is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment, in particular to a translation cleaning module of a full-automatic cutting and sorting integrated machine. Background Art

[0002] Semiconductor is a material based on conductors and insulators at room temperature. It is often used in science and technology fields such as aviation, automobiles, artificial intelligence and communication systems. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., among which silicon is the most influential one. However, semiconductors are also one of the more sophisticated materials. In daily semiconductor processing, semiconductor substrates need to be cut to obtain integrated circuit units. Therefore, after cutting, a lot of cutting debris and foreign matter will be left on the semiconductor substrate. In order to ensure product quality and the accuracy of subsequent visual inspection and sorting results, the cut semiconductor substrate needs to be cleaned.

[0003] Traditional cleaning modules are not clean enough after cleaning the products, and the products will fall and be damaged during the cleaning process. In addition, the cleaning speed cannot be adjusted, resulting in the inability to improve the cleaning efficiency. Utility Model Content

[0004] Purpose of the utility model: The purpose of the utility model is to solve the deficiencies in the prior art and to provide a translational cleaning module for a fully automatic cutting and sorting machine.

[0005] Technical solution: The translational cleaning module of the utility model fully automatic cutting and sorting integrated machine is characterized in that it includes a body, a rolling sponge, a brush, two fluids, a first motor, a second motor, a first rotating shaft, a second rotating shaft, a first cleaning area, a second cleaning area, a third cleaning area, a lifting cylinder, a sliding member, a sliding track, a first sensor, a second sensor, a base, a wind knife, a tray, a handle, a first side plate and a second side plate. The top surface of the body is provided with a first cleaning area, a second cleaning area and a third cleaning area, the side of the body is provided with a first side plate and a second side plate, the first side plate is provided with a first motor, a second motor, a first sensor and a second sensor, the first motor is connected to the first rotating shaft through a belt, a rolling sponge is provided on the first rotating shaft, the second motor and the second rotating shaft are connected through a belt, the second rotating shaft, the sliding track and the wind knife are fixedly provided on the second side plate, a sliding member is provided on the sliding track, a tray with a handle is provided directly below the sliding track, a base is provided on the sliding member, two fluids are provided on the base, a lifting cylinder is provided on the ground of the body, and a brush is provided on the lifting cylinder.

[0006] A further improvement of the utility model is that the rolling sponge cooperates with the first cleaning area, the brush cooperates with the second cleaning area, and the two fluids cooperate with the third cleaning area.

[0007] A further improvement of the utility model is that both the rolling sponge and the brush are provided with water injection channels, and the two fluids provide high-pressure air flow and high-pressure water flow.

[0008] A further improvement of the utility model is that the wind knife is provided with an air outlet, and the wind knife is adjusted to provide drying airflows with different inclination angles to the product surface.

[0009] A further improvement of the utility model is that the first motor is a fixed speed motor driven by a cylinder, and the second motor is a speed regulating motor.

[0010] A further improvement of the utility model is that the second motor, the second rotating shaft, the sliding member and the sliding track cooperate with each other, the second motor and the second rotating shaft are connected by a gear belt, the sliding member is provided with a gear groove matching the gear belt, the sliding member translates along the sliding track, and the first side panel is provided with a track groove matching the sliding track and the sliding member.

[0011] A further improvement of the present invention is that the width of the sliding member is L, the distance between the first sensor and the second sensor is L, and the stroke of the sliding member is LL.

[0012] A further improvement of the utility model is that the sliding member is provided with a right-angle notch, and when the rightmost end of the sliding member is aligned with the second sensor, the sliding member does not contact the outer circumference of the second rotating shaft.

[0013] A further improvement of the utility model is that the first sensor and the second sensor are displacement sensors, which limit the reciprocating translational repeated motion within the travel of the sliding member, and the sliding member drives the two fluids to perform repeated translational cleaning.

[0014] A further improvement of the utility model is that the rolling sponge, the brush and the second fluid are easy to replace, and the tray is provided with a water filter hole on the bottom surface thereof in order to collect and wash dropped products and take out the products.

[0015] Compared with the prior art, the translational cleaning module of the fully automatic cutting and sorting integrated machine provided by the utility model achieves at least the following beneficial effects:

[0016] The utility model cleans the product by sequentially arranging a rolling sponge, a brush and two fluids, and then air-dries the product with a wind knife, the wind knife is provided with an exhaust port, and an air-drying airflow at an inclined angle is provided to the product surface by adjusting the wind knife, in order to facilitate cleaning, a water injection channel is provided in the rolling sponge and the brush, the rolling sponge is driven to rotate by a first motor connected to a first rotating shaft, the brush is lifted and lowered by a lifting cylinder, the second motor and the second rotating shaft are connected by a gear belt, the sliding member is provided with a gear groove that matches the gear belt, the sliding member is translated along the sliding track under the action of the second motor, and the two fluids are driven by the sliding member to perform repeated translational cleaning, the two fluids provide stable high-pressure water flow and high-pressure air flow, the second motor is a speed-regulating motor, and the swing rate of the two fluids can be adjusted to improve the cleaning efficiency, the rolling sponge, the brush and the two fluids are easy to replace, the rolling sponge, the brush and the two fluids cooperate to effectively improve the cleaning quality of the product, the tray collects and cleans the dropped products and takes out the products, and reduces the loss of the products. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings incorporated in the specification and constituting a part of the specification illustrate embodiments of the utility model and, together with the description thereof, are used to explain the principles of the utility model. The accompanying drawings do not constitute any limitation to the utility model. A person skilled in the art can obtain other accompanying drawings based on the following accompanying drawings without paying any creative work.

[0018] Figure 1 It is a schematic diagram of the structure of the utility model;

[0019] Figure 2 It is a schematic diagram of the first side panel mounting member of the utility model;

[0020] Figure 3 It is the internal schematic diagram of the utility model;

[0021] Figure 4 It is a schematic diagram of the top surface of the utility model body;

[0022] Among them, 1. main body, 2. rolling sponge, 3. brush, 4. second fluid, 5. first motor, 6. second motor, 7. first rotating shaft, 8. second rotating shaft, 9. first cleaning area, 10. second cleaning area, 11. third cleaning area, 12. lifting cylinder, 13. sliding part, 14. sliding track, 15. first sensor, 16. second sensor, 17. base, 18. wind knife, 19. tray, 20. handle, 21. first side panel, 22. second side panel. DETAILED DESCRIPTION

[0023] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0024] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present invention, its application, or uses.

[0025] The techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered as part of the specification, and in all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary, not as limitations. Therefore, other examples of the exemplary embodiments may have different values.

[0026] See the instruction manual Figure 1-4 The translation cleaning module of the fully automatic cutting and sorting integrated machine is characterized in that it includes a body 1, a rolling sponge 2, a brush 3, a second fluid 4, a first motor 5, a second motor 6, a first rotating shaft 7, a second rotating shaft 8, a first cleaning area 9, a second cleaning area 10, a third cleaning area 11, a lifting cylinder 12, a sliding member 13, a sliding rail 14, a first sensor 15, a second sensor 16, a base 17, a wind knife 18, a tray 19, a handle 20, a first side plate 21 and a second side plate 22. The top surface of the body 1 is provided with a first cleaning area 9, a second cleaning area 10 and a third cleaning area 11, and the side surface of the body 1 is provided with a first side plate 21 and a second side plate 22. The first side plate 2 1 is provided with a first motor 5, a second motor 6, a first sensor 15 and a second sensor 16, the first motor 5 is connected to the first rotating shaft 7 through a belt, the first rotating shaft 7 is provided with a rolling sponge 2, the second motor 6 and the second rotating shaft 8 are connected through a belt, the second rotating shaft 8, a sliding track 14 and a wind knife 18 are fixedly provided on the second side plate 22, the sliding track 14 is provided with a sliding member 13, a tray 19 with a handle 20 is provided directly below the sliding track 14, the sliding member 13 is provided with a base 17, the base 17 is provided with two fluids 4, a lifting cylinder 12 is provided on the ground of the main body 1, and a brush 3 is provided on the lifting cylinder 12.

[0027] The rolling sponge 2 cooperates with the first cleaning area 9 , the brush 3 cooperates with the second cleaning area 10 , and the two fluids 4 cooperate with the third cleaning area 11 .

[0028] The rolling sponge 2 and the brush 3 are both provided with water injection channels, and the two fluids 4 provide high-pressure air flow and high-pressure water flow.

[0029] The wind knife 18 is provided with an exhaust port, and the wind knife 18 is adjusted to provide drying airflow with different inclination angles to the product surface.

[0030] The first motor 5 is a fixed speed motor driven by a cylinder, and the second motor 6 is a speed regulating motor.

[0031] The second motor 6, the second rotating shaft 8, the sliding member 13 and the sliding track 14 cooperate with each other. The second motor 6 and the second rotating shaft 8 are connected by a gear belt. The sliding member 13 is provided with a gear groove matching the gear belt. The sliding member 13 translates along the sliding track 14. The first side panel 21 is provided with a track groove matching the sliding track 14 and the sliding member 13.

[0032] The width of the sliding member 13 is L1, the distance between the first sensor 15 and the second sensor 16 is L2, and the stroke of the sliding member 13 is L2-L1.

[0033] The sliding member 13 is provided with a right-angle notch. When the rightmost end of the sliding member 13 is aligned with the second sensor 16 , the sliding member 13 is not in contact with the outer periphery of the second rotating shaft 8 .

[0034] The first sensor 15 and the second sensor 16 are displacement sensors, which limit the sliding member 13 to perform repeated translational movements within the stroke, and drive the second fluid 4 to perform repeated translational cleaning through the sliding member 13 .

[0035] The rolling sponge 2, the brush 3 and the second fluid 4 are easy to replace. In order to collect the dropped products for cleaning and take out the products, the bottom surface of the tray 19 is provided with a water filter hole.

[0036] In summary, the utility model clamps the cut semiconductor substrate and cleans the product in turn through the rolling sponge 2, the brush 3 and the second fluid 4, and the wind knife 18 then air-dries the product. The wind knife 18 is provided with an exhaust port, and the wind knife 18 is adjusted to provide an inclined drying airflow to the product surface. In order to facilitate cleaning, a water injection channel is provided in the rolling sponge 2 and the brush 3. The rolling sponge 2 is driven to rotate by the first motor 5 connected to the first rotating shaft 7, and the brush 3 is raised and lowered by the lifting cylinder 12.

[0037] The second motor 6 and the second rotating shaft 8 are connected by a gear belt, and the sliding member 13 is provided with a gear groove matching the gear belt. The sliding member 13 is translated along the sliding track 14 under the action of the second motor 6, and the second fluid 4 is driven by the sliding member 13 to perform repeated translational cleaning. The second fluid 4 provides high-pressure water flow and high-pressure air flow. The second motor 6 is a speed-regulating motor, which can adjust the swing rate of the second fluid 4 to improve the cleaning efficiency. The rolling sponge 2, the brush 3 and the second fluid 4 are easy to replace. The rolling sponge 2, the brush 3 and the second fluid 4 cooperate to effectively improve the cleaning quality of the product. The tray 19 collects the dropped products after cleaning and takes out the products.

[0038] Although some specific embodiments of the present invention have been described in detail by way of examples, it should be understood by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the present invention. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. The translation cleaning module of the fully automatic cutting and sorting machine is characterized by: The invention comprises a body (1), a rolling sponge (2), a brush (3), two fluids (4), a first motor (5), a second motor (6), a first rotating shaft (7), a second rotating shaft (8), a first cleaning area (9), a second cleaning area (10), a third cleaning area (11), a lifting cylinder (12), a sliding member (13), a sliding track (14), a first sensor (15), a second sensor (16), a base (17), an air knife (18), a tray (19), a handle (20), a first side plate (21) and a second side plate (22), wherein the top surface of the body (1) is provided with the first cleaning area (9), the second cleaning area (10) and the third cleaning area (11), the side surface of the body (1) is provided with the first side plate (21) and the second side plate (22), and the first motor (21) is provided with a first side plate (21) and a second side plate (22). (5), a second motor (6), a first sensor (15) and a second sensor (16), the first motor (5) is connected to the first rotating shaft (7) by a belt, the first rotating shaft (7) is provided with a rolling sponge (2), the second motor (6) and the second rotating shaft (8) are connected by a belt, the second side plate (22) is fixedly provided with the second rotating shaft (8), a sliding track (14) and a wind knife (18), the sliding track (14) is provided with a sliding member (13), a tray (19) with a handle (20) is provided directly below the sliding track (14), the sliding member (13) is provided with a base (17), the base (17) is provided with two fluids (4), the main body (1) is provided with a lifting cylinder (12) on the ground, and the lifting cylinder (12) is provided with a brush (3).

2. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The rolling sponge (2) cooperates with the first cleaning area (9), the brush (3) cooperates with the second cleaning area (10), and the two fluids (4) cooperate with the third cleaning area (11).

3. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The rolling sponge (2) and the brush (3) are both provided with water injection channels, and the two fluids (4) provide uniform high-pressure airflow and high-pressure water flow to enhance the cleaning effect.

4. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The wind knife (18) is provided with an exhaust port, and the wind knife (18) is adjusted to provide drying airflows with different inclination angles to the product surface.

5. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The first motor (5) is a fixed speed motor driven by a cylinder, and the second motor (6) is a speed regulating motor.

6. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The second motor (6), the second rotating shaft (8), the sliding member (13) and the sliding track (14) are matched with each other. The second motor (6) and the second rotating shaft (8) are connected by a gear belt. The sliding member (13) is provided with a gear groove matching with the gear belt. The sliding member (13) translates along the sliding track (14). The first side plate (21) is provided with a track groove matching with the sliding track (14) and the sliding member (13).

7. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1 is characterized in that: The width of the sliding member (13) is L1, the distance between the first sensor (15) and the second sensor (16) is L2, and the stroke of the sliding member (13) is L2-L1.

8. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The sliding member (13) is provided with a right-angle notch, and when the rightmost end of the sliding member (13) is aligned with the second sensor (16), the sliding member (13) does not contact the outer periphery of the second rotating shaft (8).

9. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 7, characterized in that: The first sensor (15) and the second sensor (16) are displacement sensors that limit the reciprocating translational repeated movement of the sliding member (13) within the travel range, and drive the two fluids (4) to perform repeated translational cleaning via the sliding member (13).

10. The translational cleaning module of the fully automatic cutting and sorting machine according to claim 1, characterized in that: The rolling sponge (2), the brush (3) and the second fluid (4) are easy to replace. In order to collect the products dropped during cleaning and to take out the products, the bottom surface of the tray (19) is provided with a water filter hole.

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