Linear cutting auxiliary vibration device and linear cutting equipment

By using a vibration generator and a transmission wheel in the online cutting equipment to transmit ultrasonic vibration to the cutting line, the problem of increased wear and risk of disconnection of cutting lines is solved, a more efficient and higher quality cutting process is achieved, and the service life of the equipment is extended.

CN222571263UActive Publication Date: 2025-03-07QINGDAO GAOCE TECH CO LTD
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Patent Information

Application Number
CN202421226301.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Priority Date
2023-05-31
Filing Date
2024-05-31
Publication Date
2025-03-07
Estimated Expiration
2034-05-31

AI Technical Summary

Technical Problem

After the existing wire cutting equipment applies ultrasonic vibration, the wear of the cutting line increases and the probability of disconnection increases, resulting in a shortened service life and a reduced production efficiency. At the same time, the vibration loss is large, affecting the cutting quality.

Method used

A wire cutting auxiliary vibration device is adopted to convert electrical energy into mechanical vibration through a vibration generator, and the vibration is transmitted to the roulette through a transmission wheel. The roulette rolls in contact with the cutting line, driving the cutting line to generate micron-level ultrasonic vibration.

Benefits of technology

The macroscopic force of the cutting line acting on the workpiece is reduced, the line bow control and cutting state of the cutting line is stabilized, the significant line marks on the cutting surface are reduced, the consistency of the cutting surface is improved, and the cutting efficiency and cutting quality are improved, while the service life of the roulette is extended.

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Abstract

The embodiment of the utility model provides a linear cutting auxiliary vibration device and linear cutting equipment, and the linear cutting auxiliary vibration device comprises a vibration generator which is used for converting electric energy into mechanical vibration in a first direction; the vibration generator comprises a rotation driving end and a vibration output end, the rotation driving end is used for being connected with the rotation driver, and the vibration generator can rotate with the first direction as the rotation center line under the action of rotation force provided by the rotation driver; a transmission wheel; the transmission wheel comprises a wheel disc and a wheel shaft which extends in the first direction, one end of the wheel shaft is connected with the vibration output end of the vibration generator, and the other end is fixedly connected to the end face of the wheel disc. According to the linear cutting auxiliary vibration device and the linear cutting equipment, the transmission wheel is in rolling contact with the cutting line to transmit vibration, the peripheral face of the transmission wheel is not prone to damage, the service life of the transmission wheel is prolonged, and limitation on routing and vibration of the cutting line is reduced.
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Description

Technical Field

[0001] The present application relates to wire cutting technology, and in particular to a wire cutting auxiliary vibration device and a wire cutting equipment. Background Art

[0002] Wire cutting equipment is a device that uses a fast-moving cutting wire to cut workpieces, such as truncating, squaring or slicing silicon rods. Technicians have found in their research that applying ultrasonic vibrations to the cutting wire can improve cutting efficiency and quality. However, technicians also found that after applying ultrasonic vibrations, the wear of the cutting wire increased, the probability of wire breakage increased, and the service life was shortened. The cutting wire needs to be replaced frequently. The process of replacing the cutting wire is more complicated and time-consuming, which reduces production efficiency; and wire breakage will also reduce cutting quality. In addition, due to the large deformation capacity of the cutting wire, when vibration acts on the cutting wire, the cutting wire itself will produce a large amplitude of resonance, resulting in large vibration losses.

[0003] In addition, the ultrasonic vibration device used in the traditional solution includes a transducer and an amplitude transformer. The cutting wire slides in contact with the amplitude transformer during the routing process, and the amplitude transformer transmits the vibration to the cutting wire. After the wire cutting equipment has been running for a period of time, the end of the amplitude transformer will be severely worn, and may even be cut into grooves by the cutting wire. The cutting wire can easily get stuck in the groove, further deepening the wear on the amplitude transformer and further causing more serious wear on the cutting wire. Summary of the invention

[0004] In order to solve one of the above-mentioned technical defects, a wire cutting auxiliary vibration device and a wire cutting equipment are provided in an embodiment of the present application.

[0005] According to a first aspect of an embodiment of the present application, there is provided a wire cutting auxiliary vibration device, comprising:

[0006] A vibration generator, used for converting electrical energy into mechanical vibration along a first direction; the vibration generator comprises a rotation drive end and a vibration output end, the rotation drive end is used to be connected to the rotation driver, and the vibration generator can rotate with the first direction as the rotation center line under the action of the rotation force provided by the rotation driver;

[0007] Transmission wheel; the transmission wheel includes a wheel disc and a wheel axle, the wheel axle extends along a first direction, one end of which is connected to the vibration output end of the vibration generator, and the other end is fixedly connected to the end surface of the wheel disc.

[0008] As described above, in the wire cutting auxiliary vibration device, the diameter of the end portion of the wheel axle connected to the wheel disc gradually increases along the direction from the wheel axle toward the wheel disc.

[0009] In the wire cutting auxiliary vibration device as described above, the generatrix of the end portion of the wheel shaft connected to the wheel disc is an arc.

[0010] The wire cutting auxiliary vibration device as described above further comprises:

[0011] The rotating support is connected between the wheel shaft and the vibration generator; the rotating support is used to be installed on a bracket so that the vibration device can rotate relative to the bracket.

[0012] As described above, the wire cutting auxiliary vibration device has axles connected to both ends of the wheel disc, and the axle away from the vibration generator is connected to another rotating support, and both rotating supports can be installed on the bracket.

[0013] As described above, in the wire cutting auxiliary vibration device, a limiting ring is provided on the peripheral surface of the end of the rotating support member facing the wheel disc, and the limiting ring protrudes from the peripheral surface.

[0014] In the wire cutting auxiliary vibration device as described above, the circumferential surface of the wheel disc is provided with an annular wire groove.

[0015] According to a second aspect of an embodiment of the present application, there is provided a wire cutting device, comprising:

[0016] A workpiece clamping table, used to clamp the workpiece to be cut;

[0017] A cutting device for winding a cutting wire; the cutting device and the workpiece clamping table can move relative to each other along the feeding direction, and the cutting wire is used to cut the workpiece to be cut during the routing process;

[0018] In the wire cutting auxiliary vibration device as described above, the peripheral surface of the wheel disc of the driving wheel contacts the cutting wire to apply vibration to the cutting wire.

[0019] The wire cutting device as described above further comprises:

[0020] The bracket is provided with a vibration mounting seat, and the vibration mounting seat is provided with a mounting hole for accommodating a rotating support member.

[0021] In the wire cutting device as described above, there are two vibration mounting seats, which are arranged opposite to each other, and the mounting holes on the two vibration mounting seats are coaxial; the rotating support members located at both ends of the wheel are respectively arranged in one mounting hole.

[0022] The technical solution provided by the embodiment of the present application adopts a vibration generator to convert electrical energy into mechanical vibration, and the wheel shaft is connected between the vibration generator and the wheel disc to transmit the mechanical vibration to the wheel disc; and the vibration generator drives the wheel shaft and the wheel disc to rotate axially together, converting the axial vibration transmitted to the wheel disc into the radial vibration of the wheel disc, and driving the cutting line to generate micron-level ultrasonic vibration, so as to further micro-process the workpiece in the process of cutting the workpiece to be cut by the cutting line, thereby having an auxiliary effect on the cutting process of the cutting line, and the micro-processing effect of ultrasonic vibration is conducive to reducing the macroscopic force of the cutting line on the workpiece, making the line bow control and cutting state of the cutting line more stable, thereby reducing the significant line marks on the cutting surface of the workpiece to be cut, making the cutting surface more consistent, thereby improving the cutting efficiency and cutting quality. In addition, the vibration is transmitted by rolling contact between the wheel disc and the cutting line, which reduces the routing resistance of the cutting line, and makes the peripheral surface of the wheel disc less likely to be damaged, prolongs the service life of the wheel disc, and reduces the restrictions on the routing and vibration of the cutting line. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0024] Figure 1 A schematic diagram of the structure of the wire cutting device provided in the embodiment of the present application;

[0025] Figure 2 A schematic diagram of the structure of a wire cutting auxiliary vibration device provided in an embodiment of the present application;

[0026] Figure 3 This is a schematic diagram of the structure in which the wire cutting auxiliary vibration device provided in an embodiment of the present application is installed on a bracket.

[0027] Reference numerals:

[0028] 1- Workpiece clamping table;

[0029] 2-Silicon rods;

[0030] 31-cutting line; 32-cutting wheel; 33-tension wheel; 34-wire guide wheel;

[0031] 4-cutting frame; 41-bracket; 411-vibration mounting seat; 412-mounting hole;

[0032] 5-feed drive mechanism;

[0033] 7-wire vibration device; 71-vibration generator; 711-cable line; 712-vibration output terminal; 72-axle; 73-wheel disc; 731-wire slot; 74-rotating support; 741-limiting ring. DETAILED DESCRIPTION

[0034] In order to make the technical solutions and advantages in the embodiments of the present application more clearly understood, the exemplary embodiments of the present application are further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than an exhaustive list of all the embodiments. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0035] The present embodiment provides a wire cutting auxiliary vibration device, which can be used in a wire cutting device to apply auxiliary vibration to the cutting wire, thereby assisting the cutting process and improving cutting efficiency and cutting quality.

[0036] Wire cutting equipment uses cutting wires to cut workpieces to be cut. It can cut larger or longer workpieces to be cut into workpieces of appropriate sizes, such as a cutter; it can also cut cylindrical workpieces to be cut into workpieces with rectangular cross sections, such as a squarer; it can also cut workpieces with rectangular cross sections into a certain number of slices, such as a slicer. The cutting wire can be a thin wire coated with diamond abrasives.

[0037] The workpiece to be cut can be photovoltaic silicon (single crystal silicon rod, polycrystalline silicon ingot), quartz crystal, silicon carbide, semiconductor, silicon nitride, sapphire, magnetic material, ceramic, cemented carbide and other hard and brittle material workpieces.

[0038] This embodiment only takes silicon rods as the workpiece to be cut and cutters as the wire cutting equipment for explanation. Those skilled in the art can directly apply the solution provided in this embodiment to other wire cutting equipment to cut other types of workpieces; they can also make equivalent changes or replacements to the relevant technical features of the technical solution provided in this embodiment and apply them to other wire cutting equipment to cut other types of workpieces. These technical solutions after changes or replacements will fall within the protection scope of this application.

[0039] like Figure 1 As shown, the wire cutting device provided in this embodiment includes: a workpiece clamping table 1, a cutting device and a wire cutting auxiliary vibration device (referred to as a wire vibration device 7). The wire cutting device uses a cutting frame 4 as the main structure, and all components are arranged on the cutting frame 4.

[0040] The workpiece clamping table 1 is used to clamp the workpiece to be cut to prevent the workpiece to be cut from causing a large displacement during the cutting process. The workpiece to be cut is specifically a silicon rod 2 .

[0041] The cutting wire 31 is wound on the cutting device. The cutting device and the workpiece clamping table 1 can move relative to each other along the feeding direction. The cutting wire 31 moves rapidly on the cutting device according to a preset routing direction. The cutting wire 31 cuts the silicon rod 2 during the routing process.

[0042] The wire vibrating device 7 is in contact with the cutting wire 31 and applies ultrasonic vibration to the cutting wire 31 so that the cutting wire 31 generates high-frequency micrometer-level vibration.

[0043] like Figure 2 and Figure 3 As shown, the wire vibration device 7 provided in this embodiment includes: a vibration generator 71 and a transmission wheel. The vibration generator 71 is connected to a power source, and the power source supplies power to the vibration generator 71. The vibration generator 71 converts electrical energy into mechanical vibration along a first direction.

[0044] The vibration generator 71 includes a rotation drive end and a vibration output end 712. The rotation drive end is used to connect to a rotation driver (not shown in the figure). The vibration generator 71 can rotate with a first direction as the rotation center line under the rotation force provided by the rotation driver. The first direction is also the axial direction of the vibration generator 71. Figure 2 The cable 711 is used to connect a power source to supply power to the vibration generator 71.

[0045] The transmission wheel includes an axle 72 and a wheel disc 73, and the axle 72 and the wheel disc 73 are an integrated structure. The axle 72 extends along a first direction, one end of which is connected to the vibration output end 712 of the vibration generator 71, and the other end is fixedly connected to the end surface of the wheel disc 73. On the one hand, the axial vibration generated by the vibration generator 71 is transmitted to the wheel disc 73 through the axle 72, causing the wheel disc 73 to vibrate. On the other hand, the vibration generator 71, the axle 72 and the wheel disc 73 rotate axially together, so that the axial vibration transmitted to the wheel disc 73 is converted into radial vibration of the wheel disc 73, and the radial vibration is applied to the cutting line in contact with the wheel disc 73, driving the cutting line to generate high-frequency micron-level vibration. The process of vibration direction change can be referred to. Figure 2 Indicated by the double-headed arrows.

[0046] The technical solution provided in this embodiment uses a vibration generator to convert electrical energy into mechanical vibration. The wheel shaft is connected between the vibration generator and the wheel disc to transmit the mechanical vibration to the wheel disc. The vibration generator drives the wheel shaft and the wheel disc to rotate axially together, converts the axial vibration transmitted to the wheel disc into radial vibration of the wheel disc, and drives the cutting line to generate micron-level ultrasonic vibration, so as to further micro-process the workpiece in the process of cutting the workpiece to be cut by the cutting line, thereby assisting the cutting process of the cutting line. The micro-processing effect of ultrasonic vibration is conducive to reducing the macroscopic force of the cutting line on the workpiece, making the line bow control and cutting state of the cutting line more stable, thereby reducing the significant line marks on the cutting surface of the workpiece to be cut, making the cutting surface more consistent, thereby improving the cutting efficiency and cutting quality. In addition, the rolling contact between the wheel disc and the cutting line to transmit vibration reduces the routing resistance of the cutting line, and makes the peripheral surface of the wheel disc less likely to be damaged, prolongs the service life of the wheel disc, and reduces the restrictions on the routing and vibration of the cutting line.

[0047] The frequency of ultrasonic vibration is usually above 20,000 Hz. The frequency of ultrasonic vibration provided in this embodiment is above 20,000 Hz, which is called high-frequency ultrasonic vibration, and its amplitude is in the micron level.

[0048] When the wheel speed is controlled to be consistent with the cutting line speed, the friction between the two can be further reduced, thereby reducing the wear of the cutting line or the wheel surface, allowing the vibration device to work more stably, and improving cutting efficiency and cutting quality.

[0049] A specific implementation method: the main body of the vibration generator 71 is cylindrical, and its center line is the axial direction, which is also the first direction. The rotation drive end and the vibration output end 712 arranged at both ends of the vibration generator 71 are also cylindrical, and their diameters are smaller than the diameter of the main body of the vibration generator 71.

[0050] For the connection scheme of the axle 72 and the wheel disc 73, if the diameter of the end of the axle 72 connected to the wheel disc 73 gradually increases along the direction of the axle 72 toward the wheel disc 73, it is equivalent to that one end of the axle 72 is cylindrical, with a small diameter, and can achieve rapid rotation. The diameter of the end facing the wheel disc 72 gradually increases to increase the contact and connection area with the wheel disc 73, and improve the firmness of the connection between the wheel disc 73 and the axle 72.

[0051] Furthermore, the end of the axle 72 may be in a truncated cone shape or a trumpet shape. Figure 2 and Figure 3 In the embodiment, the generatrix of the end of the axle 72 connected to the wheel disc 73 is an arc, forming a bell-mouth shape. In the bell-mouth-shaped part, the diameter of the end away from the wheel disc 73 changes slowly, and the diameter of the end close to the wheel disc 73 changes quickly, which can convert the axial vibration into a 360° radial vibration.

[0052] The circumference of the wheel 73 can be a smooth surface or provided with an annular wire groove, in which the cutting wire can move. The wire groove can limit the cutting wire, so that vibration can always be applied to the cutting wire, and the cutting wire is always in a vibrating state, which can improve the consistency of the cutting surface of the silicon rod, thereby improving the cutting quality.

[0053] The vibration device can be mounted on the cutting frame 4 through a bracket. For example, the vibration device also includes a rotating support 74 connected between the wheel shaft 72 and the vibration generator 71. The rotating support 74 vibrates and rotates together with the wheel shaft 72. The rotating support 74 is used to be mounted on the bracket 41 so that the vibration device can rotate relative to the bracket 41. A bearing is provided between the rotating support 74 and the bracket 41. The vibration generator 71, the wheel shaft 72 and the rotating support 74 are an integrated structure.

[0054] One implementation is: both ends of the wheel disc 73 are connected to the wheel axle 72, wherein the wheel axle far from the vibration generator 71 is connected to another rotating support 74, and the rotating support 74 is also mounted on the bracket 41. Both ends of the wheel disc 73 are mounted on the bracket 41 through the rotating support 74, so that the wheel disc 73 rotates more balanced and has higher stability.

[0055] A specific solution: the top of the bracket 41 is fixed to the cutting frame 4 by bolts, and the bottom of the bracket 41 is provided with a vibration mounting seat 411, and the number of the vibration mounting seats 411 is consistent with the number of the rotating support members 74. Figure 2 and Figure 3 In the solution shown, two vibration mounting seats 411 are arranged opposite to each other, each vibration mounting seat is provided with a mounting hole 412 , and the mounting holes 412 on the two vibration mounting seats are coaxial.

[0056] The rotating support member 74 is cylindrical, and a limiting ring 741 is provided on the circumference of the end facing the wheel disc 73. The limiting ring 741 protrudes from the circumference. The rotating support members 74 at both ends of the wheel disc 73 are respectively limited in the mounting holes 412 by the limiting rings 741, so that the rotating support members 74 cannot be disengaged from the mounting holes 412, thereby improving the reliability of its installation.

[0057] The wire vibration device and wire cutting equipment provided in this embodiment can be produced, manufactured and sold as independent products. The implementation scheme of the wire cutting equipment refers to the above content and has the same technical effect as the wire vibration device.

[0058] The vibration frequency of the vibration generator 71 can be set according to the material of the silicon rod or the cutting line. For example, the vibration generator 71 is specifically an ultrasonic vibration generator, which can emit high-frequency ultrasonic vibration to drive the cutting line to generate high-frequency micron-level vibration. The wire vibration device 7 applies ultrasonic vibration to the cutting line along the feeding direction.

[0059] On the basis of the above technical solutions, the wire cutting equipment is further improved:

[0060] A first clamping table vibration device is also used to contact the workpiece clamping table 1. When the online cutting equipment is cutting normally, high-frequency ultrasonic vibration is applied to the workpiece clamping table 1, which can drive the workpiece clamping table 1 and the silicon rod 2 to generate high-frequency micron-level vibration. When the cutting line is routed to perform macro-grinding of the silicon rod, the cutting line 31 and the silicon rod 2 are both micro-processed, which can further reduce the significant line marks on the cutting surface of the silicon rod 2 and further improve the cutting efficiency and cutting quality.

[0061] Applying ultrasonic vibration directly to the workpiece clamp and indirectly to the workpiece to be cut can reduce vibration loss, more effectively exert the auxiliary effect of ultrasonic vibration, and be more conducive to obtaining faster cutting speed and higher cutting quality. There is no need to consider the resonance state of the workpiece to be cut, and it is compatible with workpieces of various materials and sizes to be cut, and has a wide range of applications.

[0062] Furthermore, the first clamping table vibration device applies ultrasonic vibration perpendicular to the feeding direction to the workpiece clamping table 1, which is perpendicular to the vibration generated by the wire vibration device 7, forming a two-dimensional vibration, which can further improve the cutting efficiency and cutting quality.

[0063] The wire cutting equipment can adopt a vertical cutting method or a horizontal cutting method. In the vertical cutting method, the silicon rod is arranged vertically, that is, the length direction of the silicon rod is arranged vertically or at a small angle to the vertical direction. In the horizontal cutting method, the silicon rod is arranged horizontally or at a small angle to the horizontal direction, that is, the length direction of the silicon rod is arranged horizontally at a small angle to the horizontal direction.

[0064] In this embodiment, the wire cutting device takes horizontal cutting as an example. The length direction of the silicon rod 2 is set in the horizontal direction, that is, perpendicular to the plane where the X direction and the Z direction in the figure are located. The X direction is the horizontal direction, also known as the width direction of the silicon rod 2. The Z direction is the vertical direction, also known as the height direction of the silicon rod. The cutting line 31 is arranged along the X direction or along the opposite direction of the X direction to cut the silicon rod 2.

[0065] In this embodiment, the workpiece clamping platform 1 has a top surface, a bottom surface and four side surfaces. The top surface of the workpiece clamping platform 1 is used to carry and clamp the silicon rod 2. The side surfaces of the workpiece clamping platform 1 are surfaces parallel to the feeding direction.

[0066] The cutting device and the workpiece clamping table 1 can move relative to each other along the vertical feeding direction. The cutting device can be stationary, and the workpiece clamping table 1 drives the silicon rod to move up and down; or the workpiece clamping table 1 can be stationary, and the cutting device can move up and down.

[0067] One implementation method is: using a feed drive mechanism to drive the workpiece clamp to move along the vertical feed direction. Figure 1 As shown, a feed drive mechanism 5 is provided at the bottom of the workpiece clamping table 1, and the feed drive mechanism 5 is used to drive the workpiece clamping table 1 to move up and down.

[0068] The driving feeding mechanism 5 can be driven by hydraulic, pneumatic or electric means, for example, a motor is used to drive a worm gear mechanism to drive the workpiece clamping table 1 to move up and down.

[0069] The wire vibrating device 7 is disposed on the cutting frame 4 and extends along the Z direction. The bottom end of the wheel disc 73 in the wire vibrating device 7 contacts the cutting wire.

[0070] The first clamping table vibration device can be fixed on the cutting frame 4, and the output end is in contact with the side of the workpiece clamping table 1. The vibration direction generated by the first clamping table vibration device is perpendicular to the feeding direction.

[0071] Specifically, the output end of the first clamping table vibration device contacts the side surface of the workpiece clamping table 1 which is perpendicular to the routing direction of the cutting line, so as to apply ultrasonic vibration along the routing direction (X direction) to the workpiece clamping table 1 .

[0072] Alternatively, the output end of the first clamping table vibration device contacts the side surface of the workpiece clamping table 1 which is parallel to the routing direction of the cutting line, so as to apply ultrasonic vibration perpendicular to the routing direction (Y direction) to the workpiece clamping table 1 .

[0073] Alternatively, two first clamping table vibration devices are used to act on the two side surfaces of the above-mentioned workpiece clamping table 1 respectively, and ultrasonic vibration is applied along the routing direction (X direction) and perpendicular to the routing direction (Y direction) during the routing process of the cutting line. The ultrasonic vibration in the Z direction applied to the cutting line by the wire vibration device 7 is combined to form a three-dimensional ultrasonic vibration, which can further enhance micromachining, thereby improving cutting efficiency, and can further improve the texture characteristics of the cut surface of the silicon rod and improve the cutting quality.

[0074] Furthermore, it also includes: a second clamping table vibration device, which contacts the bottom surface of the workpiece clamping table 1. The vibration direction generated by the second clamping table vibration device is parallel to the feed direction (Z direction), and can enable the workpiece clamping table 1 to drive the silicon rod to generate ultrasonic vibration along the feed direction, so that the silicon rod itself can generate three-dimensional ultrasonic vibration, and then combined with the ultrasonic vibration of the cutting line, auxiliary cutting is achieved, and the cutting efficiency and cutting quality are further improved.

[0075] On the basis of the above technical solution, a workpiece vibration device may also be used, the output end of which is used to contact the silicon rod 2 to apply ultrasonic vibration to the silicon rod 2. The output end of the workpiece vibration device contacts the side surface of the silicon rod 2, that is, contacts the surface parallel to the feeding direction, and is used to apply ultrasonic vibration perpendicular to the feeding direction to the silicon rod.

[0076] The vibration direction generated by the workpiece vibration device is parallel to or perpendicular to the routing direction (X direction) of the cutting line (Y direction). Specifically, the output end of the workpiece vibration device contacts the side of the silicon rod perpendicular to the routing direction of the cutting line to apply ultrasonic vibration along the routing direction (X direction) to the silicon rod; and / or, the output end of the workpiece vibration device contacts the side of the silicon rod parallel to the routing direction of the cutting line to apply ultrasonic vibration perpendicular to the routing direction (Y direction) to the silicon rod.

[0077] For example, when only the first clamping table vibration device is used to apply ultrasonic vibration in the routing direction (X direction) to the workpiece clamping table 1, the workpiece clamping table 1 and the silicon rod 2 are driven to generate ultrasonic vibration in the X direction. The workpiece vibration device is used to apply ultrasonic vibration perpendicular to the routing direction of the cutting line (Y direction) to the silicon rod 2, which can also achieve two-dimensional ultrasonic vibration of the silicon rod 2. In combination with the ultrasonic vibration in the feed direction applied to the cutting line by the wire vibration device, three-dimensional ultrasonic vibration-assisted cutting is achieved.

[0078] The above solution provided in this embodiment can select one-dimensional ultrasonic vibration, two-dimensional ultrasonic vibration or three-dimensional ultrasonic vibration for auxiliary cutting, which has higher flexibility. ft =A ft cos(ω ft *t), where A ft is the maximum amplitude, ω ft is the ultrasonic vibration angular frequency, and t is the time.

[0079] This embodiment also provides a cutting device implementation method: comprising at least two cutting wheels 32, with cutting wires wound on the cutting wheels 32. The cutting wire between the two cutting wheels 32 forms a cutting segment for cutting the silicon rod 2, and the wire vibration device 7 acts on the cutting segment. There may be two cutting wheels, or three or more.

[0080] Furthermore, a tension wheel 33 is used, and the cutting line is wound around the cutting wheel 32 and the tension wheel 33, and the tension wheel 33 is used to adjust the tension of the cutting line. Specifically, the position of the tension wheel 33 is adjustable, and it can be close to the cutting wheel 32 to reduce the tension of the cutting line, or it can be far away from the cutting wheel 32 to increase the tension of the cutting line.

[0081] Furthermore, a wire guide wheel 34 is used, which is arranged in a rectangular shape with the tension wheel 33 and the two cutting wheels 32 , and the cutting wire is wound around the wire guide wheel 34 , the tension wheel 33 and the two cutting wheels 32 .

[0082] The cutting wire 32 is wound around the cutting wheel to form a loop. The cutting wire 32 rotates clockwise or counterclockwise to perform cutting.

[0083] Alternatively, the cutting device further comprises: a pay-off and take-up roller, the cutting line is wound out from one pay-off and take-up roller, passes around each cutting wheel, and is then taken up by another pay-off and take-up roller, so as to achieve long-line cutting. The two pay-off and take-up rollers can alternately take up and pay out the line, so that the cutting line reciprocates between the two pay-off and take-up rollers for cutting.

[0084] Another solution is to use a pay-off and take-up roller, from which the cutting wire is released and then stored. The pay-off and take-up roller reciprocates along the axial direction to realize the release and storage of the cutting wire.

[0085] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0086] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0087] In this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or can communicate with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0088] Although the preferred embodiments of the present application have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the present application.

[0089] Obviously, those skilled in the art can make various changes and modifications to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application fall within the scope of the claims of the present application and their equivalents, the present application is also intended to include these modifications and variations.

Claims

1. A wire cutting auxiliary vibration device, characterized in that: include: A vibration generator, used for converting electrical energy into mechanical vibration along a first direction; the vibration generator comprises a rotation drive end and a vibration output end, the rotation drive end is used to be connected to the rotation driver, and the vibration generator can rotate with the first direction as the rotation center line under the action of the rotation force provided by the rotation driver; Transmission wheel; the transmission wheel includes a wheel disc and a wheel axle, the wheel axle extends along a first direction, one end of which is connected to the vibration output end of the vibration generator, and the other end is fixedly connected to the end surface of the wheel disc.

2. The wire cutting auxiliary vibration device according to claim 1, characterized in that: Along the direction from the wheel axle to the wheel disc, the diameter of the end portion of the wheel axle connected to the wheel disc gradually increases.

3. The wire cutting auxiliary vibration device according to claim 2, characterized in that: The generatrix of the end portion of the wheel axle connected to the wheel disc is an arc.

4. The wire cutting auxiliary vibration device according to any one of claims 1 to 3, characterized in that: Also includes: The rotating support is connected between the wheel shaft and the vibration generator; the rotating support is used to be installed on a bracket so that the vibration device can rotate relative to the bracket.

5. The wire cutting auxiliary vibration device according to claim 4, characterized in that: Both ends of the wheel disc are connected with wheel axles, and the wheel axle far away from the vibration generator is connected with another rotating support member, and both rotating support members can be installed on the bracket.

6. The wire cutting auxiliary vibration device according to claim 5, characterized in that: A limiting ring is arranged on the peripheral surface of the end of the rotating support member facing the wheel disc, and the limiting ring protrudes from the peripheral surface.

7. The wire cutting auxiliary vibration device according to claim 1, characterized in that: The circumferential surface of the wheel disc is provided with an annular wire groove.

8. A wire cutting device, characterized in that: include: A workpiece clamping table, used to clamp the workpiece to be cut; A cutting device for winding a cutting wire; The cutting device and the workpiece clamping table can move relative to each other along the feeding direction, and the cutting line is used to cut the workpiece to be cut during the routing process; According to the wire cutting auxiliary vibration device as described in any one of claims 1 to 7, the peripheral surface of the wheel disc of the transmission wheel is in contact with the cutting wire to apply vibration to the cutting wire.

9. The wire cutting device according to claim 8, characterized in that: Also includes: The bracket is provided with a vibration mounting seat, and the vibration mounting seat is provided with a mounting hole for accommodating a rotating support member.

10. The wire cutting device according to claim 9, characterized in that: There are two vibration mounting seats, which are arranged opposite to each other, and the mounting holes on the two vibration mounting seats are coaxial; the rotating support members located at both ends of the wheel disc are respectively arranged in one mounting hole.