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217results about How to "Reduce wire resistance" patented technology

Preparation method of micro-bridge structured infrared detector, and micro-bridge structure

The invention relates to a preparation method of a micro-bridge structured infrared detector, and a micro-bridge structure. The method comprises the steps that: a metal reflective layer and a sacrificial layer are sequentially deposited on an infrared detector readout circuit substrate; PI holes are etched on the sacrificial layer, wherein the PI holes are positioned at an out-leading electrode of the readout circuit; a deposition support layer, a thermo-sensitive layer and a protective layer are sequentially deposited on the sacrificial layer; through holes are prepared in the PI holes, and a contact hole is prepared on the protective layer; electrode layer metal is deposited on the protective layer, and U-shaped metals with bridge pier structures are filled in the PI holes and the through holes; and U-shaped metal structures are formed through photolithography and etching; photolithography and etching is carried out upon the electrode layer metal; a passivation layer is deposited on the surface of the device, and the passivation layer is subjected to photolithography and etching, such that a passivation layer pattern is formed; and sacrificial layer releasing is carried out, such that the micro-bridge structure is formed. According to the invention, a U-shape filling method is adopted, and Al is adopted as a filling material. Therefore, sputtering and depositing are easy, and etching is convenient. The heat insulation property of the detector is better than that of a copper filling process, and a CMP step is not needed.
Owner:WUXI INFISENSE PERCEPTION TECH CO LTD

Capacitance type touch screen and manufacturing method thereof

The invention relates to a capacitance type touch screen and a manufacturing method thereof. The capacitance type touch screen comprises a substrate, two sets of transparent conducting films of conducting wires, an insulating film and a metal bridging beam film. In the two sets of conducting wires, the first set of transparent conducting films are continuously arranged, and the second set of transparent conducting films are piecewise arranged by using the transparent conducting films of the first set as intervals. The insulating film covers the surfaces of the two sets of transparent conducting films, and the insulating film above each film section of the second set of transparent conducting films comprises a through hole. The metal bridging film is attached on the insulating film, crosses the first set of transparent conducting films and is connected with the second set of transparent conducting films which are arranged at intervals on both sides of the first set of transparent conducting films by passing through the through hole on the insulating film so as to form the continuous second conducting wires. The method comprises the following steps: manufacturing the first set of transparent conducting films, the second set of transparent conducting films, the insulating film and the metal bridging film to achieve the structure of the touch screen. The invention adopts the metal bridging film, thereby improving the continuity of the second set of conducting wires, reducing the resistance of the second set of conducting wires and the color difference of the touch screen and improving the performance of the touch screen and the product quality.
Owner:SHENZHEN LAIBAO HI TECH
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