Furnace door structure of vertical vacuum coating machine

Abstract

The utility model discloses a vertical vacuum coating machine furnace door structure which comprises two door plates, each door plate is provided with two adjusting blocks in an up-down symmetrical mode, a bidirectional threaded rod penetrates through the adjusting blocks, the two ends of the bidirectional threaded rod are respectively connected with a fixing plate, and the two ends of the bidirectional threaded rod are respectively provided with a fixing plate. The end, away from the two-way threaded rod, of the fixing plate is connected with a door frame. The door has the advantages that the upper side and the lower side of the door frame are each provided with one electric opening and closing assembly composed of the motor and the two-way threaded rod, so that stress on all positions of the door plate is more uniform in the opening and closing process, and meanwhile the sealing toothed plate and the sealing strip are matched to effectively increase the sealing area of the door plate after the door plate is closed; the sealing performance of the furnace door on the vertical continuous vacuum coating machine is greatly improved after the furnace door is closed, and the influence on the vacuum coating quality of flat plate-shaped parts is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of vertical vacuum coating machines, in particular to a furnace door structure of a vertical vacuum coating machine. Background Art

[0002] Vacuum coating machine mainly refers to a type of coating that needs to be carried out under a high vacuum degree. There are many types, including vacuum resistance heating evaporation, electron gun heating evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is to divide it into two types: evaporation and sputtering. Among them, vertical continuous vacuum coating machines are often used for vacuum coating of flat parts, and the furnace door is an indispensable component on the vertical continuous vacuum coating machine.

[0003] The furnace door on the current vertical continuous vacuum coating machine is mainly composed of a flat plate made of stainless steel. When in use, the furnace door is first fixed to the vertical continuous vacuum coating machine in a hinged manner, and then the furnace door is opened and closed on the vertical continuous vacuum coating machine with the help of an electric opening and closing connecting rod on the top of the furnace door. Although the furnace door of the above structure can seal the port of the vertical continuous vacuum coating machine, the furnace door is mainly driven by the upper connecting rod and then pressed on the vertical continuous vacuum coating machine when closing. The different forces on the upper and lower sides of the furnace door and the small sealing area of ​​the furnace door after closing may lead to poor sealing of the furnace door after closing, thereby affecting the vacuum coating quality of flat parts. Utility Model Content

[0004] 1. Technical issues to be resolved

[0005] The technical problem to be solved by the utility model is to provide a vertical vacuum coating machine furnace door structure that can effectively improve the sealing of the door panel after closing by means of lateral sliding and increasing the contact area in response to the current status of the prior art.

[0006] (II) Technical solution

[0007] The utility model is achieved through the following technical scheme: the utility model proposes a vertical vacuum coating machine furnace door structure, including door panels, there are two door panels, each of the door panels is equipped with two adjustment blocks in a vertically symmetrical manner, a two-way threaded rod passes through the adjustment block, both ends of the two-way threaded rod are respectively connected to a fixed plate, the fixed plate is connected to a door frame at one end away from the two-way threaded rod, a motor is installed on the fixed plate at the power input end facing the two-way threaded rod, two sealing tooth plates are symmetrically installed on the side wall of the door frame facing the door panel, each of the sealing tooth plates is provided with a sealing slide groove, and a sealing strip is installed at the matching position of the door panel with the sealing slide groove.

[0008] Furthermore, a screw hole is provided on the adjusting block at a position cooperating with the bidirectional threaded rod, and the bidirectional threaded rod passes through the screw hole and is screwed to the screw hole.

[0009] By adopting the above technical solution, after the bidirectional threaded rod rotates under the action of the motor, the sliding adjustment of the door panel along with the adjustment block can be achieved under the action of thread transmission.

[0010] Furthermore, the fixing plate is a 90° bent structure, and the bidirectional threaded rod is rotatably connected to the fixing plate.

[0011] By adopting the above technical solution, it can be ensured that the bidirectional threaded rod is reliably installed and fixed on the fixing plate.

[0012] Furthermore, the motor is connected to the corresponding fixing plate bolts, and the motor is connected to the bidirectional threaded rod coupling.

[0013] By adopting the above technical solution, the motor can be reliably mounted on the fixing plate, so that the rotation of the bidirectional threaded rod can be realized with the help of the motor.

[0014] Furthermore, the adjustment block is located on one side of the top end and the bottom end of the door panel, and the adjustment block has the same thickness as the door panel.

[0015] By adopting the above technical solution, the connection strength between the adjusting block and the door panel can be ensured, thereby preventing the adjusting block from breaking with the door panel during use.

[0016] Furthermore, the sealing strip is bonded to the door panel, and the sealing strip is made of a rubber strip.

[0017] By adopting the above technical solution, the sealing strip is the main component for sealing the door panel after closing.

[0018] Furthermore, the sealing tooth plate is connected to the door frame bolts, and the sealing slide groove is formed on the sealing tooth plate.

[0019] By adopting the above technical solution, the sealing strip and the sealing groove cooperate with each other to increase the sealing area of ​​the door panel after closing, thereby improving the sealing performance of the door panel after closing.

[0020] (III) Beneficial effects

[0021] Compared with the prior art, the utility model has the following beneficial effects:

[0022] In order to solve the problem that the furnace door on the current vertical continuous vacuum coating machine is mainly composed of a flat plate made of stainless steel, the furnace door is first fixed to the vertical continuous vacuum coating machine in a hinged manner when in use, and then the electric opening and closing connecting rod on the top of the furnace door is used to realize the opening and closing of the furnace door on the vertical continuous vacuum coating machine. Although the furnace door of the above structure can block the port of the vertical continuous vacuum coating machine, the furnace door is mainly driven by the upper connecting rod and then pressed on the vertical continuous vacuum coating machine when closing, which is easy to be affected by the different forces on the upper and lower sides of the furnace door and the furnace door The sealing area after closing is small, which leads to poor sealing of the furnace door after closing, thus affecting the quality of vacuum coating of flat parts. The utility model installs an electric opening and closing assembly consisting of a motor and a bidirectional threaded rod on the upper and lower sides of the door frame respectively, so that the force on the door panel is more uniform in various places during the opening and closing process. At the same time, the sealing tooth plate and the sealing strip cooperate to effectively increase the sealing area of ​​the door panel after closing, so that the sealing performance of the furnace door on the vertical continuous vacuum coating machine after closing is greatly improved, avoiding affecting the quality of vacuum coating of flat parts. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the furnace door structure of the vertical vacuum coating machine described in the utility model;

[0024] Figure 2 It is a structural schematic diagram of the door frame in the furnace door structure of the vertical vacuum coating machine described in the utility model;

[0025] Figure 3 It is a rear view of a door panel in the furnace door structure of the vertical vacuum coating machine described in the utility model.

[0026] The following are the descriptions of the reference numerals:

[0027] 1. Bidirectional threaded rod; 2. Door panel; 3. Door frame; 4. Motor; 5. Fixed plate; 6. Adjustment block; 7. Sealing tooth plate; 8. Sealing slide groove; 9. Sealing strip; 10. Screw hole. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the utility model more clear, the utility model is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model and are not used to limit the utility model.

[0029] like Figure 1-Figure 3As shown, the furnace door structure of the vertical vacuum coating machine in this embodiment includes a door panel 2. There are two door panels 2. Two adjusting blocks 6 are installed on each door panel 2 in a symmetrical manner. A two-way threaded rod 1 runs through the adjusting block 6. A fixing plate 5 is connected to both ends of the two-way threaded rod 1 respectively. The fixing plate 5 is connected to a door frame 3 at one end away from the two-way threaded rod 1. A motor 4 is installed at the power input end of the fixing plate 5 facing the two-way threaded rod 1. The motor 4 is mainly used to realize the rotation of the two-way threaded rod 1, so as to realize the automatic opening and closing of the door panel 2 during the rotation of the two-way threaded rod 1. Two sealing tooth plates 7 are symmetrically installed on the side wall of the door frame 3 facing the door panel 2. Each sealing tooth plate 7 is provided with a sealing slide groove 8, and a sealing strip 9 is installed at the matching position of the door panel 2 with the sealing slide groove 8.

[0030] like Figure 1-Figure 3 As shown, in the present embodiment, a screw hole 10 is further provided on the adjusting block 6 at the position cooperating with the bidirectional threaded rod 1, and the bidirectional threaded rod 1 passes through the screw hole 10 and is screwed to the screw hole 10. After the bidirectional threaded rod 1 rotates under the action of the motor 4, the sliding adjustment of the door panel 2 along with the adjusting block 6 can be realized under the action of the threaded transmission. The fixing plate 5 is a 90° bent structure, and the bidirectional threaded rod 1 is rotatably connected to the fixing plate 5, which can ensure that the bidirectional threaded rod 1 is reliably installed and fixed on the fixing plate 5.

[0031] like Figure 1-Figure 3 As shown, in this embodiment, the motor 4 is bolted to the corresponding fixed plate 5, and the motor 4 is connected to the two-way threaded rod 1 by a coupling, so that the motor 4 can be reliably installed on the fixed plate 5, so that the two-way threaded rod 1 can be rotated with the help of the motor 4, and the adjusting block 6 is located on one side of the top and bottom ends of the door panel 2, and the adjusting block 6 has the same thickness as the door panel 2, which can ensure the connection strength between the adjusting block 6 and the door panel 2, and avoid the adjustment block 6 and the door panel 2 from breaking during use. The sealing strip 9 is bonded to the door panel 2, and the sealing strip 9 is made of rubber strips. The sealing strip 9 is the main component for sealing the door panel 2 after closing. The sealing tooth plate 7 is bolted to the door frame 3, and the sealing slide groove 8 is formed on the sealing tooth plate 7.

[0032] The specific implementation process of this embodiment is as follows: when in use, first fix the door frame 3 at the opening on the vertical continuous vacuum coating machine, and connect the furnace door to the power supply and control components on the vertical continuous vacuum coating machine, and then the furnace door can be put into use. During use, an electric opening and closing assembly consisting of a motor 4 and a bidirectional threaded rod 1 is installed on the upper and lower sides of the door frame 3, so that the force on the door panel 2 is more uniform at all locations during the opening and closing process. At the same time, the sealing tooth plate 7 and the sealing strip 9 cooperate to effectively increase the sealing area of ​​the door panel 2 after closing, so that the sealing performance of the furnace door on the vertical continuous vacuum coating machine after closing is greatly improved, thereby avoiding affecting the vacuum coating quality of flat parts.

[0033] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The furnace door structure of the vertical vacuum coating machine is characterized by: The invention comprises a door panel (2), wherein there are two door panels (2), and each of the door panels (2) is provided with two adjusting blocks (6) in a vertically symmetrical manner, and a bidirectional threaded rod (1) passes through the adjusting block (6), and two ends of the bidirectional threaded rod (1) are respectively connected to a fixing plate (5), and one end of the fixing plate (5) away from the bidirectional threaded rod (1) is connected to a door frame (3), and a motor (4) is installed at the power input end of the fixing plate (5) facing the bidirectional threaded rod (1), and two sealing tooth plates (7) are symmetrically installed on the side wall of the door frame (3) facing the door panel (2), and each of the sealing tooth plates (7) is provided with a sealing slide groove (8), and a sealing strip (9) is installed at a portion of the door panel (2) that cooperates with the sealing slide groove (8).

2. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: A screw hole (10) is also provided on the adjusting block (6) at a position cooperating with the bidirectional threaded rod (1), and the bidirectional threaded rod (1) passes through the screw hole (10) and is screwed to the screw hole (10).

3. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: The fixing plate (5) is a 90° bent structure, and the bidirectional threaded rod (1) is rotatably connected to the fixing plate (5).

4. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: The motor (4) is bolted to the corresponding fixing plate (5), and the motor (4) is coupled to the bidirectional threaded rod (1).

5. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: The adjustment block (6) is located on one side of the top end and the bottom end of the door panel (2), and the adjustment block (6) has the same thickness as the door panel (2).

6. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: The sealing strip (9) is bonded to the door panel (2), and the sealing strip (9) is made of a rubber strip.

7. The furnace door structure of the vertical vacuum coating machine according to claim 1, characterized in that: The sealing tooth plate (7) is bolted to the door frame (3), and the sealing sliding groove (8) is formed on the sealing tooth plate (7).

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