Polycrystalline silicon production tail gas treatment device
By adopting staged cooling and compression devices in the exhaust gas treatment process of polycrystalline silicon production, the problem of excessive cooling capacity consumption in traditional exhaust gas treatment is solved, and more efficient energy utilization and energy consumption are achieved.
Patent Information
- Application Number
- CN202420668013.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-02
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-04-02
AI Technical Summary
The cooling capacity consumption is too much during the exhaust gas treatment process of traditional polysilicon production, resulting in high energy consumption.
A polycrystalline silicon production exhaust gas treatment device is used, which is first cooled in a heat exchanger first, then compressed in a hydrogen press, and then deeply cooled and condensed in a heat exchanger second, achieving gas-liquid separation.
Through phased cooling and compression, the device effectively reduces cooling consumption, achieving the purpose of energy saving and consumption reduction. The larger the output, the more obvious the energy saving effect.
Smart Images
Figure CN222586021U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to single crystal silicon production, in particular to a polycrystalline silicon production tail gas treatment device. Background Art
[0002] Single crystal silicon refers to a silicon material that is made by arranging silicon atoms in silicon melt into a crystal structure through a specific production method. It has high purity, high stability and excellent electrical properties, and is widely used in semiconductors, solar cells and other fields.
[0003] At present, the tail gas treatment process of most enterprises in polysilicon production is to first perform deep cooling and condensation, gas-liquid separation, and then hydrogen compression, and then perform deep cooling and condensation again to achieve the purpose of separating hydrogen and chlorosilane in the tail gas; in the existing technology, the tail gas treatment process of polysilicon production enterprises is to first perform deep cooling and condensation before the hydrogen compressor inlet to achieve most of the gas-liquid separation; however, the pressure before the hydrogen compressor inlet is relatively low, and cooling and condensation is not easy. Although the energy has been relatively fully recovered and utilized, it will still consume more cooling capacity. Utility Model Content
[0004] 1. Technical issues to be resolved
[0005] In view of the shortcomings of the prior art, the utility model provides a polysilicon production tail gas treatment device, which first passes through a heat exchanger for shallow cooling, then undergoes hydrogen compression by a hydrogen compressor, and then undergoes deep cooling and condensation through a heat exchanger for greater energy saving, solving the problem of excessive cooling consumption during traditional polysilicon tail gas treatment and recovery.
[0006] (II) Technical solution
[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a polysilicon production tail gas treatment device, including a condensation component; the condensation component includes: a heat exchanger 1, a storage tank 1 is provided at the discharge port; a hydrogen compressor, the storage tank 1 discharge port is connected to the hydrogen compressor feed port; a heat exchanger 2, the hydrogen compressor discharge port is connected to the heat exchanger 2 feed port; a storage tank 3, the heat exchanger 2 discharge port is connected to the storage tank 3 feed port; a pipeline, the heat exchanger 1, the storage tank 1, the hydrogen compressor, the heat exchanger 2, and the storage tank 3 are all connected in sequence through the pipeline.
[0008] In some embodiments, the condensation component also includes: a three-way valve is arranged on a pipeline connected to the feed inlet and the discharge port of storage tank one; storage tank two is connected in parallel with storage tank one through the three-way valve.
[0009] In some embodiments, the condensation component further includes: two ends of the reflux pipe are respectively connected to pipes connected to two ends of the hydrogen compressor.
[0010] In some embodiments, the condensation component further includes: a reflux valve disposed on the reflux pipe.
[0011] In some embodiments, the condensation component further includes: a one-way valve disposed on a pipeline connected to the inlet end of the hydrogen compressor.
[0012] In some embodiments, the power of heat exchanger one is less than the power of heat exchanger two.
[0013] In some embodiments, the walls of the pipes connected to the outlet of the hydrogen compressor are thickened.
[0014] In some embodiments, the condensation component further includes: an adsorption tower connected to the third outlet end of the storage tank via a pipeline.
[0015] (III) Beneficial effects
[0016] Compared with the prior art, the utility model provides a polysilicon production tail gas treatment device, which has the following beneficial effects:
[0017] The utility model first performs shallow cooling through heat exchanger 1. The power of heat exchanger 1 is slightly lower, but it is sufficient to cool the chlorosilane in the polysilicon production process into storage tank 1. The uncondensed gas enters the hydrogen compressor for compression, and then passes through heat exchanger 2 for deep cooling and condensation. The power of heat exchanger 2 is relatively large, and the residual chlorosilane can be further condensed and stored in storage tank 2, so as to finally achieve the purpose of gas-liquid separation and energy saving and consumption reduction. Moreover, the greater the output, the greater the energy saving, which solves the problem of excessive cold consumption in traditional polysilicon tail gas treatment and recovery. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a structural schematic diagram of the overall process of the utility model;
[0019] Figure 2 This is a schematic diagram of the process structure of the utility model after the storage tank 2 and the adsorption tower are additionally installed.
[0020] In the figure:
[0021] 1. Condensation assembly; 11. Heat exchanger 1; 12. Storage tank 1; 13. Storage tank 2; 14. Hydrogen compressor; 15. Heat exchanger 2; 16. Storage tank 3; 17. Adsorption tower; 18. Pipeline; 181. Three-way valve; 182. Check valve; 19. Reflux pipe; 191. Reflux valve. DETAILED DESCRIPTION
[0022] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0023] It should be noted that all directional indications in the embodiments of the present application are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.
[0024] In this application, unless otherwise clearly specified and limited, the terms "connection", "fixation", etc. should be understood in a broad sense. For example, "fixation" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.
[0025] In addition, in this application, descriptions such as "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the ability of ordinary technicians in this field to implement them. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.
[0026] At present, the tail gas treatment process of most enterprises in polysilicon production is to first perform deep cooling and condensation, gas-liquid separation, hydrogen compression, and then deep cooling and condensation again to achieve the purpose of separating hydrogen and chlorosilane in the tail gas.
[0027] In the related technology, the tail gas treatment process of polysilicon production enterprises first performs deep cooling and condensation before the hydrogen compressor inlet to achieve most of the gas-liquid separation; however, the pressure before the hydrogen compressor inlet is low, and cooling and condensation are not easy. Although the energy has been relatively fully recovered and utilized, it will still consume more cooling capacity.
[0028] In order to solve the problems in the related technology to a certain extent, the embodiment of the present application provides a polysilicon production exhaust gas treatment device, which uses a heat exchanger 11 to condense, separate gas and liquid, and then compress hydrogen, and then perform deep cooling and condensation to achieve the purpose of energy saving and consumption reduction. The greater the output, the greater the energy saving.
[0029] The present application is described below with reference to the accompanying drawings and specific embodiments:
[0030] Combination Figure 1-Figure 2 The embodiment of the present application provides a polysilicon production tail gas treatment device, including a condensation component 1; the condensation component 1 includes: a heat exchanger 11, a storage tank 12 is provided at the discharge port; a hydrogen compressor 14, the discharge port of the storage tank 12 is connected to the feed port of the hydrogen compressor 14; a heat exchanger 2 15, the discharge port of the hydrogen compressor 14 is connected to the feed port of the heat exchanger 2 15; a storage tank 3 16, the discharge port of the heat exchanger 2 15 is connected to the feed port of the storage tank 3 16; a pipeline 18, the heat exchanger 11, the storage tank 12, the hydrogen compressor 14, the heat exchanger 2 15, and the storage tank 3 16 are all connected in sequence through the pipeline 18.
[0031] During the use of the device, the high-temperature exhaust gas from the reduction furnace outlet after the polysilicon production is completed is firstly introduced into the inlet of heat exchanger 11 for preliminary condensation. The condensed chlorosilane liquid will be stored in storage tank 12, and then the uncooled gas will continue to enter the hydrogen compressor 14 from the outlet of storage tank 12 for compression, and then enter the heat exchanger 2 15 for further condensation. Finally, the cooled chlorosilane is stored in storage tank 3 16.
[0032] After the production of polysilicon is completed, the high-temperature exhaust gas (155℃, 0.55MPA) from the outlet of the reduction furnace comes to the device, and is first cooled and condensed through the heat exchanger 11, and the temperature is reduced to (temperature 8℃, pressure 0.52MPA). A small amount of chlorosilane liquid condenses and is stored in the storage tank 1, and the uncondensed gas enters the hydrogen compressor 14 for compression. After compression, the pressure reaches 1.45MPA, and then passes through the heat exchanger 2 15 for cooling (temperature is -80℃), and the condensed chlorosilane liquid is finally stored in the storage tank 3 16.
[0033] Specifically, the following is a comparison of energy consumption between the existing tail gas treatment device and the utility model.
[0034] The following table shows the calculation of the existing equipment processing process:
[0035]
[0036] The following table shows the calculation of the processing process of the utility model:
[0037]
[0038] From the above two tables, we can see that the heat exchanger comparison result is: 12330-10931=1399KW, the load decreases by 11.3%, and according to the energy consumption ratio of 2.5, 1399÷2.5=559.6KW. Energy consumption is saved by 559.6KW (electricity) per hour.
[0039] Energy consumption comparison of hydrogen compressor 14: 1872-1834=38KW, load increase of 2%.
[0040] In summary, the method of the present invention can save (559.6-38)×8000=4.1728 million KW (electricity) per year based on 8000 hours per year.
[0041] In some embodiments, the condensation component 1 also includes: a three-way valve 181 is arranged on the pipeline 18 connected to the feed port and the discharge port of the storage tank 12; the storage tank 13 is connected in parallel with the storage tank 12 through the three-way valve 181; the purpose of this arrangement is to achieve the replacement of the storage tank 12 when it is fully loaded. At that time, it is only necessary to rotate the three-way valve 181 to make the heat exchanger 11 of the device communicate with the storage tank 2 13, and then connect the storage tank 2 13 to the hydrogen compressor 14, so that the storage tank 12 can be replaced for transportation, and then a new storage tank can be placed.
[0042] In some embodiments, the condensation component 1 further includes: both ends of a reflux pipe 19 are respectively connected to a pipe 18 connected to both ends of the hydrogen compressor 14; the reflux pipe 19 prevents excessive pressure in the pipe 18 from damaging the pipe 18 or the entire process.
[0043] In some embodiments, the condensing component 1 further includes: a reflux valve 191 disposed on the reflux pipe 19, and the reflux valve 191 is provided with a safety threshold, and when a certain pressure is reached, it will open to perform pressure reduction reflux.
[0044] In some embodiments, the condensation component 1 further includes: a one-way valve 182 disposed on a pipe 18 connected to an inlet end of the hydrogen compressor 14, and the one-way valve 182 prevents gas from flowing back during reflux to maintain normal operation of the device.
[0045] In some embodiments, the power of heat exchanger 11 is smaller than that of heat exchanger 2 15, and the initial cooling and condensation is performed using a heat exchanger with a smaller power to avoid wasting cooling capacity.
[0046] In some embodiments, the wall of the pipeline 18 connected to the outlet end of the hydrogen compressor 14 is thickened to prevent the pipeline 18 from being damaged due to excessive pressure in the pipeline 18 after compression by the hydrogen compressor.
[0047] In some embodiments, the condensation component 1 also includes: an adsorption tower 17 is connected to the outlet end of the storage tank three 16 through a pipeline 18. The adsorption tower 17 processes the final exhaust gas discharged. Because no matter how good the exhaust gas treatment method is, it cannot achieve 100% recovery, there will inevitably be some residues and some polluted substances will be released. At this time, the adsorption tower 17 is needed for final treatment and then discharged after meeting the emission standards.
[0048] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification.
[0049] In addition, the technical solutions between the various embodiments can be combined with each other, but they must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by this application.
[0050] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A polysilicon production tail gas treatment device, characterized in that: The invention comprises a condensation component (1); the condensation component (1) comprises: A heat exchanger (11), wherein a storage tank (12) is disposed at the outlet of the heat exchanger (11); A hydrogen compressor (14), wherein the discharge port of the storage tank (12) is connected to the feed port of the hydrogen compressor (14); Heat exchanger 2 (15), the outlet of the hydrogen compressor (14) is connected to the inlet of the heat exchanger 2 (15); Storage tank three (16), the outlet of heat exchanger two (15) is connected to the feed inlet of storage tank three (16); The pipeline (18), the heat exchanger 1 (11), the storage tank 1 (12), the hydrogen compressor (14), the heat exchanger 2 (15), and the storage tank 3 (16) are all connected in sequence through the pipeline (18).
2. A polysilicon production tail gas treatment device according to claim 1, characterized in that: The condensation component (1) further comprises: A three-way valve (181) is disposed on the pipeline (18) connected to the feed inlet and the discharge outlet of the storage tank (12); Storage tank 2 (13) is connected in parallel with storage tank 1 (12) via the three-way valve (181).
3. The polysilicon production tail gas treatment device according to claim 1, characterized in that: The condensation component (1) further comprises: The two ends of the reflux pipe (19) are respectively connected to the pipeline (18) connected to the two ends of the hydrogen compressor (14).
4. A polysilicon production tail gas treatment device according to claim 3, characterized in that: The condensation component (1) further comprises: The reflux valve (191) is arranged on the reflux pipe (19).
5. The polysilicon production tail gas treatment device according to claim 1, characterized in that: The condensation component (1) further comprises: A one-way valve (182) is provided on the pipeline (18) connected to the inlet end of the hydrogen compressor (14).
6. The polysilicon production tail gas treatment device according to claim 1, characterized in that: The power of the heat exchanger 1 (11) is less than the power of the heat exchanger 2 (15).
7. The polysilicon production tail gas treatment device according to claim 1, characterized in that: The pipe (18) connected to the outlet end of the hydrogen compressor (14) has a thickened wall.
8. The polysilicon production tail gas treatment device according to claim 1, characterized in that: The condensation component (1) further comprises: The adsorption tower (17) is connected to the outlet end of the storage tank three (16) through the pipeline (18).