Bidirectional movement mechanism, material taking assembly and semiconductor processing equipment

Abstract

The utility model discloses a bidirectional movement mechanism, a material taking assembly and semiconductor processing equipment. The bidirectional movement mechanism comprises a first linear transfer module and a second linear transfer module. The first linear transferring module comprises a first linear motor and a first motor sliding block, the length of the first linear motor extends in the first direction, a first assembly connecting part is arranged at the top of the first linear motor, and a first sliding rail and a first magnetic rail are arranged on the bottom face of the first linear motor; the first motor sliding block is installed on the first sliding rail and is coupled with the first magnetic rail. The second linear transferring module comprises a second linear motor and a second motor sliding block, the second linear motor is installed on the first motor sliding block, a second sliding rail and a second magnetic rail are arranged on the bottom face of the second linear motor, the second motor sliding block is installed on the second sliding rail and coupled with the second magnetic rail, and a second assembly connecting part is arranged on the second motor sliding block. The structure can be simplified, the moving sensitivity is improved, and therefore the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing equipment, in particular to a bidirectional motion mechanism, a material taking component and semiconductor processing equipment. Background Art

[0002] Most of the existing XY axis transfer mechanisms are driven by chain drive or lead screw with guide rail slider motor. This transmission method has low efficiency, low transfer accuracy and slow transfer speed. Because chain drive or lead screw needs to be used with servo motor, the installation of the motor takes up a lot of space. Due to the limitations of its structure, space, cost and other factors, it is difficult to ensure the transfer accuracy with the traditional transmission method. Moreover, the module is relatively complex in structure, requires more transmission mechanisms, and has low movement sensitivity, high cost, low efficiency, and inconvenient operation. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a bidirectional motion mechanism, a material taking component and a semiconductor processing device, which can simplify the structure, improve the movement sensitivity, and thus improve the working efficiency.

[0004] On the one hand, an embodiment of the utility model provides a bidirectional motion mechanism, comprising:

[0005] A first linear transfer module, comprising a first linear motor and a first motor slider, wherein the length of the first linear motor extends along a first direction, a first assembly connection portion is disposed on the top of the first linear motor, a first slide rail and a first magnetic rail are disposed on the bottom of the first linear motor, and the first motor slider is mounted on the first slide rail and coupled with the first magnetic rail;

[0006] The second linear transfer module includes a second linear motor and a second motor slider. The second linear motor is installed on the first motor slider, and the length of the second linear motor extends along a second direction. The second direction and the first direction are perpendicular to each other in a horizontal plane. The bottom surface of the second linear motor is provided with a second slide rail and a second magnetic rail. The second motor slider is installed on the second slide rail and coupled with the second magnetic rail. The second motor slider is provided with a second assembly connection portion.

[0007] According to some embodiments of the present invention, the first linear transfer module further includes a third motor slider, and the third motor slider is installed on the first slide rail and coupled with the first magnetic rail.

[0008] According to some embodiments of the utility model, a third linear transfer module is installed on the third motor slider, and the third linear transfer module includes a third linear motor and a fourth motor slider. The third linear motor is connected to the third motor slider, and the length of the third linear motor extends along the second direction. The bottom surface of the third linear motor is provided with a third slide rail and a third magnetic rail. The fourth motor slider is installed on the third slide rail and coupled with the third magnetic rail, and a third assembly connection portion is provided on the fourth motor slider.

[0009] According to some embodiments of the present invention, first anti-collision buffer components are provided on opposite sides of the second linear motor and the third linear motor.

[0010] According to some embodiments of the present invention, the first anti-collision buffer member is made of anti-collision rubber or a hydraulic buffer.

[0011] According to some embodiments of the present invention, second anti-collision buffer components are installed on the first linear motor and at both ends of the first slide rail.

[0012] According to some embodiments of the present invention, the second anti-collision buffer member is made of anti-collision rubber or a hydraulic buffer.

[0013] According to some embodiments of the present invention, a first grating ruler is installed on the first linear motor and located on the adjacent side of the first slide rail.

[0014] On the other hand, an embodiment of the utility model provides a material picking assembly, including a material picking head and the above-mentioned bidirectional motion mechanism, and the material picking head is connected to the second motor slider through the second assembly connection part.

[0015] On the other hand, an embodiment of the present invention provides a semiconductor processing equipment, including the above-mentioned material taking component.

[0016] The embodiments of the present invention have at least the following beneficial effects:

[0017] The first linear motor and the second linear motor are used as driving parts, and the corresponding motor sliders are driven by the magnetic track. The structure is simple, the response and transfer speed are fast, the movement sensitivity is high, and the work efficiency is improved.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0020] Figure 1 This is one of the structural schematic diagrams of the bidirectional motion mechanism of an embodiment of the utility model;

[0021] Figure 2 This is the second structural schematic diagram of the bidirectional motion mechanism of the embodiment of the utility model (viewed from above);

[0022] Figure 3 This is the third structural diagram of the bidirectional motion mechanism of the embodiment of the utility model (viewed from above);

[0023] Figure 4 for Figure 3 The middle circle shows a partial enlarged view of position B;

[0024] Figure 5 for Figure 2 The middle circle shows a partial enlarged view of position A.

[0025] Reference numerals:

[0026] The first linear transfer module 100, the first linear motor 110, the first assembly connection part 111, the first slide rail 112, the first magnetic rail 113, the third motor slider 120, the second linear transfer module 200, the second linear motor 210, the second slide rail 211, the second magnetic rail 212, the second motor slider 220, the third linear transfer module 300, the third linear motor 310, the third slide rail 311, the third magnetic rail 312, the fourth motor slider 320, the first anti-collision buffer 410, and the second anti-collision buffer 420. DETAILED DESCRIPTION

[0027] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0028] In the description of the present invention, it should be understood that the descriptions involving orientations, such as the orientations or positional relationships indicated by X, Y, Z, etc., are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0029] In the description of the present utility model, "several" means one or more, "multiple" means more than two, greater than, less than, and exceeding are understood as not including the number itself, and "above", "below", and "within" are understood as including the number itself. If there is a description of "first", "second", etc., it is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0030] In the description of the present invention, unless otherwise clearly defined, words such as “setting”, “installation”, and “connection” should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above words in the present invention based on the specific content of the technical solution.

[0031] With the development of industrial automation, people have put forward higher requirements for the degree of automation of equipment. At present, many domestic factories have begun to use automatic material handling and unloading manipulators to replace manual operations on automated production lines to reduce human labor intensity. However, due to the limitations of traditional technology, the existing material handling and unloading equipment has the following problems on production lines that require high-precision production: if precision is pursued, the speed is not fast, which affects production efficiency; if the speed is increased, the accuracy decreases and the material cannot be accurately unloaded, resulting in an increase in the failure rate of the production line. The automatic unloading and unloading system is composed of an XY-axis transfer mechanism that moves in the X and Y directions, and at the same time drives the Z-axis transfer mechanism to move in the Z direction. The material handling and unloading actions at the specified position are completed according to the position obtained by the visual system, so as to achieve the purpose of replacing manual unloading and unloading with machines.

[0032] In the related art, the assembly structure of the XY-axis transfer mechanism is to first install the X-axis transfer mechanism on a machine platform, and then install the Y-axis transfer mechanism on the X-axis transfer mechanism. Therefore, after the material picking machine head absorbs the material, the X-axis transfer mechanism needs to drive the overall structure of the Y-axis transfer mechanism to move to the precise area where the material is placed. At this time, due to the heavy weight of the overall structure, if the Y-axis transfer mechanism moves too fast, it will cause large vibration of the machine platform, poor accuracy, and insufficient stability, which will easily lead to deviations in the process of picking and placing materials, damage to the materials, and damage to the machine platform.

[0033] Most of the existing XY axis transfer mechanisms are driven by chain transmission or screw rods in conjunction with guide rail slider motors. This transmission method has low efficiency, low transfer accuracy, and slow transfer speed. Because the chain transmission or screw rod needs to be used in conjunction with a servo motor, the installation of the servo motor takes up a lot of space. Due to limitations of its structure, space, cost and other factors, it is difficult to ensure transfer accuracy with traditional transmission methods. Moreover, the module is relatively complex in structure, requires more transmission mechanisms, and has low movement sensitivity, high cost, low efficiency, and is inconvenient to operate. To this end, the present embodiment discloses a bidirectional motion mechanism, a material picking assembly, and semiconductor processing equipment, which can simplify the structure, improve movement sensitivity, and thus improve work efficiency.

[0034] This embodiment discloses a semiconductor processing device, such as chip or module testing and sorting, optical module or SiC (silicon carbide) or IGBT (insulated gate bipolar transistor) module packaging equipment, the semiconductor processing device includes a material picker head and a bidirectional motion mechanism. Please refer to Figure 1 The bidirectional motion mechanism includes a first linear transfer module 100 and a second linear transfer module 200 .

[0035] Please refer to Figure 1 and Figure 2 The first linear transfer module 100 includes a first linear motor 110 and a first motor slider. The length of the first linear motor 110 extends along the first direction. A first assembly connection portion 111, such as an assembly hole, an assembly groove or a connecting plate, is provided on the top of the first linear motor 110. The first linear motor 110 can be installed on the gantry through the first assembly connection portion 111, thereby realizing the assembly of the first linear transfer module 100. The bottom surface of the first linear motor 110 is provided with a first slide rail 112 and a first magnetic rail 113. The first motor slider is installed on the first slide rail 112 and coupled with the first magnetic rail 113. The second linear transfer module 200 includes a second linear motor 210 and a second motor slider 220. The second linear motor 210 is mounted on the first motor slider, and the length of the second linear motor 210 extends along a second direction. The second direction and the first direction are perpendicular to each other in a horizontal plane, wherein the first direction indicates the Y-axis direction, and the second direction indicates the X-axis direction. The bottom surface of the second linear motor 210 is provided with a second slide rail 211 and a second magnetic rail 212. The second motor slider 220 is mounted on the second slide rail 211 and coupled with the second magnetic rail 212. The second motor slider 220 is provided with a second assembly connection portion, such as an assembly hole or an assembly groove, and the material reclaimer head is connected to the second motor slider 220 through the second assembly connection portion. The first linear motor 110 and the second linear motor 210 are used as driving parts, and the corresponding motor sliders are driven by the magnetic rails. The structure is simple, with a faster response and transfer speed, high movement sensitivity, and is conducive to improving work efficiency.

[0036] It is worth mentioning that a linear motor is a device that directly converts electrical energy into mechanical energy of linear motion. The motor slider moves along the slide rail through the magnetic coupling between the magnetic track and the motor slider. It adopts full linear motion technology and has controllable axis acceleration and speed to ensure fast and accurate processing. It does not need to go through an intermediate conversion mechanism to directly generate linear motion, which greatly simplifies the structure, reduces the motion inertia, greatly improves the dynamic response performance and positioning accuracy, and saves costs, making manufacturing and maintenance easier. There is no mechanical contact during movement, so the moving part of the motor slider is free of friction and noise. In this way, there is no wear of transmission parts, which can greatly reduce mechanical losses, avoid noise caused by towing cables, steel cables, gears and pulleys, etc., require little or no maintenance, and have a longer service life. In addition, the first linear transfer module 100 and the second linear module are used to realize the dual-axis transfer of the X-axis and the Y-axis, and the dual axes work in coordination with each other to improve work efficiency.

[0037] Please refer to Figure 3 and Figure 4 The first linear transfer module 100 also includes a third motor slider 120, which is mounted on the first slide rail 112 and coupled to the first magnetic rail 113. More mechanisms can be installed on the third motor slider 120 to achieve multi-mechanism collaborative work. Exemplarily, a third linear transfer module 300 is installed on the third motor slider 120, and the third linear transfer module 300 includes a third linear motor 310 and a fourth motor slider 320. The third linear motor 310 is connected to the third motor slider 120, and the length of the third linear motor 310 extends along the second direction. The bottom surface of the third linear motor 310 is provided with a third slide rail 311 and a third magnetic rail 312. The fourth motor slider 320 is installed on the third slide rail 311 and coupled to the third magnetic rail 312. The fourth motor slider 320 is provided with a third assembly connection portion. The number of material reclaimer heads can be one or more. For example, the number of material reclaimer heads is two. The two material reclaimer heads are respectively installed on the second motor slider 220 through the second assembly connection part and on the fourth motor slider 320 through the third assembly connection part, thereby realizing the coordinated work of multiple material reclaimer heads, which is beneficial to improving work efficiency.

[0038] Please continue to refer to Figure 3 and Figure 4, the first anti-collision buffer 410 is provided on the opposite side of the second linear motor 210 and the third linear motor 310. Exemplarily, the first anti-collision buffer 410 is installed on the second linear motor 210, or the first anti-collision buffer 410 is installed on the third linear motor 310, or the first anti-collision buffer 410 is installed on both the second linear motor 210 and the third linear motor 310, so that the second linear module and the third linear module can play an anti-collision buffer role when they are close to each other, so that the limit distance between the second linear module and the third linear module is smaller, which is beneficial to enhancing the movement performance of the second linear transfer module 200 and the third linear transfer module 300. Among them, the first anti-collision buffer 410 adopts anti-collision glue or hydraulic buffer, and adopts a passive anti-collision structure to play an anti-collision buffer role between the second linear motor 210 and the third linear motor 310, and does not require energy consumption, and does not require active triggering, which is beneficial to improve the reliability of anti-collision.

[0039] Please refer to Figure 2 and Figure 5 A second anti-collision buffer 420 is installed on the first linear motor 110 and at both ends of the first slide rail 112. The second anti-collision buffer 420 can provide anti-collision buffering for the second linear motor 210 or the third linear motor 310 to prevent damage caused by excessive movement. Exemplarily, the second anti-collision buffer 420 uses anti-collision rubber or a hydraulic buffer. The passive anti-collision structure can play an anti-collision buffering role without energy consumption and active triggering, which is conducive to improving the reliability of anti-collision.

[0040] A first grating ruler is installed on the first linear motor 110 and adjacent to the first slide rail 112, which can accurately identify the moving position of the first motor slider, which is beneficial to improving the motion accuracy and repeatability. The number of the first grating ruler can be one or more. When the third motor slider 120 is installed, the first grating ruler can identify the moving position of the first motor slider and the third motor slider 120. Similarly, a second grating ruler is installed on the second linear motor 210, and a third grating ruler is installed on the third linear motor 310.

[0041] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A bidirectional motion mechanism, characterized in that: include: A first linear transfer module (100) comprises a first linear motor (110) and a first motor slider, wherein the length of the first linear motor (110) extends along a first direction, a first assembly connection portion (111) is provided on the top of the first linear motor (110), a first slide rail (112) and a first magnetic rail (113) are provided on the bottom of the first linear motor (110), and the first motor slider is mounted on the first slide rail (112) and coupled to the first magnetic rail (113); The second linear transfer module (200) comprises a second linear motor (210) and a second motor slider (220); the second linear motor (210) is mounted on the first motor slider, and the length of the second linear motor (210) extends along a second direction, the second direction and the first direction are perpendicular to each other in a horizontal plane, a second slide rail (211) and a second magnetic rail (212) are provided on the bottom surface of the second linear motor (210), the second motor slider (220) is mounted on the second slide rail (211) and coupled to the second magnetic rail (212), and a second assembly connection portion is provided on the second motor slider (220).

2. The bidirectional motion mechanism according to claim 1, characterized in that: The first linear transfer module (100) further comprises a third motor slider (120), wherein the third motor slider (120) is mounted on the first slide rail (112) and coupled to the first magnetic rail (113).

3. The bidirectional motion mechanism according to claim 2, characterized in that: A third linear transfer module (300) is installed on the third motor slider (120), and the third linear transfer module (300) comprises a third linear motor (310) and a fourth motor slider (320). The third linear motor (310) is connected to the third motor slider (120), and the length of the third linear motor (310) extends along the second direction. A third slide rail (311) and a third magnetic rail (312) are provided on the bottom surface of the third linear motor (310). The fourth motor slider (320) is installed on the third slide rail (311) and coupled with the third magnetic rail (312). A third assembly connection portion is provided on the fourth motor slider (320).

4. The bidirectional motion mechanism according to claim 3, characterized in that: A first anti-collision buffer (410) is provided on the opposite side of the second linear motor (210) and the third linear motor (310).

5. The bidirectional motion mechanism according to claim 4, characterized in that: The first anti-collision buffer (410) is made of anti-collision rubber or a hydraulic buffer.

6. The bidirectional motion mechanism according to any one of claims 1 to 5, characterized in that: Second anti-collision buffer components (420) are installed on the first linear motor (110) and at both ends of the first slide rail (112).

7. The bidirectional motion mechanism according to claim 6, characterized in that: The second anti-collision buffer (420) is made of anti-collision rubber or a hydraulic buffer.

8. The bidirectional motion mechanism according to any one of claims 1 to 5 or 7, characterized in that: A first grating ruler is installed on the first linear motor (110) and is located adjacent to the first slide rail (112).

9. A reclaiming assembly, comprising a reclaiming head, characterized in that: It also includes the bidirectional motion mechanism according to any one of claims 1 to 8, wherein the reclaimer head is connected to the second motor slider (220) via the second assembly connection portion.

10. A semiconductor processing equipment, characterized in that: Comprising the material taking assembly as claimed in claim 9.

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