Wafer coating spraying device and wafer coating equipment

Abstract

The utility model provides a spraying device for wafer coating. The spraying device comprises a spraying plate, a spraying device and a spraying device, the positioning structure comprises a support top seat arranged on one side of the spraying plate, and a support bottom seat arranged on the other side of the spraying plate; the clamping assembly is arranged on the bottom side of the support top seat in a sliding mode, the clamping assembly comprises a plurality of clamping rods and gap calipers, the clamping rods are arranged on one side of the support top seat in a sliding mode, and the gap calipers are arranged on the clamping rods; the lifting assembly is arranged on the support top seat; the traction piece is connected between the clamping rod and the lifting assembly; the elastic piece is connected between the clamping rod and the lifting assembly; and a gap is formed between the gap caliper and the side wall of the clamping rod. According to the spraying device for wafer coating and the wafer coating equipment disclosed by the utility model, the uniformity of the thickness of a film formed on the surface of the wafer can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer coating, in particular to a wafer coating spray device and wafer coating equipment. Background Art

[0002] With the continuous development of semiconductor technology, the quality requirements for semiconductor products are getting higher and higher. Among them, Chemical Vapor Deposition (CVD) is a key step in the semiconductor process, which is used to manufacture semiconductor devices or thin film deposition.

[0003] However, since the position of the shower plate in the chemical vapor deposition system cannot be precisely controlled, the deposition of the gas on the wafer is affected, resulting in uneven thickness of the film formed on the wafer surface, thereby reducing the yield rate of the wafer process. Therefore, there is room for improvement. Utility Model Content

[0004] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a wafer coating spray device and a wafer coating equipment, which improve the problem of uneven thickness of the film formed on the surface of the wafer.

[0005] In order to solve the above technical problems, the utility model is realized by the following technical solutions:

[0006] The utility model provides a spray device for wafer coating, the spray device comprising:

[0007] Sprinkler panels;

[0008] A positioning structure is provided on the spray plate, and the positioning structure comprises:

[0009] A bracket top seat is arranged on one side of the spray plate;

[0010] A clamping assembly is slidably disposed on the bottom side of the bracket top seat, the clamping assembly comprises a plurality of clamping rods and a gap caliper, the clamping rod is slidably disposed on one side of the bracket top seat, and the gap caliper is disposed on the clamping rod;

[0011] A lifting assembly is arranged on the top seat of the bracket;

[0012] A pulling member connected between the clamping rod and the lifting assembly; and

[0013] An elastic member, disposed on one side of the bracket top seat, and the elastic member is connected between the clamping rod and the lifting assembly;

[0014] Wherein, a gap is formed between the gap caliper and the side wall of the clamping rod.

[0015] In one embodiment of the utility model, the positioning structure further includes:

[0016] A positioning rod, arranged on the top seat of the bracket;

[0017] A plurality of buckles are respectively arranged on the lifting rod and the side wall of the clamping rod.

[0018] In an embodiment of the present invention, the bracket top seat is a symmetrical structure, and a central through hole is opened at the central position of the bracket top seat.

[0019] In an embodiment of the present invention, a groove is formed on the side wall of the clamping rod, and a plurality of the grooves are arranged in a ring shape.

[0020] In one embodiment of the present invention, the gap caliper is L-shaped, and when the clamping rod clamps the spray plate, the shortest vertical distance between the vertical end of the gap caliper and the side wall of the spray plate is greater than or equal to 3 mm.

[0021] In one embodiment of the present invention, the lifting assembly comprises:

[0022] A fixing frame is arranged on the bracket top seat, and an end of the fixing frame passes through one side of the bracket top seat and comes out from the other side of the bracket top seat;

[0023] A lifting rod, slidably disposed in the fixed frame;

[0024] Wherein, the lifting rod includes a horizontal rod and a vertical rod, the horizontal rod is slidably arranged in the fixed frame, the vertical rod is connected to the horizontal rod, the vertical rod passes through the central through hole, and the vertical rod is connected to the pulling member through a snap fitting.

[0025] In an embodiment of the present invention, the pulling member sequentially passes through the buckle member on the side wall of the clamping rod, part of the elastic member between the clamping rod and the lifting assembly, and the buckle member at the bottom end of the lifting rod.

[0026] In an embodiment of the present invention, an angle is formed between the clamping rod and the connected pulling member, and the angle is greater than or equal to 45°.

[0027] In one embodiment of the utility model, the positioning rod and the bracket top seat are located on the same horizontal plane, and a positioning angle is formed between the positioning rod and the bracket top seat, and the positioning angle is greater than or equal to 15° and less than or equal to 45°.

[0028] The utility model also provides a wafer coating device, comprising the spray device as described in any one of the above items.

[0029] As described above, the utility model provides a spray device for wafer coating and a wafer coating equipment, and the unexpected technical effect is: by setting a positioning structure, when the spray plate is placed in the gas groove of the spray panel, the distance between the peripheral side of the spray plate and the inner wall of the gas groove is uniform, thereby improving the uniformity of the thickness of the thin film formed on the surface of the wafer, thereby improving the yield rate of the wafer process. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for describing the embodiments are briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0031] Figure 1 Shown is a structural diagram of a wafer coating spray device of the utility model;

[0032] Figure 2 Display as Figure 1 Schematic diagram of the local structure in;

[0033] Figure 3 Display as Figure 2 Schematic diagram of the local structure in;

[0034] Figure 4 Display as Figure 2 Another partial structural schematic diagram in FIG.

[0035] Figure 5 Display as Figure 3 Schematic diagram of the local structure in;

[0036] Figure 6 Shown is a structural schematic diagram of a wafer coating device of the present invention.

[0037] Component number description:

[0038] 10. Spraying device; 11. Spraying plate; 12. Positioning structure;

[0039] 13. bracket top seat; 131. center through hole; 132. slide groove; 14. positioning rod;

[0040] 15. Clamping assembly; 151. Clamping rod; 152. Gap caliper; 153. Groove;

[0041] 16. lifting assembly; 161. fixing frame; 162. slide rail; 163. lifting rod; 164. horizontal rod; 165. vertical rod;

[0042] 17. Elastic member; 18. Buckle member; 19. Pull member;

[0043] 20. Wafer coating equipment; 21. Gas box; 22. Spray panel. DETAILED DESCRIPTION

[0044] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0045] See also Figure 1 and Figure 2 The utility model provides a spray device for wafer coating, which can be used in the chemical vapor deposition coating process of the wafer to improve the uniformity of the film thickness on the surface of the wafer, thereby improving the yield rate of the wafer process. The spray device 10 may include but is not limited to a spray plate 11 and a positioning structure 12, and the positioning structure 12 may be provided on the spray plate 11 to facilitate accurate positioning of the spray plate 11, so that the spray plate 11 can be accurately placed in the coating equipment. Among them, the shape of the spray plate 11 can be circular, and a plurality of air holes are provided on the spray plate 11.

[0046] See also Figure 1 , Figure 2 and Figure 3 The positioning structure 12 may include but is not limited to a bracket top seat 13, a positioning rod 14, a clamping assembly 15, a lifting assembly 16, an elastic member 17, a buckle 18 and a pulling member 19. Among them, the bracket top seat 13 may be arranged on one side of the spray plate 11. The bracket top seat 13 may be arranged in a symmetrical structure so that the spray plate 11 can be evenly stressed when clamping the spray plate 11. A central through hole 131 may be opened at the center position of the bracket top seat 13 to facilitate the passage of the lifting assembly 16. The bracket top seat 13 may be in a cross shape or a M shape. However, it is not limited to this, and the bracket top seat 13 may also be arranged in other symmetrical structures. For example, please refer to Figure 1 The shape of the bracket top seat 13 is a cross, and the cross-shaped bracket top seat 13 is an integrally formed setting. In addition, a plurality of slide grooves 132 may be provided on the bottom side of the bracket top seat 13, the length of the slide grooves 132 is less than the length of the bracket top seat 13, and the plurality of slide grooves 132 may be centrally symmetrically arranged with the central through hole 131 on the bracket top seat 13 as the symmetry center.

[0047] See also Figure 1 and Figure 3, the positioning rod 14 can be fixedly connected to the bracket top seat 13, and the positioning rod 14 and the bracket top seat 13 can be located on the same horizontal plane. A positioning angle is formed between the positioning rod 14 and the bracket top seat 13, and the positioning angle can be greater than or equal to 15° and less than or equal to 45°, so that the placement angle of the spray plate 11 can be determined by the direction of the positioning rod 14, thereby avoiding the overlap of the elastic gasket position on the spray plate 11 with the upper screw when the spray plate 11 is placed, thereby improving the uniformity of the film thickness when the spray plate 11 is sprayed. For example, the positioning angle can be 15°, 45°, or 30°. However, it is not limited to this, and the positioning angle can also be other angles. In addition, the shape of the positioning rod 14 can be cylindrical, rectangular, or other shapes. That is, the shape of the positioning rod 14 can be not specifically limited.

[0048] See also Figure 1 , Figure 2 , Figure 3 and Figure 5 , the clamping assembly 15 can be slidably disposed on the bottom side of the bracket top seat 13 to clamp the spray plate 11, place it in the spray panel, and control the gap between the periphery of the spray plate 11 and the inner wall of the spray panel to be uniform, thereby improving the uniformity of the film thickness on the wafer. Among them, the clamping assembly 15 may include but is not limited to a clamping rod 151 and a gap caliper 152. A plurality of clamping rods 151 may be provided, and the clamping rod 151 may be slidably disposed in a slide groove 132 on one side of the bracket top seat 13 to achieve clamping of the spray plate 11 by sliding the clamping rod 151. In addition, a plurality of clamping rods 151 may be centrally symmetrically arranged with the central through hole 131 as the symmetry center, so as to achieve uniform force when the spray plate 11 is clamped, thereby improving the placement accuracy of the spray plate 11. The shape of the clamping rod 151 may be cylindrical, rectangular, or other shapes. That is, the shape of the clamping rod 151 is not specifically limited, as long as the length of the clamping rod 151 is greater than the thickness of the clamped shower plate 11. For example, refer to Figure 2 Four clamping rods 151 can be provided, and the four clamping rods 151 can be symmetrically arranged in the sliding groove 132 of the bracket top seat 13 with the central through hole 131 as the symmetry center, and the shape of the clamping rods 151 is all cylindrical.

[0049] See also Figure 2 , Figure 3 and Figure 5Further, the gap caliper 152 may be provided on the clamping rod 151, and at least one gap caliper 152 may be provided on each clamping rod 151, and a gap is formed between the gap caliper 152 and the side wall of the clamping rod 151, so as to control the gap between the periphery of the spray plate 11 and the spray panel when the spray plate 11 is placed in the spray panel. Each clamping rod 151 may be provided with one gap caliper 152, or two gap calipers 152, or other numbers of gap calipers 152. The shape of the gap caliper 152 may be L-shaped, or other shapes. Among them, when the gap caliper 152 is L-shaped, the gap caliper 152 can be mirrored on the side wall of the clamping rod 151, that is, the horizontal end of the gap caliper 152 is fixedly connected to the clamping rod 151, and when the clamping rod 151 clamps the spray plate 11, the shortest vertical distance between the vertical end of the gap caliper 152 and the side wall of the spray plate 11 is greater than or equal to 3 mm. For example, the shortest vertical distance between the vertical end of the gap caliper 152 and the side wall of the spray plate 11 can be 3 mm, 5 mm, or 4 mm. However, it is not limited to this. When the clamping rod 151 clamps the spray plate 11, the shortest vertical distance between the vertical end of the gap caliper 152 and the side wall of the spray plate 11 can also be other values.

[0050] See also Figure 2 , Figure 3 and Figure 5 Furthermore, when the gap caliper 152 is fixedly connected to the side wall of the clamping rod 151, the vertical end of the gap caliper 152 can exceed the bottom end of the clamping rod 151 to better control the gap of the spray plate 11 placed in the spray panel. For example, refer to Figure 5 , each clamping rod 151 is provided with a gap caliper 152, the shape of the gap caliper 152 is L-shaped, the gap caliper 152 is mirrored on the side wall of the clamping rod 151, and when the clamping rod 151 clamps the spray plate 11, the shortest vertical distance between the vertical end of the gap caliper 152 and the side wall of the spray plate 11 is 3 mm. In addition, a groove 153 can be formed on the side wall of the clamping rod 151, and the grooves 153 on the multiple clamping rods 151 can be arranged in a ring shape, so that when the clamping rod 151 clamps the spray plate 11, the spray plate 11 can be uniformly stressed. Among them, the position of the groove 153 can correspond to the position of the gap caliper 152, and the groove 153 can be arranged in a plane groove, that is, the surface formed by the groove 153 on the clamping rod 151 is a plane, so as to improve the stability of the clamping rod 151 when clamping the spray plate 11.

[0051] See also Figure 1 , Figure 2 and Figure 4, the lifting assembly 16 can be arranged on the bracket top seat 13 to control the clamping rod 151 to clamp the spray plate 11. Among them, the lifting assembly 16 can include a fixed frame 161, which can be arranged on the bracket top seat 13, and the fixed frame 161 can be centrally symmetrically arranged with the central through hole 131 as the symmetry center. The shape of the fixed frame 161 can be a single concave shape, or two concave shapes can be arranged perpendicular to each other, or can be other shapes, that is, the shape of the fixed frame 161 can be set according to the specific shape of the bracket top seat 13, the number of sides of the fixed frame 161 is the same as the number of clamping rods 151, and the end of the fixed frame 161 passing through the bracket top seat 13 is in the same plane as the corresponding clamping rod 151. In addition, the end of the fixed frame 161 can pass through one side of the bracket top seat 13 and pass out from the other side of the bracket top seat 13. Further, the end of the fixed frame 161 passing through the other side of the bracket top seat 13 can be located in the slide groove 132 on the bottom side of the bracket top seat 13. In addition, at least one through hole may be provided on the end of the fixing frame 161 passing through the bracket top seat 13 to facilitate the passage of the pulling member 19. Figure 2 When the shape of the bracket top seat 13 is a cross, the shape of the fixed frame 161 is two concave shapes that are perpendicular to each other and intersect, and the two concave fixed frames 161 that are perpendicular to each other and intersect can be rotated 180° and fixedly connected to the bracket top seat 13 with the central through hole 131 as the center of symmetry, and the ends of the fixed frame 161 all pass through the bracket top seat 13 and pass out from the slide groove 132 of the bracket top seat 13.

[0052] See also Figure 2 and Figure 4 Further, a slide rail 162 may be provided on the inner wall of the fixed frame 161, and the slide rail 162 may be provided only on one inner wall of the fixed frame 161, or on both inner walls of the fixed frame 161, or on the inner walls of four sides of the fixed frame 161, and the slide rails 162 provided on the inner walls of two sides or four sides of the fixed frame 161 may be symmetrically provided. The lifting assembly 16 may also include a lifting rod 163, and the lifting rod 163 may be slidably provided in the fixed frame 161 through the slide rail 162. Among them, the lifting rod 163 may include a horizontal rod 164 and a vertical rod 165, and the lifting rod 163 may be symmetrically provided with the vertical rod 165 as the axis of symmetry, and when the lifting rod 163 is a symmetrical structure, the cross-sectional shape of the lifting rod 163 may be T-shaped.

[0053] See also Figure 2 and Figure 4Furthermore, the horizontal rod 164 can be slidably disposed in the fixed frame 161, the vertical rod 165 can be connected to the horizontal rod 164, and the vertical rod 165 can pass through the central through hole 131 and have a clearance fit with the central through hole 131. The horizontal rod 164 can be in a cross shape, a straight shape, or other shapes, that is, the shape of the horizontal rod 164 is the same as the shape of the bracket top seat 13. For example, refer to Figure 1 When the bracket top seat 13 is in a cross shape, the horizontal rod 164 is also in a cross shape, and the horizontal rod 164 can be clamped on the inner wall of the fixed frame 161, and the horizontal rod 164 is slidably connected to the fixed frame 161 through the slide rails 162 on the inner walls of the four sides of the fixed frame 161. However, it is not limited to this. When the slide rail 162 on the fixed frame 161 is only provided on the inner wall of one side, the lifting rod 163 may not be provided in a symmetrical structure, and only one end of the horizontal rod 164 may be provided to be slidably connected to the fixed frame 161 through the slide rail 162.

[0054] See also Figure 1 and Figure 2 , the elastic member 17 can be arranged on one side of the bracket top seat 13, and there are multiple elastic members 17, and each elastic member 17 can be connected between the clamping rod 151 and the lifting assembly 16. Specifically, the two ends of the elastic member 17 are respectively fixedly connected to the side wall of the clamping rod 151 and the end of the fixed frame 161 passing through the bracket top seat 13, so as to realize the automatic reset of the clamping rod 151. Among them, the elastic member 17 can be a spring or other elastic elements, and when the elastic member 17 is a spring, a spring with a lower elastic coefficient can be selected so that the clamping rod 151 can squeeze the spring to move toward each other, thereby facilitating the clamping of the spray plate 11. For example, please refer to Figure 2 There are four elastic members 17 , and the four elastic members 17 are respectively arranged between a clamping rod 151 and the end of the fixing frame 161 , and all of the four elastic members 17 are arranged as springs.

[0055] See also Figure 1 , Figure 2 and Figure 5, a plurality of snap fasteners 18 may be provided, and the plurality of snap fasteners 18 may be respectively provided at the end of the vertical rod 165 and on the side wall of the clamping rod 151. Among them, a through hole may be provided on the snap fastener 18 to facilitate the clamping connection with the pulling member 19. The pulling member 19 may be connected between the clamping rod 151 and the lifting assembly 16, so that the clamping rod 151 can be controlled to clamp the spray plate 11 by lifting the lifting assembly 16. The pulling member 19 may be a steel wire rope or a pulling rope of other materials, as long as it can realize the transmission of force so that the clamping rod 151 can be controlled to clamp the spray plate 11 through the lifting assembly 16. The pulling member 19 can pass through the buckle 18 on the side wall of the clamping rod 151, the partial elastic member 17 between the clamping rod 151 and the lifting rod 163, and the buckle 18 at the bottom end of the lifting rod 163 in sequence, and the vertical rod 165 in the lifting rod 163 can be connected to the pulling member 19 through the buckle 18.

[0056] See also Figure 1 , Figure 2 and Figure 5 , further, the pulling member 19 can be provided with one, two, or four. However, it is not limited to this, and the pulling member 19 can also be provided with other numbers. The pulling member 19 can sequentially pass through the snap member 18 on the side wall of the clamping rod 151, the part of the elastic member 17 between the clamping rod 151 and the lifting rod 163, and the snap member 18 at the bottom end of the lifting rod 163. In addition, an angle can be formed between the clamping rod 151 and the connected pulling member 19, and the angle can be greater than or equal to 45°, so that when the pulling member 19 pulls the clamping rod 151, the clamping rod 151 can be better stressed, thereby better clamping the spray plate 11. For example, the angle can be 45°, 50°, or 60°. However, it is not limited to this, and the angle can also be other values.

[0057] See also Figure 1 , Figure 2 and Figure 5Furthermore, when there are only two clamping rods 151, and the two clamping rods 151 are symmetrically arranged on the bracket top seat 13, one pulling member 19 can be provided. One pulling member 19 can sequentially pass through the buckle 18 on the side wall of the clamping rod 151 on one side, the part of the elastic member 17 on one side between the clamping rod 151 on one side and the lifting rod 163, the through hole at one end of the fixed frame 161, the buckle 18 at the bottom end of the lifting rod 163, the through hole at the other end of the fixed frame 161, the part of the elastic member 17 on the other side between the clamping rod 151 on the other side and the lifting rod 163, and finally be clamped on the buckle 18 on the side wall of the clamping rod 151 on the other side. At this point, by applying an upward pulling force to the horizontal rod 164 on the lifting rod 163, the lifting rod 163 can slide upward, so that the lifting rod 163 drives the pulling members 19 on both sides to move upward through the buckle 18 at its end. Since the ends of the pulling members 19 on both sides are clamped in the through holes of the buckle members 18 on the side walls of the clamping rods 151 on both sides, the pulling members 19 can drive the clamping rods 151 on both sides to move toward each other, thereby clamping the spray plate 11.

[0058] See also Figure 1 , Figure 2 and Figure 5 It is worth further explaining that when there are two clamping rods 151, two pulling members 19 can also be provided, and the two pulling members 19 respectively pass through the buckle 18 on the side wall of the clamping rod 151, the part of the elastic member 17 between the clamping rod 151 and the lifting rod 163, the through hole at the end of the fixing frame 161, and finally engage with the buckle 18 at the end of the vertical rod 165, so as to lift the lifting rod 163 to achieve the control of the clamping rod 151 moving toward each other. However, it is not limited to this. When there are four clamping rods 151, and the four clamping rods 151 are centrally symmetrically arranged with the central through hole 131 as the symmetry center, there can be two or four pulling members 19. For example, when there are two pulling members 19, the two pulling members 19 are respectively passed from the buckle 18 on the side wall of the clamping rod 151 on one side to the buckle 18 on the side wall of the clamping rod 151 on the other side symmetrical to the clamping rod 151, and the two pulling members 19 pass through the only buckle 18 at the end of the vertical rod 165. For example, refer to Figure 1 When four pulling members 19 are provided, one end of the four pulling members 19 can be respectively connected to the snap members 18 on the side walls of the four clamping rods 151 around them, and pass through the corresponding elastic members 17 between the clamping rods 151 and the lifting rods 163 and the through holes at the corresponding ends of the fixed frame 161 in turn, and finally the other ends converge in the snap members 18 at the end of the vertical rod 165, and the other ends of the four pulling members 19 are respectively connected to the snap members 18 at the end of the vertical rod 165.

[0059] See also Figure 1 , Figure 2 and Figure 6 The utility model also provides a wafer coating device 20, which may include the above-mentioned spray device 10, so as to improve the uniformity of film thickness during wafer coating. The wafer coating device 20 may also include but is not limited to a gas box 21 and a spray panel 22, wherein the gas box 21 is disposed on one side of the spray plate 11, the spray panel 22 is located on the other side of the spray plate 11, and a gas groove 221 is formed in the spray panel 22, and the spray plate 11 may be placed in the gas groove 221.

[0060] Specifically, the bracket top seat 13 can be firstly set to an integrally formed cross shape, and a central through hole 131 is opened at the center position of the bracket top seat 13. Then, a slide groove 132 is set on the bottom side of each of the four sub-brackets of the bracket top seat 13. The positioning rod 14 can be fixedly connected to the bracket top seat 13, and the positioning rod 14 and the bracket top seat 13 can be located on the same horizontal plane. A positioning angle is formed between the positioning rod 14 and the bracket top seat 13, and the positioning angle can be equal to 30°, and the positioning rod 14 is in the shape of a rectangular parallelepiped.

[0061] Further, four cylindrical clamping rods 151 may be provided, and a gap caliper 152 may be provided on the side wall of each clamping rod 151, and when the clamping rod 151 clamps the shower plate 11, the shortest vertical distance between the vertical end of the gap caliper 152 and the side wall of the shower plate 11 is set to 3 mm, so that when the shower plate 11 is placed in the gas groove 221, the distance between the peripheral side of the shower plate 11 and the inner wall of the gas groove 221 is relatively uniform, so that the position of the shower plate 11 placed in the gas groove 221 is relatively accurate. A groove 153 may be provided on the side wall of the clamping rod 151 opposite to the gap caliper 152, and the groove 153 may be provided in the form of a plane groove, that is, the surface formed by the groove 153 on the clamping rod 151 is a plane, so as to improve the stability of the clamping rod 151 when clamping the shower plate 11.

[0062] Furthermore, the fixing frame 161 can be set to a shape consisting of two concave shapes intersecting perpendicularly, and the fixing frame 161 can be fixedly set on the bracket top seat 13 after being rotated 180°, and the four side edges of the fixing frame 161 pass through the bracket top seat 13 respectively and fall into the slide groove 132 on the bottom side of the bracket top seat 13. In addition, a slide rail 162 can be set on the inner wall of each side edge of the fixing frame 161. The lifting rod 163 can be set in the fixing frame 161, and the horizontal rod 164 in the lifting rod 163 can be set in a cross shape, and the side edges of the cross-shaped lifting rod 163 can be respectively set in the slide rail 162 to achieve the sliding connection between the lifting rod 163 and the fixing frame 161. The vertical rod 165 in the lifting rod 163 can be set at the center position of the horizontal rod 164, and one end of the vertical rod 165 is fixedly connected to the horizontal rod 164, and the other end passes through the central through hole 131. Then, an elastic member 17 can be arranged between each clamping rod 151 and the end of the fixing frame 161, and the two ends of the elastic member 17 are respectively fixedly connected to the side wall of the clamping rod 151 and the end of the fixing frame 161 passing through the bracket top seat 13, so as to realize the automatic reset of the clamping rod 151. The elastic member 17 is a spring with a low elastic coefficient, so that the clamping rod 151 can squeeze the spring to move toward each other, thereby facilitating the clamping of the spray plate 11.

[0063] It is worth further explaining that at least one clip 18 needs to be provided on the end of the vertical rod 165 and the side wall of the clamping rod 151, and a through hole can be provided on the clip 18. Then the pulling member 19 is connected between the clamping rod 151 and the lifting assembly 16, so that the clamping rod 151 can control the clamping of the spray plate 11 by lifting the lifting assembly 16. The pulling member 19 is a steel wire rope, and the pulling member 19 passes through the clip 18 on the side wall of the clamping rod 151, part of the elastic member 17 between the clamping rod 151 and the lifting rod 163, and the clip 18 at the bottom end of the lifting rod 163 in sequence. In addition, an angle may be formed between the clamping rod 151 and the connected pulling member 19, and the angle may be greater than or equal to 45°, so that when the pulling member 19 pulls the clamping rod 151, the clamping rod 151 can be better stressed, thereby better clamping the spray plate 11. For example, the angle may be 45°, 50°, or 60°. However, the present invention is not limited thereto, and the angle may also be other values.

[0064] Specifically, four pulling members 19 are provided, and one end of the four pulling members 19 can be respectively connected to the snap members 18 on the side walls of the four clamping rods 151 around them, and pass through the corresponding elastic members 17 between the clamping rods 151 and the lifting rods 163, and the through holes at the corresponding ends of the fixed frame 161 in turn, and finally the other ends converge in the snap members 18 at the end of the vertical rod 165, and the other ends of the four pulling members 19 are respectively connected to the snap members 18 at the end of the vertical rod 165.

[0065] When the spray plate 11 needs to be clamped, an upward pulling force can be applied to the lifting rod 163, so that the lifting rod 163 drives the pulling member 19 to rise. Because the pulling member 19 is clamped with the buckle 18 on the side wall of the clamping rod 151, the pulling member 19 can drive the buckle 18 to move, so that the buckle 18 drives the corresponding clamping rod 151 to compress the elastic member 17. In addition, since the terminals of all the pulling members 19 are clamped on the buckle 18 at the end of the lifting rod 163, when the lifting rod 163 is pulled up, the pulling member 19 can drive the two opposite clamping rods 151 to move toward each other, thereby achieving the clamping of the spray plate 11.

[0066] In addition, when the clamping rod 151 clamps the spray plate 11 and places it in the gas tank 221, since the distance between the gap caliper 152 and the side wall of the spray plate 11 is 3 mm, the distance between the side wall of the spray plate 11 and the gas tank 221 is slightly greater than 3 mm. When the spray plate 11 needs to be placed in the gas tank 221, the lifting rod 163 can be loosened, and the clamping rod 151 moves in the opposite direction under the elastic force of the elastic member 17, so that the spray plate 11 falls naturally. In addition, when placing the spray plate 11, in order to avoid the elastic gasket on the spray plate 11 contacting the screws of the gas box 21 when the wafer coating equipment 20 is working, causing the spray plate 11 to tilt and cause uneven film thickness, when placing the spray plate 11, the positioning rod 14 can always be directed toward the staff or the workbench to avoid the elastic gasket overlapping with the screws in the gas box 21, thereby improving the uniformity of the film thickness formed on the wafer surface.

[0067] To sum up, the unexpected technical effect of the spray device of a wafer coating equipment and the wafer coating equipment provided by the utility model is that, by setting a positioning structure, when the spray plate is placed in the gas groove of the spray panel, the distance between the peripheral side of the spray plate and the inner wall of the gas groove is uniform, and when the gas box is covered on the spray plate, the screws inside the gas box and the elastic gasket on the spray plate are prevented from overlapping, thereby achieving precise positioning of the spray plate, improving the uniformity of the thickness of the thin film formed on the surface of the wafer, and thereby improving the yield rate of the wafer process.

[0068] In the description of this specification, the description with reference to the terms "this embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0069] The embodiments of the utility model disclosed above are only used to help illustrate the utility model. The embodiments do not describe all the details in detail, nor do they limit the utility model to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the utility model, so that technicians in the relevant technical field can well understand and use the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A wafer coating spraying device, characterized in that: The spraying device comprises: Sprinkler panels; A positioning structure is provided on the spray plate, and the positioning structure includes: A bracket top seat is arranged on one side of the spray plate; A clamping assembly is slidably disposed on the bottom side of the bracket top seat, the clamping assembly comprises a plurality of clamping rods and a gap caliper, the clamping rod is slidably disposed on one side of the bracket top seat, and the gap caliper is disposed on the clamping rod; A lifting assembly is arranged on the top seat of the bracket; A pulling member connected between the clamping rod and the lifting assembly; and An elastic member, disposed on one side of the bracket top seat, and the elastic member is connected between the clamping rod and the lifting assembly; Wherein, a gap is formed between the gap caliper and the side wall of the clamping rod.

2. The spray device according to claim 1, characterized in that: The positioning structure also includes: A positioning rod, arranged on the top seat of the bracket; A plurality of buckles are respectively arranged on the lifting assembly and the side wall of the clamping rod.

3. The spray device according to claim 1, characterized in that: The support top seat is a symmetrical structure, and a central through hole is opened at the central position of the support top seat.

4. The spray device according to claim 1, characterized in that: A groove is formed on the side wall of the clamping rod, and a plurality of the grooves are arranged in a ring shape.

5. The spray device according to claim 1, characterized in that: The gap caliper is in an L-shape, and when the clamping rod clamps the spray plate, the shortest vertical distance between the vertical end of the gap caliper and the side wall of the spray plate is greater than or equal to 3 mm.

6. The spray device according to claim 1, characterized in that: The lifting component comprises: A fixing frame is arranged on the bracket top seat, and an end of the fixing frame passes through one side of the bracket top seat and comes out from the other side of the bracket top seat; A lifting rod, slidably disposed in the fixed frame; Wherein, the lifting rod includes a horizontal rod and a vertical rod, the horizontal rod is slidably arranged in the fixed frame, the vertical rod is connected to the horizontal rod, the vertical rod passes through the central through hole, and the vertical rod is connected to the pulling member through a snap fitting.

7. The spray device according to claim 1, characterized in that: The pulling member sequentially passes through the buckle member on the side wall of the clamping rod, part of the elastic member between the clamping rod and the lifting assembly, and the buckle member at the bottom end of the lifting rod.

8. The spray device according to claim 1, characterized in that: An angle is formed between the clamping rod and the connected pulling member, and the angle is greater than or equal to 45°.

9. The spray device according to claim 2, characterized in that: The positioning rod and the bracket top seat are located on the same horizontal plane, and a positioning angle is formed between the positioning rod and the bracket top seat, and the positioning angle is greater than or equal to 15° and less than or equal to 45°.

10. A wafer coating device, characterized in that: The wafer coating equipment comprises a spray device as described in any one of claims 1 to 9.

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