Single crystal furnace with large feeding amount

Abstract

The utility model discloses a single crystal furnace with large feeding amount, which comprises a furnace body, and a refractory brick heat insulation layer is arranged at the lower end of a heat insulation layer in high-temperature-resistant silica gel. According to the furnace profile 120, the stroke of a crucible lifting mechanism in the vertical direction is lengthened and transformed, the lower limit space of a crucible is released, and the maximum feeding amount can reach 650 kilograms; a crucible with the height of 630 mm is matched, on the basis, the feeding amount of each furnace can be increased by 20 kg by increasing the height of an electrode column, guiding a short guide cylinder hanging piece in a matched mode and releasing a 20-mm feeding space, and the yield of each furnace can be increased by 20 kg by increasing the height of the electrode column to be matched with a guide cylinder short hanging piece in an auxiliary mode. The large-diameter crucible can be introduced to be put into use, the yield of each furnace is increased by 60 kilograms, the maximum feeding amount can be increased by 80 kilograms per furnace by integrating the two methods, the total yield of each furnace is 730 kilograms, and the yield of each furnace is increased by 7.7 kilograms per day, so that the yield is increased.

Description

Technical Field

[0001] The utility model belongs to the technical field related to single crystal furnaces with large feeding amount, and in particular relates to a single crystal furnace with large feeding amount. Background Art

[0002] A large-feed single crystal furnace is a device used to produce single crystal silicon rods. In the semiconductor manufacturing process, single crystal silicon rods are very important materials used to manufacture transistors and other semiconductor devices. A large-feed single crystal furnace has a large furnace capacity and can process multiple silicon rods at the same time, thereby improving production efficiency. This equipment is usually used in large-scale semiconductor production processes.

[0003] Jingsheng 120 furnace is limited by the size of the model. Currently, it can be upgraded to a maximum of 32S heat field. The inner wall diameter of the furnace is 1200mm. After a series of main chamber heightening and lower limit release modification operations, it can be compatible with a maximum crucible height of 630mm and a maximum feed capacity of 650kg, which is lower than the industry level. Utility Model Content

[0004] The purpose of the utility model is to provide a single crystal furnace with a large feed rate, so as to solve the problem that the Jingsheng 120 furnace mentioned in the above background technology is limited by the size of the model. At present, the maximum upgradeable heat field is 32S, and the inner wall diameter of the furnace barrel is 1200mm. After a series of main chamber heightening and releasing the lower limit modification operations, it can be compatible with the maximum crucible height of 630mm and the maximum feed rate of 650kg, which is lower than the industry level.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a large-feed single crystal furnace, comprising a furnace body, a heat preservation cover is installed at the upper end of the furnace body, a hanger is installed at the inner position of the heat preservation cover, a guide tube for guiding is installed at the lower end of the heat preservation cover, a furnace bottom ring felt is installed at the lower end of the furnace body, a furnace bottom tray is installed at the upper end of the furnace bottom ring felt, a graphite carbon felt is installed at the upper end of the furnace bottom tray, an electrode column is installed at the upper end of the graphite carbon felt, and an outer wall of the electrode column is provided An electrode sheath having a protective function is provided, a crucible support rod is arranged at the inner position of the graphite carbon felt, a crucible tray is arranged at the upper end position of the crucible support rod, a quartz crucible is arranged at the upper end position of the crucible tray, a heater for heating is arranged at the outer wall position of the crucible tray, an upper thermal insulation layer of alumina ceramic fiber for heat insulation is arranged at the upper position of the inner wall of the furnace body, a high-temperature resistant silica gel middle thermal insulation layer is arranged at the lower end position of the alumina ceramic fiber upper thermal insulation layer, and a refractory brick thermal insulation layer is arranged at the lower end position of the high-temperature resistant silica gel middle thermal insulation layer.

[0006] Preferably, the heat-insulating cover is installed at the upper end of the furnace body, and a guide tube is installed at the lower end of the heat-insulating cover.

[0007] Preferably, the guide tube allows the raw material to enter an inner position of a quartz crucible, and the quartz crucible is heated by a heater.

[0008] Preferably, the crucible tray is installed at the lower end of the quartz crucible, and the crucible tray and the crucible support rod support the quartz crucible.

[0009] Preferably, the electrode column applies an electric field, and the electrode sheath is located at the outer wall of the electrode column.

[0010] Preferably, the graphite carbon felt is arranged at the upper end of the furnace bottom tray, the furnace bottom ring felt is located at the lower end of the furnace bottom tray, and the furnace bottom ring felt consists of a three-layer structure.

[0011] Preferably, the alumina ceramic fiber upper insulation layer, the high temperature resistant silica gel middle insulation layer and the refractory brick insulation layer are attached to the inner wall of the furnace body, and the refractory brick insulation layer is located at the lowermost position to support the entire insulation structure.

[0012] Preferably, the heat-resistant silica gel middle insulation layer is filled in the gap between the heater and the furnace body, and the heat-resistant silica gel middle insulation layer reduces heat loss through high temperature resistance.

[0013] Compared with the prior art, the utility model provides a single crystal furnace with a large feed amount, which has the following beneficial effects:

[0014] 1. The 120 furnace type of this device can reach a maximum feed amount of 650 kg by lengthening the vertical stroke of the crucible lifting mechanism and releasing the lower limit space of the crucible, matching the crucible height of 630 mm. On this basis, by increasing the height of the electrode column and introducing a short guide tube hanger, 20 mm of feeding space can be released, and the feed amount of each furnace can be increased by 20 kg. By increasing the height of the electrode column and assisting with the short guide tube hanger, 20 mm of feeding space can be released, and the output of each furnace can be increased by 20 kg. By expanding the diameter of the hot field, a large-diameter crucible can be introduced for use, and the output of each furnace can be increased by 60 kg. Combining the above two methods, the maximum feed amount can be increased to 80 kg per furnace, a total of 730 kg per furnace, and the output can be increased by 7.7 kg per furnace per day, thereby increasing the output.

[0015] 2. The thermal insulation layer of this device is composed of an upper thermal insulation layer of alumina ceramic fiber, a middle thermal insulation layer of high-temperature resistant silicone, and a thermal insulation layer of refractory bricks. It is divided into three layers of upper, middle and lower structures with different materials. The thermal insulation layers of different materials have their own characteristics. Through layered design, the advantages of various materials can be fully utilized to improve the overall thermal insulation performance. Alumina ceramic fiber has good thermal insulation performance, high-temperature resistant silicone has good filling and sealing properties, and refractory bricks have high mechanical strength. The combined use can effectively reduce heat conduction and loss. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The utility model is a schematic diagram of the structure of a large-feed single crystal furnace.

[0017] Figure 2 It is a schematic diagram of a partially enlarged structure of a large-feed single crystal furnace of the utility model.

[0018] Figure 3 It is a schematic diagram of a partially enlarged structure of a large-feed single crystal furnace of the utility model.

[0019] In the figure: 1. furnace body; 2. guide tube; 3. pendant; 4. insulation cover; 5. alumina ceramic fiber upper insulation layer; 6. high temperature resistant silica gel middle insulation layer; 7. quartz crucible; 8. crucible tray; 9. crucible support rod; 10. graphite carbon felt; 11. furnace bottom tray; 12. furnace bottom ring felt; 13. electrode sheath; 14. electrode column; 15. refractory brick insulation layer; 16. heater. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] The utility model provides Figure 1-3The single crystal furnace with a large feeding amount shown in the figure comprises a furnace body 1, a heat preservation cover 4 is installed at the upper end of the furnace body 1, a hanger 3 is installed at the inner position of the heat preservation cover 4, a guide tube 2 for guiding is installed at the lower end of the heat preservation cover 4, a furnace bottom ring felt 12 is installed at the lower end of the furnace body 1, a furnace bottom tray 11 is installed at the upper end of the furnace bottom ring felt 12, a graphite carbon felt 10 is installed at the upper end of the furnace bottom tray 11, an electrode column 14 is installed at the upper end of the graphite carbon felt 10, and a protective An electrode sheath 13 and a graphite carbon felt 10 are provided with a crucible support rod 9 at an internal position, a crucible tray 8 is provided at an upper end position of the crucible support rod 9, a quartz crucible 7 is provided at an upper end position of the crucible tray 8, a heater 16 for heating is provided at an outer wall position of the crucible tray 8, an alumina ceramic fiber upper insulation layer 5 for heat insulation is provided at an upper position on the inner wall of the furnace body 1, a high-temperature resistant silica gel middle insulation layer 6 is provided at a lower end position of the alumina ceramic fiber upper insulation layer 5, and a refractory brick insulation layer 15 is provided at a lower end position of the high-temperature resistant silica gel middle insulation layer 6.

[0022] First, the raw material to be grown is put into the quartz crucible 7, and the quartz crucible 7 is placed on the crucible tray 8, and fixed to the inside of the furnace body 1 by the crucible support rod 9. The heater 16 starts to work and provides heat to gradually melt the raw material in the quartz crucible 7. The heater 16 is usually located around or at the bottom of the quartz crucible 7, and transfers heat to the quartz crucible 7 by radiation or conduction. Under suitable temperature conditions, the raw material begins to crystallize and grow in the quartz crucible 7. During the crystal growth process, an electric field is applied through the electrode column 14 to control the direction and speed of crystal growth, thereby further optimizing the structure and performance of the single crystal.

[0023] like Figure 1 and Figure 3 As shown, the heat preservation cover 4 is installed at the upper end position of the furnace body 1, and the guide tube 2 is installed at the lower end position of the heat preservation cover 4. The guide tube 2 allows the raw material to enter the inner position of the quartz crucible 7. The quartz crucible 7 is heated by the heater 16. The crucible tray 8 is installed at the lower end position of the quartz crucible 7. The crucible tray 8 and the crucible support rod 9 support the quartz crucible 7. The electrode column 14 applies an electric field, the electrode sheath 13 is located at the outer wall position of the electrode column 14, and the graphite carbon felt 10 is arranged on the furnace bottom tray 11 The furnace bottom ring felt 12 is located at the upper end of the furnace bottom tray 11. The furnace bottom ring felt 12 consists of a three-layer structure. The alumina ceramic fiber upper insulation layer 5, the high-temperature resistant silica gel middle insulation layer 6 and the refractory brick insulation layer 15 are attached to the inner wall of the furnace body 1. The refractory brick insulation layer 15 is located at the lower end to support the entire insulation structure. The high-temperature resistant silica gel middle insulation layer 6 is filled in the gap between the heater 16 and the furnace body 1. The high-temperature resistant silica gel middle insulation layer 6 reduces heat loss through high temperature resistance.

[0024] Insulation layers of different materials have their own characteristics. Through layered design, we can fully utilize the advantages of various materials to improve the overall thermal insulation performance. Alumina ceramic fiber has good thermal insulation performance, high temperature resistant silicone has good filling and sealing properties, and refractory bricks have high mechanical strength. Their combined use can effectively reduce heat conduction and loss.

[0025] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A large-feed single crystal furnace, characterized in that: The invention comprises a furnace body (1), a heat-insulating cover (4) is installed at the upper end of the furnace body (1), a hanger (3) is installed at the inner position of the heat-insulating cover (4), a guide tube (2) which plays a guiding role is installed at the lower end of the heat-insulating cover (4), a furnace bottom ring felt (12) is installed at the lower end of the furnace body (1), a furnace bottom tray (11) is installed at the upper end of the furnace bottom ring felt (12), a graphite carbon felt (10) is installed at the upper end of the furnace bottom tray (11), an electrode column (14) is installed at the upper end of the graphite carbon felt (10), and an electrode sheath which plays a protective role is arranged at the outer wall of the electrode column (14). (13), a crucible support rod (9) is arranged at an inner position of the graphite carbon felt (10), a crucible tray (8) is arranged at an upper end position of the crucible support rod (9), a quartz crucible (7) is arranged at an upper end position of the crucible tray (8), a heater (16) for heating is arranged at an outer wall position of the crucible tray (8), an upper thermal insulation layer (5) of alumina ceramic fiber for heat insulation is arranged at an upper position of the inner wall of the furnace body (1), a high-temperature resistant silica gel middle thermal insulation layer (6) is arranged at a lower end position of the high-temperature resistant silica gel middle thermal insulation layer (6), and a refractory brick thermal insulation layer (15) is arranged at a lower end position of the high-temperature resistant silica gel middle thermal insulation layer (6).

2. A large-feed single crystal furnace according to claim 1, characterized in that: The heat-insulating cover (4) is installed at the upper end of the furnace body (1), and a guide tube (2) is installed at the lower end of the heat-insulating cover (4).

3. A large-feed single crystal furnace according to claim 2, characterized in that: The guide tube (2) allows the raw material to enter the inner position of the quartz crucible (7), and the quartz crucible (7) is heated by the heater (16).

4. A large-feed single crystal furnace according to claim 3, characterized in that: The crucible tray (8) is installed at the lower end of the quartz crucible (7), and the crucible tray (8) and the crucible support rod (9) support the quartz crucible (7).

5. The large-feed single crystal furnace according to claim 1, characterized in that: The electrode column (14) applies an electric field, and the electrode sheath (13) is located at the outer wall of the electrode column (14).

6. The large-feed single crystal furnace according to claim 1, characterized in that: The graphite carbon felt (10) is arranged at the upper end of a furnace bottom tray (11), the furnace bottom ring felt (12) is located at the lower end of the furnace bottom tray (11), and the furnace bottom ring felt (12) is composed of a three-layer structure.

7. The large-feed single crystal furnace according to claim 1, characterized in that: The alumina ceramic fiber upper insulation layer (5), the high temperature resistant silica gel middle insulation layer (6) and the refractory brick insulation layer (15) are attached to the inner wall of the furnace body (1), and the refractory brick insulation layer (15) is located at the lowermost position to support the entire insulation structure.

8. The large-feed single crystal furnace according to claim 7, characterized in that: The high temperature resistant silica gel middle insulation layer (6) is filled in the gap between the heater (16) and the furnace body (1), and the high temperature resistant silica gel middle insulation layer (6) reduces heat loss through high temperature resistance.

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