Circulating water cooling device of single crystal furnace

Abstract

The utility model discloses a circulating water cooling device of a single crystal furnace, and belongs to the field of single crystal furnaces. Comprising a base, a single crystal furnace body is mounted at the top of the base in a bearing manner, a processing cavity is formed in the single crystal furnace body, a bearing table is rotatably arranged in the processing cavity, a crucible is mounted at the top of the bearing table in a bearing manner, a rotating motor for driving the bearing table to rotate is mounted on the base, and an extension furnace is arranged at the top of the single crystal furnace body; an upper hearth is installed at the top of the extension furnace in a lap joint mode, a cavity is formed in the extension furnace, a cooling water ring is installed in the cavity, adjusting cavities are symmetrically formed in the inner wall of the cavity of the extension furnace, and height adjusting assemblies assisting in position adjustment of the cooling water ring are installed in the adjusting cavities. The circulating water cooling device for the single crystal furnace has the beneficial effects that the cooling water ring can be quickly adjusted to the corresponding position according to the difference of the overall height of the liquid level surface in the molten state in the working process, and the situation that the overall cooling water ring is inconvenient to adjust is avoided as much as possible.

Description

Technical Field

[0001] The present application relates to the field of single crystal furnaces, and in particular to a circulating water cooling device for a single crystal furnace. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon and grows single crystals without dislocation using the Czochralski method. The use of a single crystal furnace involves a circulating water cooling device for cooling the materials. A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows single crystals without dislocation using the Czochralski method.

[0003] The existing single crystal furnace water cooling device has a fixed overall height, which is inconvenient to adjust. When using the water cooling device in the single crystal furnace, as the liquid level in the crucible floats, in order to ensure a better cooling effect, the height of the water cooling device needs to be adjusted. How to quickly adjust the water cooling device according to the overall height of the liquid level has become an urgent problem to be solved. Therefore, a single crystal furnace circulating water cooling device is needed to assist in solving this problem. Utility Model Content

[0004] The content of this application is used to introduce concepts in a brief form, which will be described in detail in the detailed implementation section below. The content of this application is not intended to identify the key features or essential features of the technical solution claimed for protection, nor is it intended to limit the scope of the technical solution claimed for protection.

[0005] In order to solve the technical problems mentioned in the above background technology section, some embodiments of the present application provide a single crystal furnace circulating water cooling device, including a base, a single crystal furnace body is supported and installed at the top of the base, a processing cavity is opened inside the single crystal furnace body, a receiving platform is rotatably arranged in the processing cavity, a crucible is supported and installed at the top of the receiving platform, a rotating motor for driving the receiving platform to rotate is installed on the base, an extension furnace is arranged at the top of the single crystal furnace body, an upper furnace chamber is overlapped and installed at the top of the extension furnace, a cavity is opened inside the extension furnace, a cooling water ring is installed in the cavity, an adjustment cavity is symmetrically opened on the inner wall of the cavity of the extension furnace, and a height adjustment component for assisting the position adjustment of the cooling water ring is installed in the adjustment cavity;

[0006] The height adjustment component includes a screw rod vertically rotatably arranged in an adjusting cavity, a first bevel gear protruding from the top of the screw rod, a height adjustment motor for driving the screw rod to rotate is installed on the outer side of the extension furnace, a second bevel gear is installed at the front end of the shaft of the height adjustment motor, the first bevel gear and the second bevel gear are meshed for transmission, a protruding block is protruding from the outer side of the cooling water ring, the protruding block is sleeved and installed on the screw rod, and the screw rod and the protruding block are threadedly matched.

[0007] Furthermore, a meshing gear is protrudingly provided at the outer edge of the bottom of the upper furnace, and a clamping block is symmetrically protrudingly provided on the meshing gear. A receiving groove for receiving the upper furnace is provided at the top of the extension furnace.

[0008] Furthermore, the receiving groove is symmetrically provided with a penetration groove, the inner side of the receiving groove is provided with an arc-shaped pressing groove, the penetration groove is connected with the pressing groove, and the clamping block is clamped with the penetration groove and the pressing groove.

[0009] Furthermore, a protruding plate is protrudingly provided on the outer side of the extension furnace, and a positioning component for assisting the rotation of the meshing gear is installed on the protruding plate.

[0010] Furthermore, the positioning assembly includes a positioning motor installed at the top of the protruding plate, a first transmission gear is installed at the front end of the shaft of the positioning motor, a second transmission gear is rotatably arranged inside the protruding plate, the second transmission gear is meshed with the first transmission gear for transmission, and the second transmission gear is engaged with the meshing gear.

[0011] Furthermore, a lifting component for assisting in pulling up the single crystal silicon is installed at the top of the base, and the lifting component includes a worm gear rotatably embedded in the upper furnace, an adjusting sleeve is fixedly mounted on the middle section of the worm gear, a lifting rod is installed on the adjusting sleeve, and the adjusting sleeve is threadedly matched with the lifting rod, a lifting motor is installed on the outer side of the upper furnace, a worm is installed at the front end of the shaft of the lifting motor, and the worm and the worm gear cooperate for transmission.

[0012] Furthermore, a limiting groove is vertically provided on the outer side of the lifting rod from top to bottom, a limiting block is protrudingly provided inside the upper furnace, and the limiting groove and the limiting block are engaged with each other.

[0013] Furthermore, the single crystal furnace body is equipped with a feed pipe, and the discharge port of the feed pipe is located directly above the crucible.

[0014] The beneficial effects of the present application are as follows: a circulating water cooling device for a single crystal furnace is provided, wherein a height adjustment component is provided, and the first bevel gear and the second bevel gear are meshed and transmitted, so that the first bevel gear is rotated as a whole, and the screw rod is driven to rotate as a whole, and the screw rod is threadedly matched with the protruding block, so that the position of the protruding block is adjusted, and then the overall height of the cooling water ring is adjusted, so that the cooling water ring can be quickly adjusted to the corresponding position according to the overall height of the molten state liquid level surface during the working process, and the inconvenience of adjusting the overall cooling water ring is avoided as much as possible;

[0015] Through the cooperation between the set penetration groove, pressing groove, positioning assembly, clamping block and meshing gear, the positioning motor is started, and the positioning motor drives the first transmission gear to rotate as a whole, the first transmission gear and the second transmission gear are meshed for transmission, and the second transmission gear and the meshing gear are meshed for transmission, so that the upper furnace rotates as a whole, and the overall disassembly of the upper furnace and the subsequent lifting processing can be quickly realized during work, and the inconvenience of disassembly between the upper furnace and the extension furnace can be avoided as much as possible, so as to ensure the smooth progress of subsequent work.

[0016] Through the setting of the lifting assembly, the lifting motor drives the worm to rotate as a whole, and the worm and the worm wheel cooperate with each other to rotate the worm wheel, thereby driving the adjusting sleeve to rotate as a whole, and the threads between the adjusting sleeve and the lifting rod cooperate to adjust the overall height of the lifting rod. In the process of lifting the lifting rod, the monocrystalline silicon is driven to rise as a whole, ensuring that the monocrystalline silicon column can rise stably as a whole. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The drawings constituting a part of this application are used to provide a further understanding of this application, so that other features, purposes and advantages of this application become more obvious. The drawings and descriptions of the exemplary embodiments of this application are used to explain this application and do not constitute an improper limitation on this application.

[0018] In addition, throughout the drawings, the same or similar reference numerals represent the same or similar elements. It should be understood that the drawings are schematic and that the components and elements are not necessarily drawn to scale.

[0019] In the attached picture:

[0020] Figure 1 is an overall schematic diagram according to an embodiment of the present application;

[0021] Figure 2 It is an overall schematic diagram of the furnace when it is disassembled and unfolded according to an embodiment of the present application;

[0022] Figure 3 is a longitudinal cross-sectional view of a single crystal furnace body according to an embodiment of the present application;

[0023] Figure 4 is a longitudinal cross-sectional view of the extension furnace corresponding to the penetration groove according to an embodiment of the present application;

[0024] Figure 5 It is a longitudinal cross-sectional view of the upper furnace corresponding to the lifting assembly in the embodiment of the present application.

[0025] Reference numerals:

[0026] 1. Base; 2. Rotating motor; 3. Single crystal furnace body; 4. Extension furnace; 41. Penetration groove; 42. Pressing groove; 43. Protruding plate; 44. Positioning assembly; 441. Positioning motor; 442. First transmission gear; 443. Second transmission gear; 5. Upper furnace; 51. Clamping block; 52. Engaging gear; 6. Lifting assembly; 7. Lifting motor; 8. Worm; 9. Worm wheel; 10. Adjusting sleeve; 11. Lifting rod; 111. Limiting groove; 112. Limiting block; 12. Height adjustment assembly; 13. Screw; 131. First bevel gear; 14. Height adjustment motor; 141. Second bevel gear; 15. Cooling water circle; 151. Feed pipe; 16. Crucible; 17. Receiving platform. DETAILED DESCRIPTION

[0027] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0028] It should also be noted that, for ease of description, only the parts related to the invention are shown in the drawings. In the absence of conflict, the embodiments and features in the embodiments of the present disclosure can be combined with each other.

[0029] It should be noted that the concepts such as "first" and "second" mentioned in the present disclosure are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0030] It should be noted that the modifications of "one" and "plurality" mentioned in the present disclosure are illustrative rather than restrictive, and those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0031] The present disclosure will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0032] This specific implementation is a single crystal furnace circulating water cooling device, such as Figure 1 , Figure 2 and Figure 3As shown, the single crystal furnace circulating water cooling device includes a base 1, a single crystal furnace body 3 is mounted on the top of the base 1, an atmosphere pipe is mounted on one side of the single crystal furnace body 3, an exhaust pipe for gas exhaust is mounted at the bottom of the single crystal furnace body 3, the atmosphere pipe is connected to the exhaust pipe, a processing chamber is opened inside the single crystal furnace body 3, a receiving platform 17 is rotatably arranged in the processing chamber, a crucible 16 is mounted on the top of the receiving platform 17, a rotating motor 2 for driving the receiving platform 17 to rotate is mounted on the base 1, a feed pipe 151 is mounted on the single crystal furnace body 3, and the discharge port of the feed pipe 151 is located directly above the crucible 16.

[0033] An extension furnace 4 is arranged at the top of the above-mentioned single crystal furnace body 3, and an upper furnace chamber 5 is overlapped and installed at the top of the extension furnace 4. A cavity is opened inside the extension furnace 4, and a cooling water ring 15 is installed in the cavity. An adjusting cavity is symmetrically opened on the inner wall of the cavity of the extension furnace 4, and a height adjustment component 12 for assisting the position adjustment of the cooling water ring 15 is installed in the adjusting cavity. The height adjustment component 12 includes a screw rod 13 vertically rotated in the adjusting cavity, and a first bevel gear 131 is protrudingly arranged at the top of the screw rod 13. A height adjustment motor 14 for driving the screw rod 13 to rotate is installed on the outer side edge of the extension furnace 4, and a second bevel gear 141 is installed at the front end of the machine shaft of the height adjustment motor 14. The first bevel gear 131 and the second bevel gear 141 are meshed and transmitted. A protruding block is protrudingly arranged on the outer side edge of the cooling water ring 15, and the protruding block is sleeved and installed on the screw rod 13, and the screw rod 13 and the protruding block are threadedly matched.

[0034] By setting the height adjustment component 12, the first bevel gear 131 and the second bevel gear 141 are meshed and transmitted, so that the first bevel gear 131 rotates as a whole, and drives the screw rod 13 to rotate as a whole, and the screw rod 13 and the protruding block are threadedly matched, so that the position of the protruding block is adjusted, and then the overall height of the cooling water ring 15 is adjusted, so that during the working process, the cooling water ring 15 can be quickly adjusted to the corresponding position according to the overall height of the molten state liquid level surface, and the inconvenience of adjusting the cooling water ring 15 as a whole can be avoided as much as possible.

[0035] Reference Figure 2 and Figure 4As shown, a meshing gear 52 is protrudingly provided at the outer edge of the bottom of the upper furnace 5, and a clamping block 51 is symmetrically protruding on the meshing gear 52. A receiving groove for receiving the upper furnace 5 is provided at the top of the extension furnace 4, and a through groove 41 is symmetrically provided in the receiving groove. An arc-shaped pressing groove 42 is provided on the inner side of the receiving groove, and the through groove 41 is connected with the pressing groove 42. The clamping block 51 is clamped with the through groove 41 and the pressing groove 42. A protruding plate 43 is protrudingly provided on the outer side of the extension furnace 4, and a positioning assembly 44 for assisting the rotation of the meshing gear 52 is installed at the protruding plate 43. The positioning assembly 44 includes a positioning motor 441 installed at the top of the protruding plate 43, and a first transmission gear 442 is installed at the front end of the machine shaft of the positioning motor 441. A second transmission gear 443 is rotatably provided inside the protruding plate 43, and the second transmission gear 443 is meshed with the first transmission gear 442 for transmission, and the second transmission gear 443 is matched and clamped with the meshing gear 52.

[0036] By means of the cooperation among the provided penetration groove 41, the pressing groove 42, the positioning assembly 44, the clamping block 51 and the meshing gear 52, etc., the positioning motor 441 is started, and the positioning motor 441 drives the first transmission gear 442 to rotate as a whole, the first transmission gear 442 and the second transmission gear 443 are meshed for transmission, and the second transmission gear 443 and the meshing gear 52 are meshed for transmission, so that the upper furnace 5 is rotated as a whole, and the overall disassembly of the upper furnace 5 and the subsequent hoisting processing can be quickly realized during work, and the problems such as the inconvenience of disassembly between the upper furnace 5 and the extension furnace 4 can be avoided as much as possible, so as to ensure the smooth progress of subsequent work.

[0037] Reference Figure 1 , Figure 2 and Figure 5 As shown, a lifting assembly 6 for assisting in pulling up the single crystal silicon is installed at the top of the base 1. The lifting assembly 6 includes a worm gear 9 rotatably embedded in the upper furnace 5. An adjusting sleeve 10 is fixedly mounted on the middle section of the worm gear 9. A lifting rod 11 is installed on the adjusting sleeve 10. The adjusting sleeve 10 and the lifting rod 11 are threadedly matched. A lifting motor 7 is installed on the outer side of the upper furnace 5. A worm 8 is installed at the front end of the shaft of the lifting motor 7. The worm 8 and the worm gear 9 are matched for transmission.

[0038] Through the provided lifting assembly 6, the lifting motor 7 drives the worm 8 to rotate as a whole, and the worm 8 cooperates with the worm wheel 9 to rotate, thereby driving the adjusting sleeve 10 to rotate as a whole, and the adjusting sleeve 10 and the lifting rod 11 are threadedly matched, so that the overall height of the lifting rod 11 can be adjusted. In the process of lifting the lifting rod 11, the monocrystalline silicon is driven to rise as a whole, ensuring that the monocrystalline silicon column can rise stably as a whole.

[0039] A limit groove 111 is vertically provided on the outer side of the lifting rod 11 from top to bottom, and a limit block 112 is protrudingly provided inside the upper furnace 5. The limit groove 111 and the limit block 112 are engaged with each other. Through the cooperation between the set limit block 112 and the limit groove 111, it can be ensured that the lifting rod 11 can only move up and down during operation, and rotation of the lifting rod 11 during adjustment can be avoided as much as possible.

[0040] Working principle:

[0041] When the overall height of the crucible 16 needs to be adjusted, the height adjustment motor 14 is started, and the height adjustment motor 14 drives the second bevel gear 141 to rotate, and the first bevel gear 131 and the second bevel gear 141 are meshed and transmitted, so that the first bevel gear 131 rotates as a whole, and drives the screw rod 13 to rotate as a whole, and the screw rod 13 and the protruding block are threadedly matched, so that the position of the protruding block is adjusted, and then the overall height of the cooling water circle 15 is adjusted to adapt to different working requirements, and then the overall height of the cooling water circle 15 is adjusted when the molten material in the crucible 16 falls, so as to ensure the overall water cooling effect.

[0042] During operation, the lifting motor 7 is started, and the lifting motor 7 drives the worm 8 to rotate as a whole. The worm 8 and the worm wheel 9 cooperate with each other to rotate the worm wheel 9, thereby driving the adjusting sleeve 10 to rotate as a whole. The adjusting sleeve 10 and the lifting rod 11 are threadedly matched, so that the overall height of the lifting rod 11 is adjusted, and the monocrystalline silicon is driven to rise as a whole during the lifting and lowering process of the lifting rod 11.

[0043] When the single crystal silicon column completely enters the upper furnace chamber 5, the positioning motor 441 is started, and the positioning motor 441 drives the first transmission gear 442 to rotate as a whole, and the first transmission gear 442 and the second transmission gear 443 are meshed for transmission, and the second transmission gear 443 and the meshing gear 52 are meshed for transmission, so that the upper furnace chamber 5 rotates as a whole. When the clamping block 51 is located at the penetration groove 41, the upper furnace chamber 5 is hoisted by the hoisting equipment, and the single crystal silicon column located inside the upper furnace chamber 5 is dropped as a whole, so as to realize the overall removal of the single crystal silicon column and facilitate subsequent transportation.

[0044] The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by a specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the embodiments of the present disclosure (but not limited to) and the technical solutions formed.

Claims

1. A circulating water cooling device for a single crystal furnace, characterized in that: The invention comprises a base (1), a single crystal furnace body (3) is supported and installed on the top of the base (1), a processing chamber is provided inside the single crystal furnace body (3), and a receiving platform (17) is rotatably provided inside the processing chamber. A crucible (16) is mounted on the top of the receiving platform (17), a rotating motor (2) is mounted on the base (1) to drive the receiving platform (17) to rotate, an extension furnace (4) is arranged on the top of the single crystal furnace body (3), an upper furnace chamber (5) is overlapped and mounted on the top of the extension furnace (4), a cavity is opened inside the extension furnace (4), a cooling water ring (15) is installed in the cavity, an adjustment cavity is symmetrically opened on the inner wall of the cavity of the extension furnace (4), and a height adjustment component (12) for assisting the position adjustment of the cooling water ring (15) is installed in the adjustment cavity.

2. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The height adjustment component (12) comprises a screw rod (13) vertically rotatably arranged in an adjustment chamber, a first bevel gear (131) protrudingly arranged at the top of the screw rod (13), a height adjustment motor (14) for driving the screw rod (13) to rotate is installed on the outer side of the extension furnace (4), a second bevel gear (141) is installed at the front end of the shaft of the height adjustment motor (14), the first bevel gear (131) and the second bevel gear (141) are meshed and transmitted, a protruding block is protrudingly arranged on the outer side of the cooling water ring (15), the protruding block is sleeved and installed on the screw rod (13), and the screw rod (13) and the protruding block are threadedly matched; A meshing gear (52) is protrudingly provided at the outer edge of the bottom of the upper furnace (5), and a clamping block (51) is symmetrically protrudingly provided on the meshing gear (52). A receiving groove for receiving the upper furnace (5) is provided at the top of the extension furnace (4).

3. The single crystal furnace circulating water cooling device according to claim 2 is characterized in that: A through groove (41) is symmetrically provided in the receiving groove, an arc-shaped pressing groove (42) is provided on the inner side of the receiving groove, the through groove (41) is communicated with the pressing groove (42), and the clamping block (51) is clamped with the through groove (41) and the pressing groove (42).

4. The single crystal furnace circulating water cooling device according to claim 3 is characterized in that: Place A protruding plate (43) is protrudingly provided on the outer side of the extension furnace (4), and a positioning component (44) for assisting the rotation of the meshing gear (52) is installed on the protruding plate (43).

5. The single crystal furnace circulating water cooling device according to claim 4 is characterized in that: The positioning assembly (44) comprises a positioning motor (441) installed at the top of the protruding plate (43); a first transmission gear (442) is installed at the front end of the shaft of the positioning motor (441); a second transmission gear (443) is rotatably arranged inside the protruding plate (43); the second transmission gear (443) is meshed with the first transmission gear (442) for transmission; and the second transmission gear (443) is engaged with the meshing gear (52) for locking.

6. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: A lifting assembly (6) for assisting in pulling up the single crystal silicon is installed at the top of the base (1), and the lifting assembly (6) includes a worm wheel (9) rotatably embedded in the interior of the upper furnace (5), an adjusting sleeve (10) is fixedly mounted on the middle section of the worm wheel (9), a lifting rod (11) is installed on the adjusting sleeve (10), and the adjusting sleeve (10) and the lifting rod (11) are threadedly matched, a lifting motor (7) is installed on the outer side of the upper furnace (5), a worm (8) is installed at the front end of the shaft of the lifting motor (7), and the worm (8) and the worm wheel (9) are matched for transmission.

7. The single crystal furnace circulating water cooling device according to claim 6, characterized in that: A limiting groove (111) is vertically provided on the outer side of the lifting rod (11) from top to bottom, and a limiting block (112) is protrudingly provided inside the upper furnace (5), and the limiting groove (111) and the limiting block (112) are engaged and snap-fitted.

8. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The single crystal furnace body (3) is equipped with a feed pipe (151), and the discharge port of the feed pipe (151) is located directly above the crucible (16).

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