Upper half-moon graphite piece and epitaxial furnace
By designing a first-half graphite piece including graphite plates and arched graphite components, the problem of chip yield loss caused by the fall of 3C-SiC by-products in the prior art is solved, and a more efficient maintenance process is achieved, which increases production capacity and reduces costs.
Patent Information
- Application Number
- CN202420354196.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-23
- Publication Date
- 2025-03-11
- Estimated Expiration
- 2034-02-23
AI Technical Summary
During the production process of silicon carbide epitaxial furnaces, the existing graphite parts in the first half of the month have accumulated after multiple rounds of epitaxial growth, and fall off during the rise and fall process, resulting in damage to the chip yield and the maintenance process is long, affecting production capacity.
A first half moon graphite piece is designed, which includes a graphite plate and an arched graphite assembly, with the arched opening of the arched graphite assembly movably connected to the graphite plate, allowing the graphite plate to be removed and installed separately, so that only the graphite plate needs to be cleaned during maintenance without removing the entire first half moon graphite piece.
Through this design, the maintenance efficiency of the epitaxial furnace is significantly improved, maintenance time is shortened, production capacity is improved, and production costs are reduced.
Smart Images
Figure CN222594083U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide epitaxial furnace production, in particular to an upper half-moon graphite part and an epitaxial furnace. Background Art
[0002] The single-wafer horizontal epitaxial furnace is one of the mainstream silicon carbide epitaxial furnaces on the market. It is widely favored for its extremely high growth rate upper limit, good controllability and adjustability. The thickness and concentration of epitaxial wafers produced by the horizontal epitaxial furnace are precisely controllable, and the uniformity upper limit is high. Due to the horizontal flow field and structural design, its main heating graphite parts are correspondingly designed as split upper and lower half-moon graphite parts. Its working principle is to use a manipulator to take the tray with silicon carbide substrate sheets from the loading chamber and place it on the rotating base between the upper and lower half-moon graphite parts in the process chamber. During the process growth, the source gas reacts and grows preferentially in the high-temperature area of the substrate sheet and the graphite part under the heating condition of the graphite part, and grows an epitaxial layer that meets the requirements on the substrate, but the by-product 3C-SiC will be crystallized and grown on the upper half-moon graphite part and the protective sheet.
[0003] Since the upper half of the graphite piece is directly above the substrate sheet, after multiple rounds of epitaxial growth, the 3C-SiC in the upper half of the moon accumulates and grows to a certain thickness. It gradually falls off during the temperature rise and fall process, and falls on the substrate sheet to form fatal defects such as dropped objects, resulting in damage to the chip yield. At present, the common solution in the industry is to dismantle the cavity for maintenance when the epitaxial cumulative growth is about 300μm, remove the graphite parts such as the upper half of the moon graphite part and the protective sheet, and scrape off the 3C-SiC grown on the surface of the graphite part. However, the disassembly and polishing process of graphite parts is very time-consuming, which will seriously affect production capacity during mass production. Therefore, it is very necessary to find a way to improve maintenance efficiency and save maintenance time. Utility Model Content
[0004] The utility model aims to solve one of the technical problems in the related art at least to a certain extent. To this end, one purpose of the utility model is to provide an upper half-moon graphite part and an epitaxial furnace. The upper half-moon graphite part can significantly improve the maintenance efficiency of the epitaxial furnace, shorten the maintenance time, increase the production capacity of the epitaxial furnace, and reduce the production cost.
[0005] In one aspect of the utility model, the utility model discloses an upper half-moon graphite piece. According to an embodiment of the utility model, the upper half-moon graphite piece comprises:
[0006] Graphite plate;
[0007] An arched graphite component, wherein the graphite flat plate is movably connected to the arched opening of the arched graphite component.
[0008] According to an embodiment of the utility model, the upper half of the moon graphite part includes a graphite flat plate and an arched graphite assembly, and the graphite flat plate is movably connected at the arched opening of the arched graphite assembly. When the cavity is dismantled for maintenance, because the graphite flat plate of the upper half of the moon graphite part is located directly above the substrate sheet, the byproduct 3C-SiC crystallized and grown on the lower surface of the graphite flat plate of the existing upper half of the moon graphite part will fall on the substrate sheet, resulting in the chip yield being impaired. Therefore, by movably connecting the graphite flat plate at the arched opening of the arched graphite assembly, compared to the existing integrated upper half of the moon graphite part, the graphite flat plate of the upper half of the moon graphite part of the present application can be removed or installed from the arched graphite assembly, and when it is necessary to clean the lower surface of the graphite flat plate of the upper half of the moon graphite part, it is only necessary to remove the graphite flat plate alone for cleaning, and the arched graphite assembly after removing the graphite flat plate can be replaced with a spare clean graphite flat plate of the same model, thereby avoiding the entire upper half of the moon graphite part from being taken out of the equipment for cleaning. Therefore, the upper half-moon graphite part can significantly improve the maintenance efficiency of the epitaxial furnace, shorten the maintenance time, increase the production capacity of the epitaxial furnace, and reduce production costs.
[0009] In addition, the upper half-moon graphite piece according to the above embodiment of the utility model may also have the following additional technical features:
[0010] In some embodiments of the utility model, the graphite wall end portion at the arch opening of the arched graphite assembly is provided with a first groove and a second groove, the opening of the first groove is opposite to the opening of the second groove, and bosses are provided at opposite ends of the graphite plate, respectively, and the bosses can be inserted into the first groove and the second groove, respectively. Thus, the maintenance efficiency of the epitaxial furnace can be improved.
[0011] In some embodiments of the present invention, boss baffles are respectively provided at the ends of the first groove and the second groove in the insertion direction of the graphite plate.
[0012] In some embodiments of the utility model, the graphite wall ends at the arched opening of the arched graphite assembly extend toward the center line of the arched opening to form opposite first placement platforms, and the opposite ends of the graphite flat plate can be placed on the first placement platforms, respectively. Thus, the maintenance efficiency of the epitaxial furnace can be improved.
[0013] In some embodiments of the present invention, first placement platform baffles are respectively provided at the ends of the first placement platform in the insertion direction of the graphite plate.
[0014] In some embodiments of the utility model, the graphite wall ends at the arched opening of the arched graphite assembly extend toward the center line of the arched opening to form opposite second placement platforms, and the opposite side walls of the graphite flat plate are provided with third and fourth grooves, respectively, and the second placement platforms can be inserted into the third and fourth grooves, respectively. Thus, the maintenance efficiency of the epitaxial furnace can be improved.
[0015] In some embodiments of the present invention, second placement platform baffles are respectively provided at the ends of the second placement platform in the insertion direction of the graphite plate.
[0016] In some embodiments of the utility model, the graphite plate is provided with a hand-held portion, thereby facilitating the removal of the graphite plate.
[0017] In some embodiments of the present invention, the handpiece includes grooves or protrusions.
[0018] In another aspect of the utility model, the utility model provides an epitaxial furnace. According to an embodiment of the utility model, the epitaxial furnace comprises the upper half-moon graphite piece. Thus, the epitaxial furnace has lower maintenance cost and higher production efficiency.
[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:
[0021] Figure 1 It is a schematic diagram of the structure of the existing upper half of the moon graphite part;
[0022] Figure 2 It is a three-dimensional structural schematic diagram of the upper half of the graphite piece of one embodiment of the utility model;
[0023] Figure 3 yes Figure 2 The side view of the upper half of the graphite part;
[0024] Figure 4 yes Figure 2 The side view of the graphite plate structure of the upper half of the graphite part;
[0025] Figure 5 is a side structural diagram of an upper half-moon graphite piece of another embodiment of the present invention;
[0026] Figure 6 is a side structural diagram of an upper half-moon graphite piece of another embodiment of the present invention;
[0027] Figure 7 yes Figure 6 Side view of the graphite plate structure of the upper half of the graphite part. DETAILED DESCRIPTION
[0028] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0029] The utility model is based on the following discovery: since the upper half of the graphite piece is located directly above the substrate, after multiple rounds of epitaxial growth, the 3C-SiC of the upper half of the graphite piece grows cumulatively to a certain thickness, and gradually falls off during the temperature rise and fall process, falling on the substrate to form fatal defects such as falling objects, resulting in a loss of chip yield. Figure 1 , it is necessary to remove the entire upper half of the graphite piece from the equipment and then clean up the byproduct 3C-SiC that has grown on the lower surface of the graphite plate of the upper half of the graphite piece. However, there are two problems in removing and cleaning the entire upper half of the graphite piece. First, it is not convenient to remove the entire upper half of the graphite piece from the equipment, and it takes time and effort to remove it once; second, the entire process of cleaning the upper half of the graphite piece and then putting it back into the equipment takes a long time and has a high time cost.
[0030] In view of this, one aspect of the utility model discloses an upper half moon graphite piece. According to an embodiment of the utility model, referring to Figure 2 , the upper half-moon graphite part includes: a graphite flat plate 100 and an arched graphite assembly 200, and the graphite flat plate 100 is movably connected to the arched opening of the arched graphite assembly 200. Compared with the existing integrated upper half-moon graphite part, the graphite flat plate 100 of the upper half-moon graphite part of the present application can be removed or installed from the arched graphite assembly 200. When it is necessary to clean the lower surface of the graphite flat plate 100 of the upper half-moon graphite part, it is only necessary to remove the graphite flat plate 100 for cleaning. After removing the graphite flat plate, the arched graphite assembly 200 can be replaced with a spare clean graphite flat plate of the same model, thereby avoiding taking the entire upper half-moon graphite part out of the equipment for cleaning. As a result, the upper half-moon graphite part can significantly improve the maintenance efficiency of the epitaxial furnace, shorten the maintenance time, increase the production capacity of the epitaxial furnace, and reduce production costs.
[0031] According to the embodiment of the present utility model, referring to Figure 2 , Figure 3 and Figure 4, the graphite wall end at the arch opening of the arched graphite component 200 is respectively provided with a first groove 210 and a second groove 220, the opening of the first groove 210 is opposite to the opening of the second groove 220, and the two opposite ends of the graphite plate 100 are respectively provided with bosses 110, which can be inserted into the first groove 210 and the second groove 220 respectively. Through the clamping and fixing of the first groove 210 and the second groove 220 with the boss 110, the graphite plate 100 can be removed or installed from the arched graphite component 200. When it is necessary to clean the upper half of the graphite part, it is only necessary to remove the graphite plate 100 from the arched graphite component 200, and then install the cleaned spare graphite plate 100 on the arched graphite component 200, thereby shortening the downtime of the epitaxial furnace and improving the maintenance efficiency and production capacity of the epitaxial furnace. It should be noted that for the sizes of the first groove 210, the second groove 220 and the boss 110, those skilled in the art can select them according to actual conditions.
[0032] According to the embodiment of the present utility model, referring to Figure 2 , boss baffles 111 are respectively provided at the ends of the first groove 210 and the second groove 220 in the insertion direction of the graphite plate 100. The boss baffles 111 enable the graphite plate 100 to be accurately located at the opening of the arched graphite assembly 200, thereby preventing the graphite plate 100 from being insufficiently or excessively inserted, and facilitating operation.
[0033] According to the embodiment of the present utility model, referring to Figure 5 , the graphite wall ends at the arched opening of the arched graphite assembly 200 extend in the direction of the center line of the arched opening to form a first relative placement platform 230, and the two opposite ends of the graphite flat plate 100 can be placed on the first placement platform 230 respectively. The graphite flat plate 100 is fixed by the support of the first placement platform 230 on the graphite flat plate 100. When cleaning the graphite flat plate 100, it is only necessary to pull the graphite flat plate 100 out of the first placement platform 230, thereby improving the maintenance efficiency of the epitaxial furnace. Further, the ends of the first placement platform 230 in the insertion direction of the graphite flat plate 100 are respectively provided with a first placement platform baffle (not shown). The insertion position of the graphite flat plate 100 can be fixed by the first placement platform baffle, ensuring that the graphite flat plate 100 is accurately inserted and improving work efficiency. It should be noted that the size of the first placement platform 230 can be selected by those skilled in the art according to actual conditions, and is not particularly limited here.
[0034] According to the embodiment of the present utility model, referring to Figure 6, the graphite wall end at the arch opening of the arched graphite assembly 200 extends in the direction of the center line of the arched opening to form a second relative placement platform 240, and the opposite side walls of the graphite flat plate 100 are respectively provided with a third groove 120 and a fourth groove 130, and the second placement platform 240 can be inserted into the third groove 120 and the fourth groove 130. By matching and inserting the second placement platform 240 with the third groove 120 and the fourth groove 130, the graphite flat plate 100 can be movably fixed at the arch opening of the arched graphite assembly 200. When the graphite flat plate 100 needs to be cleaned, it is only necessary to pull out the graphite flat plate 100, thereby improving the maintenance efficiency of the epitaxial furnace. Further, the ends of the second placement platform 240 in the insertion direction of the graphite flat plate 100 are respectively provided with a second placement platform baffle (not shown). The insertion position of the graphite flat plate 100 can be fixed by the second placement platform baffle, ensuring that the graphite flat plate 100 is accurately inserted and improving work efficiency. It should be noted that for the specific size of the second placement platform 240, those skilled in the art can select according to actual conditions.
[0035] According to the embodiment of the utility model, a hand-held portion is provided on the graphite plate. By providing the hand-held portion, it is convenient to extract the graphite plate, thereby improving work efficiency. Figure 2 The hand piece includes a groove 10 or a protrusion (not shown). It should be noted that the position of the hand piece on the graphite plate is not particularly limited, as long as the graphite plate is easy to extract. Those skilled in the art can select the specific position of the hand piece according to actual conditions.
[0036] In another aspect of the utility model, the utility model provides an epitaxial furnace. According to an embodiment of the utility model, the epitaxial furnace comprises the upper half-moon graphite piece. Thus, the epitaxial furnace has lower maintenance cost and higher production efficiency.
[0037] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.
[0038] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.
Claims
1. An upper half moon graphite part, characterized in that: include: Graphite plate; An arched graphite component, wherein the graphite flat plate is movably connected to the arched opening of the arched graphite component.
2. The upper half moon graphite piece according to claim 1, characterized in that: The graphite wall ends at the arched opening of the arched graphite component are respectively provided with a first groove and a second groove, the opening of the first groove is opposite to the opening of the second groove, and bosses are respectively provided at the opposite ends of the graphite plate, and the bosses can be inserted into the first groove and the second groove respectively.
3. The upper half moon graphite piece according to claim 2, characterized in that: Boss baffles are respectively provided at the ends of the first groove and the second groove in the insertion direction of the graphite plate.
4. The upper half moon graphite piece according to claim 1, characterized in that: The graphite wall ends at the arched opening of the arched graphite assembly extend toward the center line of the arched opening to form opposite first placement platforms, and opposite ends of the graphite flat plate can be placed on the first placement platforms respectively.
5. The upper half moon graphite piece according to claim 4, characterized in that: First placement platform baffles are respectively provided at the ends of the first placement platform in the insertion direction of the graphite plate.
6. The upper half moon graphite piece according to claim 1, characterized in that: The graphite wall ends at the arched opening of the arched graphite assembly extend toward the center line of the arched opening to form opposite second placement platforms, and the opposite side walls of the graphite flat plate are respectively provided with a third groove and a fourth groove, and the second placement platforms can be respectively inserted into the third groove and the fourth groove.
7. The upper half-moon graphite piece according to claim 6, characterized in that: Second placement platform baffles are respectively provided at the ends of the second placement platform in the insertion direction of the graphite plate.
8. The upper half-moon graphite piece according to any one of claims 1 to 7, characterized in that: A hand-held portion is provided on the graphite flat plate.
9. The upper half-moon graphite piece according to claim 8, characterized in that: The grip portion includes grooves or protrusions.
10. An epitaxial furnace, characterized in that: The invention comprises the upper half-moon graphite piece as described in any one of claims 1 to 9.