Adjusting base

By designing an adjustment base with a rotational adjustment mechanism, the problem of the inability to adjust the angle in the existing station adjustment is solved, angle adjustment and rapid switching of the station are achieved, and operating efficiency and accuracy are improved.

CN222600954UActive Publication Date: 2025-03-11SUZHOU VEGA TECH CO LTD
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Patent Information

Application Number
CN202420416601.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-05
Publication Date
2025-03-11
Estimated Expiration
2034-03-05

AI Technical Summary

Technical Problem

The angle cannot be adjusted during the adjustment of the existing station, and the positioning of the adjusting member on the side affects the inefficiency of operation.

Method used

An adjustment base is designed, including a bottom plate and a carrier plate. A rotation adjustment mechanism is provided on the carrier plate. Through the coordination of the active rod and the driven rod, the rotation nut is adjusted to cause relative rotational displacement between the carrier plate and the base plate to achieve angle adjustment. At the same time, a guide groove is provided below the bottom plate, which is slidly connected to the guide rail to achieve rapid switching of the work station.

Benefits of technology

The angle adjustment of the station is realized, the adjustment accuracy and efficiency are improved, the equipment maintenance time is reduced, and the operation is facilitated.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses an adjusting base which comprises a bottom plate, and a fixing shaft is fixedly connected to the bottom plate. The carrier plate is located above the bottom plate, the carrier plate comprises a rotary adjusting mechanism, the fixing shaft extends out of the carrier plate through a first kidney-shaped hole in the carrier plate to be connected with one end of the rotary adjusting mechanism, and the relative position between the bottom plate and the carrier plate can be adjusted through the rotary adjusting mechanism. The rotary adjusting assembly is arranged on the carrier plate so that rotation or left-right direction adjustment of the carrier plate relative to the bottom plate can be achieved, and the problem that adjustment precision is low due to movement adjustment in the single left-right direction or the front-back direction or the composite direction is solved. The problem that operation is inconvenient due to insufficient space on the two sides of the base is solved.
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Description

Technical Field

[0001] The utility model relates to the field of semiconductor processing equipment, in particular to an adjustment base. Background Art

[0002] With the continuous development of semiconductor manufacturing and testing technology, sorting machines are widely used in the testing process of semiconductor devices to perform quality tests on semiconductor packaged chips (ICs), including electrical performance testing, visual inspection, character marking, tape inspection, and automatic winding. According to the test results, semiconductor products are finally classified and packaged. When testing chips, it is usually necessary to test the sorting machine to distribute multiple chips to various testing stations for testing. In order to ensure the processing accuracy of each station, the processing direction of the station needs to be adjusted. At present, there are the following problems in the station adjustment process:

[0003] 1. Only left-right and front-back direction adjustment can be achieved, and angle adjustment cannot be achieved;

[0004] 2. The left and right adjustment screws are located on the side of the workstation, which requires a lot of space and affects operation when the workstations are densely arranged;

[0005] 3. It is impossible to quickly disassemble and assemble the workstation, and debugging takes a lot of time. Summary of the invention

[0006] The utility model aims to provide an adjustment base to at least solve the problem that the angle cannot be adjusted during the existing workstation adjustment process and the adjustment member is located at the side, which affects the operation and leads to low efficiency.

[0007] In order to solve the above technical problems, the utility model provides an adjustment base, comprising:

[0008] A bottom plate, to which a fixed shaft is fixedly connected;

[0009] The carrier plate is located above the base plate, and the carrier plate includes a rotation adjustment mechanism. The fixed shaft extends out of the carrier plate through a first waist hole on the carrier plate and is connected to one end of the rotation adjustment mechanism. The relative position between the base plate and the carrier plate can be adjusted by the rotation adjustment mechanism.

[0010] Optionally, in the adjustment base, the rotation adjustment mechanism includes an adjusting nut, an active rod and a driven rod connected in sequence, the driven rod is provided with a rotating shaft and one end of the driven rod is sleeved with the fixed shaft through a second waist hole, and the active rod is driven by adjusting the adjusting nut to make the driven rod rotate around the rotating shaft to achieve relative displacement between the base plate and the carrier plate.

[0011] Optionally, in the adjustment base, the bottom plate is connected to the carrier plate at one end by a fixed axis pin, and the other end is adjusted by adjusting the adjustment nut to move the first waist hole relative to the fixed axis to achieve rotational displacement between the bottom plate and the carrier plate.

[0012] Optionally, in the adjustment base, the carrier plate is provided with a fourth waist hole and a fifth waist hole parallel to each other along the second direction on both sides of the driven rod, and fixing parts are respectively sleeved in the fourth waist hole and the fifth waist hole, and the fixing parts are fixed to the bottom plate. By adjusting the adjusting nut, the fourth waist hole and the fifth waist hole are made to move relative to the fixing parts at the same time to realize the relative left and right displacement between the carrier plate and the bottom plate.

[0013] Optionally, in the adjustment base, the active rod is arranged at an edge position on one side above the carrier plate along the first direction, one end of the adjustment nut is threadedly connected to the active rod, and the other end extends out from the rear of the carrier plate.

[0014] Optionally, in the adjustment base, a guide groove is provided on the lower end surface of the base plate for sliding the base plate along the guide groove and installing it on the guide rail. The base plate is provided with a front and rear adjustment member, one end of which extends out from the rear of the base plate and the other end contacts the guide rail. The front and rear relative position between the base plate and the carrier plate can be adjusted by the front and rear adjustment member.

[0015] Optionally, in the adjustment base, adjustment members are respectively provided on both sides of the bottom plate, and the axial force of the adjustment member on one side is greater than the axial force of the adjustment member on the other side.

[0016] Optionally, in the adjustment base, a limit block is provided at one end of the guide rail away from the front and rear adjustment members, and the limit block is used to limit the depth of the bottom plate inserted into the guide rail.

[0017] Optionally, in the adjustment base, the bottom plate further includes:

[0018] Limiting members, the limiting members are located at the edges of both sides of the guide groove and are used for sliding installation between the bottom plate and the guide rail;

[0019] A locking member is fixed to the base plate and extends out of the carrier plate through an opening of the carrier plate, and is used to lock the base plate and the guide rail after installation and adjustment are completed.

[0020] Optionally, in the adjustment base, at least one oil filling groove is provided on the rotation adjustment mechanism.

[0021] The utility model provides an adjustment base, by arranging a rotation adjustment mechanism on the carrier plate, the active rod and the driven rod cooperate with each other, and the rotating nut is adjusted to make the upper carrier plate and the lower base plate produce relative rotation displacement to achieve angle adjustment, and a guide groove is provided under the base plate, and the guide groove and the guide rail are used to slide in connection to achieve rapid switching of workstations. At the same time, the adjustment nut and the front and rear adjustment parts are all arranged at the rear of the adjustment base, which is more convenient to operate, and solves the problems that workstations with circular workstation layouts such as semiconductor turret machines cannot be precisely adjusted, the equipment maintenance time is long, and it is inconvenient to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the structure of one direction of the adjustment base provided in this embodiment;

[0023] Figure 2 A schematic diagram of the structure of the adjustment base provided in this embodiment in another direction;

[0024] Figure 3 A schematic diagram of the structure of the bottom of the adjustment base when the adjustment base provided in this embodiment is inserted into the guide rail;

[0025] Figure 4 This is a schematic diagram of the guide rail structure provided in this embodiment.

[0026] The symbols in the figure are described as follows:

[0027] 10-bottom plate; 20-carrying plate; 30-rotation adjustment mechanism; 40-guide rail; 50-front and rear adjustment member; 60-locking member;

[0028] 110-fixed shaft; 120-guide groove; 130-limiting piece; 141-left adjusting piece; 142-right adjusting piece; 210-first waist hole; 310-adjusting nut; 320-active rod; 321-oil filling groove; 330-driven rod; 331-rotating shaft; 332-second waist hole; 410-limiting block; 610-buckle seat; 620-buckle; 710-fourth waist hole; 720-fifth waist hole. DETAILED DESCRIPTION

[0029] The following is a further detailed description of the adjustable base proposed by the utility model in conjunction with the accompanying drawings and specific embodiments. It should be noted that the accompanying drawings are all in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model. In addition, the structure shown in the accompanying drawings is often a part of the actual structure. In particular, the emphasis of each accompanying drawing is different, and sometimes different proportions are used.

[0030] It should be noted that the terms "first", "second", etc. in the specification, claims and drawings of the present invention are used to distinguish similar objects in order to describe the embodiments of the present invention, rather than to describe a specific order or sequence. It should be understood that the structures used in this way can be interchanged under appropriate circumstances. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0031] For the IC chip sorting and testing process, a high-speed and high-precision handling structure is required. Generally, a translational handling module or a turret handling module is used. Among them, the turret handling module has a higher handling efficiency, a more compact structure, and a wider range of application scenarios. Since the workstation layout of the semiconductor turret machine is a circular arrangement, and the current adjustment method of the adjustment base is that the bolts and the linear guide rail fixing frame are connected by threads, and the forward and reverse rotation of the bolts can achieve one-way sliding adjustment. Only the forward and backward or left and right direction adjustment cannot obtain the required adjustment accuracy. If precise adjustment is achieved in the space of the circular arrangement, the base needs to be adjusted at an angle to meet the precise adjustment requirements. In this embodiment, an adjustment base is provided, including a base plate and a carrier plate. The carrier plate is located above the base plate. A fixed shaft is fixedly connected to the base plate. A rotation adjustment mechanism is provided on the carrier plate. A rotation shaft is provided on the rotation adjustment mechanism. The fixed shaft passes through the waist hole on the carrier plate in the vertical direction and is slidably connected to one end of the rotation adjustment mechanism. The relative position between the base plate and the carrier plate is adjusted by rotating around the rotation shaft through the rotation adjustment mechanism. In order to facilitate the description of each mechanism, the following is used to describe the relationship between the base plate and the carrier plate: Figure 1 Taking the illustrated direction of the adjusting base as an example, it is defined that the length direction of the base is the first direction, the width direction of the base is the second direction, and the height direction of the base is the third direction. One end of the guide groove inserted into the guide rail is defined as the front of the adjusting base, and the other end is defined as the rear of the base.

[0032] Embodiment 1:

[0033] like Figure 1 to Figure 2As shown, the adjustment base includes a bottom plate 10, on which a fixed shaft 110 is fixedly connected; a carrier plate 20, which is located above the bottom plate 10, and the carrier plate 20 includes a rotation adjustment mechanism 30, and the fixed shaft 110 extends out of the carrier plate 20 through a waist hole 210 on the carrier plate 20 and is connected to one end of the rotation adjustment mechanism 30, and the relative position between the bottom plate 10 and the carrier plate 20 can be adjusted by the rotation adjustment mechanism 30. The bottom plate 10 and the carrier plate 20 are matched and connected at the rear by a fixed axis pin (not shown in the figure), and the fixed shaft 110 is located in the middle or front end of the adjustment base and is fixed vertically above the bottom plate 10. The length of the first waist hole 210 is opened along the second direction and the width of the waist hole is slightly larger than the diameter of the fixed shaft 110, so that the first waist hole 210 can move back and forth relative to the fixed shaft 110. In this embodiment, the rear end of the carrier plate 20 is fixedly connected to the bottom plate 10 , and the first waist hole 210 at the other end moves relatively to achieve the angle adjustment of the carrier plate 20 relative to the bottom plate 10 .

[0034] The rotation adjustment mechanism 30 includes an adjustment nut 310, an active rod 320 and a driven rod 330 connected in sequence. The two ends of the driven rod 330 are arranged at a certain angle, and the rotating shaft 331 is fixed to the carrier plate 20 and is located at the angle of the driven rod 330. The two ends of the driven rod 330 can rotate around the rotating shaft 331. A second waist hole 332 is opened on the side of the driven rod 330 connected to the fixed shaft 110. The second waist hole 332 is located above the first waist hole 210 and the two directions are opposite, forming a cross-like shape. The fixed shaft 110 is respectively located in the first waist hole 210 and the second waist hole 332. Since the fixed shaft 110 is fixed to the base plate 10, when the rotation adjustment mechanism 30 is adjusted to generate a certain force, the active rod 320 drives the driven rod 320 to rotate around the rotation axis 331, and the driven rod 330 moves relative to the fixed shaft 110 and drives the carrier plate 20 to rotate along the trajectory of the first waist hole 210 in the opposite direction relative to the driven rod 330, thereby realizing the relative rotation displacement between the base plate 10 and the carrier plate 20. One end of the active rod 320 is connected to the driven rod 330, and the other end is threadedly connected to the adjustment nut 310. The active rod 320 is driven by the adjustment nut 310 to move and adjust the angle of the base plate 10 and the carrier plate 20. It should be noted that the adjustment method used in this embodiment is manual adjustment, which can be replaced by electrical components, screws, gear racks, wedges, etc. in other embodiments. At least one oil filling groove is provided on the rotary adjustment member 30. In the present embodiment, the oil filling groove is provided on the active rod 320. Oil is regularly or selectively injected from the oil filling groove into the rotary adjustment mechanism 30 to prevent mechanical jamming between the adjusting nut 310, the active rod 320 and the driven rod 330, so as to improve the transmission accuracy and sensitivity.

[0035] Specifically, Figure 1 As shown, the driven rod 330 is arranged in an L shape, the rotating shaft 331 is located at the angle of the driven rod 330, the active rod 320 is arranged at the edge of the upper surface of the carrier 20 along the first direction, and the adjusting nut 310 is connected to one end of the active rod 320 and extends out of the rear end of the carrier 20. Since other detection or auxiliary stations are usually installed on both sides of the station, the space on both sides of the station is relatively narrow, which is not convenient for adjustment operations. The adjustment nut is arranged behind the base to increase operability and convenience. In this embodiment, the length of the first waist hole 210 is opened along the second direction, and the length of the second waist hole 332 is opened along the first direction. When the bottom plate 10 and the carrier 20 do not produce relative displacement, one end of the L-shaped driven rod 330 is connected to the active rod 320 along the second direction, and the other end of the driven rod 330 is connected to the fixed shaft 110 along the first direction, and the fixed shaft 110 is located at the front end of the active rod 320, and the fixed shaft 110 and the rotating shaft 331 remain flush in the first direction. It should be noted that by arranging the rotating shaft 311 and the fixed shaft 110 at the center position of the adjustment base, the rotation angles in all directions can be kept consistent during the rotation adjustment process. In other embodiments, the position of the rotating shaft is not limited to the middle position of the adjustment base, and the active rod is not limited to the edge position of the adjustment base. Different arrangements can be made according to different structures. A third waist hole is provided along the first direction at the connection between the active rod 320 and the driven rod 330. The active rod 320 and the driven rod 330 are connected by a connecting piece, and the connecting piece is sleeved in the third waist hole. When the active rod 320 moves along the first direction, the connecting piece moves in the third waist hole, thereby driving the driven rod 330 to rotate around the rotating shaft 331.

[0036] In this embodiment, the rotation adjustment method is as follows: when the adjusting nut 310 is adjusted and tightened forward to make the active rod 320 move forward along the first direction, the end of the driven rod 330 connected to the active rod 320 is driven to move forward, and the driven rod 330 as a whole rotates counterclockwise around the rotating shaft 331. Since the fixed shaft 110 is fixed to the bottom plate 10, the side waist hole of the driven rod 330 interacts with the fixed shaft 331 during rotation to generate a reverse force acting on the carrier plate 20, so that The carrier plate 20 rotates clockwise along the track of the first waist hole 210; when the adjusting nut 310 is adjusted to rotate in the opposite direction to drive the active rod 320 to move backward along the first direction, the end of the driven rod 330 connected to the active rod 320 moves backward along the track of the third waist hole, and the driven rod 330 as a whole rotates clockwise around the rotating shaft 331. The waist hole on the other side of the driven rod 330 interacts with the fixed shaft 110 to generate a reverse force acting on the carrier plate 20, so that the carrier plate 20 rotates counterclockwise. That is, the fixed shaft 110 moves relatively in the track similar to the cross-shaped first waist hole 210 and the second waist hole 332. Since the fixed shaft 110 is fixed to the bottom plate, the carrier plate 20 rotates relative to the bottom plate 10 due to the reaction force.

[0037] Further, such as Figure 3 As shown, a guide groove 120 is provided below the bottom plate 10, and the guide groove 120 is used to slide the bottom plate 10 along the guide groove 120 and install it on the guide rail 40. The bottom plate 10 is provided with a front-and-rear adjustment member 50, one end of which extends out of the rear of the bottom plate 10, and the other end contacts the guide rail 40. When the front-and-rear adjustment member 50 moves forward, the front-and-rear adjustment member 50 generates a forward force on the guide rail 40. Since the guide rail 40 is fixed to the large plate, a backward reaction force is formed on the bottom plate 10, pushing the bottom plate 10 to move backward relative to the guide rail to achieve adjustment in the backward direction. Conversely, the forward movement principle is the same and will not be repeated. In this embodiment, the front-and-rear adjustment member 50 is a top screw, and the guide rail 40 is tightened by the top screw to achieve the front-and-rear displacement of the carrier plate 20 relative to the bottom plate 10. Usually, the testing and sorting machine has multiple processing stations, each of which is equipped with different performance testing, marking, inspection and correction stations. Each station can be adapted to the adjustment base, and each station corresponds to a guide rail. Multiple guide rails are positioned with the adjustment base mounting plate through locating pins. After the adjustment base is installed and positioned, the station angle is precisely adjusted through the rotating adjustment mechanism on the adjustment base and the front and rear adjustment parts to improve the processing accuracy of each station and meet the processing requirements of different stations.

[0038] Since the adjustment base and the guide rail are detachably connected, when the workstation needs to be debugged or maintained, quick switching can be achieved by sliding the guide rail and the guide groove, which can effectively reduce the maintenance time of the equipment.

[0039] Furthermore, the bottom plate 10 is provided with stoppers 130 along both side edges of the guide groove 120, and the stoppers are used to cooperate with the sliding installation between the bottom plate 10 and the guide rail 40. In this embodiment, the stoppers 130 are two groups respectively located at both side edges of the front end and the rear end of the guide groove 120, ensuring that when the adjustment base is slidably placed on the guide rail, the guide rail can be installed in a tight fit with the guide groove, thereby ensuring a precise fit between the guide rail 40 and the bottom plate 10.

[0040] Adjusting parts are respectively provided on both sides of the base plate 10, wherein the axial force of the adjusting parts on one side is greater than the axial force of the adjusting parts on the other side. In the present embodiment, the adjusting parts are adjusting plungers. Two left adjusting plungers 141 are provided on the left side of the base plate 10, and two right adjusting plungers 142 are provided on the right side of the base plate 10. The axial force of the steel ball on the head of the right adjusting plunger 142 is greater than the axial force of the steel ball on the head of the left adjusting plunger 141, thereby ensuring the close fit between the base plate 10 and the guide rail 40 during the insertion process, and further ensuring the precise fit between the guide rail 40 and the base plate 10.

[0041] A stop block 410 is provided at one end of the guide groove 120 away from the front-rear adjustment member 50, and the stop block 410 is used to limit the depth of the bottom plate 10 inserted into the guide rail 40. When the base and the guide rail are installed, the bottom plate 10 is inserted into the stop block 410 along the direction of the guide rail 40, and abuts against the stop block 410 to improve the initial installation accuracy.

[0042] like Figure 2As shown, the bottom plate 10 also includes a locking member 60, and the locking member 60 is used to lock the bottom plate 10 with the guide rail 40. When the adjustment base is slidably installed in place along the guide rail, the front and rear positions of the base are adjusted along the first direction. After the adjustment in the first direction is completed, the bottom plate 10 and the guide rail 40 are locked by the locking member 60, and the adjustment base is fixed to the guide rail. In this embodiment, the locking member 60 includes a buckle seat 610 and a buckle 620, and the bottom plate 10 and the guide rail 40 are locked by clamping between the buckle seat 610 and the buckle 620. The buckle seat 610 is fixed to the bottom plate 10, and the buckle 620 is fixed on the buckle seat 610. When the adjustment of the adjustment base is completed in the first direction, the buckle seat 610 and the buckle 620 are fastened to complete the fixation of the bottom plate 10 and the carrier plate 20 in the first direction. The carrier plate 20 is provided with a corresponding space above the buckle seat 610 and the buckle 620, and the buckle seat 610 and the buckle 620 extend above the corresponding space opening of the carrier plate 20 and are exposed above the carrier plate 20. After the adjustment of the adjustment base in the first direction is completed, the locking member 60 can be operated in the space above the carrier plate 20. In this embodiment, the active rod 320 is located at the edge of the adjustment base and at one side of the locking member 60, and there is no mutual interference between the two in space, and the structural layout is more reasonable and compact, thereby improving the space utilization rate.

[0043] The specific adjustment method of the adjustment base is: insert the bottom plate 10 into the limit block 410 along the direction of the guide rail 40, and a calibration or test module (not shown in the figure) is arranged above the carrier plate 20. The calibration or test module is used to test whether the precise position of the adjustment base meets the calibration or test requirements of the product. When the calibration or test module confirms that its position meets the calibration or test requirements of the product, the adjustment base is adjusted in direction to achieve the precise position. The front and rear adjustment members are rotated to move the bottom plate 10 along the guide rail 40 to the target position in the first direction, and the bottom plate 10 is fastened to the guide rail 40 by the buckle seat 610 and the buckle 620 to complete the adjustment in the first direction. When the adjustment in the first direction is completed, the first direction will be locked, and the adjustment base can only be fine-tuned in the rotation direction. Adjust the rotating nut 310 and drive the active rod 320 to move through the threaded connection. The driven rod 330 rotates around the rotating shaft 331 under the drive of the active rod 320. The side waist hole 210 of the driven rod 330 interacts with the fixed shaft 110. The first waist hole 210 slides along the track relative to the fixed shaft 110, so that the carrier plate 20 rotates around the fixed axis pin at the other end. After adjusting to the specified position, the carrier plate 20 and the base plate 10 are locked by screws to complete the adjustment.

[0044] Embodiment 2:

[0045] In the present embodiment, the structure of the adjustment base is basically similar to that of the above-mentioned embodiment, which will not be described in detail here. The difference from the above-mentioned embodiment is that a fourth waist hole 710 and a fifth waist hole 720 are provided on the carrier plate 20, and the fourth waist hole 710 and the fifth waist hole 720 are respectively located on both sides of the rotation adjustment mechanism 30, and the lengths of the waist holes are opened along the second direction. Fixing parts are respectively provided in the fourth waist hole 710 and the fifth waist hole 720, and the fixing parts can reciprocate relative to the length track of the fourth waist hole 710 or the fifth waist hole 720. In the present embodiment, the two fixing parts are fixed to the bottom plate, so when the rotary adjustment nut 310 is adjusted, the two groups of waist holes move relative to the fixing parts along the track of the waist holes, so as to realize the movement of the carrier plate relative to the bottom plate in the second direction (left and right direction).

[0046] The specific adjustment method of the adjustment base is: insert the bottom plate 10 into the limit block 410 along the direction of the guide rail 40, and a calibration or test module (not shown in the figure) is arranged above the carrier plate 20. The calibration or test module is used to test whether the precise position of the adjustment base meets the calibration or test requirements of the product. When the calibration or test module confirms that its position meets the calibration or test requirements of the product, the adjustment base is adjusted in direction to achieve the precise position. The front and rear adjustment members are rotated to move the bottom plate 10 along the guide rail 40 to the target position in the first direction, and the bottom plate 10 is fastened to the guide rail 40 by the buckle seat 610 and the buckle 620 to complete the adjustment in the first direction. When the adjustment in the first direction is completed, the first direction will be locked, and the adjustment base can only be adjusted in the second direction. Adjust the rotating nut 310 and drive the active rod 320 to move through the threaded connection. The driven rod 330 rotates around the rotating axis 331 under the drive of the active rod 320. Since the two fixing parts are fixed to the base plate, there is a reverse force acting on the fourth waist hole 710 and the fifth waist hole 720 at the same time. The carrier plate moves horizontally in the left or right direction along the parallel trajectory of the fourth waist hole 710 and the fifth waist hole 720. After adjusting to the specified position, the carrier plate 20 and the base plate 10 are locked by screws to complete the adjustment.

[0047] Since the left and right adjustment screws of the general adjustment mechanism are located on the side of the station, the space requirement is high, and the operability is poor when the stations are densely arranged. Other detection or auxiliary stations are installed on both sides of the adjustment station, resulting in insufficient space for manual operation when manual adjustment is performed on both sides. In this embodiment, by arranging the adjustment nut and the front and rear adjustment parts at the rear end of the carrier plate, the rear end has a larger operating space, which increases operability, and the front and rear, left and right and angle adjustments can be completed only from the rear end of the adjustment base.

[0048] The utility model provides an adjustable base, which has the following beneficial effects:

[0049] 1. By setting a rotation adjustment mechanism on the carrier plate, the active rod and the driven rod cooperate with each other, and adjusting the rotating nut to make the upper carrier plate and the lower base plate produce relative rotation displacement, it is suitable for the circular layout of workstations such as semiconductor turret machines, improves the adjustment accuracy, shortens the adjustment time, and is suitable for the precise adjustment of tiny products.

[0050] 2. A guide groove is provided under the bottom plate, which is used to slide with the guide rail to achieve rapid switching of workstations, and the initial installation accuracy is high, effectively reducing the maintenance time of the equipment.

[0051] 3. The rotation adjustment mechanism and the front and rear adjustment parts are all arranged at the rear of the adjustment base. The space behind the base is large and easy to operate.

[0052] It should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other. In addition, the different parts between the various embodiments can also be used in combination with each other, and the present invention is not limited to this.

[0053] The above description is only a description of the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention. Any changes or modifications made by a person skilled in the art in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. An adjustment base, characterized in that: include: A bottom plate, to which a fixed shaft is fixedly connected; The carrier plate is located above the base plate, and the carrier plate includes a rotation adjustment mechanism. The fixed shaft extends out of the carrier plate through a first waist hole on the carrier plate and is connected to one end of the rotation adjustment mechanism. The relative position between the base plate and the carrier plate can be adjusted by the rotation adjustment mechanism.

2. The adjustment base according to claim 1, characterized in that: The rotation adjustment mechanism includes an adjusting nut, an active rod and a driven rod which are connected in sequence. The driven rod is provided with a rotating shaft and one end of the driven rod is sleeved with the fixed shaft through a second waist hole. The active rod is driven by adjusting the adjusting nut to make the driven rod rotate around the rotating shaft to realize relative displacement between the base plate and the carrier plate.

3. The adjustment base according to claim 2, characterized in that: The bottom plate is connected to the carrier plate at one end by a fixed axis pin, and the other end is adjusted by the adjusting nut to adjust the first waist hole to move relative to the fixed axis to achieve relative rotational displacement between the bottom plate and the carrier plate.

4. The adjustment base according to claim 2, characterized in that: The carrier plate is located on both sides of the driven rod and is respectively provided with a fourth waist hole and a fifth waist hole which are parallel to each other along the second direction. Fixing parts are respectively sleeved in the fourth waist hole and the fifth waist hole. The fixing parts are fixed to the base plate. By adjusting the adjusting nut, the fourth waist hole and the fifth waist hole are made to move relative to the fixing parts at the same time to realize the relative left and right displacement between the carrier plate and the base plate.

5. The adjustment base according to claim 2, characterized in that: The active rod is arranged at an edge position on one side above the carrier plate along a first direction, one end of the adjusting nut is threadedly connected to the active rod, and the other end extends out from the rear of the carrier plate.

6. The adjustment base according to claim 1, characterized in that: The lower end surface of the base plate is provided with a guide groove for sliding the base plate along the guide groove and installing it on the guide rail. The base plate is provided with a front and rear adjustment member, one end of the front and rear adjustment member extends out from the rear of the base plate, and the other end contacts the guide rail. The front and rear relative position between the base plate and the carrier plate can be adjusted by the front and rear adjustment member.

7. The adjustment base according to claim 6, characterized in that: Adjusting pieces are respectively arranged on the two side edges of the bottom plate, and the axial force of the adjusting piece on one side is greater than the axial force of the adjusting piece on the other side.

8. The adjustment base according to claim 6, characterized in that: A limit block is provided at one end of the guide rail away from the front and rear adjusting member, and the limit block is used to limit the depth of the bottom plate inserted into the guide rail.

9. The adjustment base according to claim 6, characterized in that: The base plate also includes: Limiting members, the limiting members are located at the edges of both sides of the guide groove and are used for sliding installation between the bottom plate and the guide rail; A locking member is fixed to the base plate and extends out of the carrier plate through an opening of the carrier plate, and is used to lock the base plate and the guide rail after installation and adjustment are completed.

10. The adjustment base according to any one of claims 1 to 9, characterized in that: At least one oil filling groove is provided on the rotation adjustment mechanism.