Physical vapor deposition device capable of eliminating film ring position difference

Abstract

The utility model relates to a physical vapor deposition device capable of eliminating film ring position difference, which comprises an umbrella stand main body and a product transmission component for driving a product to rotate, a plurality of open slots annularly distributed around the central axis of the umbrella stand main body are arranged on the umbrella stand main body, groove blocks are fixed on the inner side walls of the two sides of each open slot, and the groove blocks are fixed on the inner side walls of the two sides of each open slot. The groove block bodies are located at the front end and the rear end of the inner side walls of the two sides of the open groove, and the product transmission assembly is fixed to the open groove through the groove block bodies. The temperature, evaporation density and other conditions of each product can be the same, and the difference between the inner ring and the outer ring of the film product is eliminated.

Description

Technical Field

[0001] The utility model relates to, in particular, a physical vapor deposition device capable of eliminating the difference in film circle position. Background Art

[0002] In today's physical vapor deposition, such as vacuum evaporation coating, when the film material evaporates onto the product, even if the workpiece disk rotates, the film thickness and density of the inner and outer ring products on the workpiece disk will be different. Even if the coating machine is equipped with a MASK plate, it can only reduce the thickness difference, but cannot eliminate the thickness difference. This inhomogeneity is caused by the following: ① The rotation speed of the inner and outer rings of the umbrella frame; ② The temperature difference between the inner and outer rings; ③ The difference in the evaporation density of the film material in the inner and outer rings, which will cause the refractive index of the product to be different; ④ The difference in the energy and density of the ion beam emitted by the ion source. The above differences are difficult to resolve, which will lead to uneven optical properties of the inner and outer ring products. As the film thickness or the number of film layers increases, this inhomogeneity will increase. Utility Model Content

[0003] The utility model aims to provide a physical vapor deposition device capable of eliminating the difference in the position of thin film circles, so that each product is subjected to the same conditions such as temperature and evaporation density, thereby eliminating the difference between the inner and outer circles of the thin film product.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a physical vapor deposition device that can eliminate the difference in film circle position, including an umbrella frame main body and a product transmission assembly that drives the product to rotate, the umbrella frame main body is provided with a plurality of grooves distributed in a ring around the central axis of the umbrella frame main body, groove blocks are fixed on the inner side walls on both sides of the groove, the groove blocks are located at the front and rear ends of the inner side walls on both sides of the groove, and the product transmission assembly is fixed to the groove through the groove blocks.

[0005] Furthermore, support columns are fixed on both sides of the product transmission assembly and are located opposite to the groove block. The shape of the support columns matches the shape of the groove of the groove block, and the support columns are fixed at the groove of the groove block.

[0006] Furthermore, the product transmission assembly includes a support plate and a transmission belt, there are two support plates and they are arranged in relative positions, the support columns are fixed on the outer surface of the support plate, a driving motor is fixed on one side of the inner surface of the support plate on one side, a first pulley is fixed on the output end of the driving motor, a rotating shaft is fixed on the other side of the inner surface of the support plate on one side through a bearing, a second pulley is fixed on the rotating shaft, the transmission belt is wound around the outside of the first pulley and the second pulley, and the product is fixed on the outer surface of the transmission belt.

[0007] Furthermore, multiple groups of screw holes are evenly arranged at both ends of the transmission track, and the distance between the screw holes in each group is corresponding to the screw positions on the product.

[0008] Furthermore, a built-in track battery for supplying power to the drive motor is fixed on the support plate.

[0009] Beneficial effects of the utility model: In order to eliminate the difference between the inner and outer circles of the thin film product, the utility model innovatively adopts the product transmission assembly to be installed on the umbrella frame, and the transmission track is installed along the umbrella frame from the inside to the outside, and then the coated product is fixed to the track. The device is simple, and the transmission track in the product transmission assembly is easy to install and remove, and it is easy to clean the umbrella frame. As the transmission track on the umbrella frame starts to work, the product on the transmission track will appear repeatedly at each position from the inner circle to the outer circle. The coating product is rotated by the rotation of the transmission track so that each coating product is subjected to the same conditions, so that the coating product has extremely strong uniformity, that is, the difference between the inner and outer circles of the thin film product on the ordinary umbrella frame is solved. In addition, there will be more coated products placed on the transmission track, which greatly enhances the productivity compared to placing the coated products on the upper and lower parts of the umbrella frame. While ensuring the uniformity of the film layer, it also saves a certain amount of manpower, material and time costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a front view of the utility model;

[0011] Figure 2 It is a top view of the utility model;

[0012] Figure 3 It is a structural schematic diagram of the transmission component of the utility model product;

[0013] Figure 4 It is a schematic diagram of the internal structure of the transmission component of the utility model product.

[0014] Among them: 1. umbrella frame body, 2. slotting, 3. groove block, 4. product, 5. screw, 6. support column, 7. product transmission assembly, 71. support plate, 72. transmission crawler, 73. drive motor, 74. first pulley, 75. rotating shaft, 76. second pulley, 8. built-in battery of crawler. DETAILED DESCRIPTION

[0015] The utility model is further described below in conjunction with the accompanying drawings.

[0016] See also Figures 1 to 4The utility model provides an embodiment: a physical vapor deposition device that can eliminate the difference in the position of the thin film, characterized in that it includes an umbrella frame body 1 and a product transmission assembly 7 that drives the product 4 to rotate, the umbrella frame body 1 is provided with a plurality of slots 2 distributed in an annular manner around the central axis of the umbrella frame body 1, and groove blocks 3 are fixed on the inner side walls on both sides of the slot 2, the groove blocks 3 are located at the front and rear ends of the inner side walls on both sides of the slot 2, and the product transmission assembly 7 is fixed to the slot 2 through the groove blocks 3. The product transmission assembly 7 is installed on the slots 2 distributed in an annular manner around the central axis of the umbrella frame body 1, and the product 4 is installed on the crawler in the product transmission assembly 7, and the crawler in the product transmission assembly 7 drives the product 4 to rotate.

[0017] Please continue reading Figure 1 to Figure 2 As shown, in one embodiment of the utility model, support columns 6 are fixed on both sides of the product transmission assembly 7, which are opposite to the groove block 3. The shape of the support columns 6 matches the shape of the groove of the groove block 3, and the support columns 6 are fixed at the groove of the groove block 3. The shapes of the groove block 3 and the support columns 6 match, and this fixing method can facilitate the assembly and disassembly of the product transmission assembly 7.

[0018] Please continue reading Figures 1 to 4 As shown, in one embodiment of the utility model, the product transmission assembly 7 includes a support plate 71 and a transmission crawler 72, the support plates 71 have two and are arranged in relative positions, the support columns 6 are all fixed on the outer surface of the support plate 71, a driving motor 73 is fixed on one side of the inner surface of the support plate 71, a first pulley 74 is fixed on the output end of the driving motor 73, a rotating shaft 75 is fixed on the other side of the inner surface of the support plate 71 on one side through a bearing, a second pulley 76 is sleeved and fixed on the rotating shaft 75, the transmission crawler 72 is wound around the outer sides of the first pulley 74 and the second pulley 76, and the product 4 is fixed on the outer surface of the transmission crawler 72. The transmission crawler 72 is installed along the umbrella frame from the inside to the outside, and the rotation direction of the transmission crawler 72 is also along the umbrella frame from the inside to the outside. When the coating machine provides power to the drive motor 73 (the six drive motors 73 are powered by the same power source, which can ensure that the speed of the drive motor 73 is the same, and the speed of the drive motor 73 is adjusted by adjusting the output power of the power source), as Figure 4As shown, when the drive motor 73 starts working, the drive motor 73 will drive the first pulley 74 to rotate, and the first drive drive belt 72 will transmit and rotate on the first pulley 74 and the second pulley 76, so that the product 4 fixed on the transmission belt 72 can be driven to rotate along with the transmission belt 72. In this way, as the track on the umbrella frame starts working, the product 4 on the track will appear repeatedly at each position from the inner circle to the outer circle, which will make each product 4 subject to the same temperature, evaporation density and other conditions, that is, the difference between the inner and outer circles of the thin film product 4 is eliminated, and at the same time more coated products 4 can be placed, which greatly improves productivity.

[0019] Please continue reading Figure 2 , Figure 3 As shown, in one embodiment of the utility model, multiple groups of screw holes are evenly opened at both ends of the transmission crawler 72, and the distance between the screw holes of each group is opposite to the position of the screws 5 on the product 4. The coated product 4 is fixed to the transmission crawler 72 by the screws 5 at both ends. When the transmission crawler 72 starts to work, the coated product 4 will also rotate. The coated product 4 will appear evenly at each position from the inner circle to the outer circle of the umbrella frame through continuous rotation. The coating conditions of each coated product 4 are consistent, that is, the film coated on each product 4 is the same.

[0020] Please continue reading Figure 4 As shown, in one embodiment of the utility model, a track internal battery 8 for powering the drive motor 73 is also fixed on the support plate 71. For some coating machines that do not support power supply, it can also be provided by the track internal battery.

[0021] The utility model has the following working principle: a product transmission assembly is added, and the product transmission assembly is installed on the slots distributed in a ring around the central axis of the umbrella frame body. The product is installed on the crawler in the product transmission assembly. The crawler in the product transmission assembly will drive the product to rotate, so that as the crawler on the umbrella frame starts to work, the product on the crawler will repeatedly appear at each position from the inner circle to the outer circle.

[0022] The above description is only a preferred embodiment of the present utility model and cannot be understood as a limitation of the present application. All equivalent changes and modifications made within the scope of the patent application of the present utility model shall fall within the scope of the present utility model.

Claims

1. A physical vapor deposition device capable of eliminating the difference in film ring position, characterized in that: It includes an umbrella frame main body and a product transmission component that drives the product to rotate. The umbrella frame main body is provided with a plurality of grooves distributed in a ring around the central axis of the umbrella frame main body. Groove blocks are fixed on the inner side walls on both sides of the groove. The groove blocks are located at the front and rear ends of the inner side walls on both sides of the groove. The product transmission component is fixed to the groove through the groove blocks.

2. A physical vapor deposition device capable of eliminating the difference in film circle position according to claim 1, characterized in that: Support columns are fixed on both sides of the product transmission assembly and are located opposite to the groove block. The shape of the support columns matches the shape of the groove of the groove block, and the support columns are fixed at the groove of the groove block.

3. A physical vapor deposition device capable of eliminating the difference in film circle position according to claim 2, characterized in that: The product transmission assembly includes a support plate and a transmission track, there are two support plates and they are arranged in relative positions, the support columns are fixed to the outer surface of the support plate, a driving motor is fixed to one side of the inner surface of the support plate on one side, a first pulley is fixed to the output end of the driving motor, a rotating shaft is fixed to the other side of the inner surface of the support plate on one side through a bearing, a second pulley is fixed on the rotating shaft, the transmission track is wound around the outer sides of the first pulley and the second pulley, and the product is fixed to the outer surface of the transmission track.

4. A physical vapor deposition device capable of eliminating the difference in film circle position according to claim 3, characterized in that: Multiple groups of screw holes are evenly arranged at both ends of the transmission crawler, and the distance between the screw holes in each group is relative to the screw positions on the product.

5. The physical vapor deposition device capable of eliminating the difference in film circle position according to claim 3, characterized in that: The support plate is also fixed with a track built-in battery for supplying power to the drive motor.

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