Replaceable water-cooling heat shield

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a replaceable water-cooled heat shield which comprises a water-cooled heat shield body arranged on a single crystal furnace, the water-cooled heat shield body comprises an upper heat shield connecting piece and a lower heat shield connecting piece located on the lower side of the upper heat shield connecting piece, the upper heat shield connecting piece and the lower heat shield connecting piece are detachably connected, the upper heat shield connecting piece is provided with an upper heat exchange cavity, and the lower heat shield connecting piece is provided with a lower heat exchange cavity. The lower heat shield connecting piece is provided with a lower heat exchange cavity, and further comprises a first cooling water pipe communicated with the upper heat exchange cavity and a second cooling water pipe communicated with the lower heat exchange cavity, the lower heat shield connecting piece is further provided with a containing cavity allowing single crystals to penetrate through, and a lower end opening of the containing cavity is located above the crucible and is close to the liquid level of the silicon liquid. According to the water-cooled heat shield, the detachable upper heat shield connecting piece and the detachable lower heat shield connecting piece are arranged, so that the lower heat shield connecting piece with shorter service life can be conveniently replaced, the whole water-cooled heat shield does not need to be replaced, the use cost can be reduced, the replacement time is shortened, and the production efficiency is further improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a replaceable water-cooled heat screen. Background Art

[0002] The Czochralski method for growing single crystal silicon is currently the most widely used technology for producing single crystal silicon. The water-cooled heat shield is a single crystal furnace auxiliary equipment that realizes heat transfer between materials between two or more fluids at different temperatures. It transfers heat from a fluid with a higher temperature to a fluid with a lower temperature so that the fluid temperature reaches the indicator specified by the process to meet the needs of process conditions. When growing single crystal silicon by the Czochralski method, high-purity solid polycrystalline silicon raw materials are melted in the crucible of the single crystal furnace to form a melt. The seed crystal is lowered by the seed crystal pulling mechanism to make it contact with the melt in the rotating crucible. Then, the seed crystal is rotated and pulled from the pulling channel of the water-cooled heat shield according to a certain process method, and the melt solidifies around the seed crystal to form a single crystal silicon rod.

[0003] For example, Chinese patent document CN217636891U discloses a water-cooled heat screen with a new material structure. The shell of the water-cooled heat screen includes an annular inner shell and an annular outer shell which forms a heat exchange space with the annular inner shell. The annular inner shell and the annular outer shell are both made of metal. Since the water-cooled heat screen is used in a high temperature environment, the temperature at the bottom of the water-cooled heat screen is relatively high, which will shorten its service life. If the bottom of the water-cooled heat screen needs to be replaced, the entire water-cooled heat screen needs to be replaced, which not only results in high cost of use, but also complicated replacement process affects production efficiency. Therefore, in view of the above shortcomings, it is necessary to develop a water-cooled heat screen that is easy to replace to improve replacement efficiency. Utility Model Content

[0004] In view of the technical problem mentioned above that when the bottom of the existing water-cooled heat screen needs to be replaced, the entire water-cooled heat screen needs to be replaced, which not only causes high cost of use, but also the replacement process is complicated and affects production efficiency. The technical solution adopted by the utility model to solve the technical problem is:

[0005] A replaceable water-cooled heat shield comprises a water-cooled heat shield body arranged in a single crystal furnace, the water-cooled heat shield body comprises an upper heat shield connector and a lower heat shield connector located at the lower side of the upper heat shield connector, the upper heat shield connector and the lower heat shield connector are detachably connected, the upper heat shield connector is provided with an upper heat exchange cavity, the lower heat shield connector is provided with a lower heat exchange cavity, and also comprises a first cooling water pipe connected to the upper heat exchange cavity, and a second cooling water pipe connected to the lower heat exchange cavity, the lower heat shield connector is also provided with a cavity for the single crystal to pass through, the lower end opening of the cavity is located above the crucible close to the silicon liquid surface.

[0006] Furthermore, in some embodiments of the present invention, the upper heat shield connecting piece is in an upper cone shape, and the lower heat shield connecting piece is in a lower cone shape.

[0007] Furthermore, in some embodiments of the utility model, the first cooling water pipe is provided with a first cooling water pipe inlet and a first cooling water pipe outlet respectively connected to the upper heat exchange chamber, and the second cooling water pipe is provided with a second cooling water pipe inlet and a second cooling water pipe outlet respectively connected to the lower heat exchange chamber.

[0008] Furthermore, in some embodiments of the present invention, the lower heat shield connector is provided with a connecting portion, and the upper heat shield connector is provided with a matching portion that cooperates and is fixed with the connecting portion, the matching portion is a fixing groove located on the side wall of the upper heat shield connector, and the connecting portion extends upward and can be snapped into the fixing groove.

[0009] Furthermore, in some embodiments of the utility model, the connecting portion is a trapezoidal prism extending from bottom to top and tilted outward, the fixing groove is similar in shape to the connecting portion, the connecting portion is provided with a connecting portion inclined surface facing outward, and the fixing groove is provided with a fixing groove inclined surface abutting against the connecting portion inclined surface.

[0010] Furthermore, in some embodiments of the present invention, the second cooling water pipe and the connecting portion are fixedly connected, and the fixing groove allows the second cooling water pipe to pass through.

[0011] Furthermore, in some embodiments of the utility model, the first cooling water pipe includes a first inner tube and a first outer tube sleeved on the outside of the first inner tube, the first inner tube is provided with a first inner tube channel, a first outer tube channel is provided between the first outer tube and the first inner tube, the water inlet of the first cooling water pipe is located on the first inner tube channel, and the water outlet of the first cooling water pipe is located on the first outer tube channel.

[0012] Furthermore, in some embodiments of the utility model, the second cooling water pipe includes a second inner tube and a second outer tube sleeved on the outside of the second inner tube, the second inner tube is provided with a second inner tube channel, a second outer tube channel is provided between the second outer tube and the second inner tube, the water inlet of the second cooling water pipe is located on the second inner tube channel, and the water outlet of the second cooling water pipe is located on the second outer tube channel.

[0013] Furthermore, in some embodiments of the present invention, cooling water pipe sleeves are respectively provided on the outer sides of the first cooling water pipe and the second cooling water pipe.

[0014] Furthermore, in some embodiments of the present invention, the bottom outer diameter of the upper heat shield connecting piece is close to the top outer diameter of the lower heat shield connecting piece.

[0015] The beneficial effects of the utility model are as follows:

[0016] 1. The utility model provides two separate detachable upper heat shield connectors and lower heat shield connectors, which can facilitate the replacement of the lower heat shield connector with a shorter lifespan, thereby eliminating the need to replace the entire water-cooled heat shield, thereby reducing the cost of use, reducing the replacement time, and further improving production efficiency.

[0017] 2. The first cooling water pipe and the second cooling water pipe of the utility model exchange heat with the upper heat exchange cavity and the lower heat exchange cavity respectively. When the upper heat shield connector and the lower heat shield connector are separated, the heat exchange effect of each individual component is not affected, thereby improving the convenience and flexibility of maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a top view of the replaceable water-cooled heat shield of the utility model.

[0019] Figure 2 for Figure 1 AA section view.

[0020] Figure 3 for Figure 2 Enlarged view of the second cooling water pipe in part B.

[0021] Figure 4 for Figure 2 An enlarged view of the connection between the upper heat shield connector and the lower heat shield connector of part C.

[0022] Figure 5 for Figure 2 An enlarged view of the connection between the upper heat shield connector and the lower heat shield connector of part D.

[0023] Figure 6 for Figure 2 An enlarged view of the connection between the first cooling water pipe and the upper heat exchange cavity in part E.

[0024] Figure 7 It is a schematic diagram of the replaceable water-cooled heat shield of the utility model.

[0025] Figure 8 It is an exploded view of the replaceable water-cooled heat shield of the utility model. DETAILED DESCRIPTION

[0026] The implementation modes of the present utility model are described in detail below in conjunction with the accompanying drawings.

[0027] like Figures 1 to 8The replaceable water-cooled heat shield shown comprises a water-cooled heat shield body 100 arranged in the single crystal furnace 1, the water-cooled heat shield body 100 comprises an upper heat shield connector 200 and a lower heat shield connector 300 located at the lower side of the upper heat shield connector 200, the upper heat shield connector 200 and the lower heat shield connector 300 are detachably connected, the upper heat shield connector 200 is provided with an upper heat exchange cavity 400, the lower heat shield connector 300 is provided with a lower heat exchange cavity 500, and also comprises a first cooling water pipe 600 communicating with the upper heat exchange cavity 400, and a second cooling water pipe 700 communicating with the lower heat exchange cavity 500, the lower heat shield connector 300 is also provided with a cavity 301 for allowing the single crystal 800 to pass through, and the lower end opening of the cavity 301 is located above the crucible 900 close to the liquid surface of the silicon liquid 901. The utility model provides two separate detachable upper heat shield connectors and lower heat shield connectors, which can facilitate the replacement of the lower heat shield connector with a shorter lifespan, thereby eliminating the need to replace the entire water-cooled heat shield, which can reduce the cost of use, reduce the time for replacement, and further improve production efficiency. The first cooling water pipe and the second cooling water pipe of the utility model exchange heat with the upper heat exchange cavity and the lower heat exchange cavity respectively, and the heat exchange effect of the upper heat shield connector and the lower heat shield connector is not affected when they are separated, thereby improving the convenience and flexibility of maintenance.

[0028] Specifically, a water-cooled heat shield is a thermal barrier cooled by water, which is used to isolate the heat exchange between the single crystal furnace body and the external environment. The heat shield is usually made of metal material and is cooled by water flow inside. The main function of the water-cooled heat shield is to reduce the heat dissipation and heat leakage of the furnace body, and reduce the impact of the external environment on the furnace body temperature. It can provide thermal isolation, maintain the stability of the furnace body temperature and reduce energy consumption, thereby improving the efficiency and quality of the single crystal growth process. The bottom of the cavity is located above the crucible and close to the silicon liquid level, thereby reducing the resistance of the single crystal, ensuring that the single crystal can pass through the cavity smoothly without being affected, and improving the pulling efficiency of the single crystal.

[0029] Specifically, the upper heat shield connector is provided with an upper heat exchange cavity and connected with a first cooling water pipe, and the lower heat shield connector is provided with a lower heat exchange cavity and connected with a second cooling water pipe, and cooling water is respectively sent to the upper heat exchange cavity and the lower heat exchange cavity, thereby realizing the function of water cooling the upper heat exchange cavity and the lower heat exchange cavity, effectively controlling the furnace body temperature, and improving the efficiency and quality of single crystal growth. The non-connected setting of the upper heat exchange cavity and the lower heat exchange cavity optimizes the heat transfer path, so that the heat can be more evenly distributed on the surface of the upper heat shield connector and the lower heat shield connector, thereby improving the cooling effect and extending the service life of the upper heat shield connector and the lower heat shield connector.

[0030] like Figures 1 to 8In the replaceable water-cooled heat shield shown, the upper heat shield connector 200 is in the shape of an upper cone, and the lower heat shield connector 300 is in the shape of a lower cone. Further, as a preferred embodiment of the utility model but not limited thereto, the upper heat shield connector is in the shape of an upper cone, and the structure of the upper cone is similar to an inverted conical container, which is wider at the top and narrower at the bottom. The lower heat shield connector is in the shape of a lower cone, and the structure of the lower cone is a conical container with a wider bottom and a narrower top. Such a design can make the water-cooled heat shield better adapt to the shape of the crucible, optimize heat transfer and fluid flow, so as to improve the performance and efficiency of the water-cooled heat shield. The cone-shaped design can change the fluid flow path, increase the flow rate and enhance the turbulent effect of the flow, thereby enhancing the heat transfer efficiency. The water-cooled heat shield can better realize heat transfer and control the furnace temperature, improve the efficiency and quality of the entire Czochralski method for growing single crystal silicon, and at the same time, the cone-shaped design can also increase the stability of the water-cooled heat shield and reduce its deformation and movement in a high temperature environment.

[0031] like Figures 1 to 8 In the replaceable water-cooled heat shield shown, the first cooling water pipe 600 is provided with a first cooling water pipe inlet 601 and a first cooling water pipe outlet 602 respectively connected to the upper heat exchange chamber 400, and the second cooling water pipe 700 is provided with a second cooling water pipe inlet 701 and a second cooling water pipe outlet 702 respectively connected to the lower heat exchange chamber 500. Further, as a preferred embodiment of the utility model but not a limitation, the replaceable water-cooled heat shield realizes the circulation and flow of cooling water, and the cooling water absorbs heat when passing through the upper heat exchange chamber or the lower heat exchange chamber, and then takes the heat away through the first cooling water pipe outlet or the second cooling water pipe outlet. In this way, the stable working temperature of the water-cooled heat shield can be maintained, ensuring the constant temperature during the process of growing single crystal silicon by the Czochralski method.

[0032] Specifically, the first cooling water pipe is connected to the upper heat exchange chamber, and cooling water is introduced into the upper heat exchange chamber through the water inlet of the first cooling water pipe. The cooling water ensures the uniform temperature of the upper heat shield connector during the movement of the cooling water in the upper heat exchange chamber, reduces local overheating, and then the cooling water that has absorbed heat is discharged through the water outlet of the first cooling water pipe to achieve cooling and control of the heat in the upper heat exchange chamber.

[0033] Specifically, the second cooling water pipe is connected to the lower heat exchange chamber, and cooling water is introduced into the lower heat exchange chamber through the water inlet of the second cooling water pipe. The cooling water ensures the uniform temperature of the lower heat shield connector during the movement of the cooling water in the lower heat exchange chamber, reduces local overheating, and then the cooling water that has absorbed heat is discharged through the water outlet of the second cooling water pipe to achieve cooling and control of the heat in the lower heat exchange chamber.

[0034] like Figures 1 to 8In the replaceable water-cooled heat shield shown, the lower heat shield connector 300 is provided with a connecting portion 310, and the upper heat shield connector 200 is provided with a matching portion that cooperates and fixes with the connecting portion 310, and the matching portion is a fixing groove 210 located on the side wall of the upper heat shield connector 200, and the connecting portion 310 extends upward and can be snapped into the fixing groove 210. Further, as a preferred embodiment of the utility model but not limited thereto, such a setting can achieve the fixation and connection of the upper heat shield connector and the lower heat shield connector by snapping the connecting portion extending upward into the fixing groove. This fixing method can prevent the lower heat shield connector from loosening or falling off in a high temperature environment, thereby ensuring the normal operation and service life of the water-cooled heat shield. At the same time, by providing the fixing groove and the connecting portion, the upper heat shield connector and the lower heat shield connector can be easily disassembled and installed, which is convenient for maintenance and replacement.

[0035] like Figures 7 and 8 In the replaceable water-cooled heat shield shown, the connection part 310 is a trapezoidal prism that is inclined from bottom to top and outward, the fixing groove 210 is similar in shape to the connection part 310, the connection part 310 is provided with a connection part inclined surface 3101 facing outward, and the fixing groove 210 is provided with a fixing groove inclined surface 2101 that abuts against the connection part inclined surface 3101. Further, as a preferred embodiment of the utility model but not a limitation, such a design enables the connection part to achieve stable matching when inserted into the fixing groove. The inclined shape of the trapezoidal prism can provide better insertion and snap-fitting effects, ensuring the firmness and stability of the connection. The fixing groove is similar in shape to the connection part, and the connection part inclined surface can better match and abut against the fixing groove inclined surface, which can better withstand thermal expansion and stress changes in a high temperature environment, further increasing the tightness of the matching, thereby ensuring the stability and reliability of the water-cooled heat shield, and the connection part and the fixing groove can be easily installed, improving production efficiency and use effect.

[0036] Optionally, in some embodiments, since the water-cooled heat shield is made into two separate entities, when the upper heat shield connector and the lower heat shield connector are installed, there is no need to provide a sealing ring between the two, which provides a higher safety factor and greater assurance.

[0037] like Figures 1 to 7In the replaceable water-cooled heat shield shown, the second cooling water pipe 700 is fixedly connected to the connecting portion 310, and the fixing groove 210 is provided for the second cooling water pipe 700 to pass through. Optionally, in some embodiments, the stability and reliability of the second cooling water pipe can be achieved by fixing the second cooling water pipe to the connecting portion. At the same time, when the upper heat shield connector and the lower heat shield connector are installed, the second cooling water pipe can be passed through the fixing groove from bottom to top so that the connecting portion is engaged with the fixing groove, and the second cooling water pipe can be conveniently installed and maintained, thereby improving production efficiency and use effect. Through the fixed connection between the connecting portion and the fixing groove, the second cooling water pipe can effectively transport cooling water to achieve cooling of the water-cooled heat shield.

[0038] like Figures 1 to 8 In the replaceable water-cooled heat shield shown, the first cooling water pipe 600 includes a first inner pipe 603, a first outer pipe 604 sleeved on the outside of the first inner pipe 603, the first inner pipe 603 is provided with a first inner pipe channel 6031, a first outer pipe channel 6041 is provided between the first outer pipe 604 and the first inner pipe 603, the first cooling water pipe water inlet 601 is located on the first inner pipe channel 6031, and the first cooling water pipe water outlet 602 is located on the first outer pipe channel 6041. Optionally, in some embodiments, this design divides the first cooling water pipe into two parts, the first inner pipe and the first outer pipe, so that one first cooling water pipe can achieve the cooling effect, without the need for one water pipe for water inlet and one water pipe for water outlet.

[0039] Specifically, the cooling water can circulate in the first cooling water pipe. When the cooling water enters the first cooling water pipe, it first enters the first inner tube channel through the first cooling water pipe water inlet, and then flows from the first inner tube channel to the first outer tube channel. Finally, the cooling water leaves the first cooling water pipe through the first cooling water pipe water outlet. Through such a design, the cooling water can form a closed flow path in the first cooling water pipe to achieve a cooling effect on the upper heat shield connector. The structure of the first inner tube and the first outer tube can provide a larger surface area and enhance the cooling effect. The position design of the first cooling water pipe water inlet and the first cooling water pipe water outlet makes the inlet and outlet water flow smooth and easy to control.

[0040] By providing the first inner tube channel and the first outer tube channel, the flow rate and flow velocity of the cooling water can be better controlled, thereby better controlling the cooling effect of the upper heat shield connector. In addition, since the first cooling water pipe inlet and the first cooling water pipe outlet are respectively located on the first inner tube channel and the first outer tube channel, the cooling water can be conveniently supplied and discharged, thereby improving production efficiency and use effect.

[0041] like Figures 1 to 8In the replaceable water-cooled heat shield shown, the second cooling water pipe 700 includes a second inner pipe 703, a second outer pipe 704 sleeved on the outer side of the second inner pipe 703, the second inner pipe 703 is provided with a second inner pipe channel 7031, a second outer pipe channel 7041 is provided between the second outer pipe 704 and the second inner pipe 703, the second cooling water pipe water inlet 701 is located on the second inner pipe channel 7031, and the second cooling water pipe water outlet 702 is located on the second outer pipe channel 7041. Optionally, in some embodiments, this design divides the second cooling water pipe into two parts, the second inner pipe and the second outer pipe, so that one second cooling water pipe can achieve the cooling effect, without the need for one water pipe for water inlet and one water pipe for water outlet.

[0042] Specifically, the cooling water can circulate in the second cooling water pipe. When the cooling water enters the second cooling water pipe, it first enters the second inner tube channel through the second cooling water pipe water inlet, and then flows from the second inner tube channel to the second outer tube channel. Finally, the cooling water leaves the second cooling water pipe through the second cooling water pipe water outlet. Through such a design, the cooling water can form a closed flow path in the second cooling water pipe to achieve a cooling effect on the lower heat shield connector. The structure of the second inner tube and the second outer tube can provide a larger surface area and enhance the cooling effect. The position design of the second cooling water pipe water inlet and the second cooling water pipe water outlet makes the inflow and outflow of water smooth and easy to control.

[0043] By providing the second inner tube channel and the second outer tube channel, the flow rate and flow velocity of the cooling water can be better controlled, thereby better controlling the cooling effect of the lower heat shield connector. In addition, since the second cooling water pipe inlet and the second cooling water pipe outlet are respectively located on the second inner tube channel and the second outer tube channel, the cooling water can be conveniently supplied and discharged, thereby improving production efficiency and use effect.

[0044] like Figures 1 to 8 In the replaceable water-cooled heat shield shown, cooling water pipe sleeves 1000 are respectively provided on the outside of the first cooling water pipe 600 and the second cooling water pipe 700. Optionally, in some embodiments, the cooling water pipe sleeves can also provide an additional protective layer to prevent the first cooling water pipe and the second cooling water pipe from being physically damaged or corroded by the external environment. At the same time, it can also reduce the surface temperature of the first cooling water pipe and the second cooling water pipe, reduce the heat radiation of the water-cooled heat shield in the working environment, increase the heat insulation effect of the first cooling water pipe and the second cooling water pipe through the cooling water pipe sleeve, reduce the heat transfer from the outside to the first cooling water pipe and the second cooling water pipe, improve the operational safety, and thus extend the service life of the first cooling water pipe and the second cooling water pipe.

[0045] like Figures 1 to 8In the replaceable water-cooled heat shield shown, the bottom outer diameter of the upper heat shield connector 200 is close to the top outer diameter of the lower heat shield connector 300. Further, as a preferred embodiment of the present invention but not a limitation, the upper heat shield connector and the lower heat shield connector have similar dimensions in outer diameter. Their outer diameters are close, and this design can make the upper heat shield connector and the lower heat shield connector form a relatively tight fit when connected, forming a sealed connection, thereby reducing the heat transfer from the connection to the outside and improving the heat transfer efficiency. At the same time, since the bottom and top outer diameters of the upper and lower heat shield connectors are close, the heat concentration in the local area can be reduced, thereby extending the service life of the water-cooled heat shield. This design can also make the upper heat shield connector and the lower heat shield connector form a stable support structure when connected, so as to better withstand thermal expansion and stress changes in a high temperature environment, and ensure the stability and reliability of the water-cooled heat shield.

[0046] like Figures 1 to 8 As shown, the implementation method of this embodiment is as follows:

[0047] A replaceable water-cooled heat shield comprises a water-cooled heat shield body 100 arranged in a single crystal furnace 1, wherein the water-cooled heat shield body 100 comprises an upper heat shield connector 200 and a lower heat shield connector 300 located at the lower side of the upper heat shield connector 200, wherein the upper heat shield connector 200 and the lower heat shield connector 300 are detachably connected, wherein the upper heat shield connector 200 is provided with an upper heat exchange cavity 400, wherein the lower heat shield connector 300 is provided with a lower heat exchange cavity 500, and further comprises a first cooling water pipe 600 communicating with the upper heat exchange cavity 400, and a second cooling water pipe 700 communicating with the lower heat exchange cavity 500, wherein the lower heat shield connector 300 is further provided with a cavity 301 for a single crystal 800 to pass through, wherein a lower end opening of the cavity 301 is located above a crucible 900 and close to the liquid surface of a silicon liquid 901.

[0048] The upper heat shield connector 200 is in the shape of an upper cone, and the lower heat shield connector 300 is in the shape of a lower cone. The upper cone has a structure that is wider at the top and narrower at the bottom, and the lower cone is a conical container that is wider at the bottom and narrower at the top.

[0049] The first cooling water pipe 600 is provided with a first cooling water pipe inlet 601 and a first cooling water pipe outlet 602 respectively connected to the upper heat exchange chamber 400, and the second cooling water pipe 700 is provided with a second cooling water pipe inlet 701 and a second cooling water pipe outlet 702 respectively connected to the lower heat exchange chamber 500.

[0050] The lower heat shield connector 300 is provided with a connecting portion 310 , and the upper heat shield connector 200 is provided with a matching portion that cooperates and fixes with the connecting portion 310 . The matching portion is a fixing groove 210 located on the side wall of the upper heat shield connector 200 . The connecting portion 310 extends upward and can be snapped into the fixing groove 210 .

[0051] The connecting portion 310 is a trapezoidal prism extending from bottom to top and tilted outward. The fixing groove 210 is similar in shape to the connecting portion 310 . The connecting portion 310 is provided with a connecting portion inclined surface 3101 facing outward. The fixing groove 210 is provided with a fixing groove inclined surface 2101 abutting against the connecting portion inclined surface 3101 .

[0052] The second cooling water pipe 700 is fixedly connected to the connecting portion 310 , and the fixing groove 210 is provided for the second cooling water pipe 700 to pass through.

[0053] The first cooling water pipe 600 includes a first inner tube 603 and a first outer tube 604 sleeved on the outside of the first inner tube 603. The first inner tube 603 is provided with a first inner tube channel 6031. A first outer tube channel 6041 is provided between the first outer tube 604 and the first inner tube 603. The first cooling water pipe inlet 601 is located on the first inner tube channel 6031. The first cooling water pipe outlet 602 is located on the first outer tube channel 6041.

[0054] The second cooling water pipe 700 includes a second inner tube 703 and a second outer tube 704 sleeved on the outside of the second inner tube 703. The second inner tube 703 is provided with a second inner tube channel 7031. A second outer tube channel 7041 is provided between the second outer tube 704 and the second inner tube 703. The second cooling water pipe inlet 701 is located on the second inner tube channel 7031. The second cooling water pipe outlet 702 is located on the second outer tube channel 7041.

[0055] Specifically, the first cooling water pipe 600 is connected to the upper heat exchange chamber 400, and cooling water is introduced into the upper heat exchange chamber 400 through the first cooling water pipe inlet 601. The cooling water ensures the uniform temperature of the upper heat shield connector 200 during the movement of the upper heat exchange chamber 400, reduces local overheating, and then the cooling water that has absorbed heat is discharged through the first cooling water pipe outlet 602 to achieve cooling and control of the heat in the upper heat exchange chamber 400.

[0056] Specifically, cooling water can circulate in the first cooling water pipe 600. When the cooling water enters the first cooling water pipe 600, it first enters the first inner tube channel 6031 through the first cooling water pipe water inlet 601, and then flows from the first inner tube channel 6031 to the first outer tube channel 6041. Finally, the cooling water leaves the first cooling water pipe 600 through the first cooling water pipe water outlet 602. Through such a design, the cooling water can form a closed flow path in the first cooling water pipe 600 to achieve a cooling effect on the upper heat shield connector 200. The structure of the first inner tube 603 and the first outer tube 604 can provide a larger surface area and enhance the cooling effect. The position design of the first cooling water pipe water inlet 601 and the first cooling water pipe water outlet 602 makes the inflow and outflow of water smooth and easy to control.

[0057] Specifically, the second cooling water pipe 700 is connected to the lower heat exchange chamber 500, and cooling water is introduced into the lower heat exchange chamber 500 through the second cooling water pipe inlet 701. The cooling water ensures the uniform temperature of the lower heat shield connector 300 during the movement of the cooling water in the lower heat exchange chamber 500, thereby reducing local overheating. The cooling water that has absorbed heat is then discharged through the second cooling water pipe outlet 702 to achieve cooling and control of the heat in the lower heat exchange chamber 500.

[0058] Specifically, cooling water can circulate in the second cooling water pipe 700. When the cooling water enters the second cooling water pipe 700, it first enters the second inner tube channel 7031 through the second cooling water pipe water inlet 701, and then flows from the second inner tube channel 7031 to the second outer tube channel 7041. Finally, the cooling water leaves the second cooling water pipe through the second cooling water pipe water outlet 702. Through such a design, the cooling water can form a closed flow path in the second cooling water pipe 700 to achieve a cooling effect on the lower heat shield connector 300. The structure of the second inner tube 703 and the second outer tube 704 can provide a larger surface area and enhance the cooling effect. The position design of the second cooling water pipe water inlet 701 and the second cooling water pipe water outlet 702 makes the inlet and outlet water flow smooth and easy to control.

[0059] The first cooling water pipe 600 and the second cooling water pipe 700 are respectively provided with cooling water pipe sleeves 1000. The bottom outer diameter of the upper heat shield connector 200 is close to the top outer diameter of the lower heat shield connector 300.

[0060] The utility model provides two separate detachable upper heat shield connector 200 and lower heat shield connector 300, which can facilitate the replacement of the lower heat shield connector 300 with a shorter lifespan, so that the entire water-cooled heat shield does not need to be replaced, which can reduce the cost of use, reduce the time of replacement, and further improve the efficiency of production. The first cooling water pipe 600 and the second cooling water pipe 700 of the utility model exchange heat with the upper heat exchange cavity 400 and the lower heat exchange cavity 500 respectively. When the upper heat shield connector 200 and the lower heat shield connector 300 are separated, the heat exchange effect of the individual components is not affected, which improves the convenience and flexibility of maintenance.

[0061] The above examples are only used to further illustrate the technical content of the utility model, so that readers can understand it more easily, but it does not mean that the implementation methods of the utility model are limited to this. Any technical extension or re-creation made based on the utility model is protected by the utility model. The protection scope of the utility model shall be based on the claims.

Claims

1. A replaceable water-cooled heat shield, comprising a water-cooled heat shield body (100) arranged in a single crystal furnace (1), characterized in that: The water-cooled heat shield body (100) comprises an upper heat shield connector (200) and a lower heat shield connector (300) located at the lower side of the upper heat shield connector (200); the upper heat shield connector (200) and the lower heat shield connector (300) are detachably connected; the upper heat shield connector (200) is provided with an upper heat exchange cavity (400); the lower heat shield connector (300) is provided with a lower heat exchange cavity (500); and further comprises a first cooling water pipe (600) communicating with the upper heat exchange cavity (400) and a second cooling water pipe (700) communicating with the lower heat exchange cavity (500); the lower heat shield connector (300) is further provided with a cavity (301) for allowing a single crystal (800) to pass through; the lower end opening of the cavity (301) is located above the crucible (900) and close to the liquid surface of the silicon liquid (901).

2. The replaceable water-cooled heat shield according to claim 1, characterized in that: The upper heat shield connecting piece (200) is in the shape of an upper cone, and the lower heat shield connecting piece (300) is in the shape of a lower cone.

3. The replaceable water-cooled heat shield according to claim 1, characterized in that: The first cooling water pipe (600) is provided with a first cooling water pipe inlet (601) and a first cooling water pipe outlet (602) respectively connected to the upper heat exchange chamber (400), and the second cooling water pipe (700) is provided with a second cooling water pipe inlet (701) and a second cooling water pipe outlet (702) respectively connected to the lower heat exchange chamber (500).

4. The replaceable water-cooled heat shield according to claim 3 is characterized in that: The lower heat shield connector (300) is provided with a connecting portion (310), and the upper heat shield connector (200) is provided with a matching portion that is matched and fixed with the connecting portion (310), the matching portion being a fixing groove (210) located on a side wall of the upper heat shield connector (200), and the connecting portion (310) extends upward and can be snapped into the fixing groove (210).

5. The replaceable water-cooled heat shield according to claim 4 is characterized in that: The connecting portion (310) is a trapezoidal prism extending from bottom to top and tilted outwards, the fixing groove (210) is similar in shape to the connecting portion (310), the connecting portion (310) is provided with a connecting portion inclined surface (3101) facing outwards, and the fixing groove (210) is provided with a fixing groove inclined surface (2101) abutting against the connecting portion inclined surface (3101).

6. The replaceable water-cooled heat shield according to claim 4, characterized in that: The second cooling water pipe (700) and the connecting portion (310) are fixedly connected, the fixing groove (210) allows the second cooling water pipe (700) to pass through, and the connecting portion (310) is provided with a connecting portion cavity (3100) which is respectively connected to the second cooling water pipe outlet (702) and the lower heat exchange cavity (500).

7. The replaceable water-cooled heat shield according to claim 3 is characterized in that: The first cooling water pipe (600) comprises a first inner pipe (603) and a first outer pipe (604) sleeved on the outside of the first inner pipe (603); the first inner pipe (603) is provided with a first inner pipe channel (6031); a first outer pipe channel (6041) is provided between the first outer pipe (604) and the first inner pipe (603); the first cooling water pipe water inlet (601) is located on the first inner pipe channel (6031); and the first cooling water pipe water outlet (602) is located on the first outer pipe channel (6041).

8. The replaceable water-cooled heat shield according to claim 3 is characterized in that: The second cooling water pipe (700) comprises a second inner pipe (703) and a second outer pipe (704) sleeved on the outside of the second inner pipe (703); the second inner pipe (703) is provided with a second inner pipe channel (7031); a second outer pipe channel (7041) is provided between the second outer pipe (704) and the second inner pipe (703); the second cooling water pipe water inlet (701) is located on the second inner pipe channel (7031); and the second cooling water pipe water outlet (702) is located on the second outer pipe channel (7041).

9. The replaceable water-cooled heat shield according to claim 1, characterized in that: Cooling water pipe sleeves (1000) are respectively provided on the outside of the first cooling water pipe (600) and the second cooling water pipe (700).

10. The replaceable water-cooled heat shield according to any one of claims 1 to 9, characterized in that: The bottom outer diameter of the upper heat shield connecting piece (200) is close to the top outer diameter of the lower heat shield connecting piece (300).

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