Particle-free vacuum knife valve for semiconductor equipment

Abstract

The utility model discloses a particle-free vacuum knife valve for semiconductor equipment, and relates to the technical field of valves, the particle-free vacuum knife valve comprises a valve body and an anti-retention assembly, the cavity wall of the valve body is provided with a groove, the anti-retention assembly is embedded in the groove, and the anti-retention assembly comprises a sealing ring framework, an access port and a sealing lip. According to the particle-free vacuum knife valve for the semiconductor equipment, when a passage in the valve body needs to be opened, the hand wheel is rotated reversely so that the gate plate can be separated from the inner cavity of the valve body, the sealing filler is arranged between the valve cover and the gate plate, particles are prevented from entering the valve cover, and at the moment, the two sealing lips draw close to each other under the elastic force effect of rubber and close a port; when a medium flows out from the circular inlet to the medium flow channel, as the groove in the cavity wall of the valve body is closed, the medium flows out together with solid particles in the medium, and no solid particles are retained in the valve body, so that the valve plate can be closed in place in subsequent use, and the sealing performance is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of valves, in particular to a particle-free vacuum knife valve for semiconductor equipment. Background Art

[0002] The vacuum knife valve is a commonly used valve, which generally includes a valve body, a valve stem, a gate, a valve cover, etc. A sealing packing is arranged between the valve cover and the valve stem, and the valve stem is connected to the gate through transmission. A bracket is also fixed on the valve cover, and a nut matching the valve stem is arranged in the bracket. The vacuum gate valve is mainly used for cutting off, throttling, distributing and changing the flow direction of the medium in the pipeline.

[0003] The knife-shaped gate valves in the prior art all have a circular inlet and a circular outlet, with an inner cavity formed between the inlet and the outlet. The space of the inner cavity is larger than the diameter of the flow channel, and there is a groove at the bottom of the cavity. When the knife-shaped gate valve is in use, solid particles in the medium will continuously deposit in the groove, so that the valve cannot be closed in place, loses the closing seal, and further blocks the flow capacity of the pipeline. In order to solve this problem, the valve often needs to be disassembled for cleaning, which is time-consuming and labor-intensive, affecting production efficiency.

[0004] Therefore, in view of this, the existing structural deficiencies are studied and improved, and a particle-free vacuum knife valve for semiconductor equipment is proposed. Utility Model Content

[0005] The utility model aims to provide a particle-free vacuum knife valve for semiconductor equipment to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a particle-free vacuum knife valve for semiconductor equipment, comprising a valve body and an anti-retention component, the cavity wall of the valve body is provided with a groove, the anti-retention component is embedded in the groove, the anti-retention component comprises a sealing ring frame, an access port and a sealing lip, the sealing ring frame is interference fit in the groove, and an access port is provided on the top of the sealing ring frame, two sealing lips are arranged opposite to each other on the inner side of the sealing ring frame, and the two sealing lips are brought close to each other and close the port under the action of rubber elastic force.

[0007] Furthermore, a valve cover is fixed on the top of the valve body, and a guide sleeve is arranged in the middle of the valve cover.

[0008] Furthermore, brackets are bolted to the front and rear ends of the valve cover, and the brackets are in a "U"-shaped structure with the opening facing downward.

[0009] Furthermore, a hand wheel is provided at the top of the bracket for rotation, and a thread in the middle of the hand wheel cooperates with a screw rod.

[0010] Furthermore, the screw rod passes through the inside of the valve cover through the bracket, and the screw rod and the guide sleeve are limitedly matched.

[0011] Furthermore, a gate plate is fixedly connected to the bottom of the screw, and the gate plate penetrates into the inner cavity of the valve body through the top access port of the sealing ring skeleton to realize the opening and closing control of the flow channel.

[0012] Furthermore, guide rods are fixed on both sides of the top of the gate plate, and a spring is sleeved in the middle of the guide rods.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. When the utility model is in use, when it is necessary to open the passage in the valve body, the hand wheel is reversed to make the gate plate separate from the inner cavity of the valve body. A sealing filler is provided between the valve cover and the gate plate to prevent particles from entering the interior of the valve cover. At this time, the two sealing lips are moved closer to each other and the port is closed under the action of the rubber elastic force. When the medium flows out from the circular inlet to the medium flow channel, since the groove of the valve body cavity wall is closed, the medium will flow out together with the solid particles therein, and no solid particles will be retained in the valve body, so that the valve plate can be closed in place in subsequent use, thereby improving the sealing performance.

[0015] 2. When the utility model is in use, when it is necessary to close the passage in the valve body, the hand wheel is turned, and under the cooperation of the hand wheel and the thread of the middle screw, the gate plate penetrates into the inner cavity of the valve body through the top access port of the sealing ring skeleton, and the bottom end of the gate plate squeezes the port closed by the sealing ring to open it to realize the opening and closing control of the flow channel. During this process, the spring will cooperate to apply pressure to the gate plate, so that the gate plate can be subjected to greater external force, thereby making the contact with the sealing ring skeleton more complete, thereby ensuring the sealing of the sealing surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the overall external structure of the utility model;

[0017] Figure 2 This is a schematic diagram of the overall internal structure of the utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the anti-retention component of the utility model.

[0019] In the figure: 1. valve body; 2. groove; 3. anti-retention assembly; 301. sealing ring frame; 302. access port; 303. sealing lip; 4. valve cover; 5. guide sleeve; 6. bracket; 7. hand wheel; 8. screw; 9. gate; 10. guide rod; 11. spring. DETAILED DESCRIPTION

[0020] The following is a further detailed description of the implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but cannot be used to limit the scope of the present invention.

[0021] like Figures 1 to 3 As shown, a particle-free vacuum knife valve for semiconductor equipment includes a valve body 1 and an anti-retention component 3. The cavity wall of the valve body 1 is provided with a groove 2, and the anti-retention component 3 is embedded in the groove 2. The anti-retention component 3 includes a sealing ring frame 301, an access port 302 and a sealing lip 303. The sealing ring frame 301 is interference-fitted in the groove 2, and the top of the sealing ring frame 301 is provided with an access port 302. Two sealing lips 303 are arranged opposite to each other on the inner side of the sealing ring frame 301, and the two sealing lips 303 are moved closer to each other and close the port under the action of rubber elastic force. When it is needed When the passage in the valve body 1 is to be opened, the hand wheel 7 is reversed to make the gate plate 9 separate from the inner cavity of the valve body 1. A sealing filler is provided between the valve cover 4 and the gate plate 9 to prevent particles from entering the valve cover 4. At this time, the two sealing lips 303 are moved closer to each other and close the port under the action of the rubber elastic force. When the medium flows out from the circular inlet to the medium flow channel, since the groove 2 of the cavity wall of the valve body 1 is closed, the medium will flow out together with the solid particles therein, and no solid particles will be retained in the valve body 1, so that the valve plate can be closed in place in subsequent use, thereby improving the sealing performance;

[0022] like Figure 1 to Figure 2 As shown, a valve cover 4 is fixed on the top of the valve body 1, and a guide sleeve 5 is arranged in the middle of the valve cover 4. A bracket 6 is fixed with bolts at the front and rear ends of the valve cover 4, and the bracket 6 is in a "U"-shaped structure with the opening facing downward. A hand wheel 7 is rotated on the top of the bracket 6, and the middle part of the hand wheel 7 is threaded with a screw rod 8. The screw rod 8 passes through the inside of the valve cover 4 through the bracket 6, and the screw rod 8 is limitedly matched with the guide sleeve 5. A gate plate 9 is fixedly connected to the bottom of the screw 8, and the gate plate 9 is inserted into the inner cavity of the valve body 1 through the top access port 302 of the sealing ring skeleton 301 to realize the opening and closing control of the flow channel. Guide rods are fixed on both sides of the top of the gate plate 9. 10, and a spring 11 is sleeved in the middle of the guide rod 10. When it is necessary to close the passage in the valve body 1, the hand wheel 7 is turned. Under the action of the thread cooperation between the hand wheel 7 and the middle screw 8, the gate plate 9 penetrates into the inner cavity of the valve body 1 through the top access port 302 of the sealing ring skeleton 301, and the bottom end of the gate plate 9 squeezes the port closed by the sealing ring to open it to realize the opening and closing control of the flow channel. In this process, the spring 11 will cooperate to apply pressure to the gate plate 9, so that the gate plate 9 can be subjected to greater external force, thereby making the contact with the sealing ring skeleton 301 more complete, thereby ensuring the sealing of the sealing surface.

[0023] Working principle: When using this particle-free vacuum knife valve for semiconductor equipment, when it is necessary to close the passage in the valve body 1, turn the hand wheel 7. Under the action of the thread cooperation between the hand wheel 7 and the middle screw 8, the gate plate 9 penetrates into the inner cavity of the valve body 1 through the top access port 302 of the sealing ring skeleton 301. The bottom end of the gate plate 9 squeezes the port closed by the sealing ring to open it to realize the opening and closing control of the flow channel. During this process, the spring 11 will cooperate to apply pressure to the gate plate 9, so that the gate plate 9 can be subjected to greater external force, thereby making it more fully in contact with the sealing ring skeleton 301, thereby ensuring the sealing of the sealing surface. Sealing: when it is necessary to open the passage in the valve body 1, the hand wheel 7 is reversed to make the gate plate 9 separate from the inner cavity of the valve body 1. A sealing filler is provided between the valve cover 4 and the gate plate 9 to prevent particles from entering the interior of the valve cover 4. At this time, the two sealing lips 303 are moved closer to each other and close the port under the action of rubber elastic force. When the medium flows out from the circular inlet to the medium flow channel, since the groove 2 on the cavity wall of the valve body 1 is closed, the medium will flow out together with the solid particles therein, and no solid particles will be retained in the valve body 1, so that the valve plate can be closed in place in subsequent use, thereby improving the sealing.

[0024] The embodiments of the present invention are provided for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those of ordinary skill in the art. The embodiments are selected and described to better illustrate the principles and practical applications of the present invention, and to enable those of ordinary skill in the art to understand the present invention and thereby design various embodiments with various modifications suitable for specific uses.

Claims

1. A particle-free vacuum knife valve for semiconductor equipment, characterized in that: The invention comprises a valve body (1) and an anti-retention component (3), wherein a groove (2) is provided on the cavity wall of the valve body (1), the anti-retention component (3) is embedded in the groove (2), the anti-retention component (3) comprises a sealing ring frame (301), an access port (302) and a sealing lip (303), the sealing ring frame (301) is interference-fitted in the groove (2), and an access port (302) is provided on the top of the sealing ring frame (301), and two sealing lips (303) are arranged opposite to each other on the inner side of the sealing ring frame (301), and the two sealing lips (303) are moved closer to each other and close the port under the action of rubber elastic force.

2. The particle-free vacuum knife valve for semiconductor equipment according to claim 1, characterized in that: A valve cover (4) is fixed on the top of the valve body (1), and a guide sleeve (5) is arranged in the middle of the valve cover (4).

3. The particle-free vacuum knife valve for semiconductor equipment according to claim 2, characterized in that: The front and rear ends of the valve cover (4) are fixed with a bracket (6) by bolts, and the bracket (6) is in a "U"-shaped structure with its opening facing downward.

4. The particle-free vacuum knife valve for semiconductor equipment according to claim 3, characterized in that: A hand wheel (7) is rotatably mounted on the top of the bracket (6), and a threaded portion of the middle portion of the hand wheel (7) is engaged with a screw rod (8).

5. The particle-free vacuum knife valve for semiconductor equipment according to claim 4, characterized in that: The screw rod (8) passes through the bracket (6) and penetrates the interior of the valve cover (4), and the screw rod (8) and the guide sleeve (5) are limitedly matched.

6. The particle-free vacuum knife valve for semiconductor equipment according to claim 4, characterized in that: The bottom of the screw rod (8) is fixedly connected with a gate plate (9), and the gate plate (9) penetrates into the inner cavity of the valve body (1) through the top access port (302) of the sealing ring frame (301) to realize the opening and closing control of the flow channel.

7. The particle-free vacuum knife valve for semiconductor equipment according to claim 6, characterized in that: Guide rods (10) are fixed on both sides of the top of the gate plate (9), and a spring (11) is sleeved on the middle of the guide rod (10).

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