Helium mass spectrum leak detection device
By designing a helium mass spectrometry leak detection device, the problem that the adsorber's helium mass spectrometry leak detection results are affected by the adsorbent by designing a helium mass spectrometry leak detection device, and accurate leakage rate detection is achieved without vacuum evacuation.
Patent Information
- Application Number
- CN202420590930.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-26
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-03-26
AI Technical Summary
In the prior art, the helium mass spectrometry leak detection results of the adsorber are affected by the adsorbent, and the true leakage rate of the adsorber cannot be accurately judged. At the same time, the adsorbent also affects the evacuation performance of the evacuation unit.
A helium mass spectrometry leak detection device is designed to realize helium circulation through the adsorber to be inspected by combining sealed box, evacuation pipeline, helium intake pipeline and helium outlet pipeline, thereby avoiding vacuum operation of the adsorber.
There is no need to evacuate the adsorber, which avoids the adsorbent affecting the detection results, ensures the accuracy of the detection results, accurately obtains the true leakage rate of the adsorber, and improves the detection accuracy.
Smart Images
Figure CN222618126U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of leak detection, in particular to a helium mass spectrometer leak detection device. Background Art
[0002] With the continuous development of cryogenic technology, cryogenic containers are more widely used, and the types of cryogenic equipment suitable for process systems are more diverse. At present, for safety and cost considerations, there are higher leakage rate requirements for cryogenic containers. For example, adsorbers filled with adsorbents have higher leakage rate requirements to avoid leakage of media from adsorbers in low-temperature environments.
[0003] In the prior art, when leak detection is performed on an adsorber, due to the adsorbent filled in the adsorber, the helium mass spectrometer leak detection result will be greatly affected when the adsorber is evacuated for leak detection, and the true leak rate of the adsorber cannot be determined. Moreover, when the adsorber is evacuated, the adsorbent will also affect the evacuation performance of the evacuation unit. Utility Model Content
[0004] The utility model aims to develop a helium mass spectrometer leak detection device which can detect the leak rate of an adsorber without evacuating the adsorber.
[0005] The utility model is achieved through the following technical solutions:
[0006] A helium mass spectrometer leak detection device, comprising:
[0007] Sealed box;
[0008] The evacuation pipeline is installed on the sealed box; and
[0009] a first helium gas inlet pipeline and a helium gas outlet pipeline;
[0010] Among them, the evacuation pipeline is connected with the evacuation unit and the leak detector, the adsorber to be tested is placed in the sealed box and is connected with the first helium inlet pipeline and the helium outlet pipeline, the first helium inlet pipeline and the helium outlet pipeline are both led out of the sealed box and allow the helium to circulate through the adsorber to be tested.
[0011] Optionally, the first helium inlet pipeline and the helium outlet pipeline are arranged on a sealed box, and the connecting ends of the first helium inlet pipeline and the helium outlet pipeline and the adsorber to be inspected are both located in the sealed box.
[0012] Optionally, valves are provided on both the first helium inlet pipeline and the helium outlet pipeline.
[0013] Optionally, a helium hood is provided outside the sealed box, a second helium inlet pipeline is provided on the helium hood, a purge and replacement pipeline is connected to the sealed box, and a valve is provided on the purge and replacement pipeline.
[0014] The beneficial effects of the utility model are:
[0015] The utility model does not need to evacuate the adsorber when performing helium mass spectrometry leak detection on the adsorber, thus avoiding the adsorbent affecting the evacuation performance of the evacuation unit during evacuation, and avoiding the detection result being affected by the adsorbent. The detection result is accurate and the true leakage rate of the adsorber can be obtained. The leakage rate of the sealed box is detected before the leakage rate of the adsorber is detected, thus further improving the accuracy of the leakage rate detection of the adsorber. The utility model has a simple structure, is easy to maintain, and has low production and use costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0017] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0018] In the following, only some exemplary embodiments are briefly described. As those skilled in the art will appreciate, the described embodiments may be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and descriptions are considered to be exemplary and non-restrictive in nature.
[0019] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.
[0020] The embodiments of the present utility model are described in detail below with reference to the accompanying drawings.
[0021] like Figure 1As shown, the utility model discloses a helium mass spectrometer leak detection device, including a sealed box 4, which can be opened and closed. The sealed box 4 is provided with a first helium inlet pipeline 3 and a helium outlet pipeline 2, and valves are provided on the first helium inlet pipeline 3 and the helium outlet pipeline 2.
[0022] The sealed box body 4 is also connected with an evacuation pipeline 5 and a purge replacement pipeline 10 . The evacuation pipeline 5 is connected with the evacuation unit 7 and the leak detector 6 . The purge replacement pipeline 10 is provided with a valve.
[0023] A helium cover 8 is provided outside the sealed box body 4 . The helium cover 8 is sealed and can be disassembled outside the sealed box body 4 . A second helium gas inlet pipeline 9 is provided on the helium cover 8 .
[0024] The adsorber 1 to be inspected is placed in a sealed box 4, the first helium inlet pipeline 3 and the helium outlet pipeline 2 are connected to the adsorber 1 to be inspected, the sealed box 4 is evacuated through the evacuation pipeline 5 and the evacuation unit 7, a helium cover 8 is placed outside the sealed box 4, helium is filled into the helium cover 8 through the second helium inlet pipeline 9, and the leak detector 6 connected to the evacuation pipeline 5 is used to detect whether there is helium infiltrated from the helium cover 8 in the sealed box 4, so as to detect whether the leakage rate of the sealed box 4 reaches the allowable design requirement value.
[0025] After the leakage rate of the sealed box 4 is qualified, the helium cover 8 outside the sealed box 4 is removed, and dry clean nitrogen is continuously injected into the sealed box 4 through the purge replacement pipeline 10 for repeated replacement. During the replacement process, the gas in the sealed box 4 is discharged through the evacuation pipeline 5, and the leak detector 6 is used to determine whether there is no helium residue in the sealed box 4.
[0026] The sealed box 4 is evacuated through the evacuation pipeline 5, and helium is introduced into the adsorber 1 to be tested through the first helium inlet pipeline 3. The helium is then discharged through the helium outlet pipeline 2. If the adsorber 1 to be tested leaks, the helium seeps out of the adsorber 1 to be tested and enters the sealed box 4 and is finally detected by the leak detector 6. The value on the leak detector 6 is used to determine whether the leakage rate of the adsorber 1 to be tested meets the standard.
[0027] When the utility model performs helium mass spectrometry leak detection on the adsorber, there is no need to evacuate the adsorber, thereby avoiding the adsorbent affecting the evacuation performance of the evacuation unit 7 during evacuation, and avoiding the detection result being affected by the adsorbent. The detection result is accurate and the true leakage rate of the adsorber can be obtained. Before detecting the leakage rate of the adsorber, the sealing box 4 is leak-tested, thereby further improving the accuracy of the adsorber leakage rate detection. In addition, the utility model has a simple structure, is easy to maintain, and has low production and use costs.
[0028] The above embodiments are only preferred embodiments of the present utility model and are not limitations on the technical solutions of the present utility model. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present utility model.
Claims
1. A helium mass spectrometer leak detection device, characterized in that: include: Sealed box; The evacuation pipeline is installed on the sealed box; and a first helium gas inlet pipeline and a helium gas outlet pipeline; Among them, the evacuation pipeline is connected with the evacuation unit and the leak detector, the adsorber to be tested is placed in the sealed box and is connected with the first helium inlet pipeline and the helium outlet pipeline, the first helium inlet pipeline and the helium outlet pipeline are both led out of the sealed box and allow the helium to circulate through the adsorber to be tested.
2. The helium mass spectrometer leak detection device according to claim 1, characterized in that: The first helium inlet pipeline and the helium outlet pipeline are arranged on the sealed box, and the connecting ends of the first helium inlet pipeline and the helium outlet pipeline and the adsorber to be inspected are all located in the sealed box.
3. The helium mass spectrometer leak detection device according to claim 1, characterized in that: The first helium gas inlet pipeline and the helium gas outlet pipeline are both provided with valves.
4. The helium mass spectrometer leak detection device according to any one of claims 1 to 3, characterized in that: A helium hood is arranged outside the sealed box, a second helium inlet pipeline is arranged on the helium hood, a purge and replacement pipeline is connected to the sealed box, and a valve is arranged on the purge and replacement pipeline.