Fixing jig for wafer boat

Abstract

The utility model provides a fixing jig for a wafer boat. The jig is arranged between a base and the wafer boat. The base comprises a chassis and a plurality of supporting columns; one end of the supporting column is connected with the chassis, and the other end of the supporting column extends in the direction away from the chassis. The wafer boat comprises a base, and a plurality of through holes are formed in the base; comprising an upper surface and a lower surface which are arranged in parallel; a plurality of first positioning columns distributed at intervals are arranged on the upper surface, correspond to the through holes one to one and are connected with the through holes in a mortise and tenon mode; a plurality of positioning grooves distributed at intervals are formed in the lower surface, correspond to the other ends of the supporting columns one to one and are connected with the other ends of the supporting columns in a mortise and tenon mode. The base of the wafer boat is in surface contact with the upper surface of the body, so that the problem that the wafer boat moves and shakes relative to the supporting columns is obviously solved, and the wafer can be prevented from colliding with the wafer boat; and the body has a heat preservation effect, so that the uniformity of a film-forming product is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a fixing fixture for a wafer boat. Background Art

[0002] like Figure 1 to Figure 4 As shown, in the semiconductor manufacturing process, a film forming device is required, and a pedestal 1 (pedestal) for carrying a wafer boat 2 (boat) is provided in the film forming device; the pedestal 1 includes a chassis 101 and four support columns 102, and the four support columns 102 are fixed on the chassis 101; the tops of the four support columns 102 are all provided with steps, and the tops of three support columns 102 are also provided with positioning holes 1021; the shape of the base 201 of the wafer boat 2 is annular, and the base 201 is provided with a through hole 2011 that matches the positioning hole 1021 on the support column 102. When the wafer boat 2 is placed on the pedestal 1, the base 201 of the wafer boat 2 is placed on the step on the support column 102, and the step has a certain limiting effect on the wafer boat 2; then three positioning pins 3 are respectively inserted into the through holes 2011 on the base 201 and the positioning holes 1021 on the support column 102, and the wafer boat 2 is fixed by the positioning pins 3.

[0003] However, the contact area between the wafer boat 2 and the base 1 is very small, equivalent to point contact. During the vibration process of the motor in the film forming equipment, it is easy to cause the wafer boat 2 to move and shake relative to the support column 102, thereby causing the wafers in the wafer boat 2 to collide with the wafer boat 2, and the wafers are easily damaged and scrapped. In addition, the gap between the positioning pin 3 and the through hole 2011 and the positioning hole 1021 is usually about 2 mm, and the fixing effect of the positioning pin 3 is poor, which is also easy to cause the wafer boat 2 to move and shake relative to the support column 102. Utility Model Content

[0004] The utility model provides a fixing fixture for a crystal boat, so as to solve the technical problem that the crystal boat moves and shakes relative to a supporting column.

[0005] In order to solve the above technical problems, the utility model provides a fixture for fixing a crystal boat, the fixture is arranged between a base and a crystal boat; the base includes a chassis and a plurality of support columns; one end of the support column is connected to the chassis, and the other end of the support column extends in a direction away from the chassis; the crystal boat includes a base, and a plurality of through holes are arranged on the base; the fixture includes a body, and the body includes an upper surface and a lower surface arranged in parallel; a plurality of first positioning columns distributed at intervals are arranged on the upper surface, the first positioning columns correspond to the through holes one by one, and the first positioning columns are connected to the through holes by mortise and tenon method;

[0006] The lower surface is provided with a plurality of positioning grooves distributed at intervals, the positioning grooves correspond to the other ends of the support columns one by one, and the positioning grooves are connected to the other ends of the support columns by mortise and tenon means.

[0007] Optionally, a frosted layer is provided on the upper surface of the body.

[0008] Optionally, the body is disc-shaped.

[0009] Optionally, the number of the support columns is four, and the other ends of three of the support columns are respectively provided with positioning holes; three second positioning columns are provided on the lower surface of the main body, the second positioning columns correspond to the positioning holes one by one, and the second positioning columns are connected to the positioning holes by mortise and tenon.

[0010] Optionally, the diameter of the second positioning column is equal to the diameter of the positioning hole.

[0011] Optionally, the lower surface of the body is provided with pointing grooves, and the pointing grooves and the second positioning columns are evenly and spacedly distributed along the circumferential direction.

[0012] Optionally, a chamfer is arranged on the circumference of the lower surface of the second positioning column.

[0013] Optionally, the diameter of the first positioning column is equal to the diameter of the through hole.

[0014] Optionally, a chamfer is arranged on the circumference of the upper surface of the first positioning column.

[0015] Optionally, the positioning groove is semi-cylindrical in shape.

[0016] The utility model provides a fixture for fixing a wafer boat, comprising a first positioning column and a positioning groove, wherein the first positioning column is connected to the through hole by a mortise and tenon method, and the positioning groove is connected to the other end of the support column by a mortise and tenon method. The unexpected effect is that the base of the wafer boat and the upper surface of the body are in surface contact, and the problem of the wafer boat moving and shaking relative to the support column is significantly improved, which can prevent the wafer from colliding with the wafer boat; in addition, the body of the fixture is solid, and the body has a heat preservation effect, which improves the uniformity of the film-forming product. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 The present invention is a schematic diagram of a structure in which a wafer boat is placed on a base in the prior art.

[0018] Figure 2 yes Figure 1 Schematic diagram of the structure of the base.

[0019] Figure 3 yes Figure 1 Schematic diagram of the structure of the bottom of the crystal boat.

[0020] Figure 4 yes Figure 1 Schematic diagram of the structure of the positioning pin.

[0021] Figure 5 It is a structural schematic diagram of a fixture provided by an embodiment of the utility model when in use.

[0022] Figure 6 yes Figure 5 Explosion diagram.

[0023] Figure 7 It is a front schematic diagram of a fixture provided by one embodiment of the utility model.

[0024] Figure 8 It is a schematic diagram of the reverse side of a fixture provided by one embodiment of the utility model.

[0025] [Description of reference numerals is as follows]:

[0026] Base-1, crystal boat-2, positioning pin-3;

[0027] Chassis-101, support column-102;

[0028] Positioning hole-1021;

[0029] Base - 201;

[0030] Via-2011;

[0031] Jig-11;

[0032] Ontology-111;

[0033] Upper surface-1111, lower surface-1112, first positioning column-1113, positioning groove-1114, second positioning column-1115, pointing groove-1116. DETAILED DESCRIPTION

[0034] In order to make the purpose, advantages and features of the present invention clearer, a wafer boat fixing fixture proposed by the present invention is further described in detail below in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the present invention.

[0035] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0036] like Figures 5 to 8 As shown, the utility model provides a fixture 11 for fixing a wafer boat 2, wherein the fixture 11 is arranged between a base 1 and a wafer boat 2; the base 1 comprises a chassis 101 and a plurality of support columns 102; one end of the support column 102 is connected to the chassis 101, and the other end of the support column 102 extends in a direction away from the chassis 101; the wafer boat 2 comprises a base 201, and a plurality of through holes 2011 are arranged on the base 201; the fixture 11 comprises a body 111, and the body 111 comprises upper surfaces 1111 arranged in parallel and lower surface 1112; the upper surface 1111 is provided with a plurality of first positioning posts 1113 distributed at intervals, the first positioning posts 1113 correspond one-to-one with the through holes 2011, and the first positioning posts 1113 and the through holes 2011 are connected by mortise and tenon; the lower surface 1112 is provided with a plurality of positioning grooves 1114 distributed at intervals, the positioning grooves 1114 correspond one-to-one with the other end of the support column 102, and the positioning grooves 1114 and the other end of the support column 102 are connected by mortise and tenon. The mortise and tenon connection means that the sizes of the two matching parts are equal or very close. The fixture 11 can be made of quartz to improve the thermal insulation effect.

[0037] The present embodiment provides a fixture 11 for fixing a wafer boat 2, comprising a first positioning column 1113 and a positioning groove 1114, wherein the first positioning column 1113 is connected to the through hole 2011 by a mortise and tenon method, and the positioning groove 1114 is connected to the other end of the support column 102 by a mortise and tenon method. The unexpected effect is that the base 201 of the wafer boat 2 and the upper surface 1111 of the body 111 are in surface contact, and the problem of the wafer boat 2 moving and shaking relative to the support column 102 is significantly improved, and the wafer can be prevented from colliding with the wafer boat 2; in addition, the body 111 of the fixture 11 is solid, and the body 111 has a heat preservation effect, which improves the uniformity of the film-forming product.

[0038] Optional, reference Figure 7 As shown, a frosted layer is provided on the upper surface 1111 of the body 111. The texture structure can be used as the frosted layer, which can increase the friction force and further prevent the wafer boat from moving and shaking relative to the body 111 of the fixture 11.

[0039] Optional, reference Figure 7 As shown, the shape of the body 111 is a disc. The shape of the body 111 can be a flat cylinder, that is, a disc, so that it is convenient to manufacture the body 111. In other embodiments, the shape of the body 111 can be an ellipse or a rectangle.

[0040] Optional, such as Figure 2 , Figure 6and Figure 8 As shown, the number of the support columns 102 is four, and the other ends of the three support columns 102 are respectively provided with positioning holes 1021; the lower surface 1112 of the body 111 is provided with three second positioning columns 1115, and the second positioning columns 1115 correspond to the positioning holes 1021 one by one, and the second positioning columns 1115 are connected to the positioning holes 1021 by mortise and tenon. Through the mortise and tenon connection between the second positioning columns 1115 and the positioning holes 1021, the fixture 11 can be firmly fixed on the other end of the support column 102.

[0041] Optional, such as Figure 2 and Figure 8 As shown, the diameter of the second positioning column 1115 is equal to the diameter of the positioning hole 1021 , so the riveting effect is very strong. In other embodiments, the diameter of the second positioning column 1115 can be slightly smaller than the diameter of the positioning hole 1021 .

[0042] Optional, such as Figure 2 and Figure 8 As shown, the lower surface 1112 of the body 111 is provided with a pointing groove 1116, and the pointing groove 1116 and the second positioning column 1115 are evenly and spacedly distributed along the circumferential direction. Among the four support columns 102, one support column 102 has no positioning hole 1021 at its top, and the pointing groove 1116 is used to point to the support column 102, that is, the positioning groove 1114 near the pointing groove 1116 is used to be fixed on the support column 102.

[0043] Optional, reference Figure 2 and Figure 8 As shown, the circumference of the lower surface of the second positioning column 1115 is chamfered, which facilitates the insertion of the second positioning column 1115 into the positioning hole 1021.

[0044] Optional, such as Figure 6 and Figure 7 As shown, the diameter of the first positioning column 1113 is equal to the diameter of the through hole 2011, so the riveting effect is very strong. In other embodiments, the diameter of the first positioning column 1113 can be slightly smaller than the diameter of the through hole 2011.

[0045] Optional, such as Figure 7 As shown, the upper surface of the first positioning column 1113 is chamfered in the circumferential direction, so that the through hole 2011 of the wafer boat can be easily inserted into the first positioning column 1113 .

[0046] Optional, such as Figure 2 and Figure 8As shown, the shape of the positioning groove 1114 is semi-cylindrical. Since the top of the support column 102 is usually provided with a semi-cylindrical step, the shape of the positioning groove 1114 is designed to be semi-cylindrical, which can improve the riveting effect between the positioning groove 1114 and the support column 102. In other embodiments, the shape of the positioning groove 1114 can be adjusted according to the shape of the top of the support column 102.

[0047] In summary, the utility model provides a fixture 11 for fixing a wafer boat 2, comprising a first positioning column 1113 and a positioning groove 1114, wherein the first positioning column 1113 is connected to the through hole 2011 by a mortise and tenon method, and the positioning groove 1114 is connected to the other end of the support column 102 by a mortise and tenon method. An unexpected effect is that the base 201 of the wafer boat 2 and the upper surface 1111 of the body 111 are in surface contact, and the problem of the wafer boat 2 moving and shaking relative to the support column 102 is significantly improved, which can prevent the wafer from colliding with the wafer boat 2; in addition, the body 111 of the fixture 11 is solid, and the body 111 has a heat preservation effect, which improves the uniformity of the film-forming product.

[0048] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A fixture for fixing a wafer boat, the fixture being arranged between a base and a wafer boat; the base comprising a chassis and a plurality of support columns; one end of the support column is connected to the chassis, and the other end of the support column extends away from the chassis; the wafer boat comprises a base, and a plurality of through holes are arranged on the base; characterized in that, The fixture comprises a body, the body comprises an upper surface and a lower surface arranged in parallel; a plurality of first positioning columns distributed at intervals are arranged on the upper surface, the first positioning columns correspond to the through holes one by one, and the first positioning columns are connected to the through holes by mortise and tenon method; The lower surface is provided with a plurality of positioning grooves distributed at intervals, the positioning grooves correspond to the other ends of the support columns one by one, and the positioning grooves are connected to the other ends of the support columns by mortise and tenon means.

2. A wafer boat fixing fixture as claimed in claim 1, characterized in that: The upper surface of the body is provided with a frosted layer.

3. A wafer boat fixing fixture as claimed in claim 1, characterized in that: The body is in the shape of a disc.

4. A wafer boat fixing fixture as claimed in claim 1, characterized in that: There are four support columns, and the other ends of three of the support columns are respectively provided with positioning holes; three second positioning columns are provided on the lower surface of the main body, and the second positioning columns correspond to the positioning holes one by one, and the second positioning columns are connected to the positioning holes by mortise and tenon.

5. A wafer boat fixing fixture as claimed in claim 4, characterized in that: The diameter of the second positioning column is equal to the diameter of the positioning hole.

6. A wafer boat fixing fixture as claimed in claim 4, characterized in that: The lower surface of the body is provided with a pointing groove, and the pointing groove and the second positioning column are evenly and spacedly distributed along the circumferential direction.

7. A wafer boat fixing fixture as claimed in claim 4, characterized in that: A chamfer is arranged on the circumference of the lower surface of the second positioning column.

8. The wafer boat fixing fixture according to claim 1, characterized in that: The diameter of the first positioning column is equal to the diameter of the through hole.

9. The wafer boat fixing fixture according to claim 1, characterized in that: The upper surface of the first positioning column is chamfered in the circumferential direction.

10. The wafer boat fixing fixture according to claim 1, characterized in that: The positioning groove is in a semi-cylindrical shape.

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