Polishing device

Abstract

The utility model discloses a polishing device which comprises a jig assembly used for containing a substrate slice, a polishing assembly, a plurality of first driving pieces, a second driving assembly and a supporting assembly, and the polishing assembly is located above the jig assembly. The polishing assembly comprises a first mounting frame and a plurality of polishing structures, the first driving part is mounted on the first mounting frame, an output shaft of the first driving part penetrates through the first mounting frame to be connected with the corresponding polishing structure, and the second driving assembly is connected with the supporting assembly. And the second driving assembly is connected with the first mounting frame so as to drive the polishing structure to rotate. According to the polishing device, the plurality of first driving parts are connected to the corresponding polishing structures, so that each first driving part can independently control the rotating speed and direction of the corresponding polishing structure, and different polishing structures can rotate at different speeds and directions to meet different polishing requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of polishing, in particular to a polishing device. Background Art

[0002] In the fields of semiconductor manufacturing, precision optical device processing and metal surface treatment, workpieces often need to be polished. Traditional polishing usually adopts single-wheel polishing. However, single-wheel polishing machines are often limited to a single rotation speed and direction. It is difficult to achieve diversified polishing effects through simple adjustments, which makes it difficult to adapt to the polishing needs of different areas. Utility Model Content

[0003] The technical problem to be solved by the utility model is that a single-wheel polishing machine is often limited to a single rotation speed and direction, and it is difficult to achieve a variety of polishing effects through simple adjustment, which makes it difficult to adapt to the polishing needs of different areas.

[0004] In order to solve the above technical problems, the utility model provides a polishing device, including a fixture assembly for placing a substrate sheet, a polishing assembly, a plurality of first driving members, a second driving assembly and a supporting assembly, wherein the polishing assembly is located above the fixture assembly;

[0005] The polishing assembly includes a first mounting frame and a plurality of polishing structures, the first driving member is mounted on the first mounting frame, and the output shaft of the first driving member passes through the first mounting frame and is connected to the corresponding polishing structure, the second driving assembly is connected to the supporting assembly, and the second driving assembly is connected to the first mounting frame to drive the polishing structure to rotate.

[0006] In some embodiments, the number of the polishing structures is three, and the three polishing structures are distributed in a triangular shape on the first mounting frame.

[0007] In some embodiments, the first mounting frame includes a first mounting plate, a second mounting plate and a third mounting plate, the third mounting plate is connected to the first mounting plate through the second mounting plate, the third mounting plate is arranged parallel to the second mounting plate, the second mounting plate is arranged vertically to the third mounting plate and the first mounting plate, the second mounting plate is formed with an avoidance groove for installation of the first driving member, the first driving member is installed on the first mounting plate, and the second driving component is connected to the third mounting plate.

[0008] In some embodiments, the second drive assembly includes a second mounting frame and a second drive member, one side of the second mounting frame is connected to the first mounting frame, and the other side is connected to the support assembly, the second drive member is installed on the second mounting frame, and the output shaft of the second drive member passes through the second mounting frame and is connected to the first mounting frame.

[0009] In some embodiments, the second mounting frame includes a fourth mounting plate and a fifth mounting plate, the fifth mounting plate is connected to the fourth mounting plate, and the fourth mounting plate and the fifth mounting plate are vertically arranged, the fourth mounting plate is connected to the first mounting frame, the fifth mounting plate is connected to the supporting assembly, the second driving member is mounted on the fourth mounting plate, and the output shaft of the second driving member passes through the fourth mounting plate and is connected to the first mounting frame.

[0010] In some embodiments, the polishing structure includes a polishing wheel and a polishing pad. The polishing wheel is connected to the output shaft of the first driving member through a fixing member, and the polishing pad is installed on a side of the polishing wheel facing the fixture assembly.

[0011] In some embodiments, a third driving member is further included, wherein the third driving member is installed on the supporting assembly and connected to the second driving assembly to drive the polishing assembly to perform lifting motion.

[0012] In some embodiments, the jig assembly includes a jig, a fourth driving member and a vacuum driving member. The jig has a suction port on the side facing the polishing assembly, the vacuum driving member is connected to the suction port, and the output shaft of the fourth driving member is connected to the jig to drive the jig to rotate.

[0013] In some embodiments, the fixture assembly further includes a fifth driving member, wherein the fifth driving member is connected to the fourth driving member to drive the fourth driving member to reciprocate along the first direction.

[0014] In some embodiments, the support assembly includes two support columns and a third mounting frame, the two support columns are spaced apart, two sides of the third mounting frame are respectively connected to the support columns, and the third driving member is mounted on the third mounting frame.

[0015] Compared with the prior art, the polishing device of the utility model has the following beneficial effects:

[0016] The embodiment of the utility model connects a plurality of first driving members to the corresponding polishing structures to ensure that each first driving member can independently control the rotation speed and direction of the corresponding polishing structure, so that different polishing structures rotate at different speeds and directions to meet different polishing requirements. In addition, the entire first mounting frame (and all polishing structures thereon) is driven to rotate in the opposite direction by the second driving assembly, so that a speed difference is formed with the polishing structure controlled by the first driving member, which helps to remove materials more effectively and improve the polishing quality and efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural schematic diagram of a polishing device provided by an embodiment of the utility model;

[0018] Figure 2 It is a structural schematic diagram of the polishing device provided by the embodiment of the utility model without the fixture assembly;

[0019] Figure 3 It is a structural schematic diagram of the polishing device provided by the embodiment of the utility model without the fixture assembly and the support assembly;

[0020] Figure 4 The utility model embodiment provides Figure 3 A partial enlarged view of the circled portion A;

[0021] Figure 5 It is a structural schematic diagram of a fixture assembly provided by an embodiment of the utility model;

[0022] In the figure, 1, substrate sheet; 2, fixture assembly; 21, fixture; 22, fourth driving member; 23, fifth driving member; 3, polishing assembly; 31, first mounting frame; 311, first mounting plate; 3111, avoidance groove; 312, second mounting plate; 313, third mounting plate; 32, polishing structure; 321, polishing wheel; 322, polishing pad; 323, fixing member; 4, first driving member; 5, second driving assembly; 51, second mounting frame; 511, fourth mounting plate; 512, fifth mounting plate; 52, second driving member; 6, support assembly; 61, support column; 62, third mounting frame; 7, third driving member. DETAILED DESCRIPTION

[0023] The following is a further detailed description of the specific implementation of the present invention in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0024] like Figure 1 and Figure 2 As shown, the utility model provides a polishing device, including a fixture assembly 2, a polishing assembly 3, a plurality of first driving members 4, a second driving assembly 5 and a supporting assembly 6. The fixture assembly 2 is used to place a substrate sheet 1 to ensure that the position of the substrate remains unchanged during the entire polishing process and to maintain the processing accuracy. The polishing assembly 3 is located above the fixture assembly 2 and acts on the surface of the substrate sheet 1.

[0025] The polishing assembly 3 includes a first mounting frame 31 and a plurality of polishing structures 32. The first driving member 4 is mounted on the first mounting frame 31, and the output shaft of the first driving member 4 passes through the first mounting frame 31 and is connected to the corresponding polishing structure 32. The second driving assembly 5 is connected to the supporting assembly 6, and the second driving assembly 5 is connected to the first mounting frame 31 to drive the polishing structure 32 to rotate.

[0026] Based on the above structure, in this embodiment, multiple first driving members 4 are connected to the corresponding polishing structures 32 to ensure that each first driving member 4 can independently control the rotation speed and direction of the corresponding polishing structure 32, so that different polishing structures 32 rotate at different speeds and directions to meet different polishing requirements. In addition, the entire first mounting frame 31 (and all polishing structures 32 thereon) is driven to rotate in the opposite direction by the second driving assembly 5, so that a speed difference is formed with the polishing structure 32 controlled by the first driving member 4, which helps to remove materials more effectively and improve the polishing quality and efficiency.

[0027] It should be noted that the rotation speed and direction of each polishing structure 32 in this embodiment can be controlled as needed. In addition, when the second drive assembly 5 drives the first mounting frame 31 to rotate, the polishing structure 32 driven by some first drive members 4 can also rotate in the same direction as the second drive assembly 5, which is not particularly limited here. The first drive member 4 in this embodiment is a rotating motor.

[0028] In some embodiments, the number of the polishing structures 32 is three, and the three polishing structures 32 are distributed in a triangle shape on the first mounting frame 31 .

[0029] This embodiment arranges the polishing structures 32 in the above manner to ensure that during the polishing process, the pressure and force on the surface of the substrate sheet 1 are more evenly distributed. In addition, the three polishing structures 32 work simultaneously, which can speed up the polishing speed and shorten the processing cycle compared to a single polishing head. While each polishing structure 32 works independently, the collaborative work between them covers a wider area, reducing the need for repeated polishing and improving the overall processing efficiency.

[0030] like Figure 3 As shown, the first mounting frame 31 includes a first mounting plate 311, a second mounting plate 312 and a third mounting plate 313. The second mounting plate 312 acts as a bridge, so that the third mounting plate 313 is connected to the first mounting plate 311 through the second mounting plate 312. The third mounting plate 313 is arranged in parallel with the first mounting plate 311 to form a stable three-dimensional frame structure. The second mounting plate 312 is vertically arranged to the third mounting plate 313 and the first mounting plate 311. The second mounting plate 312 is formed with an avoidance groove 3111 for installing the first driving member 4, which not only ensures the installation space of the first driving member 4, but also does not affect the compactness and stability of the overall structure. The first driving member 4 is installed on the first mounting plate 311, and the second driving component 5 is connected to the third mounting plate 313.

[0031] The first mounting frame 31 of this embodiment is interconnected and supported by three layers of mounting plates, especially the vertical setting of the second mounting plate 312, which enhances the stability and rigidity of the entire polishing assembly 3 to maintain good mechanical properties, reduce vibration and deformation, and ensure polishing accuracy.

[0032] In some embodiments, the second drive assembly 5 includes a second mounting frame 51 and a second drive member 52, one side of the second mounting frame 51 is connected to the first mounting frame 31, and the other side is connected to the support assembly 6, the second drive member 52 is installed on the second mounting frame 51, and the output shaft of the second drive member 52 passes through the second mounting frame 51 and is connected to the first mounting frame 31, so that the second drive member 52 can control the rotation direction and speed of the first mounting frame 31, and realize a different motion mode from the polishing structure 32 (controlled by the first drive member 4), that is, the polishing structure 32 and the first mounting frame 31 (together with the polishing structure 32 thereon) can be set to rotate in opposite directions, and the two form a larger speed difference, which can improve the polishing efficiency. The second drive member 52 of this embodiment is a rotating motor.

[0033] In some embodiments, the second mounting frame 51 includes a fourth mounting plate 511 and a fifth mounting plate 512, the fifth mounting plate 512 is connected to the fourth mounting plate 511, and the fourth mounting plate 511 and the fifth mounting plate 512 are vertically arranged to form a stable frame structure; the fourth mounting plate 511 is connected to the three mounting plates 313 of the first mounting frame 31, the fifth mounting plate 512 is connected to the support assembly 6, the second driving member 52 is installed on the fourth mounting plate 511, and the output shaft of the second driving member 52 passes through the fourth mounting plate 511 and is connected to the first mounting frame 31, ensuring that the power of the second driving member 52 can be directly and effectively transmitted to the first mounting frame 31, driving the first mounting frame 31 to rotate in a predetermined direction and speed, and the motion combination formed with the polishing structure 32 acts on the surface of the workpiece to achieve an ideal polishing effect.

[0034] like Figure 4 As shown, the polishing structure 32 includes a polishing wheel 321 and a polishing pad 322. The polishing wheel 321 is connected to the output shaft of the first driving member 4 through a fixing member 323 to ensure that the polishing wheel 321 is firmly mounted on the rotating shaft. The polishing pad 322 is mounted on the side of the polishing wheel 321 facing the jig assembly 2. The polishing pad 322 is used to contact and polish the substrate sheet 1, which can not only protect the substrate sheet 1 from direct wear, but also can adapt to the requirements of different materials and polishing stages by adjusting the hardness, density and texture of the polishing pad 322 to achieve a more ideal surface finish.

[0035] In some embodiments, a third driving member 7 is further included. The third driving member 7 is installed on the supporting assembly 6, and the third driving member 7 is connected to the second driving assembly 5 to drive the polishing assembly 3 to perform lifting movement.

[0036] In this embodiment, the lifting and lowering of the polishing assembly 3 is controlled by the third driving member 7, and the pressure of the polishing pad 322 on the surface of the substrate 1 can be adjusted. For example, increasing the pressure can improve the material removal rate, and reducing the pressure is suitable for fine polishing and reducing surface damage. In addition, before and after the polishing operation, the lifting function of the polishing assembly 3 also facilitates the loading and unloading of the workpiece, simplifies the operation process, and improves production efficiency. The third driving member 7 of this embodiment is a slide cylinder.

[0037] like Figure 5 As shown, the jig assembly 2 includes a jig 21, a fourth drive member 22, and a vacuum drive member. The jig 21 is used to fix and support the substrate sheet 1 to be polished, ensuring that the substrate is in a stable position during the polishing process to avoid movement or offset. The side of the jig 21 facing the polishing assembly 3 has a suction port, and the vacuum drive member is connected to the suction port to fix the substrate sheet 1 by vacuum suction to ensure that the substrate sheet 1 will not be displaced due to external force during the entire polishing process. The output shaft of the fourth drive member 22 is connected to the jig 21 to drive the jig 21 to rotate, so that the substrate sheet 1 can contact the polishing pad 322 in more directions and more evenly during the polishing process, avoiding local over-polishing or unpolished areas caused by static positions, and improving the uniformity and overall efficiency of polishing. The fourth drive member 22 of this embodiment is a rotary motor.

[0038] In some embodiments, the fixture assembly 2 further includes a fifth driving member 23, which is connected to the third driving member 7 to drive the fourth driving member 22 to reciprocate along the first direction, so that the polishing assembly 3 can move forward and backward in a direction perpendicular to the rotation axis, so that the polishing force is more evenly distributed during the polishing process, and the local over-polishing or under-polishing phenomenon is reduced. In this embodiment, the fifth driving member 23 and the fourth driving member 22 work together to enhance the flexibility, efficiency and polishing effect of the polishing process. The fifth driving member 23 of this embodiment is a linear motor, and the first direction is the length direction of the linear motor.

[0039] In some embodiments, the support assembly 6 includes two support columns 61 and a third mounting frame 62. The two support columns 61 are arranged at intervals to provide a support basis for the stability of the entire system. The two sides of the third mounting frame 62 are respectively connected to the support columns 61. The third driving member 7 is installed on the third mounting frame 62 to provide stable support for the third driving member 7 through the support columns 61.

[0040] The working process is as follows:

[0041] The substrate sheet 1 is mounted on the jig 21, and the second driving member 52 rotates to drive the three first driving members 4 to revolve. The first driving members 4 rotate to drive the polishing wheels 321 to rotate at different speeds, and the third driving member 7 drives the polishing pad 322 downward to contact the substrate sheet 1; the fourth driving member 22 rotates to drive the jig 21 and the substrate sheet 1 to rotate, and the fifth driving member 23 drives the jig 21 to reciprocate to perform polishing.

[0042] In summary, the embodiment of the utility model provides a polishing device, which is connected to the corresponding polishing structure 32 through multiple first driving members 4 to ensure that each first driving member 4 can independently control the rotation speed and direction of the corresponding polishing structure 32, so that different polishing structures 32 rotate at different speeds and directions to meet different polishing requirements. In addition, the entire first mounting frame 31 (and all the polishing structures 32 thereon) is driven to rotate in the opposite direction through the second driving component 5, so that a speed difference is formed with the polishing structure 32 controlled by the first driving member 4, which helps to remove materials more effectively and improve the polishing quality and efficiency.

[0043] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principle of the present invention. These improvements and substitutions should also be regarded as the protection scope of the present invention.

Claims

1. A polishing device, characterized in that: It comprises a jig assembly for placing a substrate sheet, a polishing assembly, a plurality of first driving members, a second driving assembly and a supporting assembly, wherein the polishing assembly is located above the jig assembly; The polishing assembly includes a first mounting frame and a plurality of polishing structures, the first driving member is mounted on the first mounting frame, and the output shaft of the first driving member passes through the first mounting frame and is connected to the corresponding polishing structure, the second driving assembly is connected to the supporting assembly, and the second driving assembly is connected to the first mounting frame to drive the polishing structure to rotate.

2. The polishing device according to claim 1, characterized in that: The number of the polishing structures is three, and the three polishing structures are distributed in a triangular shape on the first mounting frame.

3. The polishing device according to claim 2, characterized in that: The first mounting frame includes a first mounting plate, a second mounting plate and a third mounting plate, the third mounting plate is connected to the first mounting plate through the second mounting plate, the third mounting plate is arranged parallel to the second mounting plate, the second mounting plate is arranged vertically to the third mounting plate and the first mounting plate, the second mounting plate is formed with an avoidance groove for installation of the first driving member, the first driving member is installed on the first mounting plate, and the second driving component is connected to the third mounting plate.

4. The polishing device according to claim 1, characterized in that: The second driving component includes a second mounting frame and a second driving member, one side of the second mounting frame is connected to the first mounting frame, and the other side is connected to the supporting component, the second driving member is installed on the second mounting frame, and the output shaft of the second driving member passes through the second mounting frame and is connected to the first mounting frame.

5. The polishing device according to claim 4, characterized in that: The second mounting frame includes a fourth mounting plate and a fifth mounting plate, the fifth mounting plate is connected to the fourth mounting plate, and the fourth mounting plate and the fifth mounting plate are vertically arranged, the fourth mounting plate is connected to the first mounting frame, the fifth mounting plate is connected to the supporting assembly, the second driving member is installed on the fourth mounting plate, and the output shaft of the second driving member passes through the fourth mounting plate and is connected to the first mounting frame.

6. The polishing device according to claim 1, characterized in that: The polishing structure includes a polishing wheel and a polishing pad. The polishing wheel is connected to the output shaft of the first driving member through a fixing member, and the polishing pad is installed on a side of the polishing wheel facing the fixture assembly.

7. The polishing device according to claim 1, characterized in that: It also includes a third driving member, which is installed on the supporting assembly and connected to the second driving assembly to drive the polishing assembly to move up and down.

8. The polishing device according to claim 1, characterized in that: The jig assembly includes a jig, a fourth driving member and a vacuum driving member. The jig has a suction port on a side facing the polishing assembly. The vacuum driving member is connected to the suction port. The output shaft of the fourth driving member is connected to the jig to drive the jig to rotate.

9. The polishing device according to claim 8, characterized in that: The fixture assembly also includes a fifth driving member, which is connected to the fourth driving member to drive the fourth driving member to reciprocate along the first direction.

10. The polishing device according to claim 7, characterized in that: The support assembly includes two support columns and a third mounting frame. The two support columns are arranged at an interval. Two sides of the third mounting frame are respectively connected to the support columns. The third driving member is installed on the third mounting frame.

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