Gallium oxide czochralski method gas guide device and gallium oxide furnace

Abstract

The utility model discloses a gallium oxide czochralski method gas guide device and a gallium oxide furnace, and particularly relates to the technical field of gallium oxide preparation equipment, the gallium oxide czochralski method gas guide device comprises a gas guide cylinder and a seed crystal rod, the gas guide cylinder is fixedly sleeved outside the seed crystal rod, and the seed crystal rod extends into one end of a heat preservation cylinder of the gallium oxide furnace and is fixedly connected with a seed crystal; a first annular gap exists between the inner side wall of the gas guide cylinder and the outer side wall of the seed crystal rod, a second annular gap exists between the outer side wall of the gas guide cylinder and a lifting opening of a heat preservation cylinder of the gallium oxide furnace, and high-temperature gas in the heat preservation cylinder of the gallium oxide furnace leaves the heat preservation cylinder from the first annular gap. Low-temperature gas of the heat preservation cylinder is sucked into the heat preservation cylinder from the second annular gap, and the central axis of the gas guide cylinder and the central axis of the seed rod are collinear. According to the utility model, the airflow direction can be improved, a melt cold core is concentrated, and the stability of seeding and shouldering temperature is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of gallium oxide preparation equipment, in particular to a gallium oxide Czochralski gas guide device and a gallium oxide furnace. Background Art

[0002] The general process of preparing gallium oxide by the Czochralski method is as follows: the purified raw materials are placed in a crucible, and the crucible is placed in an appropriate heat field. During the heating process, the raw materials gradually melt in the crucible. After that, the pre-placed seed crystal is pulled and rotated at a certain speed to grow a single crystal that meets the conditions. During the growth process of gallium oxide, the flow of airflow is convected by heat exchange in the heat field. However, the flow of airflow in the furnace is turbulent, which can easily cause the liquid surface cooling center to be not in the center, and the temperature of seeding and shoulder is unstable. Utility Model Content

[0003] The utility model aims to provide a gallium oxide Czochralski gas guide device and a gallium oxide furnace to solve the problems existing in the above-mentioned prior art, improve the direction of gas flow, concentrate the melt cooling center, and improve the stability of seeding and shouldering temperature.

[0004] To achieve the above purpose, the utility model provides the following solutions:

[0005] The utility model provides a gas guide device for a gallium oxide direct pulling method, comprising a gas guide tube and a seed crystal rod, wherein the gas guide tube is fixedly sleeved outside the seed crystal rod, one end of the seed crystal rod extending into a heat preservation tube of a gallium oxide furnace is fixedly connected to the seed crystal, a first annular gap exists between the inner side wall of the gas guide tube and the outer side wall of the seed crystal rod, a second annular gap exists between the outer side wall of the gas guide tube and a lifting port of the heat preservation tube of the gallium oxide furnace, high-temperature gas in the heat preservation tube of the gallium oxide furnace leaves the heat preservation tube from the first annular gap, and low-temperature gas in the heat preservation tube is sucked into the heat preservation tube from the second annular gap, and the central axis of the gas guide tube and the central axis of the seed crystal rod are collinear.

[0006] Preferably, a connecting frame is further included, and the inner side wall of the air guide cylinder is fixedly connected to the outer side wall of the seed rod through the connecting frame.

[0007] Preferably, the connecting frame includes an annular member and four connecting plates evenly arranged on the outer side wall of the annular member, the annular member is fixedly sleeved outside the seed crystal rod, and the four connecting plates are fixedly connected to the inner side wall of the gas guide cylinder.

[0008] Preferably, the seed crystal rod is fixedly connected to the seed crystal via a fixing pin.

[0009] Preferably, one end of the seed crystal rod away from the seed crystal is connected to a pulling mechanism of the gallium oxide furnace through a connecting piece.

[0010] The utility model also provides a gallium oxide furnace, comprising an outer cylinder, a pulling mechanism, a heat-insulating cylinder, a crucible, an intermediate frequency coil and the gallium oxide Czochralski gas guide device, the heat-insulating cylinder and the intermediate frequency coil are arranged in the outer cylinder, the intermediate frequency coil is sleeved outside the heat-insulating cylinder, the intermediate frequency coil is used for heating the outer cylinder, the crucible is arranged in the heat-insulating cylinder, the top of the heat-insulating cylinder is provided with a heat-insulating cover, the heat-insulating cover is provided with a pulling port, the gallium oxide Czochralski gas guide device is connected to the pulling mechanism, and one end of the gallium oxide Czochralski gas guide device close to the seed crystal passes through the pulling port and extends into the heat-insulating cylinder.

[0011] Preferably, the central axis of the air guide cylinder, the central line of the lifting port and the central axis of the heat preservation cylinder are collinear.

[0012] Compared with the prior art, the utility model has achieved the following technical effects:

[0013] The utility model provides a gallium oxide Czochralski gas guide device and a gallium oxide furnace. The gas guide tube is sleeved outside a seed crystal rod. A first annular gap exists between the gas guide tube and the seed crystal rod. A second annular gap exists between the gas guide tube and a pulling port of an insulation tube of the gallium oxide furnace. Through the chimney effect, the high-temperature airflow in the insulation tube rises along with the first annular gap and leaves at the top of the first annular gap. Then, the gas with a lower temperature and a larger specific gravity outside the insulation tube is sucked into the insulation tube from the second annular gap, so as to improve the direction of the airflow. The heat taken away by the airflow makes the cold core of the melt concentrated. The direction of the gas guide changes the temperature gradient in the furnace, so that the seeding and shouldering temperatures can be better controlled, and the product quality can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0015] Figure 1 This is a schematic structural diagram of a gallium oxide Czochralski gas guide device according to Example 1;

[0016] Figure 2 A top view of the gallium oxide Czochralski gas guide device of Example 1;

[0017] Figure 3 It is a structural schematic diagram of the gallium oxide furnace of Example 2;

[0018] Figure 4 Schematic diagram of the flow of gas in the gallium oxide Czochralski method gas guide device and the heat preservation cylinder in Example 2.

[0019] In the figure: 1-air guide cylinder; 2-connecting frame; 3-seed crystal; 4-lifting mechanism; 5-fixing pin; 6-seed crystal rod; 7-outer cylinder; 8-insulating cylinder; 9-crucible; 10-intermediate frequency coil; 11-insulating cover; 12-lifting port. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] The utility model aims to provide a gallium oxide Czochralski gas guide device and a gallium oxide furnace to solve the problems existing in the above-mentioned prior art, improve the direction of gas flow, concentrate the melt cooling center, and improve the stability of seeding and shouldering temperature.

[0022] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0023] Example 1

[0024] This embodiment provides a gallium oxide Czochralski gas guide device, such as Figure 1-2 As shown, it includes an air guide tube 1 and a seed crystal rod 6, the air guide tube 1 is fixedly sleeved outside the seed crystal rod 6, one end of the seed crystal rod 6 extends into the insulation tube 8 of the gallium oxide furnace and is fixedly connected to the seed crystal 3, there is a first annular gap between the inner wall of the air guide tube 1 and the outer wall of the seed crystal rod 6, there is a second annular gap between the outer wall of the air guide tube 1 and the pulling port 12 of the insulation tube 8 of the gallium oxide furnace, the high-temperature gas in the insulation tube 8 of the gallium oxide furnace leaves the insulation tube 8 from the first annular gap, the low-temperature gas in the insulation tube 8 is sucked into the insulation tube 8 from the second annular gap, and the central axis of the air guide tube 1 and the central axis of the seed crystal rod 6 are collinear. The gas guide tube 1 is sleeved on the outside of the seed crystal rod 6, and there is a first annular gap between the gas guide tube 1 and the seed crystal rod 6, and there is a second annular gap between the gas guide tube 1 and the pulling port 12 of the insulation tube 8 of the gallium oxide furnace. Through the chimney effect, the high-temperature airflow in the insulation tube 8 rises along with the first annular gap and leaves at the top of the first annular gap, and then the gas with lower temperature and higher specific gravity outside the insulation tube 8 is sucked into the insulation tube 8 from the second annular gap, so as to improve the direction of the airflow, concentrate the cold core of the melt through the heat carried away by the airflow, and change the temperature gradient in the furnace, so as to better control the seeding and shouldering temperatures and improve the product quality.

[0025] In the implementation of this embodiment, it is further preferred that the gallium oxide Czochralski gas guide device further includes a connecting frame 2, and the inner wall of the gas guide cylinder 1 is fixedly connected to the outer wall of the seed crystal rod 6 through the connecting frame 2, thereby improving the connection stability between the gas guide cylinder 1 and the seed crystal rod 6.

[0026] It is further preferred in the implementation of this embodiment that the connecting frame 2 includes an annular member and four connecting plates evenly arranged on the outer side wall of the annular member, the annular member is fixedly sleeved outside the seed crystal rod 6, and the four connecting plates are fixedly connected to the inner side wall of the gas guide cylinder 1. The annular member and the four connecting plates evenly arranged on the outer side wall of the annular member can firmly connect the gas guide cylinder 1 and the seed crystal rod 6 without blocking the flow of gas.

[0027] It is further preferred in the implementation manner of this embodiment that the seed crystal rod 6 is fixedly connected to the seed crystal 3 via the fixing pin 5, and the fixing method is simple and convenient.

[0028] In the implementation of this embodiment, it is further preferred that the end of the seed crystal rod 6 away from the seed crystal 3 is connected to the pulling mechanism 4 of the gallium oxide furnace through a connecting piece, and the seed crystal is lowered by the pulling mechanism 4 to enter the insulation cylinder for Czochralski seeding and shoulder release operations.

[0029] Example 2

[0030] This embodiment provides a gallium oxide furnace, such as Figure 3-4 As shown, it includes an outer cylinder 7, a pulling mechanism 4, a heat preservation cylinder 8, a crucible 9, an intermediate frequency coil 10 and a gallium oxide Czochralski gas guide device of Example 1, the heat preservation cylinder 8 and the intermediate frequency coil 10 are arranged in the outer cylinder 7, the intermediate frequency coil 10 is sleeved outside the heat preservation cylinder 8, the intermediate frequency coil 10 is used to heat the inner part of the outer cylinder 7, the crucible 9 is arranged in the heat preservation cylinder 8, the top of the heat preservation cylinder 8 is provided with a heat preservation cover 11, the heat preservation cover 11 is provided with a pulling port 12, the gallium oxide Czochralski gas guide device is connected to the pulling mechanism 4, and the end of the gallium oxide Czochralski gas guide device close to the seed crystal 3 passes through the pulling port 12 and extends into the heat preservation cylinder 8, and the seed crystal is lowered by the pulling mechanism 4 to enter the heat preservation cylinder for Czochralski seeding and shouldering operations. In the production process of gallium oxide, the airflow direction can be improved, and the problems such as the intermediate frequency coil 10 heating the outer cylinder 7, causing the airflow turbulence in the Czochralski process, the liquid surface cold center is not in the center, and the temperature of seeding and shouldering is unstable. The core working principle of the medium frequency coil heating furnace is electromagnetic induction. When alternating current passes through the coil, an alternating magnetic field is generated around it. When a conductive material (metal crucible) is placed in this magnetic field, an induced current (eddy current) will be generated inside the material. When these eddy currents flow inside the metal, due to the existence of resistance, they will convert electrical energy into heat energy, thereby heating the metal.

[0031] It is further preferred in the implementation manner of this embodiment that the central axis of the air guide cylinder 1, the central line of the pulling port 12 and the central axis of the insulation cylinder 8 are collinear. When the air flow circulates in the air guide cylinder 1, the cold center of the liquid surface can be ensured to be in the center, thereby improving the uniformity of cooling.

[0032] The present invention uses specific examples to illustrate the principle and implementation of the present invention. The above examples are only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A gallium oxide Czochralski gas guide device, characterized in that: It includes an air guide tube and a seed crystal rod, wherein the air guide tube is fixedly sleeved outside the seed crystal rod, one end of the seed crystal rod extends into the insulation tube of the gallium oxide furnace and is fixedly connected to the seed crystal, a first annular gap exists between the inner wall of the air guide tube and the outer wall of the seed crystal rod, and a second annular gap exists between the outer wall of the air guide tube and the pulling port of the insulation tube of the gallium oxide furnace, the high-temperature gas in the insulation tube of the gallium oxide furnace leaves the insulation tube from the first annular gap, and the low-temperature gas in the insulation tube is sucked into the insulation tube from the second annular gap, and the central axis of the air guide tube and the central axis of the seed crystal rod are collinear.

2. The gallium oxide Czochralski gas guide device according to claim 1, characterized in that: It also includes a connecting frame, through which the inner wall of the gas guide cylinder is fixedly connected to the outer wall of the seed crystal rod.

3. The gallium oxide Czochralski gas guide device according to claim 2, characterized in that: The connecting frame includes an annular member and four connecting plates evenly arranged on the outer side wall of the annular member. The annular member is fixedly sleeved outside the seed crystal rod, and the four connecting plates are fixedly connected to the inner side wall of the air guide cylinder.

4. The gallium oxide Czochralski gas guide device according to claim 1, characterized in that: The seed crystal rod is fixedly connected to the seed crystal through a fixing pin.

5. The gallium oxide Czochralski gas guide device according to claim 1, characterized in that: One end of the seed crystal rod away from the seed crystal is connected to the pulling mechanism of the gallium oxide furnace through a connecting piece.

6. A gallium oxide furnace, characterized in that: It comprises an outer cylinder, a pulling mechanism, a heat-insulating cylinder, a crucible, an intermediate frequency coil and the gallium oxide Czochralski gas-guiding device according to any one of claims 1 to 5, wherein the heat-insulating cylinder and the intermediate frequency coil are arranged in the outer cylinder, the intermediate frequency coil is sleeved outside the heat-insulating cylinder, the intermediate frequency coil is used for heating the outer cylinder, the crucible is arranged in the heat-insulating cylinder, the top of the heat-insulating cylinder is provided with a heat-insulating cover, the heat-insulating cover is provided with a pulling port, the gallium oxide Czochralski gas-guiding device is connected to the pulling mechanism, and one end of the gallium oxide Czochralski gas-guiding device close to the seed crystal passes through the pulling port and extends into the heat-insulating cylinder.

7. The gallium oxide furnace according to claim 6, characterized in that: The central axis of the air guide cylinder, the central line of the lifting port and the central axis of the heat preservation cylinder are collinear.

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