Air passage structure and industrial equipment

Abstract

The utility model relates to the technical field of industrial equipment, and discloses an air channel structure and industrial equipment, the air channel structure is applied to the industrial equipment, the industrial equipment comprises a containing box with a containing cavity, the air channel structure comprises a main body, a sealing connecting piece and an air pipe connector, and the main body is provided with a channel and a first opening which are communicated. The first opening is also used for communicating with the accommodating cavity; the sealing connecting piece is wound on the peripheral wall of the main body; the air pipe joint is inserted into the outer wall of the main body and communicated with the channel; the gas pipe joint is positioned on one side of the sealing connector deviating from the first opening; the sealing connecting piece and the air pipe connector are spaced to form a flange installation space, the flange installation space is used for installing a flange, the flange is used for connecting the sealing connecting piece to the outer wall of the containing box, and the technological process of air path assembly can be simplified.

Description

Technical Field

[0001] The utility model relates to the technical field of industrial equipment, in particular to an airway structure and industrial equipment. Background Art

[0002] In industrial production, some parts require process gases during process processing. For example, semiconductor vacuum coating, semiconductor photovoltaics and other processing technologies all require process gases.

[0003] However, when using process gas, complicated gas line assembly is required, which is troublesome. Utility Model Content

[0004] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes an airway structure that can simplify the process flow of airway assembly.

[0005] According to the airway structure of the first aspect embodiment of the utility model, the airway structure is applied to industrial equipment, the industrial equipment includes a containing box with a containing cavity, the airway structure includes a main body, a sealing connector and an air pipe joint, the main body is provided with a connected passage and a first opening, the first opening is also used to connect the containing cavity; the sealing connector is arranged around the outer peripheral wall of the main body; the air pipe joint is inserted into the outer wall of the main body and connected to the passage; the air pipe joint is located on the side of the sealing connector away from the first opening; wherein, the sealing connector and the air pipe joint are spaced to form a flange installation space, the flange connection space is used to install the flange, and the flange is used to connect the sealing connector to the outer wall of the containing box.

[0006] According to the airway structure of the embodiment of the utility model, there are at least the following beneficial effects: the main body is provided with a connected channel and a first opening, and the first opening is also used to connect the accommodating chamber to form a flow channel for gas flow, which is convenient for gas to enter the accommodating chamber, or to facilitate gas to flow out of the accommodating chamber. The sealing connector is arranged around the outer peripheral wall of the main body, the air pipe joint is inserted into the outer wall of the main body and connected to the channel, and the air pipe joint is located on the side of the sealing connector away from the first opening. In this way, the airway structure integrates the air pipe joint and the sealing connector, thereby reducing the process of assembling the air pipe joint and the sealing connector when using industrial equipment, and simplifying the process flow of airway assembly. The sealing connector and the air pipe joint are arranged at intervals and form a flange installation space, the flange connection space is used to install the flange, and the flange is used to connect the sealing connector to the outer wall of the accommodating box. In this way, the airway structure provides a certain installation position for the flange, so that the flange can be used to fix the airway structure more conveniently, optimizing the process of assembling the flange when fixing the airway structure, and further simplifying the process flow of airway assembly.

[0007] According to some embodiments of the present invention, the sealing connector and the main body are an integrally formed structure.

[0008] According to some embodiments of the present invention, the air pipe connector is sealingly connected to the main body.

[0009] According to some embodiments of the utility model, the airway structure further includes a sealing ring connected to a side of the sealing connector facing away from the air pipe joint, and the sealing connector is used for sealingly connecting with the accommodating box through the sealing ring.

[0010] According to some embodiments of the utility model, an annular groove is provided on the side of the sealing connector facing away from the trachea joint, and the sealing ring is arranged in the annular groove.

[0011] According to some embodiments of the utility model, the sealing connector separates the main body into an inserting section and a connecting section distributed along the extension direction of the channel, the inserting section is used to be inserted in the accommodating cavity, the first opening is provided in the inserting section, and the trachea joint is inserted into the outer peripheral wall of the connecting section.

[0012] According to some embodiments of the utility model, the main body is also provided with a second opening connected to the channel, and the second opening is located on the side of the trachea connector away from the sealing connector; the airway structure also includes a sealing assembly, which is detachably connected to the main body and is used to seal the second opening.

[0013] According to some embodiments of the present invention, the first opening and the second opening are respectively disposed on opposite end surfaces of the main body.

[0014] According to some embodiments of the present invention, the main body is a circular columnar structure.

[0015] According to the industrial equipment of the second aspect embodiment of the utility model, the industrial equipment includes a containing box, a flange and the airway structure of any of the above embodiments, the containing box is provided with a containing cavity; the airway structure is plugged into the containing box, and the first opening is connected to the containing cavity; the flange is arranged between the sealing connector and the air pipe joint, and is used to connect the sealing connector to the containing box.

[0016] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0018] Figure 1 A schematic diagram of the assembly structure of the airway structure, flange and accommodating box provided in an embodiment of the utility model is shown;

[0019] Figure 2 Shows Figure 1 Schematic diagram of the cross-section structure;

[0020] Figure 3A schematic structural diagram of an airway structure provided by an embodiment of the utility model is shown;

[0021] Figure 4 Shows Figure 2 Schematic diagram of the enlarged structure at point IV in the middle.

[0022] Reference numerals:

[0023] Airway structure 100;

[0024] Main body 110; channel 111; first opening 112; second mounting hole 113; plug section 114; connecting section 115; second opening 116; mounting portion 117;

[0025] Sealing connector 120; connecting portion 121; abutting portion 122; accommodating space 123;

[0026] Air pipe joint 130; flange installation space 140; sealing ring 150;

[0027] Sealing assembly 160; locking member 161; sealing cover 162; sealing ring 163;

[0028] Flange 200;

[0029] The receiving box 300 ; the receiving cavity 310 ; and the first mounting hole 320 . DETAILED DESCRIPTION

[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0031] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0032] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0033] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0034] In the description of the utility model, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0035] In industrial production, some parts require process gases during process processing. For example, semiconductor vacuum coating, semiconductor photovoltaics and other processing technologies all require process gases.

[0036] However, when using process gases, complex gas circuit assembly is required. For example, scattered flanges, sealing rings, joints, pipes and other structures need to be assembled one by one to complete the assembly of the gas circuit, which is rather troublesome.

[0037] See also Figure 1 to Figure 2 , an embodiment of the present application provides an industrial device, and the industrial device may refer to a device used for vacuum coating or photovoltaic processing of semiconductors, or the industrial device may also refer to other devices.

[0038] The industrial equipment includes an air duct structure 100 , a flange 200 , and a containing box 300 .

[0039] The airway structure 100 is plugged into the containing box 300 , and the flange 200 can fix the airway structure 100 to the containing box 300 .

[0040] As an example, the flange 200 can be installed on the outer wall of the accommodating box 300 through a fixing member to fix the airway structure 100 to the outer wall of the connection box. The fixing member can be a screw, a rivet or other structural member for fixing. For example, the flange 200 can be a quick-release flange 200 (Klein Flange, KF).

[0041] The containing box 300 is provided with a containing chamber 310 , and the containing chamber 310 can be used to contain process gas and parts to be processed.

[0042] The airway structure 100 can serve as the containing box 300 to provide an air path connected to other devices, and other devices can extract gas from the containing chamber 310 or inject gas into the containing chamber 310 through the airway structure 100 .

[0043] As an example, the other device may refer to an extraction device, which can extract the gas in the accommodating chamber 310 through the gas channel structure 100, so that the accommodating chamber 310 can be in a vacuum state. Alternatively, the other device may also refer to a gas tank or other gas storage device to inject the required process gas into the accommodating chamber 310. For example, the accommodating box 300 can be used as a reaction chamber for semiconductor vacuum coating or semiconductor photovoltaic processing.

[0044] In some embodiments, the containing box 300 may be provided with a first mounting hole 320 communicating with the containing cavity 310, and the airway structure 100 may be partially inserted into the first mounting hole 320 so that the airway structure 100 can communicate with the containing cavity 310 to facilitate gas flow.

[0045] See also Figures 2 to 4 In some embodiments, the airway structure 100 includes a main body 110 , a sealing connector 120 , and an air pipe connector 130 .

[0046] The sealing connector 120 can be used to be sealed and connected to the containing box 300 .

[0047] The air pipe connector 130 may be used to connect other devices so as to extract gas from the accommodating chamber 310 through the air pipe or inject gas into the accommodating chamber 310 .

[0048] As an example, the trachea connector 130 can be used to connect a trachea. Specifically, one end of the trachea is plugged into the trachea connector 130, and the other end of the trachea can be connected to other devices. For example, the trachea connector 130 can be a vacuum coupling radial seal (VCR) connector.

[0049] The main body 110 is provided with a connected channel 111 and a first opening 112, and the first opening 112 is also used to connect to the accommodating chamber 310. In this way, when the airway structure 100 is plugged into the accommodating box 300, the accommodating chamber 310, the first opening 112 and the channel 111 are connected in sequence to form a flow channel for gas flow, which is convenient for gas to enter the accommodating chamber 310, or to facilitate gas to flow out of the accommodating chamber 310.

[0050] The sealing connector 120 is wrapped around the outer wall of the main body 110, and the trachea connector 130 is inserted into the outer wall of the main body 110 and connected to the channel 111. The trachea connector 130 is located on the side of the sealing connector 120 away from the first opening 112. In this way, the airway structure 100 integrates the trachea connector 130 and the sealing connector 120, thereby reducing the process of assembling the trachea connector 130 and the sealing connector 120 when using industrial equipment, simplifying the process flow of air circuit assembly, saving time, and making it easier to store and manage the airway structure 100.

[0051] The sealing connector 120 and the air pipe joint 130 are spaced apart and form a flange 200 installation space 140. The flange 200 connection space is used to install the flange 200. The flange 200 is used to connect the sealing connector 120 to the outer wall of the accommodating box 300. In this way, the airway structure 100 provides a certain installation position for the flange 200, so that the flange 200 can be used to fix the airway structure 100 more conveniently, thereby optimizing the process of assembling the flange 200 when fixing the airway structure 100, and further simplifying the process flow of airway assembly.

[0052] See also Figure 1 and Figure 3 In some embodiments, the flange 200 may be a split flange to facilitate the subsequent installation of the flange 200 in the flange 200 installation space 140 .

[0053] As an example, the flange 200 may be spliced ​​by two semicircular flanges, so as to facilitate installation of the flange 200 in the flange 200 installation space 140 .

[0054] See also Figure 3 to Figure 4 In some embodiments, one end of the main body 110 having the first opening 112 may be partially inserted into the first mounting hole 320 , so that the first opening 112 may be in communication with the accommodating cavity 310 .

[0055] In some embodiments, the main body 110 may be in a round column shape to reduce the manufacturing difficulty of the main body 110 and facilitate the connection between the main body 110 and the sealing connector 120. For example, the main body 110 may be machined and formed. In other embodiments, the main body 110 may also be machined and formed by casting or the like.

[0056] In some embodiments, the sealing connector 120 and the main body 110 can be an integrally molded structure, thereby eliminating the need to assemble the sealing connector 120 and the main body 110, helping to reduce the number of steps required to assemble the sealing connector 120 and the main body 110, and also helping to make the connection between the sealing connector 120 and the main body 110 more secure.

[0057] As an example, the shape of the sealing connector 120 is generally annular, which helps to make the sealing connector 120 easier to process. The main body 110 and the sealing connector 120 can be machined into an integrally formed structure.

[0058] In some other embodiments, the main body 110 and the sealing connector 120 may also be processed into an integrally formed structure by casting or the like.

[0059] In some embodiments, the air pipe connector 130 can be sealed and connected to the main body 110, which helps to prevent external air from entering the accommodating chamber 310 through the connection position between the air pipe connector 130 and the main body 110, thereby affecting the vacuum state of the accommodating chamber 310 or affecting the process gas in the accommodating chamber 310, thereby improving the performance of the industrial equipment.

[0060] As an example, the outer wall of the main body 110 may be provided with a second mounting hole 113, the second mounting hole 113 may be communicated with the channel 111, and the trachea connector 130 may be plugged into the second mounting hole 113. The trachea connector 130 and the main body 110 may be sealed and connected by welding, which helps to improve the sealing effect between the trachea connector 130 and the main body 110.

[0061] It is understandable that the second mounting hole 113 can be a through hole or a threaded hole. When the second mounting hole 113 is a through hole, it helps to reduce the difficulty of processing the second mounting hole 113. When the second mounting hole 113 is a threaded hole, the trachea connector 130 can be threadedly connected to the second mounting hole 113, which helps to pre-position the trachea connector 130, so as to facilitate the subsequent sealing of the connection between the main body 110 and the trachea connector 130.

[0062] In some other embodiments, the trachea connector 130 and the main body 110 may be sealed and connected by means of sealant, or the trachea connector 130 and the main body 110 may be sealed and connected by means of other methods.

[0063] In some embodiments, the airway structure 100 may further include a sealing ring 150, which may be connected to the side of the sealing connector 120 facing away from the trachea connector 130. The sealing connector 120 is used to seal the connection with the containing box 300 through the sealing ring 150, thereby improving the sealing effect between the sealing connector 120 and the containing box 300.

[0064] As an example, the flange 200 can be fixed to the outer wall of the containing box 300 by a fixing member, and the sealing connector 120 is at least partially located between the flange 200 and the outer wall of the containing box 300, so that the flange 200 can press the sealing connector 120 onto the outer wall of the containing box 300 to compress the sealing ring 150, so that the sealing ring 150 abuts between the sealing connector 120 and the outer wall of the containing box 300, and the sealing ring 150 is deformed after being compressed to perform sealing.

[0065] The sealing ring 150 may be a rubber sealing ring 150 , a silicone sealing ring 150 or other sealing structures.

[0066] In some embodiments, a ring groove may be provided on the side of the sealing connector 120 facing away from the trachea connector 130, and the sealing ring 150 is disposed in the ring groove. In this way, the groove wall of the ring groove can limit the sealing ring 150, which helps to reduce the displacement of the sealing ring 150 after being compressed and deformed, thereby affecting the sealing effect. In addition, the ring groove can provide a more certain installation position for the sealing ring 150, which helps to more conveniently install the sealing ring 150 on the sealing connector 120.

[0067] As an example, the sealing connector 120 may include a connecting portion 121 and an abutting portion 122 that are coaxially connected, the connecting portion 121 may be arranged around the outer peripheral wall of the main body 110, and the abutting portion 122 may be connected to one end of the connecting portion 121 and arranged around the outer peripheral wall of the connecting portion 121. An accommodating space 123 is formed between the connecting portion 121 and the abutting portion 122, and the annular groove may be connected to the accommodating space 123. The annular groove may be provided in the abutting portion 122, or the annular groove may be provided at the connection between the abutting portion 122 and the connecting portion 121. When the flange 200 presses the sealing connector 120 onto the outer wall of the installation box, the connecting portion 121 may be partially inserted into the first installation hole 320, and the abutting portion 122 presses the sealing member against the outer wall of the accommodating box 300.

[0068] In some embodiments, the sealing connector 120 divides the main body 110 into an inserting section 114 and a connecting section 115 distributed along the extension direction of the channel 111 .

[0069] The plug section 114 can be inserted into the accommodating cavity 310, and the connecting section 115 and the sealing connector 120 can be exposed from the installation box. The plug section 114 can play a positioning role, so that the airway structure 100 can be roughly fixed to the accommodating box 300, so as to facilitate the subsequent assembly of the flange 200.

[0070] The first opening 112 may be disposed at the inserting section 114 , so that the first opening 112 may be connected to the accommodating cavity 310 .

[0071] The trachea connector 130 may be plugged into the outer peripheral wall of the connecting section 115 . For example, the second mounting hole 113 may be provided on the outer wall of the connecting section 115 , and the trachea connector 130 may be plugged into the second mounting hole 113 .

[0072] In some embodiments, the main body 110 may also be provided with a second opening 116 connected to the channel 111. The second opening 116 may be located on the side of the trachea connector 130 away from the sealing connector 120. The second opening 116 may be used to connect with other structural parts to extend the length of the main body 110 or increase the inner diameter of the main body 110.

[0073] For example, pipes of different lengths or different inner diameters can be welded to one side of the body 110 where the second opening 116 is provided, thereby extending the length of the body 110 or increasing the inner diameter of the body 110 to expand the application range of the airway structure 100 .

[0074] In some embodiments, the first opening 112 and the second opening 116 may be respectively disposed on opposite end surfaces of the main body 110 , thereby eliminating the need for processing on the sidewall of the main body 110 , which helps to reduce the difficulty of processing the main body 110 .

[0075] In some embodiments, the airway structure 100 may further include a sealing assembly 160, which is detachably connected to the main body 110 and is used to seal the second opening 116, so that when the second opening 116 is not needed, the sealing assembly 160 can seal the second opening 116, which helps to avoid air leakage at the second opening 116.

[0076] As an example, the sealing assembly 160 may include a locking member 161, a sealing cover 162 and a sealing ring 163. The outer peripheral surface of the end of the main body 110 provided with the second opening 116 may be provided with a mounting portion 117, and the sealing cover 162 may be provided on the mounting portion 117 to cover the second opening 116. The sealing ring 163 may be provided between the sealing cover 162 and the mounting portion 117 for sealing. The locking member 161 may include a hinged first arc-shaped locking portion and a second arc-shaped locking portion. A locking space is provided between the first arc-shaped locking portion and the second arc-shaped locking portion. The mounting portion 117, the sealing cover 162 and the sealing ring 163 may be located in the locking space, the first arc-shaped locking portion and the second arc-shaped locking portion rotate toward each other to lock the sealing cover 162 to the mounting portion 117, and the first arc-shaped locking portion and the second arc-shaped locking portion rotate away from each other to open the locking space so as to facilitate the removal of the sealing cover 162.

[0077] When the first arc-shaped locking portion and the second arc-shaped locking portion rotate toward each other to lock the sealing cover 162 to the mounting portion 117, the locking member 161 may include a first locking portion and a second locking portion relatively distributed along the extension direction of the channel 111, the first locking portion may abut against the side of the mounting portion 117 away from the sealing cover 162, and the second locking portion may abut against the side of the sealing cover 162 away from the mounting portion 117, thereby locking the sealing cover 162 to the mounting portion 117.

[0078] In the airway structure 100 and the industrial equipment provided in the embodiment of the present application, the main body 110 is provided with a connected passage 111 and a first opening 112, and the first opening 112 is also used to connect the accommodating chamber 310 to form a flow channel for gas flow, which is convenient for gas to enter the accommodating chamber 310, or to facilitate gas to flow out of the accommodating chamber 310. The sealing connector 120 is arranged around the outer peripheral wall of the main body 110, and the air pipe joint 130 is inserted into the outer wall of the main body 110 and connected to the passage 111. The air pipe joint 130 is located on the side of the sealing connector 120 away from the first opening 112. In this way, the airway structure 100 integrates the air pipe joint 130 and the sealing connector 120, thereby reducing the process of assembling the air pipe joint 130 and the sealing connector 120 when using the industrial equipment, and simplifying the process flow of airway assembly. The sealing connector 120 and the air pipe joint 130 are spaced apart and form a flange 200 installation space 140. The flange 200 connection space is used to install the flange 200. The flange 200 is used to connect the sealing connector 120 to the outer wall of the accommodating box 300. In this way, the airway structure 100 provides a certain installation position for the flange 200, so that the flange 200 can be used to fix the airway structure 100 more conveniently, thereby optimizing the process of assembling the flange 200 when fixing the airway structure 100, and further simplifying the process flow of airway assembly.

[0079] The embodiments of the utility model are described in detail above in conjunction with the accompanying drawings, but the utility model is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the utility model. In addition, the embodiments of the utility model and the features in the embodiments can be combined with each other without conflict.

Claims

1. An airway structure, characterized in that: Applied to industrial equipment, the industrial equipment includes a containing box with a containing cavity, and the airway structure includes: A main body, wherein the main body is provided with a communicating passage and a first opening, and the first opening is also used to communicate with the accommodating cavity; A sealing connector, the sealing connector being disposed around the outer peripheral wall of the main body; and An air pipe joint, which is plugged into the outer wall of the main body and communicates with the passage; the air pipe joint is located on a side of the sealing connector away from the first opening; The sealing connector and the air pipe joint are spaced apart to form a flange installation space, the flange connection space is used to install a flange, and the flange is used to connect the sealing connector to the outer wall of the accommodating box.

2. The airway structure according to claim 1, characterized in that: The sealing connector and the main body are an integrally formed structure.

3. The airway structure according to claim 1, characterized in that: The air pipe joint is sealingly connected to the main body.

4. The airway structure according to claim 1, characterized in that: The airway structure also includes a sealing ring, which is connected to a side of the sealing connector facing away from the air pipe joint, and the sealing connector is used for sealingly connecting with the accommodating box through the sealing ring.

5. The airway structure according to claim 4, characterized in that: A ring groove is arranged on one side of the sealing connector away from the trachea joint, and the sealing ring is arranged in the ring groove.

6. The airway structure according to claim 1, characterized in that: The sealing connector divides the main body into an inserting section and a connecting section distributed along the extension direction of the channel, the inserting section is used to be inserted in the accommodating cavity, the first opening is arranged in the inserting section, and the trachea joint is inserted into the outer peripheral wall of the connecting section.

7. The airway structure according to claim 1, characterized in that: The main body is further provided with a second opening communicating with the passage, and the second opening is located on a side of the trachea connector away from the sealing connector; The airway structure further includes a sealing component, which is detachably connected to the main body and is used for sealing the second opening.

8. The airway structure according to claim 7, characterized in that: The first opening and the second opening are respectively arranged at two opposite end surfaces of the main body.

9. The airway structure according to claim 1, characterized in that: The main body is a circular columnar structure.

10. An industrial device, characterized in that: include: A containing box, wherein the containing box is provided with a containing cavity; and The airway structure according to any one of claims 1 to 9, wherein the airway structure is plugged into the accommodating box, and the first opening is connected to the accommodating cavity; and A flange is arranged between the sealing connector and the air pipe joint and is used to connect the sealing connector to the accommodating box.

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