Probe station convenient for sample loading

Abstract

When a to-be-detected wafer needs to be replaced in use, a new wafer can be installed on an objective table B, the objective table B is rotated to a detection area from the outer side after the new wafer is adjusted to a proper position, and at the moment, an objective table A can also be rotated to the outer side from the detection area. Therefore, the detected wafer can be taken down and replaced by a new wafer. When the probe station is used and the wafer is replaced, an operator does not need to stretch the hand into a narrow detection area to replace the wafer and rotate the objective table to an open outer side area to replace the wafer, so that the operator can conveniently place the wafer on a proper position of the objective table; and the design waste caused by replacing the wafer in a narrow area can be reduced.

Description

Technical Field

[0001] The utility model relates to the field of probe stations, in particular to a probe station for convenient sample loading. Background Art

[0002] The probe station is a device used for wafer testing in the semiconductor production process. It mainly completes the functions of reliable contact between the probe card and the wafer, fixed step movement of the wafer, and signal connection between the probe station and the tester. The probe card is a component used to realize the electrical connection between the tester and the wafer. The probes on the probe card directly contact the tin pads or bumps on the wafer to draw out the electrical signals, and then cooperate with the tester for measurement. The probe station is mainly used in the semiconductor industry, optoelectronics industry, integrated circuits and quality testing of components. It is widely used in the research and development of precision electrical measurements of complex and high-speed devices to ensure quality and reliability, and to reduce the research and development time and the cost of device manufacturing processes. With the development of science and technology, the size of components is getting smaller and smaller. Usually, multiple components are integrated on the wafer to form a test piece to facilitate subsequent testing. With the development of the semiconductor industry, the demand for probe stations at home and abroad has increased, and the performance requirements for probe stations are also increasing. For example, the Chinese utility model patent probe station with patent number CN117192342A includes a material box, a robotic arm, a pre-alignment component and a test bench. The robotic arm takes out the wafer from the material box and calibrates the position of the wafer carried, thereby effectively improving the detection efficiency and detection accuracy of the probe station. The robotic arm can move in two directions relative to the material box, the pre-alignment component is arranged on one side of the material box along a first direction, and the test bench is arranged on one side of the robotic arm along a third direction, thereby fully utilizing the space inside the probe station, making the internal layout of the probe station compact, reducing the overall occupied space of the probe station, and effectively improving the space utilization efficiency of the probe station.

[0003] The probe stations currently in use require operators to place the wafer to be tested on a test base. Other probe station components are installed around the test base. The space for operators to place the wafer is small and the operating movements are restricted by the space. It is difficult to prepare and place the wafer in a suitable position conveniently. It usually takes a lot of operator time to adjust the wafer position, which wastes the operator's time. Utility Model Content

[0004] In view of the above technical problems, the utility model provides a convenient sample-loading probe station, which is characterized by being composed of a base, a supporting structure, an observation structure, a probe structure, and a loading structure. The supporting structure is installed above the base, the observation structure is installed above the supporting structure, the probe structures are installed on the left and right sides above the base, and the loading structure is installed at the tail above the base.

[0005] The support structure is composed of a side support rod A, a side support rod B, and a transverse support rod. The side support rod A is installed above the base, the transverse support rod is installed on the top of the side support rod A, and the side support rod B is installed below the other end of the transverse support rod.

[0006] The observation structure is composed of a slide rail A, a slide rail B, an adjustment shaft, a sliding base, a connecting rod, an observation mirror adjustment shaft, a mounting arm, and an observation mirror. The slide rail A is installed above the transverse support rod, the adjustment shaft is installed on the side of the slide rail A, the slide rail B is installed on the side of the adjustment shaft, a sliding base is placed outside the slide rails A and B, a connecting rod is installed above the sliding base, a mounting arm is installed on the side of the connecting rod, an observation mirror adjustment shaft is installed above one end of the mounting arm, and an observation mirror is installed above the other end of the mounting arm.

[0007] The probe structure consists of a probe bracket A, a probe bracket B, a probe support A, a probe support B, a probe slide A, a probe slide B, a probe seat A, a probe seat B, a probe A, and a probe B. The probe bracket A is installed on the upper left side of the base, the probe bracket A is installed above the probe bracket A, a probe slide A is opened above the probe support A, the probe seat A is installed inside the probe slide A, and the probe A is installed on the side of the probe seat A. The probe bracket B is installed on the upper right side of the base, the probe bracket B is installed above the probe bracket B, a probe slide B is opened above the probe support B, the probe seat B is installed inside the probe slide B, and the probe B is installed on the side of the probe seat B.

[0008] The loading structure is composed of a loading platform connecting rod A, a loading platform connecting rod B, a loading platform A, a loading platform B, a loading platform bracket, a ring sleeve, a fixing buckle A, and a fixing buckle B. The loading platform bracket is installed above the tail of the base, the ring sleeve is installed on the outside of the loading platform bracket, the loading platform connecting rod A is installed on one side of the ring sleeve, the loading platform A is installed on the top of the loading platform connecting rod A, the loading platform connecting rod B is installed on the other side of the ring sleeve opposite to the loading platform connecting rod A, the loading platform B is installed on the top of the loading platform connecting rod B, the fixing buckle A is installed above the ring sleeve, and the fixing buckle B is installed below the ring sleeve.

[0009] The fixing buckle A and the fixing buckle B are both installed on the side of the stage bracket. A groove is set on the outside of the fixing buckle A, and a protrusion is set on the outside of the fixing buckle B. The installation positions of the fixing buckle A and the fixing buckle B correspond, and the sizes of the groove and the protrusion correspond and can be fastened.

[0010] Beneficial effects of the utility model:

[0011] The utility model provides a convenient probe station for loading samples. When the wafer to be tested needs to be replaced during use, the new wafer can be installed on the stage B, and the stage B can be rotated from the outside to the detection area after the new wafer is adjusted to a suitable position. At this time, the stage A can also be rotated from the detection area to the outside, so that the wafer that has completed the test can be removed and replaced with a new wafer. When using this probe station, when replacing the wafer, there is no need for the operator to extend his hand into the narrow detection area for replacement. The stage can be rotated to the open outer area to replace the wafer, which makes it easier for the operator to place the wafer in a suitable position on the stage, and can also reduce the design waste caused by replacing the wafer due to the narrow area. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the overall structure of a probe station for convenient sample loading according to the utility model;

[0013] Figure 2 This is a schematic diagram of the overall structure of a probe station for convenient sample loading according to the utility model;

[0014] As shown in the figure: 1. Base, 2. Side support rod A, 3. Side support rod B, 4. Transverse support rod, 8. Sliding base, 9. Connecting rod, 10. Observation mirror adjustment shaft, 11. Mounting arm, 12. Observation mirror, 13. Probe bracket A, 14. Probe bracket B, 15. Probe support A, 16. Probe support B, 17. Probe slide A, 18. Probe slide B, 19. Probe seat A, 20. Probe seat B, 21. Probe A, 22. Probe B, 23. Stage connecting rod A, 24. Stage connecting rod B, 25. Stage A, 26. Stage B, 27. Stage bracket, 28. Ring sleeve, 29. Fixing buckle A, 30. Fixing buckle B. DETAILED DESCRIPTION

[0015] The technical solution of the utility model will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0016] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0017] In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances. In addition, the technical features involved in the different embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0018] Example 1

[0019] like Figure 1 , Figure 2As shown, a side support rod A2 is installed on the left side above the base 1, a transverse support rod 4 is installed on the top of the side support rod A2, a side support rod B3 is installed below the transverse support rod 4, a slide rail A is installed above the transverse support rod 4, an adjustment shaft is installed on the side of the slide rail A, a slide rail B is installed on the side of the adjustment shaft, a sliding base 8 is installed on the outside of the slide rails A and B, a connecting rod 9 is installed above the sliding base 8, a mounting arm 11 is installed on the side of the connecting rod 9, an observation mirror adjustment shaft 10 is installed at one end of the mounting arm 11, and an observation mirror 12 is installed at the other end of the mounting arm 11, a probe bracket A13 is installed on the left side above the base 1, a probe support A15 is installed on the top of the probe bracket A13, a probe slide groove A17 is provided above the probe support A15, a probe seat A19 is installed inside the probe slide groove A17, and the probe seat A19 is installed inside the probe slide groove A17. A probe A21 is installed on the side 19, a probe bracket B14 is installed on the right side above the base 1, a probe support B16 is installed on the top of the probe bracket B14, a probe slide groove B18 is opened above the probe support B16, a probe seat B20 is installed inside the probe slide groove B18, a probe B22 is installed on the side of the probe seat B20, a stage bracket 27 is installed on the tail above the base 1, a ring sleeve 28 is installed on the outside of the stage bracket 27, a stage connecting rod A23 is installed on one side of the ring sleeve 28, a stage A25 is installed on the top of the stage connecting rod A23, a stage connecting rod B24 is installed on the other side of the ring sleeve, a stage B26 is installed on the top of the stage connecting rod B24, a fixing buckle A29 is installed above the ring sleeve 28, and a fixing buckle B30 is installed below the ring sleeve 28.

[0020] Example 2

[0021] When using the utility model, the wafer to be inspected is placed on the stage A25, and the position of the observation mirror 12 on the x-axis is adjusted by adjusting the adjustment shaft 7, and the position of the observation mirror 10 on the y-axis is adjusted by adjusting the observation mirror adjustment shaft 10, so that the observation mirror 12 is in a position suitable for detection, and the positions of the probe holder A19 and the probe holder B20 are moved along the probe slide A17 and the probe slide B18 respectively, so that the probe A21 and the probe B22 are in a position suitable for detection, and the wafer can be inspected.

[0022] When testing another wafer, place it on stage B26, open the connection between fixing buckle A and fixing buckle B, rotate stage B26 to a position suitable for testing, fasten fixing buckle A and fixing buckle B, and then perform testing. Then remove the wafer that has been tested and replace it with a new wafer.

[0023] The above shows and describes the basic principle and main features of the utility model and the advantages of the utility model. The various components mentioned in the utility model are common technologies in the existing field. The technicians in this industry should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only to illustrate the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model will have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A probe station for convenient sample loading, characterized in that It consists of a base, a supporting structure, an observation structure, a probe structure and a loading structure. The supporting structure is installed on the top of the base, the observation structure is installed on the top of the supporting structure, the probe structures are installed on the left and right sides of the top of the base, the loading structure is installed at the tail of the top of the base, the loading structure consists of a loading platform connecting rod A, a loading platform connecting rod B, a loading platform A, a loading platform B, a loading platform bracket, a ring sleeve, a fixing buckle A and a fixing buckle B. The loading platform bracket is installed at the tail of the top of the base, the ring sleeve is installed on the outside of the loading platform bracket, the loading platform connecting rod A is installed on one side of the ring sleeve, the loading platform A is installed on the top of the loading platform connecting rod A, the loading platform connecting rod B is installed on the other side of the ring sleeve, the loading platform B is installed on the top of the loading platform connecting rod B, the fixing buckle A is installed on the top of the ring sleeve, and the fixing buckle B is installed on the bottom of the ring sleeve.

2. A convenient sample loading probe station according to claim 1, characterized in that The support structure consists of a side support rod A, a side support rod B, and a transverse support rod. The side support rod A is installed above the base, the transverse support rod is installed on the top of the side support rod A, and the side support rod B is installed below the other end of the transverse support rod.

3. A convenient sampling probe station according to claim 1, wherein the probe structure consists of a probe bracket A, a probe bracket B, a probe support A, a probe support B, a probe slide A, a probe slide B, a probe seat A, a probe seat B, a probe A, and a probe B. The probe bracket A is installed on the upper left side of the base, the probe bracket A is installed above the probe bracket A, a probe slide A is opened above the probe support A, the probe seat A is installed inside the probe slide A, and the probe A is installed on the side of the probe seat A; the probe bracket B is installed on the upper right side of the base, the probe support B is installed above the probe bracket B, a probe slide B is opened above the probe support B, the probe seat B is installed inside the probe slide B, and the probe B is installed on the side of the probe seat B.

4. According to a convenient sample-loading probe station according to claim 2, the observation structure is composed of a slide rail A, a slide rail B, an adjustment shaft, a sliding base, a connecting rod, an observation mirror adjustment shaft, a mounting arm, and an observation mirror. A slide rail A is installed above the transverse support rod, an adjustment shaft is installed on the side of the slide rail A, a slide rail B is installed on the side of the adjustment shaft, a sliding base is placed outside the slide rails B and A, a connecting rod is installed above the sliding base, a mounting arm is installed on the side of the connecting rod, an observation mirror adjustment shaft is installed above one end of the mounting arm, and an observation mirror is installed above the other end of the mounting arm.

5. A convenient sample loading probe station according to claim 1, characterized in that The fixing buckle A and the fixing buckle B are both installed on the side of the stage bracket. A groove is set on the outside of the fixing buckle A, and a protrusion is set on the outside of the fixing buckle B. The installation positions of the fixing buckle A and the fixing buckle B correspond, and the sizes of the groove and the protrusion correspond and can be fastened.

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